[Scan]
initial_time=2016-02-16T01:04:46
final_time=2016-02-16T01:05:05
ip_count=19
run=1030
dataset=4
scan=299
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08806E-4
ql1_vset=
ql1_vmon=-8.1594E-1
ql1_imon=6.24716E-10
ql2_vset=
ql2_vmon=-7.98059E-1
ql2_imon=2.7914E-10
ql3_vset=
ql3_vmon=-9.13103E0
ql3_imon=5.79226E-10
ql4_vset=
ql4_vmon=-9.14223E0
ql4_imon=5.10025E-10
mult1=-9.78855E-9
mult2=-2.7765E-9
rf_tmon=-5.7321E-3
rf_agc=3.218E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.60284E-3
ql5_imon=3.456E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63217E0
bslens_imon=2.34054E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20127E1
lens5a_imon=2.01087E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12486E2
lens4a_imon=2.05028E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53792E1
cs_ef1b_imon=3.0802E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04629E2
lens23_imon=1.02197E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04988E1
cs_ea1_imon=2.20516E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43363E0
lens1_imon=2.87874E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64558E1
os_ef1alow_imon=2.96006E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03773E1
cs_ea2_imon=1.60627E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83839E1
cs_ef1a_imon=3.0308E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=3.96895E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11155E1
os_restr1_imon=2.86687E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15777E1
os_ea1_imon=1.87499E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63723E1
os_ef1bup_imon=3.11725E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19293E0
cs_ionrep_imon=1.25587E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91902E2
cs_nozzle_imon=1.93489E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0164E1
cs_anode1_imon=3.24899E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20556E0
olens4_imon=6.90293E-10
tplens_vset=1.4E-1
tplens_vmon=1.59118E0
tplens_imon=-7.18098E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26014E1
iondef3_imon=1.49901E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26645E1
iondef2_imon=1.58108E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02961E2
lens6_imon=2.98365E-4
ql6_vset=1.0E-1
ql6_vmon=9.29594E-2
ql6_imon=3.58796E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27118E0
ionrepsh_imon=1.99866E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33607E1
lens5b_imon=2.18416E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74738E1
cs_ef2b_imon=3.1427E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.78124E-1
os_ea2_imon=-5.48936E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06108E2
lens4b_imon=2.00646E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70771E1
cs_ef2a_imon=3.17115E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.66273E0
os_ef2alow_imon=-2.23E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.36503E-1
os_ef2bup_imon=-5.22032E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10493E1
os_restr2_imon=2.87324E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23074E2
cs_ionfoca_imon=6.29737E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01522E1
cs_anode2_imon=2.28041E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72859E1
iondef1_imon=1.11006E-5
iondef4_vset=2.691E1
iondef4_vmon=2.681E1
iondef4_imon=1.10225E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.93394E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82547E-1
olens1_imon=2.45988E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.08897E0
cs_ionaccel_imon=-2.11398E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02127E2
cs_ionfocb_imon=1.47346E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56E1
einzel_imon=7.75895E-6
window_vset=0.0E0
window_vmon=1.77676E-1
window_imon=-8.15302E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8261E2
mask1_imon=2.39129E-4
mask2_vset=0.0E0
mask2_vmon=-1.86587E1
mask2_imon=-6.39401E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92608E3
multa_neg_imon=7.39044E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93685E3
defgrida_imon=6.45146E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50113E3
multb_neg_imon=6.94767E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.65933E0
defgridb_imon=6.22244E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33938E1
os_fil1_imon=4.85385E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.04128E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66338E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30801E1
cs_fil1_imon=1.00856E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62247E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66564E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.07143E-2
os_fil2_imon=-2.33191E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.80473E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.60842E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31131E-1
cs_fil2_imon=-2.34438E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.68394E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2244E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=1.98592E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40076E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.89751E-1
res40_imon=-2.42087E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=212
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09402E0	-8.16751E-1	-7.97963E-1	-9.13117E0	-9.14164E0	5.45979E-3	9.32932E-2	2.73228E1	-3.26649E1	-3.26201E1	2.68004E1	1.73684E-7	2.52338E-3	2.52338E-3	6.28423E-3	1.99283E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09394E0	-8.16226E-1	-7.97987E-1	-9.1315E0	-9.14154E0	5.65052E-3	9.30309E-2	2.731E1	-3.26744E1	-3.25917E1	2.6795E1	1.73679E-7	2.52276E-3	2.52276E-3	6.32896E-3	1.99E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-8.16631E-1	-7.97939E-1	-9.13134E0	-9.14197E0	5.22137E-3	9.32693E-2	2.7298E1	-3.26644E1	-3.26579E1	2.68052E1	1.73758E-7	2.51804E-3	2.51804E-3	6.31299E-3	1.99401E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-8.16393E-1	-7.97844E-1	-9.13129E0	-9.14207E0	5.29289E-3	9.28879E-2	2.73145E1	-3.26555E1	-3.26272E1	2.67891E1	1.73677E-7	2.52131E-3	2.52131E-3	6.32328E-3	1.98894E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.16274E-1	-7.98178E-1	-9.13136E0	-9.14202E0	5.24521E-3	9.30786E-2	2.73057E1	-3.26735E1	-3.26284E1	2.68154E1	1.73605E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.97903E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.16274E-1	-7.97963E-1	-9.13122E0	-9.14209E0	5.67436E-3	9.31501E-2	2.72877E1	-3.26567E1	-3.26098E1	2.6783E1	1.73605E-7	2.51443E-3	2.51443E-3	6.29645E-3	1.97903E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.15988E-1	-7.98273E-1	-9.1315E0	-9.14216E0	5.67436E-3	9.34362E-2	2.72666E1	-3.26651E1	-3.26398E1	2.68376E1	1.73605E-7	2.51417E-3	2.51417E-3	6.31278E-3	1.98661E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-8.16154E-1	-7.9844E-1	-9.13172E0	-9.14192E0	5.43594E-3	9.32932E-2	2.73045E1	-3.26897E1	-3.25852E1	2.6813E1	1.73681E-7	2.52139E-3	2.52139E-3	6.31858E-3	1.99401E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09402E0	-8.16154E-1	-7.98178E-1	-9.13124E0	-9.14171E0	5.14984E-3	9.33886E-2	2.72865E1	-3.26771E1	-3.26272E1	2.67583E1	1.73753E-7	2.51632E-3	2.51632E-3	6.32896E-3	1.9883E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.16202E-1	-7.98273E-1	-9.13131E0	-9.14199E0	5.43594E-3	9.31501E-2	2.72733E1	-3.26482E1	-3.25936E1	2.68124E1	1.73642E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.99977E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.16584E-1	-7.97844E-1	-9.13143E0	-9.14209E0	5.79357E-3	9.30071E-2	2.736E1	-3.26183E1	-3.2626E1	2.67577E1					
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.16107E-1	-7.98082E-1	-9.13126E0	-9.14197E0	5.34058E-3	9.31978E-2	2.73075E1	-3.26609E1	-3.26146E1	2.67842E1	1.73605E-7	2.51552E-3	2.51552E-3	6.32936E-3	1.9911E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09588E0	-8.16584E-1	-7.98416E-1	-9.13124E0	-9.14185E0	5.4121E-3	9.30071E-2	2.72823E1	-3.26867E1	-3.25828E1	2.68569E1	1.73605E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.00847E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09588E0	-8.16321E-1	-7.97892E-1	-9.13107E0	-9.1418E0	5.76973E-3	9.29594E-2	2.72985E1	-3.27059E1	-3.25894E1	2.67746E1	1.73605E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.99803E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.16727E-1	-7.97844E-1	-9.13134E0	-9.1418E0	5.34058E-3	9.32693E-2	2.73219E1	-3.26819E1	-3.26098E1	2.68274E1	1.73679E-7	2.50775E-3	2.50775E-3	6.32356E-3	2.01219E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.16226E-1	-7.97963E-1	-9.13086E0	-9.14211E0	5.36442E-3	9.31501E-2	2.74301E1	-3.27624E1	-3.26074E1	2.68022E1	1.73605E-7	2.51025E-3	2.51025E-3	6.30182E-3	1.99401E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.16345E-1	-7.97939E-1	-9.13105E0	-9.14202E0	5.07832E-3	9.3627E-2	2.73135E1	-3.26609E1	-3.25948E1	2.67728E1	1.73605E-7	2.5199E-3	2.5199E-3	6.28006E-3	1.99283E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09364E0	-8.16464E-1	-7.97915E-1	-9.13103E0	-9.1419E0	5.36442E-3	9.34124E-2	2.72774E1	-3.26856E1	-3.26372E1	2.68134E1	1.7368E-7	2.51552E-3	2.51552E-3	6.30192E-3	1.98419E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09456E0	-8.16154E-1	-7.98202E-1	-9.13103E0	-9.14214E0	5.55515E-3	9.3174E-2	2.73039E1	-3.27498E1	-3.26284E1	2.681E1	1.73605E-7	2.52025E-3	2.52025E-3	6.30212E-3	1.97897E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-8.1594E-1	-7.98059E-1	-9.13103E0	-9.14223E0	5.60284E-3	9.29594E-2	2.72859E1	-3.26645E1	-3.26014E1	2.681E1	1.73605E-7	2.5188E-3	2.5188E-3	6.32936E-3	1.98592E-1