[Scan]
initial_time=2016-02-16T01:06:31
final_time=2016-02-16T01:06:51
ip_count=19
run=1030
dataset=4
scan=303
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09387E0
qbias_imon=-1.08713E-4
ql1_vset=
ql1_vmon=-8.16417E-1
ql1_imon=6.20449E-10
ql2_vset=
ql2_vmon=-7.98178E-1
ql2_imon=2.90394E-10
ql3_vset=
ql3_vmon=-9.1311E0
ql3_imon=5.30946E-10
ql4_vset=
ql4_vmon=-9.14226E0
ql4_imon=4.90379E-10
mult1=-9.78855E-9
mult2=-2.58687E-9
rf_tmon=-3.57514E-3
rf_agc=3.4349E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.38826E-3
ql5_imon=3.56424E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66974E0
bslens_imon=2.68556E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20127E1
lens5a_imon=1.98163E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.05183E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53754E1
cs_ef1b_imon=3.04829E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04599E2
lens23_imon=1.02063E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05114E1
cs_ea1_imon=2.19829E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40861E0
lens1_imon=2.69637E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64789E1
os_ef1alow_imon=2.96216E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03955E1
cs_ea2_imon=1.56994E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.847E1
cs_ef1a_imon=3.04469E-5
olens2_vset=9.7E-1
olens2_vmon=9.70554E-1
olens2_imon=3.74353E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1164E1
os_restr1_imon=2.86954E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14819E1
os_ea1_imon=1.8879E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63563E1
os_ef1bup_imon=3.0883E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25991E0
cs_ionrep_imon=1.27794E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.919E2
cs_nozzle_imon=1.93571E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01683E1
cs_anode1_imon=3.26633E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20558E0
olens4_imon=6.96325E-10
tplens_vset=1.4E-1
tplens_vmon=1.56993E0
tplens_imon=-3.4621E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26176E1
iondef3_imon=1.50505E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26164E1
iondef2_imon=1.5804E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02963E2
lens6_imon=2.98674E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=3.53372E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28514E0
ionrepsh_imon=1.98812E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34198E1
lens5b_imon=2.21163E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74615E1
cs_ef2b_imon=3.13263E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.63139E-1
os_ea2_imon=-6.77866E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06104E2
lens4b_imon=2.00857E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71102E1
cs_ef2a_imon=3.18813E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62278E0
os_ef2alow_imon=-2.47534E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.64988E-1
os_ef2bup_imon=-5.08822E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10625E1
os_restr2_imon=2.88107E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.30253E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01941E1
cs_anode2_imon=2.28497E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72829E1
iondef1_imon=1.10094E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67776E1
iondef4_imon=1.10756E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=1.91466E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=2.684E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.08269E0
cs_ionaccel_imon=-1.93475E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02047E2
cs_ionfocb_imon=1.47305E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56147E1
einzel_imon=7.67703E-6
window_vset=0.0E0
window_vmon=1.97521E-1
window_imon=-9.25639E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39196E-4
mask2_vset=0.0E0
mask2_vmon=-1.8641E1
mask2_imon=-4.67935E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.53061E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93735E3
defgrida_imon=6.92498E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=6.99347E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.51886E0
defgridb_imon=6.32295E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33975E1
os_fil1_imon=5.2087E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.55128E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66462E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30785E1
cs_fil1_imon=1.00813E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63165E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66463E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.04791E-2
os_fil2_imon=-2.30557E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.23872E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.58446E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31464E-1
cs_fil2_imon=-2.39567E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25635E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22266E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=1.9917E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51096E-3
foreline_cvt_pmon=2.51096E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.64097E-1
res40_imon=-2.54382E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=146
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09333E0	-8.16464E-1	-7.97653E-1	-9.13081E0	-9.14195E0	5.14984E-3	9.29832E-2	2.7285E1	-3.26543E1	-3.26419E1	2.67873E1	1.73831E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.00847E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09441E0	-8.16107E-1	-7.97749E-1	-9.131E0	-9.14197E0	5.43594E-3	9.32693E-2	2.72843E1	-3.26529E1	-3.26278E1	2.67898E1	1.73679E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.00021E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09356E0	-8.16846E-1	-7.98035E-1	-9.13131E0	-9.14202E0	5.29289E-3	9.31263E-2	2.73159E1	-3.26471E1	-3.26408E1	2.68236E1	1.73681E-7	2.52139E-3	2.52139E-3	6.31299E-3	1.99048E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-8.16631E-1	-7.97749E-1	-9.13131E0	-9.14192E0	5.05447E-3	9.34839E-2	2.73171E1	-3.27017E1	-3.26206E1	2.68052E1	1.73605E-7	2.51575E-3	2.51575E-3	6.3126E-3	1.9994E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09426E0	-8.16965E-1	-7.97653E-1	-9.13119E0	-9.14209E0	5.14984E-3	9.3317E-2	2.73511E1	-3.26472E1	-3.26502E1	2.67752E1	1.7368E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.00151E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.17013E-1	-7.98011E-1	-9.13124E0	-9.14228E0	5.24521E-3	9.31263E-2	2.73123E1	-3.26903E1	-3.26164E1	2.6819E1	1.73679E-7	2.5131E-3	2.5131E-3	6.32896E-3	2.01391E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.16846E-1	-7.9782E-1	-9.13124E0	-9.14195E0	5.53131E-3	9.32217E-2	2.72883E1	-3.26254E1	-3.2611E1	2.68064E1	1.73605E-7	2.5199E-3	2.5199E-3	6.28006E-3	1.98592E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.16274E-1	-7.98035E-1	-9.13107E0	-9.14235E0	5.48363E-3	9.3174E-2	2.72997E1	-3.26386E1	-3.2605E1	2.68142E1	1.73605E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.98592E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.16298E-1	-7.97844E-1	-9.13093E0	-9.14226E0	5.34058E-3	9.30309E-2	2.73016E1	-3.26502E1	-3.26248E1	2.68024E1	1.73605E-7	2.51334E-3	2.51334E-3	6.32386E-3	1.98764E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-8.16107E-1	-7.98273E-1	-9.13124E0	-9.14202E0	5.19753E-3	9.32693E-2	2.73369E1	-3.26981E1	-3.26549E1	2.67842E1	1.73605E-7	2.51552E-3	2.51552E-3	6.30192E-3	1.98937E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09418E0	-8.16178E-1	-7.98202E-1	-9.13103E0	-9.14218E0	5.65052E-3	9.31263E-2	2.72925E1	-3.26254E1	-3.26434E1	2.67854E1	1.73679E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.00021E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-8.16083E-1	-7.9844E-1	-9.13134E0	-9.14218E0	5.57899E-3	9.31025E-2	2.73129E1	-3.26494E1	-3.2608E1	2.68118E1	1.73605E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.00325E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.16393E-1	-7.98106E-1	-9.13103E0	-9.14211E0	5.45979E-3	9.31978E-2	2.72721E1	-3.26762E1	-3.26254E1	2.68352E1	1.73605E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.99803E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09426E0	-8.16393E-1	-7.98345E-1	-9.13098E0	-9.14185E0	5.17368E-3	9.32932E-2	2.73213E1	-3.26717E1	-3.2641E1	2.67397E1	1.7368E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.00499E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.16846E-1	-7.97987E-1	-9.13119E0	-9.14216E0	5.50747E-3	9.30786E-2	2.72853E1	-3.26987E1	-3.2596E1	2.68106E1	1.73679E-7	2.51632E-3	2.51632E-3	6.29128E-3	1.9968E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09364E0	-8.16345E-1	-7.97868E-1	-9.13112E0	-9.14242E0	5.43594E-3	9.30309E-2	2.73173E1	-3.26548E1	-3.26303E1	2.681E1	1.73605E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.00673E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09309E0	-8.16393E-1	-7.9751E-1	-9.13112E0	-9.14202E0	5.55515E-3	9.31501E-2	2.73033E1	-3.26615E1	-3.25918E1	2.67908E1	1.73681E-7	2.51804E-3	2.51804E-3	6.34661E-3	1.99754E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0934E0	-8.16441E-1	-7.97677E-1	-9.13107E0	-9.14209E0	5.38826E-3	9.32932E-2	2.73163E1	-3.26567E1	-3.26225E1	2.67914E1	1.73605E-7	2.51225E-3	2.51225E-3	6.30192E-3	2.00673E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09325E0	-8.16822E-1	-7.97558E-1	-9.13112E0	-9.14252E0	5.34058E-3	9.30071E-2	2.73004E1	-3.26885E1	-3.259E1	2.67764E1	1.73605E-7	2.51417E-3	2.51417E-3	6.30202E-3	1.9883E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09387E0	-8.16417E-1	-7.98178E-1	-9.1311E0	-9.14226E0	5.38826E-3	9.31025E-2	2.72829E1	-3.26164E1	-3.26176E1	2.67776E1	1.73605E-7	2.51096E-3	2.51096E-3	6.32896E-3	1.9917E-1