[Scan]
initial_time=2016-02-16T01:00:20
final_time=2016-02-16T01:00:39
ip_count=19
run=1030
dataset=4
scan=289
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08741E-4
ql1_vset=
ql1_vmon=-8.17108E-1
ql1_imon=6.94931E-10
ql2_vset=
ql2_vmon=-7.98202E-1
ql2_imon=2.79248E-10
ql3_vset=
ql3_vmon=-9.13119E0
ql3_imon=6.64663E-10
ql4_vset=
ql4_vmon=-9.14228E0
ql4_imon=5.19359E-10
mult1=-9.4755E-9
mult2=-2.74057E-9
rf_tmon=-4.3502E-3
rf_agc=3.30692E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=3.70669E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67591E0
bslens_imon=2.53188E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20173E1
lens5a_imon=1.99713E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1251E2
lens4a_imon=2.05364E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53617E1
cs_ef1b_imon=3.04021E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04647E2
lens23_imon=1.02191E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05095E1
cs_ea1_imon=2.19235E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3517E0
lens1_imon=2.50963E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64548E1
os_ef1alow_imon=2.99239E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03945E1
cs_ea2_imon=1.56274E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84459E1
cs_ef1a_imon=3.00462E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=3.90506E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11179E1
os_restr1_imon=2.88257E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1549E1
os_ea1_imon=1.8934E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63621E1
os_ef1bup_imon=3.0833E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23773E0
cs_ionrep_imon=1.26935E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91897E2
cs_nozzle_imon=1.93648E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01797E1
cs_anode1_imon=3.26763E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=6.37567E-10
tplens_vset=1.4E-1
tplens_vmon=1.62614E0
tplens_imon=-1.57311E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26134E1
iondef3_imon=1.50963E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26807E1
iondef2_imon=1.55802E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02952E2
lens6_imon=2.98557E-4
ql6_vset=1.0E-1
ql6_vmon=9.28402E-2
ql6_imon=3.64149E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24144E0
ionrepsh_imon=1.99991E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33911E1
lens5b_imon=2.21321E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7471E1
cs_ef2b_imon=3.13585E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.46316E-1
os_ea2_imon=-5.35522E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06129E2
lens4b_imon=2.00731E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7117E1
cs_ef2a_imon=3.19785E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65647E0
os_ef2alow_imon=-2.49604E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.26683E-1
os_ef2bup_imon=-5.23454E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10702E1
os_restr2_imon=2.88924E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23093E2
cs_ionfoca_imon=6.31513E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01917E1
cs_anode2_imon=2.29261E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72895E1
iondef1_imon=1.10027E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67896E1
iondef4_imon=1.0924E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=1.92745E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=3.0427E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10651E0
cs_ionaccel_imon=-1.94E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47343E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56215E1
einzel_imon=7.64336E-6
window_vset=0.0E0
window_vmon=1.94517E-1
window_imon=-9.30788E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82618E2
mask1_imon=2.39126E-4
mask2_vset=0.0E0
mask2_vmon=-1.86696E1
mask2_imon=-4.97076E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=7.52649E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.52813E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50171E3
multb_neg_imon=6.99255E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39374E0
defgridb_imon=6.25281E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33945E1
os_fil1_imon=5.16751E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.40094E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66421E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30776E1
cs_fil1_imon=1.00791E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62937E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66344E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.12567E-2
os_fil2_imon=-2.3205E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.04533E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.58914E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3115E-1
cs_fil2_imon=-2.32514E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08061E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22397E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=1.99456E-1
chamber_ion_pmon=1.7368E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.162E-1
res40_imon=-2.58501E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=299
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.16703E-1	-7.98225E-1	-9.13146E0	-9.14209E0	5.29289E-3	9.32217E-2	2.73224E1	-3.27082E1	-3.26039E1	2.68197E1	1.73605E-7	2.51709E-3	2.51709E-3	6.31163E-3	1.99461E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.16679E-1	-7.98297E-1	-9.13153E0	-9.14228E0	5.55515E-3	9.3174E-2	2.73276E1	-3.26485E1	-3.26445E1	2.67981E1	1.73691E-7	2.51278E-3	2.51278E-3	6.30111E-3	1.98027E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09595E0	-8.16727E-1	-7.98202E-1	-9.13124E0	-9.14195E0	5.93662E-3	9.2864E-2	2.72727E1	-3.26654E1	-3.26173E1	2.68198E1	1.73667E-7	2.51747E-3	2.51747E-3	6.31651E-3	1.9766E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-8.16846E-1	-7.98297E-1	-9.13117E0	-9.14199E0	5.62668E-3	9.29832E-2	2.7334E1	-3.26537E1	-3.26201E1	2.67845E1	1.7375E-7	2.51814E-3	2.51814E-3	6.33388E-3	1.98229E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.16417E-1	-7.98249E-1	-9.13093E0	-9.14211E0	5.57899E-3	9.30309E-2	2.7278E1	-3.26366E1	-3.26189E1	2.68028E1	1.73753E-7	2.50989E-3	2.50989E-3	6.30202E-3	1.9951E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.16607E-1	-7.98106E-1	-9.13098E0	-9.14221E0	5.65052E-3	9.32693E-2	2.72823E1	-3.26464E1	-3.26134E1	2.6807E1	1.73605E-7	2.51225E-3	2.51225E-3	6.29098E-3	2.00499E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.17084E-1	-7.98202E-1	-9.13112E0	-9.14235E0	5.72205E-3	9.3174E-2	2.72916E1	-3.26456E1	-3.26009E1	2.68118E1	1.73605E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.00499E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-8.16536E-1	-7.9813E-1	-9.13093E0	-9.14228E0	5.29289E-3	9.26256E-2	2.73109E1	-3.2666E1	-3.26196E1	2.67821E1	1.7368E-7	2.51007E-3	2.51007E-3	6.3074E-3	2.00325E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09634E0	-8.17013E-1	-7.98202E-1	-9.13088E0	-9.14209E0	5.14984E-3	9.27448E-2	2.7302E1	-3.26591E1	-3.26156E1	2.67639E1	1.73679E-7	2.51739E-3	2.51739E-3	6.30202E-3	2.00021E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0965E0	-8.1687E-1	-7.98273E-1	-9.13117E0	-9.14199E0	5.26905E-3	9.31263E-2	2.73405E1	-3.26756E1	-3.26691E1	2.68041E1	1.7368E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.98592E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-8.17251E-1	-7.98059E-1	-9.13115E0	-9.14209E0	5.29289E-3	9.30309E-2	2.7379E1	-3.26735E1	-3.26266E1	2.67878E1	1.73531E-7	2.51954E-3	2.51954E-3	6.3074E-3	1.9968E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.17108E-1	-7.98345E-1	-9.13107E0	-9.14183E0	4.95911E-3	9.29356E-2	2.72612E1	-3.26627E1	-3.26567E1	2.68076E1	1.73642E-7	2.51552E-3	2.51552E-3	6.32112E-3	1.99197E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-8.17108E-1	-7.98631E-1	-9.13138E0	-9.14218E0	5.24521E-3	9.31025E-2	2.73016E1	-3.26691E1	-3.26225E1	2.68316E1					
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.16989E-1	-7.98273E-1	-9.13072E0	-9.14185E0	5.26905E-3	9.32455E-2	2.72883E1	-3.27245E1	-3.25912E1	2.67752E1	1.7368E-7	2.51334E-3	2.51334E-3	6.31288E-3	2.00151E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.17251E-1	-7.98297E-1	-9.13112E0	-9.14187E0	5.24521E-3	9.30071E-2	2.72889E1	-3.26621E1	-3.26729E1	2.67764E1	1.73605E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.98491E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09603E0	-8.17299E-1	-7.98726E-1	-9.13079E0	-9.14183E0	5.34058E-3	9.30786E-2	2.72684E1	-3.26753E1	-3.2602E1	2.67601E1	1.73755E-7	2.5199E-3	2.5199E-3	6.3074E-3	1.9963E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0958E0	-8.17204E-1	-7.98512E-1	-9.13107E0	-9.1419E0	5.60284E-3	9.29117E-2	2.73015E1	-3.26536E1	-3.265E1	2.6771E1	1.7368E-7	2.51225E-3	2.51225E-3	6.31288E-3	1.9963E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.17037E-1	-7.98321E-1	-9.13112E0	-9.14192E0	5.79357E-3	9.30309E-2	2.7298E1	-3.2652E1	-3.25977E1	2.68337E1	1.73755E-7	2.51334E-3	2.51334E-3	6.31837E-3	2.00673E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.17251E-1	-7.98273E-1	-9.13129E0	-9.14211E0	5.38826E-3	9.30071E-2	2.72817E1	-3.26639E1	-3.2605E1	2.67728E1	1.73605E-7	2.51847E-3	2.51847E-3	6.29128E-3	1.9934E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.17108E-1	-7.98202E-1	-9.13119E0	-9.14228E0	5.126E-3	9.28402E-2	2.72895E1	-3.26807E1	-3.26134E1	2.67896E1	1.7368E-7	2.51443E-3	2.51443E-3	6.32386E-3	1.99456E-1