[Scan]
initial_time=2016-02-16T01:07:25
final_time=2016-02-16T01:07:44
ip_count=19
run=1030
dataset=4
scan=305
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08736E-4
ql1_vset=
ql1_vmon=-8.16154E-1
ql1_imon=6.25181E-10
ql2_vset=
ql2_vmon=-7.97987E-1
ql2_imon=2.64835E-10
ql3_vset=
ql3_vmon=-9.13143E0
ql3_imon=5.44858E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=5.04899E-10
mult1=-9.17448E-9
mult2=-2.87031E-9
rf_tmon=-5.11926E-3
rf_agc=3.30091E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=3.76105E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65678E0
bslens_imon=2.59635E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20113E1
lens5a_imon=1.97554E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12479E2
lens4a_imon=2.05157E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53778E1
cs_ef1b_imon=3.05442E-5
lens23_vset=-2.05E2
lens23_vmon=-2.046E2
lens23_imon=1.02057E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04498E1
cs_ea1_imon=2.19852E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40913E0
lens1_imon=2.6282E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64446E1
os_ef1alow_imon=2.9863E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04068E1
cs_ea2_imon=1.55931E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8443E1
cs_ef1a_imon=3.01081E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=3.89647E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11274E1
os_restr1_imon=2.8872E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15146E1
os_ea1_imon=1.88033E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63725E1
os_ef1bup_imon=3.08217E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25328E0
cs_ionrep_imon=1.26801E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91902E2
cs_nozzle_imon=1.93385E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01515E1
cs_anode1_imon=3.26201E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=7.21991E-10
tplens_vset=1.4E-1
tplens_vmon=1.61076E0
tplens_imon=-2.13941E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25852E1
iondef3_imon=1.49701E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26837E1
iondef2_imon=1.58974E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02985E2
lens6_imon=2.98413E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=3.53694E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26095E0
ionrepsh_imon=1.99147E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3423E1
lens5b_imon=2.18153E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74495E1
cs_ef2b_imon=3.1301E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.77581E-1
os_ea2_imon=-3.76754E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06106E2
lens4b_imon=2.00577E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71029E1
cs_ef2a_imon=3.17948E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62999E0
os_ef2alow_imon=-2.47534E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.55978E-1
os_ef2bup_imon=-5.18553E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10769E1
os_restr2_imon=2.88287E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23105E2
cs_ionfoca_imon=6.30955E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01767E1
cs_anode2_imon=2.29182E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73387E1
iondef1_imon=1.08503E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68178E1
iondef4_imon=1.08449E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.90715E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=2.99621E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09891E0
cs_ionaccel_imon=-1.97079E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02068E2
cs_ionfocb_imon=1.47273E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56441E1
einzel_imon=7.75992E-6
window_vset=0.0E0
window_vmon=2.14339E-1
window_imon=-1.09503E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39207E-4
mask2_vset=0.0E0
mask2_vmon=-1.86044E1
mask2_imon=-5.43619E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.61523E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93688E3
defgrida_imon=6.29503E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.75681E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47052E0
defgridb_imon=6.2561E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33958E1
os_fil1_imon=6.18177E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.07385E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66295E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30734E1
cs_fil1_imon=1.00855E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6287E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66545E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.0913E-2
os_fil2_imon=-2.46775E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.74038E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.73567E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31076E-1
cs_fil2_imon=-2.22148E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.31991E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22384E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=1.9985E-1
chamber_ion_pmon=1.73753E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.35576E-1
res40_imon=-2.66275E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.16679E-1	-7.98011E-1	-9.13134E0	-9.14216E0	5.62668E-3	9.31025E-2	2.72833E1	-3.26638E1	-3.26585E1	2.68383E1	1.73679E-7	2.51417E-3	2.51417E-3	6.29665E-3	1.9951E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.16274E-1	-7.9782E-1	-9.13153E0	-9.14211E0	5.38826E-3	9.31025E-2	2.73284E1	-3.26505E1	-3.26425E1	2.67851E1	1.73679E-7	2.51203E-3	2.51203E-3	6.32356E-3	1.9883E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.16631E-1	-7.97939E-1	-9.1315E0	-9.14235E0	5.53131E-3	9.30786E-2	2.72809E1	-3.2639E1	-3.26478E1	2.67902E1	1.73681E-7	2.5147E-3	2.5147E-3	6.32418E-3	1.99931E-1
4.0E0	0.0E0	1.0E0	6.55E2	3.98E2	-2.09487E0	-8.16941E-1	-7.9813E-1	-9.13136E0	-9.14218E0	5.55515E-3	9.32932E-2	2.72933E1	-3.2636E1	-3.26319E1	2.67812E1	1.73679E-7	2.51417E-3	2.51417E-3	6.31009E-3	1.99936E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.16965E-1	-7.97844E-1	-9.13119E0	-9.1424E0	5.4121E-3	9.34124E-2	2.73231E1	-3.26543E1	-3.26278E1	2.67974E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.1687E-1	-7.98106E-1	-9.13143E0	-9.14207E0	5.6982E-3	9.34601E-2	2.72921E1	-3.26944E1	-3.26526E1	2.67908E1	1.73642E-7	2.51716E-3	2.51716E-3	6.28825E-3	2.00847E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.16655E-1	-7.97987E-1	-9.13186E0	-9.1424E0	5.48363E-3	9.32455E-2	2.73045E1	-3.26236E1	-3.26542E1	2.67929E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.16417E-1	-7.97772E-1	-9.1311E0	-9.14223E0	5.26905E-3	9.30548E-2	2.73117E1	-3.26873E1	-3.26122E1	2.68217E1	1.7368E-7	2.51552E-3	2.51552E-3	6.33486E-3	1.99977E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.16274E-1	-7.97606E-1	-9.13117E0	-9.14207E0	5.22137E-3	9.30071E-2	2.72883E1	-3.26681E1	-3.26014E1	2.67878E1	1.7368E-7	2.51225E-3	2.51225E-3	6.34037E-3	1.99803E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-8.16488E-1	-7.97439E-1	-9.13131E0	-9.14211E0	5.22137E-3	9.29832E-2	2.72921E1	-3.26762E1	-3.26767E1	2.67538E1	1.73605E-7	2.52099E-3	2.52099E-3	6.30192E-3	1.98764E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09426E0	-8.16464E-1	-7.97939E-1	-9.13148E0	-9.14204E0	5.31673E-3	9.31263E-2	2.73104E1	-3.26691E1	-3.259E1	2.67938E1	1.73679E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.00192E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-8.16512E-1	-7.97534E-1	-9.13153E0	-9.14214E0	5.57899E-3	9.30548E-2	2.73303E1	-3.26422E1	-3.26224E1	2.67439E1	1.73605E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.01219E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.16727E-1	-7.97534E-1	-9.13153E0	-9.14202E0	5.81741E-3	9.30309E-2	2.73141E1	-3.26741E1	-3.26254E1	2.67932E1	1.73605E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.00499E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-8.1625E-1	-7.98297E-1	-9.1316E0	-9.14202E0	5.67436E-3	9.3317E-2	2.73144E1	-3.26631E1	-3.26399E1	2.67364E1	1.73906E-7	2.51334E-3	2.51334E-3	6.32386E-3	2.01197E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.16274E-1	-7.98225E-1	-9.13148E0	-9.14195E0	5.81741E-3	9.3174E-2	2.73201E1	-3.26735E1	-3.2644E1	2.68184E1	1.73605E-7	2.52025E-3	2.52025E-3	6.32328E-3	1.98561E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09418E0	-8.16751E-1	-7.98082E-1	-9.13157E0	-9.14216E0	5.74589E-3	9.3174E-2	2.73293E1	-3.26762E1	-3.26095E1	2.68111E1	1.73605E-7	2.52318E-3	2.52318E-3	6.3074E-3	1.98247E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09402E0	-8.16298E-1	-7.97772E-1	-9.13141E0	-9.14195E0	5.45979E-3	9.32932E-2	2.72871E1	-3.26867E1	-3.26146E1	2.68316E1	1.73605E-7	2.51954E-3	2.51954E-3	6.31278E-3	1.99E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.16393E-1	-7.98321E-1	-9.13162E0	-9.14218E0	5.19753E-3	9.32932E-2	2.73111E1	-3.26717E1	-3.26308E1	2.67824E1	1.73605E-7	2.52027E-3	2.52027E-3	6.31299E-3	1.97818E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.16154E-1	-7.98154E-1	-9.1315E0	-9.14211E0	5.34058E-3	9.32455E-2	2.73051E1	-3.26354E1	-3.26307E1	2.6807E1	1.73605E-7	2.52169E-3	2.52169E-3	6.29128E-3	1.97984E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.16154E-1	-7.97987E-1	-9.13143E0	-9.14202E0	5.29289E-3	9.32932E-2	2.73387E1	-3.26837E1	-3.25852E1	2.68178E1	1.73753E-7	2.51954E-3	2.51954E-3	6.29128E-3	1.9985E-1