[Scan]
initial_time=2016-02-16T01:06:58
final_time=2016-02-16T01:07:17
ip_count=19
run=1030
dataset=4
scan=304
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08764E-4
ql1_vset=
ql1_vmon=-8.16154E-1
ql1_imon=6.19948E-10
ql2_vset=
ql2_vmon=-7.97582E-1
ql2_imon=2.80392E-10
ql3_vset=
ql3_vmon=-9.1311E0
ql3_imon=5.54383E-10
ql4_vset=
ql4_vmon=-9.14233E0
ql4_imon=5.20051E-10
mult1=-8.98183E-9
mult2=-2.75055E-9
rf_tmon=-7.09597E-3
rf_agc=3.11285E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=3.74103E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64911E0
bslens_imon=2.53264E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19807E1
lens5a_imon=1.97342E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12516E2
lens4a_imon=2.05181E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53459E1
cs_ef1b_imon=3.05002E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04606E2
lens23_imon=1.0233E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05018E1
cs_ea1_imon=2.20666E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36843E0
lens1_imon=2.67068E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64594E1
os_ef1alow_imon=2.99092E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04074E1
cs_ea2_imon=1.57488E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84391E1
cs_ef1a_imon=3.01109E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=3.8265E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11353E1
os_restr1_imon=2.8876E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15524E1
os_ea1_imon=1.90192E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63243E1
os_ef1bup_imon=3.0992E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24797E0
cs_ionrep_imon=1.26058E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.9347E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01886E1
cs_anode1_imon=3.26197E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2052E0
olens4_imon=6.88565E-10
tplens_vset=1.4E-1
tplens_vmon=1.6202E0
tplens_imon=-9.36015E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.25858E1
iondef3_imon=1.49418E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26284E1
iondef2_imon=1.60815E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02972E2
lens6_imon=2.98332E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=3.5975E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30047E0
ionrepsh_imon=2.00669E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33764E1
lens5b_imon=2.16242E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74708E1
cs_ef2b_imon=3.11442E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.74631E-1
os_ea2_imon=-5.67882E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06148E2
lens4b_imon=2.0058E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70839E1
cs_ef2a_imon=3.17952E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63634E0
os_ef2alow_imon=-2.59133E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.48082E-1
os_ef2bup_imon=-5.1567E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10829E1
os_restr2_imon=2.86531E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23048E2
cs_ionfoca_imon=6.29362E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01697E1
cs_anode2_imon=2.28642E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73478E1
iondef1_imon=1.10485E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6795E1
iondef4_imon=1.09291E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=1.90439E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=2.89333E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09653E0
cs_ionaccel_imon=-1.97918E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47396E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56346E1
einzel_imon=7.79045E-6
window_vset=0.0E0
window_vmon=2.10146E-1
window_imon=-9.70721E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82609E2
mask1_imon=2.39332E-4
mask2_vset=0.0E0
mask2_vmon=-1.86462E1
mask2_imon=-5.49647E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9264E3
multa_neg_imon=7.47719E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93732E3
defgrida_imon=6.76223E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.57984E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34059E0
defgridb_imon=6.69145E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33924E1
os_fil1_imon=4.18517E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.36387E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66343E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30745E1
cs_fil1_imon=1.00762E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62578E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66585E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.14195E-2
os_fil2_imon=-2.37863E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.18012E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.84703E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30478E-1
cs_fil2_imon=-2.27248E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.53141E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22388E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31798E-3
inlet_lpb_pmon=1.98727E-1
chamber_ion_pmon=1.73677E-7
chamber_cvt_pmon=2.51603E-3
foreline_cvt_pmon=2.51603E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.66876E-1
res40_imon=-2.64086E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.16512E-1	-7.97606E-1	-9.13119E0	-9.14221E0	5.38826E-3	9.31501E-2	2.73128E1	-3.26585E1	-3.26484E1	2.67864E1	1.73827E-7	2.50989E-3	2.50989E-3	6.32896E-3	1.99E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0941E0	-8.16059E-1	-7.97725E-1	-9.13122E0	-9.14221E0	5.53131E-3	9.30786E-2	2.72861E1	-3.26621E1	-3.26278E1	2.68001E1	1.73755E-7	2.51389E-3	2.51389E-3	6.31563E-3	1.98937E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09387E0	-8.16441E-1	-7.97606E-1	-9.13119E0	-9.14218E0	5.60284E-3	9.30309E-2	2.73134E1	-3.26561E1	-3.26437E1	2.67984E1	1.73679E-7	2.51417E-3	2.51417E-3	6.31278E-3	1.98661E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0941E0	-8.16178E-1	-7.98082E-1	-9.13088E0	-9.14204E0	4.95911E-3	9.29356E-2	2.73116E1	-3.2652E1	-3.26372E1	2.67908E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.16298E-1	-7.97963E-1	-9.13119E0	-9.14216E0	5.45979E-3	9.31501E-2	2.72925E1	-3.26639E1	-3.26008E1	2.68094E1	1.73679E-7	2.51484E-3	2.51484E-3	6.31555E-3	1.99397E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0941E0	-8.16321E-1	-7.98059E-1	-9.1311E0	-9.14237E0	5.45979E-3	9.28164E-2	2.7304E1	-3.26789E1	-3.25924E1	2.68121E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.16751E-1	-7.97844E-1	-9.13119E0	-9.14218E0	5.38826E-3	9.30309E-2	2.72994E1	-3.26807E1	-3.26184E1	2.68056E1	1.73605E-7	2.50955E-3	2.50955E-3	6.323E-3	1.98955E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-8.16607E-1	-7.97844E-1	-9.13143E0	-9.14207E0	5.62668E-3	9.30786E-2	2.73003E1	-3.26633E1	-3.26146E1	2.68017E1	1.73605E-7	2.5199E-3	2.5199E-3	6.32483E-3	1.99466E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.1625E-1	-7.98011E-1	-9.13124E0	-9.14218E0	5.53131E-3	9.3317E-2	2.7308E1	-3.26797E1	-3.26012E1	2.67964E1	1.73605E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.9911E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.16035E-1	-7.98035E-1	-9.13134E0	-9.14204E0	5.4121E-3	9.30309E-2	2.73424E1	-3.26591E1	-3.26801E1	2.67914E1	1.73605E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.00021E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.16321E-1	-7.9782E-1	-9.13124E0	-9.14209E0	5.31673E-3	9.28164E-2	2.73051E1	-3.26464E1	-3.26368E1	2.68082E1	1.7368E-7	2.51389E-3	2.51389E-3	6.31014E-3	2.0076E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09426E0	-8.16393E-1	-7.97915E-1	-9.13134E0	-9.1418E0	5.4121E-3	9.28164E-2	2.73175E1	-3.26962E1	-3.26166E1	2.67746E1					
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09371E0	-8.16464E-1	-7.98059E-1	-9.13143E0	-9.1419E0	5.50747E-3	9.32217E-2	2.73562E1	-3.26705E1	-3.26368E1	2.67962E1	1.73605E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.00499E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09402E0	-8.16393E-1	-7.97844E-1	-9.13143E0	-9.14199E0	5.50747E-3	9.28402E-2	2.73263E1	-3.26744E1	-3.26219E1	2.67584E1	1.73605E-7	2.52384E-3	2.52384E-3	6.31278E-3	1.9917E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-8.16441E-1	-7.97725E-1	-9.13129E0	-9.14223E0	5.67436E-3	9.32217E-2	2.73111E1	-3.26549E1	-3.26675E1	2.67974E1	1.73755E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.01022E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-8.16107E-1	-7.97892E-1	-9.13136E0	-9.14218E0	5.45979E-3	9.32932E-2	2.73454E1	-3.26741E1	-3.25918E1	2.68352E1	1.73827E-7	2.5131E-3	2.5131E-3	6.31817E-3	1.9934E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.16417E-1	-7.97725E-1	-9.1315E0	-9.14223E0	5.8651E-3	9.32217E-2	2.73305E1	-3.26638E1	-3.2629E1	2.67716E1	1.73755E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.98592E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09464E0	-8.16345E-1	-7.97987E-1	-9.13124E0	-9.14228E0	5.55515E-3	9.35555E-2	2.73316E1	-3.26514E1	-3.26048E1	2.67984E1	1.73679E-7	2.51632E-3	2.51632E-3	6.31278E-3	1.98491E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09456E0	-8.16369E-1	-7.97701E-1	-9.13107E0	-9.14235E0	5.45979E-3	9.31025E-2	2.72909E1	-3.2682E1	-3.26313E1	2.67956E1	1.7368E-7	2.51334E-3	2.51334E-3	6.30192E-3	1.97903E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.16154E-1	-7.97582E-1	-9.1311E0	-9.14233E0	5.29289E-3	9.3174E-2	2.73478E1	-3.26284E1	-3.25858E1	2.6795E1	1.73677E-7	2.51603E-3	2.51603E-3	6.31798E-3	1.98727E-1