[Scan]
initial_time=2016-02-16T01:00:46
final_time=2016-02-16T01:01:06
ip_count=19
run=1030
dataset=4
scan=290
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08772E-4
ql1_vset=
ql1_vmon=-8.17037E-1
ql1_imon=6.16431E-10
ql2_vset=
ql2_vmon=-7.98535E-1
ql2_imon=3.02875E-10
ql3_vset=
ql3_vmon=-9.13138E0
ql3_imon=5.40245E-10
ql4_vset=
ql4_vmon=-9.14211E0
ql4_imon=5.11694E-10
mult1=-7.72961E-9
mult2=-2.50503E-9
rf_tmon=-7.94314E-3
rf_agc=2.91759E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.31673E-3
ql5_imon=3.70324E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61747E0
bslens_imon=2.44763E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19827E1
lens5a_imon=1.99064E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12535E2
lens4a_imon=2.05172E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53484E1
cs_ef1b_imon=3.04361E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04632E2
lens23_imon=1.02143E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04766E1
cs_ea1_imon=2.19648E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4032E0
lens1_imon=2.82615E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64596E1
os_ef1alow_imon=2.9964E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03786E1
cs_ea2_imon=1.60239E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8437E1
cs_ef1a_imon=3.02126E-5
olens2_vset=9.7E-1
olens2_vmon=9.70483E-1
olens2_imon=3.96919E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11616E1
os_restr1_imon=2.87098E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15101E1
os_ea1_imon=1.87204E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63287E1
os_ef1bup_imon=3.10199E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23708E0
cs_ionrep_imon=1.25091E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93413E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01617E1
cs_anode1_imon=3.23498E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20546E0
olens4_imon=7.03204E-10
tplens_vset=1.4E-1
tplens_vmon=1.64564E0
tplens_imon=-2.02012E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25978E1
iondef3_imon=1.49424E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26134E1
iondef2_imon=1.59914E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02998E2
lens6_imon=2.98847E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=3.31438E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27493E0
ionrepsh_imon=2.00182E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33586E1
lens5b_imon=2.19072E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74471E1
cs_ef2b_imon=3.13118E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.8597E-1
os_ea2_imon=-5.80532E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06117E2
lens4b_imon=2.009E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70777E1
cs_ef2a_imon=3.19461E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.66123E0
os_ef2alow_imon=-2.38885E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.33153E-1
os_ef2bup_imon=-5.13147E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10949E1
os_restr2_imon=2.86341E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23083E2
cs_ionfoca_imon=6.32127E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01665E1
cs_anode2_imon=2.29723E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73309E1
iondef1_imon=1.08472E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68202E1
iondef4_imon=1.10071E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71791E1
olens3_imon=1.90995E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82499E-1
olens1_imon=2.50208E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.07969E0
cs_ionaccel_imon=-2.10053E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47489E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55967E1
einzel_imon=7.80317E-6
window_vset=0.0E0
window_vmon=1.54874E-1
window_imon=-9.72491E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82574E2
mask1_imon=2.3921E-4
mask2_vset=0.0E0
mask2_vmon=-1.86494E1
mask2_imon=-9.18431E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.926E3
multa_neg_imon=8.21555E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=7.04034E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.14128E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43164E0
defgridb_imon=6.03095E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33935E1
os_fil1_imon=4.9384E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.04982E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66457E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30799E1
cs_fil1_imon=1.00745E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62528E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66324E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.04791E-2
os_fil2_imon=-2.28154E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.19978E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.7546E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31723E-1
cs_fil2_imon=-2.11336E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17226E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22421E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32858E-3
inlet_lpb_pmon=1.99394E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51498E-3
foreline_cvt_pmon=2.51498E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.32573E-1
res40_imon=-2.65194E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.16631E-1	-7.98655E-1	-9.13084E0	-9.14209E0	5.26905E-3	9.30071E-2	2.73045E1	-3.26561E1	-3.26272E1	2.68128E1	1.73605E-7	2.52169E-3	2.52169E-3	6.31817E-3	1.9934E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09449E0	-8.1656E-1	-7.98202E-1	-9.13095E0	-9.14207E0	5.10216E-3	9.28164E-2	2.73139E1	-3.26868E1	-3.26307E1	2.67885E1	1.73605E-7	2.52061E-3	2.52061E-3	6.31817E-3	1.9951E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.1687E-1	-7.98368E-1	-9.13105E0	-9.14207E0	5.34058E-3	9.34124E-2	2.73163E1	-3.2656E1	-3.26129E1	2.67901E1	1.73679E-7	2.51525E-3	2.51525E-3	6.29665E-3	1.99E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-8.16703E-1	-7.98607E-1	-9.13095E0	-9.14216E0	5.31673E-3	9.33409E-2	2.73517E1	-3.27056E1	-3.26148E1	2.68088E1	1.73605E-7	2.52027E-3	2.52027E-3	6.31858E-3	1.98169E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09426E0	-8.16798E-1	-7.98345E-1	-9.13119E0	-9.14214E0	5.22137E-3	9.32932E-2	2.73175E1	-3.26573E1	-3.26207E1	2.67896E1	1.73679E-7	2.51739E-3	2.51739E-3	6.3074E-3	1.9883E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-8.17394E-1	-7.98345E-1	-9.1311E0	-9.14226E0	5.24521E-3	9.3317E-2	2.72727E1	-3.26309E1	-3.26144E1	2.68064E1	1.7368E-7	2.51443E-3	2.51443E-3	6.32936E-3	1.98592E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.16822E-1	-7.98035E-1	-9.13098E0	-9.14211E0	5.45979E-3	9.31501E-2	2.73021E1	-3.26404E1	-3.26392E1	2.67788E1	1.73605E-7	2.5147E-3	2.5147E-3	6.29624E-3	1.99754E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0941E0	-8.16965E-1	-7.98011E-1	-9.13069E0	-9.1419E0	5.34058E-3	9.32932E-2	2.72877E1	-3.26663E1	-3.26374E1	2.6801E1	1.73605E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.98419E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09394E0	-8.1706E-1	-7.97963E-1	-9.13119E0	-9.14214E0	5.24521E-3	9.3317E-2	2.72642E1	-3.26801E1	-3.26332E1	2.67932E1	1.73605E-7	2.51847E-3	2.51847E-3	6.3074E-3	1.9985E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09356E0	-8.1706E-1	-7.98202E-1	-9.13112E0	-9.14211E0	5.29289E-3	9.30071E-2	2.72744E1	-3.26201E1	-3.26467E1	2.67723E1	1.73605E-7	2.51225E-3	2.51225E-3	6.3074E-3	1.9963E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09418E0	-8.16894E-1	-7.98297E-1	-9.131E0	-9.14209E0	5.14984E-3	9.30071E-2	2.73069E1	-3.26536E1	-3.26407E1	2.67895E1	1.73605E-7	2.51847E-3	2.51847E-3	6.3074E-3	1.9917E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0941E0	-8.16774E-1	-7.98655E-1	-9.13098E0	-9.14202E0	5.19753E-3	9.30309E-2	2.72871E1	-3.26987E1	-3.25948E1	2.67878E1	1.73681E-7	2.51248E-3	2.51248E-3	6.32978E-3	1.98344E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.16894E-1	-7.98297E-1	-9.13117E0	-9.14207E0	5.43594E-3	9.32693E-2	2.73153E1	-3.26741E1	-3.2605E1	2.67896E1	1.73605E-7	2.51007E-3	2.51007E-3	6.34037E-3	1.99803E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.16774E-1	-7.97892E-1	-9.13131E0	-9.14209E0	5.24521E-3	9.30548E-2	2.73452E1	-3.26726E1	-3.26343E1	2.66991E1	1.73605E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.9963E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.16774E-1	-7.98607E-1	-9.13119E0	-9.1423E0	5.60284E-3	9.30309E-2	2.72922E1	-3.26419E1	-3.26695E1	2.68492E1	1.73605E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.98419E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09394E0	-8.16631E-1	-7.98607E-1	-9.13134E0	-9.14197E0	5.36442E-3	9.32693E-2	2.72603E1	-3.26596E1	-3.25835E1	2.68308E1	1.73605E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.98505E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.16679E-1	-7.98416E-1	-9.13126E0	-9.14218E0	5.34058E-3	9.30071E-2	2.72949E1	-3.26326E1	-3.265E1	2.67373E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.16894E-1	-7.98583E-1	-9.13112E0	-9.14211E0	5.65052E-3	9.29117E-2	2.73004E1	-3.2613E1	-3.26413E1	2.6804E1	1.7368E-7	2.52209E-3	2.52209E-3	6.31288E-3	1.99283E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.16774E-1	-7.9844E-1	-9.13129E0	-9.14211E0	5.57899E-3	9.31978E-2	2.73086E1	-3.26844E1	-3.26024E1	2.68128E1	1.73531E-7	2.51525E-3	2.51525E-3	6.3074E-3	1.99E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.17037E-1	-7.98535E-1	-9.13138E0	-9.14211E0	5.31673E-3	9.3174E-2	2.73309E1	-3.26134E1	-3.25978E1	2.68202E1	1.73605E-7	2.51498E-3	2.51498E-3	6.32858E-3	1.99394E-1