[Scan]
initial_time=2016-02-16T01:08:18
final_time=2016-02-16T01:08:37
ip_count=19
run=1030
dataset=4
scan=307
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08789E-4
ql1_vset=
ql1_vmon=-8.16703E-1
ql1_imon=6.14607E-10
ql2_vset=
ql2_vmon=-7.98297E-1
ql2_imon=3.06082E-10
ql3_vset=
ql3_vmon=-9.13103E0
ql3_imon=5.34737E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=4.96793E-10
mult1=-9.96916E-9
mult2=-3.10186E-9
rf_tmon=-3.85752E-3
rf_agc=3.4343E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=3.80325E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64811E0
bslens_imon=2.59543E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19971E1
lens5a_imon=1.9892E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12484E2
lens4a_imon=2.04916E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53544E1
cs_ef1b_imon=3.06811E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04653E2
lens23_imon=1.0229E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0506E1
cs_ea1_imon=2.18855E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35273E0
lens1_imon=2.75044E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64602E1
os_ef1alow_imon=2.97549E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04477E1
cs_ea2_imon=1.55985E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84935E1
cs_ef1a_imon=3.02054E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=3.95894E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11183E1
os_restr1_imon=2.88756E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15546E1
os_ea1_imon=1.91133E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63749E1
os_ef1bup_imon=3.10271E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27853E0
cs_ionrep_imon=1.26352E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9184E2
cs_nozzle_imon=1.93564E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01635E1
cs_anode1_imon=3.26057E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20527E0
olens4_imon=6.56104E-10
tplens_vset=1.4E-1
tplens_vmon=1.59637E0
tplens_imon=-9.38636E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26392E1
iondef3_imon=1.49352E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26825E1
iondef2_imon=1.58725E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02983E2
lens6_imon=2.98468E-4
ql6_vset=1.0E-1
ql6_vmon=9.28879E-2
ql6_imon=3.61562E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30557E0
ionrepsh_imon=2.02128E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34259E1
lens5b_imon=2.18783E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74615E1
cs_ef2b_imon=3.13263E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.43913E-1
os_ea2_imon=-6.63446E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06144E2
lens4b_imon=2.00605E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70855E1
cs_ef2a_imon=3.19245E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6408E0
os_ef2alow_imon=-2.66275E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.3916E-1
os_ef2bup_imon=-5.30446E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11171E1
os_restr2_imon=2.85656E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23085E2
cs_ionfoca_imon=6.30974E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01293E1
cs_anode2_imon=2.28389E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73177E1
iondef1_imon=1.09661E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67926E1
iondef4_imon=1.06575E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.95613E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=3.19028E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11693E0
cs_ionaccel_imon=-1.8915E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02052E2
cs_ionfocb_imon=1.47255E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56549E1
einzel_imon=7.71307E-6
window_vset=0.0E0
window_vmon=2.04128E-1
window_imon=-1.08061E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.39491E-4
mask2_vset=0.0E0
mask2_vmon=-1.86206E1
mask2_imon=-6.80569E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.52701E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.85288E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=7.30711E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50081E0
defgridb_imon=6.34458E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33933E1
os_fil1_imon=4.74018E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.99576E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66521E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30734E1
cs_fil1_imon=1.00883E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62678E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66378E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.97053E-2
os_fil2_imon=-2.2395E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.05853E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.61926E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31464E-1
cs_fil2_imon=-2.02326E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.99846E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22309E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=1.9951E-1
chamber_ion_pmon=1.73679E-7
chamber_cvt_pmon=2.51096E-3
foreline_cvt_pmon=2.51096E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.39781E-1
res40_imon=-2.50057E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-8.16202E-1	-7.98059E-1	-9.13122E0	-9.14207E0	5.65052E-3	9.29832E-2	2.73169E1	-3.26891E1	-3.26437E1	2.6777E1	1.7368E-7	2.51552E-3	2.51552E-3	6.29098E-3	1.98247E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09588E0	-8.15988E-1	-7.98416E-1	-9.13129E0	-9.14211E0	5.26905E-3	9.27687E-2	2.73033E1	-3.26777E1	-3.26338E1	2.68088E1	1.73605E-7	2.51847E-3	2.51847E-3	6.31817E-3	1.98322E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.16154E-1	-7.98368E-1	-9.13134E0	-9.14245E0	5.19753E-3	9.27687E-2	2.73004E1	-3.26443E1	-3.26142E1	2.67902E1	1.73605E-7	2.51771E-3	2.51771E-3	6.3514E-3	1.99803E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0965E0	-8.16631E-1	-7.98273E-1	-9.13155E0	-9.14214E0	5.17368E-3	9.29356E-2	2.73327E1	-3.26627E1	-3.26693E1	2.67962E1	1.73605E-7	2.51709E-3	2.51709E-3	6.3074E-3	1.98894E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09603E0	-8.16703E-1	-7.98368E-1	-9.13157E0	-9.14207E0	5.17368E-3	9.31025E-2	2.73171E1	-3.26717E1	-3.2611E1	2.67992E1	1.73719E-7	2.51953E-3	2.51953E-3	6.31294E-3	1.98905E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09572E0	-8.16822E-1	-7.97939E-1	-9.13138E0	-9.14211E0	5.50747E-3	9.32455E-2	2.7288E1	-3.26555E1	-3.26124E1	2.68262E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0968E0	-8.16679E-1	-7.97772E-1	-9.13126E0	-9.14197E0	5.48363E-3	9.31263E-2	2.7288E1	-3.26201E1	-3.26408E1	2.68186E1	1.73605E-7	2.51417E-3	2.51417E-3	6.34518E-3	2.00192E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-2.09634E0	-8.16488E-1	-7.97987E-1	-9.13148E0	-9.14178E0	5.24521E-3	9.30309E-2	2.72955E1	-3.2653E1	-3.26122E1	2.67854E1	1.73605E-7	2.51203E-3	2.51203E-3	6.32896E-3	1.98661E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09634E0	-8.16369E-1	-7.98035E-1	-9.13177E0	-9.14223E0	5.19753E-3	9.3174E-2	2.72901E1	-3.26392E1	-3.26326E1	2.67734E1	1.73605E-7	2.51443E-3	2.51443E-3	6.28552E-3	1.98937E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09595E0	-8.16226E-1	-7.98059E-1	-9.13119E0	-9.14204E0	5.43594E-3	9.32217E-2	2.73129E1	-3.26681E1	-3.26506E1	2.68112E1	1.7368E-7	2.5188E-3	2.5188E-3	6.32936E-3	1.99283E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09572E0	-8.16464E-1	-7.98082E-1	-9.13157E0	-9.1423E0	5.24521E-3	9.31501E-2	2.72799E1	-3.2644E1	-3.26242E1	2.68148E1	1.73755E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.98764E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.16679E-1	-7.98106E-1	-9.13136E0	-9.14223E0	5.17368E-3	9.28879E-2	2.73508E1	-3.26711E1	-3.26416E1	2.68238E1					
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09665E0	-8.16488E-1	-7.98059E-1	-9.13136E0	-9.14218E0	5.24521E-3	9.27448E-2	2.73016E1	-3.26248E1	-3.2626E1	2.67872E1	1.73605E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.99283E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0958E0	-8.1687E-1	-7.97892E-1	-9.13112E0	-9.14216E0	5.45979E-3	9.28879E-2	2.72886E1	-3.27062E1	-3.2615E1	2.67481E1	1.73679E-7	2.51739E-3	2.51739E-3	6.29665E-3	1.98661E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.16703E-1	-7.97677E-1	-9.13148E0	-9.14207E0	5.126E-3	9.30548E-2	2.73004E1	-3.26573E1	-3.26301E1	2.68004E1	1.73681E-7	2.51581E-3	2.51581E-3	6.31858E-3	2.00463E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.16178E-1	-7.98249E-1	-9.13153E0	-9.14207E0	5.57899E-3	9.28164E-2	2.72971E1	-3.26787E1	-3.26187E1	2.68166E1	1.73679E-7	2.52599E-3	2.52599E-3	6.32356E-3	2.00021E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.16321E-1	-7.98035E-1	-9.13131E0	-9.14195E0	5.36442E-3	9.29832E-2	2.72874E1	-3.26567E1	-3.26284E1	2.67932E1	1.73758E-7	2.5147E-3	2.5147E-3	6.31858E-3	2.00818E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.16774E-1	-7.9751E-1	-9.13119E0	-9.14211E0	5.38826E-3	9.29117E-2	2.73181E1	-3.2688E1	-3.26396E1	2.67763E1	1.73605E-7	2.50668E-3	2.50668E-3	6.3074E-3	2.00363E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.1625E-1	-7.98106E-1	-9.13122E0	-9.14221E0	5.36442E-3	9.28164E-2	2.72915E1	-3.26472E1	-3.26526E1	2.67986E1	1.73605E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.01219E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.16703E-1	-7.98297E-1	-9.13103E0	-9.14199E0	5.48363E-3	9.28879E-2	2.73177E1	-3.26825E1	-3.26392E1	2.67926E1	1.73679E-7	2.51096E-3	2.51096E-3	6.31278E-3	1.9951E-1