[Scan]
initial_time=2016-02-16T01:02:33
final_time=2016-02-16T01:02:52
ip_count=19
run=1030
dataset=4
scan=294
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08756E-4
ql1_vset=
ql1_vmon=-8.16655E-1
ql1_imon=5.70393E-10
ql2_vset=
ql2_vmon=-7.97582E-1
ql2_imon=2.79713E-10
ql3_vset=
ql3_vmon=-9.13095E0
ql3_imon=5.16748E-10
ql4_vset=
ql4_vmon=-9.14223E0
ql4_imon=4.71163E-10
mult1=-1.06916E-8
mult2=-3.10985E-9
rf_tmon=-4.24806E-3
rf_agc=3.23662E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=3.75676E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6373E0
bslens_imon=2.77207E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20403E1
lens5a_imon=2.02092E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12486E2
lens4a_imon=2.04978E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53688E1
cs_ef1b_imon=3.0537E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.02067E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04736E1
cs_ea1_imon=2.20586E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39119E0
lens1_imon=2.89104E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6402E1
os_ef1alow_imon=2.98739E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0327E1
cs_ea2_imon=1.54507E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.85007E1
cs_ef1a_imon=3.00432E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=3.76821E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11087E1
os_restr1_imon=2.88035E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15185E1
os_ea1_imon=1.9034E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63828E1
os_ef1bup_imon=3.09659E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21785E0
cs_ionrep_imon=1.28407E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91908E2
cs_nozzle_imon=1.9338E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01623E1
cs_anode1_imon=3.25444E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=6.81555E-10
tplens_vset=1.4E-1
tplens_vmon=1.5417E0
tplens_imon=-2.41667E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25978E1
iondef3_imon=1.51767E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26849E1
iondef2_imon=1.58076E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02963E2
lens6_imon=2.98544E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=3.60703E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.21905E0
ionrepsh_imon=2.00578E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34222E1
lens5b_imon=2.18387E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74639E1
cs_ef2b_imon=3.14812E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.40308E-1
os_ea2_imon=-7.9683E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06122E2
lens4b_imon=2.0076E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70699E1
cs_ef2a_imon=3.18452E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.68705E0
os_ef2alow_imon=-2.4357E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.23543E-1
os_ef2bup_imon=-5.42699E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10829E1
os_restr2_imon=2.88611E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.2964E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02031E1
cs_anode2_imon=2.2911E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73405E1
iondef1_imon=1.1168E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68118E1
iondef4_imon=1.10143E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=1.90722E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=2.82764E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0911E0
cs_ionaccel_imon=-2.11495E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47496E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56351E1
einzel_imon=7.59053E-6
window_vset=0.0E0
window_vmon=1.93316E-1
window_imon=-6.66154E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82617E2
mask1_imon=2.38976E-4
mask2_vset=0.0E0
mask2_vmon=-1.86344E1
mask2_imon=-4.60728E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=7.79738E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93692E3
defgrida_imon=6.80962E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50094E3
multb_neg_imon=7.02952E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.51284E0
defgridb_imon=6.17155E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33953E1
os_fil1_imon=4.70414E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.62335E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66461E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3079E1
cs_fil1_imon=1.01026E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62834E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66392E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.17689E-2
os_fil2_imon=-2.4257E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.47899E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.7778E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33536E-1
cs_fil2_imon=-2.23349E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.47568E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22447E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.00363E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.10949E-1
res40_imon=-2.57986E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.16131E-1	-7.98225E-1	-9.1316E0	-9.14226E0	5.43594E-3	9.3317E-2	2.73016E1	-3.26986E1	-3.26325E1	2.67966E1	1.7368E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.00673E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.16536E-1	-7.98273E-1	-9.13174E0	-9.14216E0	5.76973E-3	9.32932E-2	2.72979E1	-3.26092E1	-3.26669E1	2.67876E1	1.73605E-7	2.51847E-3	2.51847E-3	6.29665E-3	2.00363E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0941E0	-8.16345E-1	-7.98035E-1	-9.13146E0	-9.14226E0	5.24521E-3	9.31025E-2	2.73517E1	-3.26484E1	-3.26201E1	2.68221E1	1.73605E-7	2.51007E-3	2.51007E-3	6.30192E-3	1.9963E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-8.16536E-1	-7.97534E-1	-9.13129E0	-9.1424E0	5.62668E-3	9.29594E-2	2.73141E1	-3.26981E1	-3.26092E1	2.67295E1	1.73679E-7	2.51632E-3	2.51632E-3	6.30202E-3	2.00192E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-8.16584E-1	-7.97963E-1	-9.1315E0	-9.14242E0	5.57899E-3	9.29356E-2	2.72739E1	-3.26374E1	-3.26765E1	2.67607E1	1.73605E-7	2.5188E-3	2.5188E-3	6.34037E-3	2.01197E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.1625E-1	-7.98082E-1	-9.13131E0	-9.14233E0	5.43594E-3	9.29356E-2	2.73647E1	-3.26284E1	-3.26773E1	2.67914E1	1.73679E-7	2.52134E-3	2.52134E-3	6.32916E-3	2.0043E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.16321E-1	-7.98178E-1	-9.13136E0	-9.1424E0	5.57899E-3	9.30548E-2	2.73219E1	-3.26627E1	-3.26008E1	2.68304E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09387E0	-8.16393E-1	-7.9782E-1	-9.13148E0	-9.14233E0	5.62668E-3	9.31263E-2	2.73412E1	-3.26927E1	-3.26474E1	2.67839E1	1.73605E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.00499E-1
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.16464E-1	-7.98273E-1	-9.1316E0	-9.1423E0	5.26905E-3	9.2864E-2	2.73039E1	-3.26779E1	-3.26278E1	2.68186E1	1.73681E-7	2.50914E-3	2.50914E-3	6.31858E-3	1.99754E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.16178E-1	-7.98321E-1	-9.13138E0	-9.14228E0	5.31673E-3	9.3174E-2	2.73291E1	-3.27131E1	-3.26326E1	2.67607E1	1.73605E-7	2.51847E-3	2.51847E-3	6.31278E-3	1.9985E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09588E0	-8.17037E-1	-7.9813E-1	-9.1311E0	-9.14233E0	5.57899E-3	9.27687E-2	2.73016E1	-3.26933E1	-3.26378E1	2.68244E1	1.73605E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.00151E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09588E0	-8.16441E-1	-7.98202E-1	-9.13098E0	-9.14221E0	5.48363E-3	9.29117E-2	2.72591E1	-3.2662E1	-3.26313E1	2.67145E1	1.73679E-7	2.51632E-3	2.51632E-3	6.29128E-3	2.01047E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.16679E-1	-7.98345E-1	-9.13112E0	-9.1423E0	5.74589E-3	9.32693E-2	2.73314E1	-3.26646E1	-3.26248E1	2.68454E1	1.73753E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.00876E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.16989E-1	-7.97987E-1	-9.13115E0	-9.14237E0	5.53131E-3	9.2864E-2	2.72614E1	-3.26496E1	-3.25841E1	2.67976E1	1.73605E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.00325E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-8.16345E-1	-7.97868E-1	-9.1311E0	-9.14221E0	5.36442E-3	9.30071E-2	2.73219E1	-3.26597E1	-3.25731E1	2.6828E1	1.73605E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.99977E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.16655E-1	-7.97629E-1	-9.13098E0	-9.14218E0	5.34058E-3	9.2864E-2	2.73249E1	-3.26861E1	-3.2602E1	2.68394E1	1.7368E-7	2.5188E-3	2.5188E-3	6.30192E-3	2.00151E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.16584E-1	-7.9782E-1	-9.13098E0	-9.14226E0	5.67436E-3	9.28402E-2	2.72678E1	-3.26675E1	-3.2605E1	2.67487E1	1.73755E-7	2.51334E-3	2.51334E-3	6.28552E-3	2.01022E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09611E0	-8.16536E-1	-7.97749E-1	-9.13098E0	-9.14235E0	5.17368E-3	9.30786E-2	2.73115E1	-3.26799E1	-3.26208E1	2.67804E1	1.73605E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.99283E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.16798E-1	-7.97224E-1	-9.131E0	-9.14242E0	5.48363E-3	9.33409E-2	2.73523E1	-3.26567E1	-3.26284E1	2.68436E1	1.73677E-7	2.51814E-3	2.51814E-3	6.30212E-3	2.00231E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.16655E-1	-7.97582E-1	-9.13095E0	-9.14223E0	5.48363E-3	9.31263E-2	2.73405E1	-3.26849E1	-3.25978E1	2.68118E1	1.73605E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.00363E-1