[Scan]
initial_time=2016-02-16T01:06:05
final_time=2016-02-16T01:06:24
ip_count=19
run=1030
dataset=4
scan=302
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09433E0
qbias_imon=-1.0877E-4
ql1_vset=
ql1_vmon=-8.16607E-1
ql1_imon=6.16789E-10
ql2_vset=
ql2_vmon=-7.98225E-1
ql2_imon=2.76005E-10
ql3_vset=
ql3_vmon=-9.13095E0
ql3_imon=5.51844E-10
ql4_vset=
ql4_vmon=-9.1424E0
ql4_imon=4.79901E-10
mult1=-9.95712E-9
mult2=-2.75055E-9
rf_tmon=-4.69868E-3
rf_agc=3.26066E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.53131E-3
ql5_imon=3.46506E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69571E0
bslens_imon=2.71315E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1996E1
lens5a_imon=1.99961E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12523E2
lens4a_imon=2.05228E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53772E1
cs_ef1b_imon=3.04289E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04584E2
lens23_imon=1.02032E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05E1
cs_ea1_imon=2.20454E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36843E0
lens1_imon=2.66006E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64512E1
os_ef1alow_imon=2.98991E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03897E1
cs_ea2_imon=1.56992E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83541E1
cs_ef1a_imon=3.00072E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=4.24314E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11232E1
os_restr1_imon=2.87566E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15058E1
os_ea1_imon=1.89236E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63497E1
os_ef1bup_imon=3.09623E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26921E0
cs_ionrep_imon=1.25633E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91877E2
cs_nozzle_imon=1.93466E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01893E1
cs_anode1_imon=3.25768E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20527E0
olens4_imon=6.71458E-10
tplens_vset=1.4E-1
tplens_vmon=1.5907E0
tplens_imon=-2.77651E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26567E1
iondef3_imon=1.49666E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26807E1
iondef2_imon=1.57771E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02949E2
lens6_imon=2.98498E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=3.65472E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28749E0
ionrepsh_imon=2.02297E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33687E1
lens5b_imon=2.20489E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74417E1
cs_ef2b_imon=3.12794E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.67552E-1
os_ea2_imon=-5.32488E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06125E2
lens4b_imon=2.0074E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71522E1
cs_ef2a_imon=3.17912E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60056E0
os_ef2alow_imon=-2.48255E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.24143E-1
os_ef2bup_imon=-4.89721E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10637E1
os_restr2_imon=2.88683E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23105E2
cs_ionfoca_imon=6.31273E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01689E1
cs_anode2_imon=2.29614E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72955E1
iondef1_imon=1.09387E-5
iondef4_vset=2.691E1
iondef4_vmon=2.681E1
iondef4_imon=1.12197E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.89102E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81975E-1
olens1_imon=2.74611E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11693E0
cs_ionaccel_imon=-2.01404E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47414E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56573E1
einzel_imon=7.54368E-6
window_vset=0.0E0
window_vmon=2.13138E-1
window_imon=-7.45441E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8264E2
mask1_imon=2.38933E-4
mask2_vset=0.0E0
mask2_vmon=-1.86572E1
mask2_imon=-4.49916E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.40995E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93739E3
defgrida_imon=7.07016E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50113E3
multb_neg_imon=7.25067E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2963E0
defgridb_imon=6.02958E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33949E1
os_fil1_imon=5.19668E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.67141E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66361E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30728E1
cs_fil1_imon=1.00909E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62564E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66217E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.25591E-2
os_fil2_imon=-2.43772E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.93839E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.83438E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28875E-1
cs_fil2_imon=-2.6059E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17226E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22408E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.00325E-1
chamber_ion_pmon=1.7368E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.3947E-1
res40_imon=-2.50418E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.16369E-1	-7.98082E-1	-9.13153E0	-9.14209E0	5.126E-3	9.32932E-2	2.73157E1	-3.26419E1	-3.26402E1	2.68142E1	1.73605E-7	2.51417E-3	2.51417E-3	6.30202E-3	1.9934E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.16393E-1	-7.9782E-1	-9.13124E0	-9.14221E0	5.19753E-3	9.31025E-2	2.73092E1	-3.26697E1	-3.26201E1	2.68099E1	1.73605E-7	2.51417E-3	2.51417E-3	6.31817E-3	1.98661E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.16154E-1	-7.97963E-1	-9.13129E0	-9.14216E0	4.79221E-3	9.28402E-2	2.73219E1	-3.26709E1	-3.26553E1	2.67876E1	1.7368E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.98247E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-8.16417E-1	-7.98249E-1	-9.1315E0	-9.14216E0	5.22137E-3	9.28164E-2	2.72811E1	-3.27432E1	-3.25737E1	2.68148E1	1.73683E-7	2.52179E-3	2.52179E-3	6.33592E-3	1.98625E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-8.16154E-1	-7.97915E-1	-9.13191E0	-9.14214E0	4.81606E-3	9.28879E-2	2.73279E1	-3.26404E1	-3.26338E1	2.67896E1	1.73753E-7	2.51632E-3	2.51632E-3	6.3074E-3	1.98491E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.16154E-1	-7.98011E-1	-9.13177E0	-9.14197E0	5.17368E-3	9.3174E-2	2.73003E1	-3.26573E1	-3.26464E1	2.67974E1	1.73605E-7	2.51334E-3	2.51334E-3	6.3074E-3	1.98764E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09402E0	-8.16178E-1	-7.98035E-1	-9.13165E0	-9.14195E0	5.24521E-3	9.30786E-2	2.7233E1	-3.26807E1	-3.25569E1	2.6801E1	1.7368E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.97903E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.16536E-1	-7.97749E-1	-9.13131E0	-9.14216E0	5.14984E-3	9.3317E-2	2.72787E1	-3.26338E1	-3.26446E1	2.68022E1	1.73755E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.00325E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.16703E-1	-7.98321E-1	-9.13107E0	-9.14211E0	5.19753E-3	9.29832E-2	2.73448E1	-3.26543E1	-3.26284E1	2.68106E1	1.73605E-7	2.52209E-3	2.52209E-3	6.33486E-3	2.00847E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.16274E-1	-7.97772E-1	-9.13169E0	-9.14214E0	5.24521E-3	9.29832E-2	2.73246E1	-3.27275E1	-3.26207E1	2.67668E1	1.73605E-7	2.52318E-3	2.52318E-3	6.29645E-3	1.99977E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.1625E-1	-7.98106E-1	-9.13131E0	-9.1419E0	5.14984E-3	9.30786E-2	2.73538E1	-3.26839E1	-3.26098E1	2.67966E1	1.73605E-7	2.50668E-3	2.50668E-3	6.31278E-3	1.98661E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.16584E-1	-7.97868E-1	-9.13134E0	-9.14195E0	5.29289E-3	9.33886E-2	2.73108E1	-3.26725E1	-3.26018E1	2.6797E1	1.73827E-7	2.51954E-3	2.51954E-3	6.30202E-3	2.00021E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-8.16369E-1	-7.98011E-1	-9.13153E0	-9.14192E0	5.26905E-3	9.3317E-2	2.72793E1	-3.26993E1	-3.26362E1	2.67926E1	1.73684E-7	2.51874E-3	2.51874E-3	6.3074E-3	1.991E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09572E0	-8.16536E-1	-7.98416E-1	-9.1316E0	-9.14202E0	5.126E-3	9.29117E-2	2.73313E1	-3.26738E1	-3.26067E1	2.67723E1	1.73679E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.9917E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09619E0	-8.1687E-1	-7.98273E-1	-9.13155E0	-9.14214E0	4.95911E-3	9.30071E-2	2.73159E1	-3.26775E1	-3.26114E1	2.67857E1	1.73819E-7	2.51886E-3	2.51886E-3	6.3126E-3	1.99776E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.16941E-1	-7.9782E-1	-9.13129E0	-9.14207E0	5.17368E-3	9.3174E-2	2.73281E1	-3.26903E1	-3.25818E1	2.67836E1	1.73605E-7	2.51411E-3	2.51411E-3	6.31902E-3	1.99283E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-8.16655E-1	-7.98178E-1	-9.13131E0	-9.14207E0	4.91142E-3	9.32932E-2	2.72979E1	-3.26771E1	-3.2617E1	2.68058E1	1.73605E-7	2.51443E-3	2.51443E-3	6.29098E-3	1.99977E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.16751E-1	-7.97939E-1	-9.13131E0	-9.14192E0	5.38826E-3	9.30309E-2	2.73452E1	-3.26549E1	-3.2652E1	2.68012E1	1.73605E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.00192E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.16607E-1	-7.98106E-1	-9.13084E0	-9.14211E0	5.38826E-3	9.3174E-2	2.73216E1	-3.26856E1	-3.26071E1	2.67824E1	1.73605E-7	2.51525E-3	2.51525E-3	6.31817E-3	1.9883E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09433E0	-8.16607E-1	-7.98225E-1	-9.13095E0	-9.1424E0	5.53131E-3	9.32455E-2	2.72955E1	-3.26807E1	-3.26567E1	2.681E1	1.7368E-7	2.51334E-3	2.51334E-3	6.32936E-3	2.00325E-1