[Scan]
initial_time=2016-02-16T00:58:59
final_time=2016-02-16T00:59:19
ip_count=19
run=1030
dataset=4
scan=286
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09426E0
qbias_imon=-1.08758E-4
ql1_vset=
ql1_vmon=-8.17013E-1
ql1_imon=6.73938E-10
ql2_vset=
ql2_vmon=-7.98512E-1
ql2_imon=2.81835E-10
ql3_vset=
ql3_vmon=-9.13103E0
ql3_imon=6.1357E-10
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=5.0528E-10
mult1=-1.07518E-8
mult2=-2.83239E-9
rf_tmon=-5.92436E-3
rf_agc=3.19997E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=3.82638E-10
bslens_vset=-6.2E0
bslens_vmon=-6.70159E0
bslens_imon=2.718E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1949E1
lens5a_imon=1.97442E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12484E2
lens4a_imon=2.05223E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53652E1
cs_ef1b_imon=3.05118E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04638E2
lens23_imon=1.02114E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04808E1
cs_ea1_imon=2.2073E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36174E0
lens1_imon=2.47647E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6468E1
os_ef1alow_imon=2.98558E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04231E1
cs_ea2_imon=1.58544E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84268E1
cs_ef1a_imon=3.01478E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=3.78776E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11159E1
os_restr1_imon=2.88323E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14921E1
os_ea1_imon=1.86086E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63467E1
os_ef1bup_imon=3.08541E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23107E0
cs_ionrep_imon=1.2628E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91878E2
cs_nozzle_imon=1.93557E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01785E1
cs_anode1_imon=3.24939E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20549E0
olens4_imon=6.96683E-10
tplens_vset=1.4E-1
tplens_vmon=1.621E0
tplens_imon=-1.55148E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25948E1
iondef3_imon=1.48487E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27113E1
iondef2_imon=1.60924E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02953E2
lens6_imon=2.98573E-4
ql6_vset=1.0E-1
ql6_vmon=9.28402E-2
ql6_imon=3.47769E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.32119E0
ionrepsh_imon=1.98379E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33279E1
lens5b_imon=2.20658E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74705E1
cs_ef2b_imon=3.13875E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.7095E-1
os_ea2_imon=-6.45421E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06108E2
lens4b_imon=2.00871E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71246E1
cs_ef2a_imon=3.17623E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60837E0
os_ef2alow_imon=-2.33839E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.13932E-1
os_ef2bup_imon=-5.27202E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10793E1
os_restr2_imon=2.87674E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23037E2
cs_ionfoca_imon=6.30253E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01893E1
cs_anode2_imon=2.28641E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72985E1
iondef1_imon=1.10743E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68052E1
iondef4_imon=1.08846E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.90775E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82714E-1
olens1_imon=3.21627E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11993E0
cs_ionaccel_imon=-1.91673E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.47331E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56081E1
einzel_imon=7.73469E-6
window_vset=0.0E0
window_vmon=2.16742E-1
window_imon=-8.5356E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39293E-4
mask2_vset=0.0E0
mask2_vmon=-1.86386E1
mask2_imon=-7.77877E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92668E3
multa_neg_imon=8.03891E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93667E3
defgrida_imon=6.68705E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50148E3
multb_neg_imon=7.02592E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.61811E0
defgridb_imon=5.94443E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3397E1
os_fil1_imon=5.45497E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.73748E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66485E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30768E1
cs_fil1_imon=1.00703E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6251E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66476E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.15109E-2
os_fil2_imon=-2.38366E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.65919E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.70562E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32889E-1
cs_fil2_imon=-2.32359E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.29839E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22444E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=1.9951E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.81226E-1
res40_imon=-2.60869E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=202
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.17013E-1	-7.98082E-1	-9.13086E0	-9.14218E0	5.07832E-3	9.31501E-2	2.72508E1	-3.26815E1	-3.26531E1	2.67955E1	1.73605E-7	2.51225E-3	2.51225E-3	6.32936E-3	1.9911E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.16536E-1	-7.98488E-1	-9.13086E0	-9.14209E0	5.126E-3	9.30548E-2	2.7282E1	-3.26784E1	-3.26148E1	2.68406E1	1.73679E-7	2.51417E-3	2.51417E-3	6.3074E-3	2.00192E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.1687E-1	-7.9782E-1	-9.13107E0	-9.14223E0	5.76973E-3	9.3174E-2	2.73074E1	-3.26243E1	-3.25999E1	2.67729E1	1.73605E-7	2.52585E-3	2.52585E-3	6.3074E-3	2.0064E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.16655E-1	-7.9813E-1	-9.13105E0	-9.1419E0	5.36442E-3	9.30071E-2	2.73424E1	-3.26464E1	-3.26458E1	2.67872E1	1.73677E-7	2.51077E-3	2.51077E-3	6.31798E-3	1.99394E-1
5.0E0	0.0E0	1.0E0	8.24E2	5.17E2	-2.09426E0	-8.16464E-1	-7.98702E-1	-9.131E0	-9.14218E0	5.72205E-3	9.30548E-2	2.73263E1	-3.26779E1	-3.26408E1	2.68322E1	1.73605E-7	2.51662E-3	2.51662E-3	6.33486E-3	1.98937E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-8.16321E-1	-7.98464E-1	-9.13112E0	-9.14226E0	5.45979E-3	9.27687E-2	2.73243E1	-3.26963E1	-3.25918E1	2.67644E1	1.73679E-7	2.51632E-3	2.51632E-3	6.30202E-3	1.98322E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.16774E-1	-7.98488E-1	-9.13107E0	-9.14252E0	5.53131E-3	9.29117E-2	2.72817E1	-3.26987E1	-3.2599E1	2.68196E1	1.73605E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.97903E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.16822E-1	-7.98297E-1	-9.13088E0	-9.14221E0	5.17368E-3	9.29832E-2	2.72793E1	-3.26789E1	-3.25942E1	2.67583E1	1.73755E-7	2.51007E-3	2.51007E-3	6.31288E-3	1.99283E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.16917E-1	-7.97963E-1	-9.13103E0	-9.14226E0	4.95911E-3	9.30548E-2	2.72985E1	-3.26549E1	-3.26422E1	2.67974E1	1.73605E-7	2.52099E-3	2.52099E-3	6.32386E-3	1.99803E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-8.16751E-1	-7.98345E-1	-9.1311E0	-9.14218E0	5.55515E-3	9.31263E-2	2.73273E1	-3.2611E1	-3.26242E1	2.67866E1	1.73605E-7	2.5147E-3	2.5147E-3	6.29067E-3	2.0064E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.16703E-1	-7.9844E-1	-9.13131E0	-9.14209E0	5.14984E-3	9.3174E-2	2.73099E1	-3.26651E1	-3.26506E1	2.68022E1	1.73679E-7	2.51203E-3	2.51203E-3	6.30202E-3	2.00192E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09441E0	-8.16488E-1	-7.98368E-1	-9.1311E0	-9.14211E0	5.34058E-3	9.3317E-2	2.72979E1	-3.26837E1	-3.26278E1	2.68064E1	1.73605E-7	2.51225E-3	2.51225E-3	6.31288E-3	2.00673E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.16989E-1	-7.98321E-1	-9.13126E0	-9.1419E0	5.17368E-3	9.31501E-2	2.72727E1	-3.27165E1	-3.25606E1	2.68037E1	1.73529E-7	2.51225E-3	2.51225E-3	6.32386E-3	2.00151E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.16846E-1	-7.9782E-1	-9.13115E0	-9.14218E0	5.29289E-3	9.33409E-2	2.73385E1	-3.26265E1	-3.26747E1	2.67925E1	1.73605E-7	2.52025E-3	2.52025E-3	6.31798E-3	2.00399E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.16941E-1	-7.98798E-1	-9.131E0	-9.1423E0	5.48363E-3	9.30786E-2	2.7367E1	-3.27245E1	-3.25906E1	2.67794E1	1.73723E-7	2.51733E-3	2.51733E-3	6.32458E-3	2.00506E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.16488E-1	-7.98368E-1	-9.13098E0	-9.14197E0	5.10216E-3	9.26733E-2	2.73478E1	-3.25966E1	-3.26615E1	2.67583E1	1.73758E-7	2.51581E-3	2.51581E-3	6.31299E-3	2.00818E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-8.16917E-1	-7.98321E-1	-9.13129E0	-9.14199E0	5.17368E-3	9.29594E-2	2.72841E1	-3.27059E1	-3.26056E1	2.6855E1	1.7368E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.99977E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09426E0	-8.16989E-1	-7.98416E-1	-9.13138E0	-9.14195E0	5.00679E-3	9.27687E-2	2.72933E1	-3.26248E1	-3.26502E1	2.6752E1	1.73605E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.9963E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.16894E-1	-7.98512E-1	-9.13126E0	-9.14204E0	4.95911E-3	9.27448E-2	2.73488E1	-3.26767E1	-3.26219E1	2.6771E1	1.73679E-7	2.52169E-3	2.52169E-3	6.31278E-3	1.98661E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09426E0	-8.17013E-1	-7.98512E-1	-9.13103E0	-9.1419E0	5.05447E-3	9.28402E-2	2.72985E1	-3.27113E1	-3.25948E1	2.68052E1	1.73605E-7	2.51632E-3	2.51632E-3	6.31817E-3	1.9951E-1