[Scan]
initial_time=2016-02-16T01:02:59
final_time=2016-02-16T01:03:19
ip_count=19
run=1030
dataset=4
scan=295
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08775E-4
ql1_vset=
ql1_vmon=-8.16178E-1
ql1_imon=6.35397E-10
ql2_vset=
ql2_vmon=-7.98011E-1
ql2_imon=2.87938E-10
ql3_vset=
ql3_vmon=-9.13115E0
ql3_imon=5.53775E-10
ql4_vset=
ql4_vmon=-9.14226E0
ql4_imon=4.9746E-10
mult1=-8.42796E-9
mult2=-2.83438E-9
rf_tmon=-5.79819E-3
rf_agc=3.25645E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.60284E-3
ql5_imon=3.63636E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63429E0
bslens_imon=2.50891E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19815E1
lens5a_imon=2.00831E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12473E2
lens4a_imon=2.04877E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53911E1
cs_ef1b_imon=3.06559E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.02532E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05054E1
cs_ea1_imon=2.20297E-5
lens1_vset=-5.0E0
lens1_vmon=-5.399E0
lens1_imon=2.84057E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64266E1
os_ef1alow_imon=2.99243E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03949E1
cs_ea2_imon=1.54399E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8413E1
cs_ef1a_imon=3.03424E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=3.6726E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.10685E1
os_restr1_imon=2.86305E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15714E1
os_ea1_imon=1.89511E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64002E1
os_ef1bup_imon=3.09731E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24849E0
cs_ionrep_imon=1.25595E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9187E2
cs_nozzle_imon=1.93694E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01593E1
cs_anode1_imon=3.24363E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20575E0
olens4_imon=7.2552E-10
tplens_vset=1.4E-1
tplens_vmon=1.58916E0
tplens_imon=-2.45272E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26092E1
iondef3_imon=1.54435E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26837E1
iondef2_imon=1.56706E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02975E2
lens6_imon=2.98584E-4
ql6_vset=1.0E-1
ql6_vmon=9.29594E-2
ql6_imon=3.64029E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28514E0
ionrepsh_imon=2.01191E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33922E1
lens5b_imon=2.18531E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74856E1
cs_ef2b_imon=3.13515E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.83567E-1
os_ea2_imon=-4.00285E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06114E2
lens4b_imon=2.00745E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71035E1
cs_ef2a_imon=3.17407E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64921E0
os_ef2alow_imon=-2.28433E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.22341E-1
os_ef2bup_imon=-5.38375E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10589E1
os_restr2_imon=2.90269E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2308E2
cs_ionfoca_imon=6.33605E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.29651E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73417E1
iondef1_imon=1.10815E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6783E1
iondef4_imon=1.12269E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=1.89321E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82499E-1
olens1_imon=2.90489E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14276E0
cs_ionaccel_imon=-2.10774E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02051E2
cs_ionfocb_imon=1.47662E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56579E1
einzel_imon=7.37429E-6
window_vset=0.0E0
window_vmon=2.10735E-1
window_imon=-6.73362E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.38868E-4
mask2_vset=0.0E0
mask2_vmon=-1.86236E1
mask2_imon=-5.36411E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.70365E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93743E3
defgrida_imon=6.47436E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.4513E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43765E0
defgridb_imon=6.34458E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33918E1
os_fil1_imon=5.19068E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.88164E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66312E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30761E1
cs_fil1_imon=1.00995E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62738E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66527E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.20268E-2
os_fil2_imon=-2.31158E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.07014E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.74042E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32371E-1
cs_fil2_imon=-2.47976E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.07634E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22296E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.00021E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51203E-3
foreline_cvt_pmon=2.51203E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.91127E-1
res40_imon=-2.87538E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.16536E-1	-7.98059E-1	-9.13107E0	-9.14233E0	5.38826E-3	9.31263E-2	2.73151E1	-3.26927E1	-3.26596E1	2.67862E1	1.73605E-7	2.51007E-3	2.51007E-3	6.31288E-3	1.98937E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.16488E-1	-7.98225E-1	-9.13098E0	-9.14218E0	5.29289E-3	9.30309E-2	2.72978E1	-3.26664E1	-3.26174E1	2.67733E1	1.73605E-7	2.52169E-3	2.52169E-3	6.3074E-3	1.98491E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09418E0	-8.16846E-1	-7.97653E-1	-9.13115E0	-9.14204E0	5.19753E-3	9.30548E-2	2.73132E1	-3.27268E1	-3.26196E1	2.67827E1	1.73605E-7	2.51359E-3	2.51359E-3	6.32978E-3	1.97994E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09387E0	-8.1687E-1	-7.98106E-1	-9.131E0	-9.14223E0	5.57899E-3	9.34362E-2	2.73435E1	-3.26368E1	-3.26212E1	2.68653E1	1.73605E-7	2.51182E-3	2.51182E-3	6.32328E-3	1.97235E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.16512E-1	-7.9813E-1	-9.1311E0	-9.14202E0	5.07832E-3	9.33647E-2	2.7324E1	-3.26632E1	-3.26136E1	2.67984E1	1.73605E-7	2.52169E-3	2.52169E-3	6.32356E-3	1.9951E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.16774E-1	-7.98702E-1	-9.13115E0	-9.14202E0	5.74589E-3	9.33647E-2	2.72985E1	-3.26903E1	-3.2626E1	2.67613E1	1.73605E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.99456E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.16941E-1	-7.9782E-1	-9.13107E0	-9.14233E0	5.14984E-3	9.36031E-2	2.7266E1	-3.26621E1	-3.26374E1	2.6795E1	1.73605E-7	2.51116E-3	2.51116E-3	6.33486E-3	1.98764E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.16488E-1	-7.97915E-1	-9.13119E0	-9.14207E0	4.98295E-3	9.33886E-2	2.73369E1	-3.26494E1	-3.26332E1	2.68064E1	1.73755E-7	2.50898E-3	2.50898E-3	6.32386E-3	1.99977E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.16441E-1	-7.97963E-1	-9.13129E0	-9.14211E0	5.31673E-3	9.32455E-2	2.72672E1	-3.26657E1	-3.26434E1	2.68599E1	1.73605E-7	2.51007E-3	2.51007E-3	6.34037E-3	2.00673E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0965E0	-8.16584E-1	-7.97606E-1	-9.13119E0	-9.14207E0	5.07832E-3	9.3174E-2	2.72774E1	-3.26225E1	-3.2711E1	2.67752E1	1.7368E-7	2.52538E-3	2.52538E-3	6.3074E-3	1.9911E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09657E0	-8.16822E-1	-7.97701E-1	-9.13124E0	-9.14209E0	5.126E-3	9.31501E-2	2.72935E1	-3.2633E1	-3.26156E1	2.68059E1	1.73605E-7	2.51847E-3	2.51847E-3	6.29665E-3	1.9917E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09572E0	-8.16774E-1	-7.97963E-1	-9.13129E0	-9.14187E0	5.4121E-3	9.33409E-2	2.72498E1	-3.26992E1	-3.26254E1	2.68219E1	1.73677E-7	2.51919E-3	2.51919E-3	6.34982E-3	1.99729E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09572E0	-8.16727E-1	-7.97677E-1	-9.13105E0	-9.14195E0	5.17368E-3	9.30071E-2	2.72588E1	-3.26945E1	-3.25581E1	2.6783E1	1.73605E-7	2.51874E-3	2.51874E-3	6.35399E-3	1.99283E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.17037E-1	-7.97606E-1	-9.13126E0	-9.14187E0	5.45979E-3	9.3174E-2	2.72901E1	-3.2736E1	-3.25816E1	2.68364E1	1.7368E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.00151E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09588E0	-8.16464E-1	-7.98321E-1	-9.13088E0	-9.14199E0	5.45979E-3	9.35078E-2	2.73135E1	-3.27414E1	-3.25563E1	2.67788E1	1.73755E-7	2.52209E-3	2.52209E-3	6.32936E-3	2.00499E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-8.1656E-1	-7.98297E-1	-9.1311E0	-9.14209E0	5.10216E-3	9.30548E-2	2.72576E1	-3.27143E1	-3.26122E1	2.67986E1	1.73642E-7	2.51863E-3	2.51863E-3	6.32371E-3	2.00085E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.1656E-1	-7.98225E-1	-9.13138E0	-9.1424E0	5.05447E-3	9.31263E-2	2.73552E1	-3.26461E1	-3.26307E1	2.68064E1					
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.1656E-1	-7.97701E-1	-9.1311E0	-9.14199E0	5.126E-3	9.35555E-2	2.72522E1	-3.26789E1	-3.26404E1	2.68569E1	1.73605E-7	2.51334E-3	2.51334E-3	6.33486E-3	1.99803E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.16202E-1	-7.97963E-1	-9.131E0	-9.14228E0	5.45979E-3	9.29117E-2	2.72962E1	-3.26225E1	-3.26602E1	2.68742E1	1.73755E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.98764E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.16178E-1	-7.98011E-1	-9.13115E0	-9.14226E0	5.60284E-3	9.29594E-2	2.73417E1	-3.26837E1	-3.26092E1	2.6783E1	1.73605E-7	2.51203E-3	2.51203E-3	6.31278E-3	2.00021E-1