[Scan]
initial_time=2016-02-16T01:05:12
final_time=2016-02-16T01:05:32
ip_count=19
run=1030
dataset=4
scan=300
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09565E0
qbias_imon=-1.08769E-4
ql1_vset=
ql1_vmon=-8.16965E-1
ql1_imon=6.15025E-10
ql2_vset=
ql2_vmon=-7.97558E-1
ql2_imon=2.94507E-10
ql3_vset=
ql3_vmon=-9.13134E0
ql3_imon=5.3823E-10
ql4_vset=
ql4_vmon=-9.14233E0
ql4_imon=5.07367E-10
mult1=-9.51162E-9
mult2=-2.68867E-9
rf_tmon=-5.59391E-3
rf_agc=3.25465E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.65052E-3
ql5_imon=3.90208E-10
bslens_vset=-6.2E0
bslens_vmon=-6.60966E0
bslens_imon=2.61706E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20037E1
lens5a_imon=2.04183E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12459E2
lens4a_imon=2.04913E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53953E1
cs_ef1b_imon=3.07244E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.02103E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0467E1
cs_ea1_imon=2.20261E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40801E0
lens1_imon=2.44763E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6426E1
os_ef1alow_imon=2.97765E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03732E1
cs_ea2_imon=1.57968E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84364E1
cs_ef1a_imon=3.01982E-5
olens2_vset=9.7E-1
olens2_vmon=9.70626E-1
olens2_imon=4.05407E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.10763E1
os_restr1_imon=2.85296E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15798E1
os_ea1_imon=1.88069E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64242E1
os_ef1bup_imon=3.111E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19862E0
cs_ionrep_imon=1.2765E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93218E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01359E1
cs_anode1_imon=3.23318E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=6.84452E-10
tplens_vset=1.4E-1
tplens_vmon=1.55251E0
tplens_imon=-7.94438E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26386E1
iondef3_imon=1.49568E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26651E1
iondef2_imon=1.63051E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02938E2
lens6_imon=2.98342E-4
ql6_vset=1.0E-1
ql6_vmon=9.30309E-2
ql6_imon=3.49367E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24669E0
ionrepsh_imon=2.0184E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33303E1
lens5b_imon=2.20442E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75036E1
cs_ef2b_imon=3.15461E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.8537E-1
os_ea2_imon=-5.51693E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06077E2
lens4b_imon=2.00666E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70831E1
cs_ef2a_imon=3.16074E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.69186E0
os_ef2alow_imon=-2.29875E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.51173E-1
os_ef2bup_imon=-5.618E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10415E1
os_restr2_imon=2.89008E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2308E2
cs_ionfoca_imon=6.30361E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01569E1
cs_anode2_imon=2.29038E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73027E1
iondef1_imon=1.09157E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67854E1
iondef4_imon=1.11765E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.8858E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=2.38812E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.08269E0
cs_ionaccel_imon=-2.32037E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02114E2
cs_ionfocb_imon=1.4754E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55883E1
einzel_imon=7.52927E-6
window_vset=0.0E0
window_vmon=1.31448E-1
window_imon=-7.70669E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82591E2
mask1_imon=2.38929E-4
mask2_vset=0.0E0
mask2_vmon=-1.8671E1
mask2_imon=-3.6342E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92656E3
multa_neg_imon=7.70365E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93736E3
defgrida_imon=6.74473E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.5198E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.60307E0
defgridb_imon=6.30853E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3397E1
os_fil1_imon=5.79735E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.04672E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66274E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30778E1
cs_fil1_imon=1.00944E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61765E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66582E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.17689E-2
os_fil2_imon=-2.35362E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.01958E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.86932E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.2771E-1
cs_fil2_imon=-2.85217E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.93839E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.224E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=1.99283E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51225E-3
foreline_cvt_pmon=2.51225E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.31662E-1
res40_imon=-2.84655E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=199
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09426E0	-8.16727E-1	-7.97892E-1	-9.1315E0	-9.14209E0	5.84126E-3	9.3174E-2	2.73171E1	-3.26789E1	-3.25966E1	2.67932E1	1.73605E-7	2.51248E-3	2.51248E-3	6.31299E-3	1.98696E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0941E0	-8.16536E-1	-7.98225E-1	-9.13117E0	-9.14195E0	5.74589E-3	9.28879E-2	2.73069E1	-3.26425E1	-3.26615E1	2.68593E1	1.73605E-7	2.51203E-3	2.51203E-3	6.31817E-3	1.9917E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.16512E-1	-7.98273E-1	-9.13157E0	-9.14216E0	5.34058E-3	9.27925E-2	2.73184E1	-3.26834E1	-3.26179E1	2.67509E1	1.73683E-7	2.51952E-3	2.51952E-3	6.33021E-3	1.99163E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.16655E-1	-7.97915E-1	-9.13098E0	-9.1423E0	5.60284E-3	9.29594E-2	2.73075E1	-3.26407E1	-3.26223E1	2.682E1	1.73605E-7	2.51603E-3	2.51603E-3	6.32858E-3	1.99896E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.1687E-1	-7.9782E-1	-9.13115E0	-9.14187E0	5.45979E-3	9.28164E-2	2.7285E1	-3.26531E1	-3.26307E1	2.67688E1	1.7368E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.01022E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.1656E-1	-7.98273E-1	-9.131E0	-9.14221E0	5.55515E-3	9.2721E-2	2.72949E1	-3.26927E1	-3.2599E1	2.67728E1	1.73605E-7	2.51225E-3	2.51225E-3	6.32386E-3	1.98764E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.16727E-1	-7.97892E-1	-9.1311E0	-9.14211E0	5.34058E-3	9.31263E-2	2.72709E1	-3.26107E1	-3.2636E1	2.68088E1	1.73605E-7	2.51203E-3	2.51203E-3	6.32356E-3	1.97815E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.16751E-1	-7.97939E-1	-9.13112E0	-9.14218E0	5.38826E-3	9.30786E-2	2.73339E1	-3.2632E1	-3.26224E1	2.67956E1	1.73605E-7	2.51417E-3	2.51417E-3	6.32356E-3	1.96805E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-8.16607E-1	-7.97725E-1	-9.13105E0	-9.14202E0	5.81741E-3	9.27687E-2	2.72976E1	-3.26397E1	-3.2611E1	2.68194E1	1.73605E-7	2.51552E-3	2.51552E-3	6.30192E-3	1.98592E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-8.16774E-1	-7.97939E-1	-9.13103E0	-9.14214E0	5.45979E-3	9.29832E-2	2.73486E1	-3.26961E1	-3.25907E1	2.67902E1	1.73683E-7	2.51611E-3	2.51611E-3	6.3074E-3	1.98625E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-8.16512E-1	-7.98059E-1	-9.13086E0	-9.14216E0	5.43594E-3	9.29594E-2	2.73411E1	-3.26434E1	-3.26567E1	2.67193E1	1.73605E-7	2.51919E-3	2.51919E-3	6.29157E-3	1.98229E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-8.16536E-1	-7.9782E-1	-9.13112E0	-9.1423E0	5.24521E-3	9.30786E-2	2.72962E1	-3.26437E1	-3.26148E1	2.67868E1	1.73605E-7	2.51662E-3	2.51662E-3	6.32936E-3	1.98937E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.16512E-1	-7.97915E-1	-9.13105E0	-9.14221E0	5.65052E-3	9.27687E-2	2.73177E1	-3.27125E1	-3.26218E1	2.67938E1	1.73755E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.99283E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09572E0	-8.16488E-1	-7.9813E-1	-9.13131E0	-9.14207E0	5.34058E-3	9.29117E-2	2.7324E1	-3.26691E1	-3.26207E1	2.67956E1	1.73605E-7	2.51847E-3	2.51847E-3	6.31817E-3	1.99E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.1656E-1	-7.9813E-1	-9.13124E0	-9.14199E0	5.31673E-3	9.30309E-2	2.73225E1	-3.26561E1	-3.2614E1	2.67656E1	1.73679E-7	2.51632E-3	2.51632E-3	6.31278E-3	1.97478E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.16464E-1	-7.97796E-1	-9.13134E0	-9.14226E0	5.22137E-3	9.3174E-2	2.73514E1	-3.27005E1	-3.262E1	2.68268E1	1.73605E-7	2.52362E-3	2.52362E-3	6.30182E-3	1.97643E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09572E0	-8.16917E-1	-7.97844E-1	-9.13124E0	-9.1424E0	5.65052E-3	9.29594E-2	2.73339E1	-3.26873E1	-3.26765E1	2.6801E1	1.73605E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.97559E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09603E0	-8.16631E-1	-7.98082E-1	-9.1315E0	-9.1423E0	5.4121E-3	9.31978E-2	2.73234E1	-3.26697E1	-3.26437E1	2.68094E1	1.73755E-7	2.51443E-3	2.51443E-3	6.33486E-3	1.9963E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09603E0	-8.16941E-1	-7.98059E-1	-9.13126E0	-9.1423E0	5.93662E-3	9.31501E-2	2.72803E1	-3.26649E1	-3.26667E1	2.67866E1	1.73605E-7	2.51287E-3	2.51287E-3	6.30212E-3	1.99896E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09565E0	-8.16965E-1	-7.97558E-1	-9.13134E0	-9.14233E0	5.65052E-3	9.30309E-2	2.73027E1	-3.26651E1	-3.26386E1	2.67854E1	1.73605E-7	2.51225E-3	2.51225E-3	6.31288E-3	1.99283E-1