[Scan]
initial_time=2016-02-16T01:04:19
final_time=2016-02-16T01:04:39
ip_count=19
run=1030
dataset=4
scan=298
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.08747E-4
ql1_vset=
ql1_vmon=-8.16584E-1
ql1_imon=6.19602E-10
ql2_vset=
ql2_vmon=-7.98059E-1
ql2_imon=3.01683E-10
ql3_vset=
ql3_vmon=-9.13129E0
ql3_imon=5.22768E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=5.13303E-10
mult1=-1.00786E-8
mult2=-2.61547E-9
rf_tmon=-3.71901E-3
rf_agc=3.49136E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.43594E-3
ql5_imon=3.80766E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66313E0
bslens_imon=2.57741E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20674E1
lens5a_imon=1.99677E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.05226E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5355E1
cs_ef1b_imon=3.06667E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04646E2
lens23_imon=1.02121E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05018E1
cs_ea1_imon=2.24912E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41101E0
lens1_imon=2.50531E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64957E1
os_ef1alow_imon=2.9809E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03486E1
cs_ea2_imon=1.58508E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84214E1
cs_ef1a_imon=3.02054E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=3.62253E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=2.87999E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15528E1
os_ea1_imon=1.86303E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63299E1
os_ef1bup_imon=3.10163E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24008E0
cs_ionrep_imon=1.23613E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91889E2
cs_nozzle_imon=1.93456E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01845E1
cs_anode1_imon=3.25372E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20556E0
olens4_imon=6.83713E-10
tplens_vset=1.4E-1
tplens_vmon=1.53929E0
tplens_imon=-7.22339E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26065E1
iondef3_imon=1.49316E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26626E1
iondef2_imon=1.56814E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02919E2
lens6_imon=2.98512E-4
ql6_vset=1.0E-1
ql6_vmon=9.30309E-2
ql6_imon=3.91281E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23648E0
ionrepsh_imon=1.99208E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34048E1
lens5b_imon=2.1936E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74501E1
cs_ef2b_imon=3.12434E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.51123E-1
os_ea2_imon=-4.00285E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06112E2
lens4b_imon=2.00781E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71516E1
cs_ef2a_imon=3.20146E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62038E0
os_ef2alow_imon=-2.48616E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.56579E-1
os_ef2bup_imon=-5.27563E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10793E1
os_restr2_imon=2.88936E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23115E2
cs_ionfoca_imon=6.30469E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01563E1
cs_anode2_imon=2.29038E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7334E1
iondef1_imon=1.11644E-5
iondef4_vset=2.691E1
iondef4_vmon=2.677E1
iondef4_imon=1.08701E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.89708E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=2.96927E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12534E0
cs_ionaccel_imon=-2.03566E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47324E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56369E1
einzel_imon=7.78875E-6
window_vset=0.0E0
window_vmon=2.13138E-1
window_imon=-9.79699E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82612E2
mask1_imon=2.38965E-4
mask2_vset=0.0E0
mask2_vmon=-1.86644E1
mask2_imon=-5.03975E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9264E3
multa_neg_imon=7.38281E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93675E3
defgrida_imon=6.81323E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50151E3
multb_neg_imon=7.29629E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.63916E0
defgridb_imon=6.26888E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33953E1
os_fil1_imon=5.03451E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.26897E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66313E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30807E1
cs_fil1_imon=1.00924E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62564E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66369E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.18979E-2
os_fil2_imon=-2.29356E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.41892E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.75589E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29263E-1
cs_fil2_imon=-1.92715E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.23232E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22456E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=1.9917E-1
chamber_ion_pmon=1.73679E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.28969E-1
res40_imon=-2.59788E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=147
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-8.16584E-1	-7.98059E-1	-9.13122E0	-9.14185E0	5.65052E-3	9.28879E-2	2.73028E1	-3.26463E1	-3.26237E1	2.6784E1	1.73605E-7	2.51525E-3	2.51525E-3	6.29128E-3	1.9934E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.16751E-1	-7.97796E-1	-9.13138E0	-9.14216E0	5.48363E-3	9.31263E-2	2.72659E1	-3.26719E1	-3.26554E1	2.67862E1	1.73679E-7	2.51417E-3	2.51417E-3	6.30202E-3	1.97647E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.16631E-1	-7.98321E-1	-9.13117E0	-9.14216E0	5.34058E-3	9.30309E-2	2.73051E1	-3.26855E1	-3.26651E1	2.68117E1	1.73681E-7	2.51693E-3	2.51693E-3	6.31858E-3	1.97469E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-8.16488E-1	-7.98106E-1	-9.13143E0	-9.14214E0	5.55515E-3	9.28879E-2	2.72886E1	-3.26449E1	-3.26307E1	2.68124E1	1.73605E-7	2.51525E-3	2.51525E-3	6.31278E-3	1.97984E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.16941E-1	-7.98106E-1	-9.13148E0	-9.14214E0	5.43594E-3	9.28879E-2	2.73207E1	-3.26639E1	-3.26687E1	2.67908E1	1.73679E-7	2.51739E-3	2.51739E-3	6.31278E-3	1.97478E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.17084E-1	-7.98154E-1	-9.13136E0	-9.14214E0	5.29289E-3	9.28402E-2	2.73442E1	-3.26476E1	-3.26194E1	2.6801E1	1.73681E-7	2.51136E-3	2.51136E-3	6.3074E-3	1.98344E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09565E0	-8.16965E-1	-7.98202E-1	-9.13103E0	-9.14216E0	5.50747E-3	9.30071E-2	2.73399E1	-3.26236E1	-3.26649E1	2.67397E1	1.7368E-7	2.51334E-3	2.51334E-3	6.32386E-3	1.99803E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.16727E-1	-7.98273E-1	-9.13107E0	-9.14223E0	5.43594E-3	9.2864E-2	2.73381E1	-3.2626E1	-3.2641E1	2.67872E1	1.73753E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.01047E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09433E0	-8.16607E-1	-7.97987E-1	-9.13138E0	-9.1419E0	5.57899E-3	9.30309E-2	2.73293E1	-3.26756E1	-3.26124E1	2.67659E1	1.73679E-7	2.51417E-3	2.51417E-3	6.3074E-3	2.00192E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.17037E-1	-7.98106E-1	-9.13124E0	-9.14211E0	5.62668E-3	9.30548E-2	2.72168E1	-3.26482E1	-3.26512E1	2.67914E1	1.73605E-7	2.51225E-3	2.51225E-3	6.30192E-3	1.98937E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.16393E-1	-7.98059E-1	-9.13112E0	-9.14214E0	5.65052E-3	9.3174E-2	2.73326E1	-3.26682E1	-3.26132E1	2.67914E1	1.73831E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.99283E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.16441E-1	-7.98225E-1	-9.13084E0	-9.14202E0	5.36442E-3	9.31025E-2	2.73434E1	-3.26897E1	-3.26354E1	2.68123E1	1.73605E-7	2.52209E-3	2.52209E-3	6.34588E-3	1.98937E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-8.16655E-1	-7.97963E-1	-9.13086E0	-9.14218E0	5.34058E-3	9.29594E-2	2.7236E1	-3.26705E1	-3.26512E1	2.68172E1	1.73831E-7	2.50789E-3	2.50789E-3	6.31288E-3	1.98937E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.16822E-1	-7.97677E-1	-9.13084E0	-9.14211E0	5.22137E-3	9.30309E-2	2.73145E1	-3.27039E1	-3.26195E1	2.68052E1	1.73679E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.00192E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.16655E-1	-7.97844E-1	-9.13117E0	-9.14209E0	5.07832E-3	9.27925E-2	2.731E1	-3.26468E1	-3.26187E1	2.681E1	1.73605E-7	2.51334E-3	2.51334E-3	6.32386E-3	2.00325E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.16393E-1	-7.98059E-1	-9.1311E0	-9.14202E0	5.34058E-3	9.30071E-2	2.71405E1	-3.24854E1	-3.25996E1	2.68052E1	1.7368E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.00151E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.16846E-1	-7.97462E-1	-9.13093E0	-9.14221E0	5.57899E-3	9.29832E-2	2.73135E1	-3.26314E1	-3.26681E1	2.68148E1	1.73605E-7	2.51225E-3	2.51225E-3	6.30192E-3	1.98937E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.16679E-1	-7.97534E-1	-9.1311E0	-9.14235E0	5.29289E-3	9.31025E-2	2.73279E1	-3.26356E1	-3.26128E1	2.68112E1	1.73605E-7	2.51552E-3	2.51552E-3	6.30192E-3	1.99456E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.16464E-1	-7.9782E-1	-9.13103E0	-9.1423E0	5.55515E-3	9.28879E-2	2.73092E1	-3.26608E1	-3.2649E1	2.68346E1	1.7368E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.98592E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-8.16584E-1	-7.98059E-1	-9.13129E0	-9.14202E0	5.43594E-3	9.30309E-2	2.7334E1	-3.26626E1	-3.26065E1	2.677E1	1.73679E-7	2.5131E-3	2.5131E-3	6.33436E-3	1.9917E-1