[Scan]
initial_time=2016-02-16T01:09:38
final_time=2016-02-16T01:09:57
ip_count=19
run=1030
dataset=4
scan=310
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09642E0
qbias_imon=-1.08786E-4
ql1_vset=
ql1_vmon=-8.16059E-1
ql1_imon=6.19328E-10
ql2_vset=
ql2_vmon=-7.97963E-1
ql2_imon=2.97403E-10
ql3_vset=
ql3_vmon=-9.13146E0
ql3_imon=4.97091E-10
ql4_vset=
ql4_vmon=-9.14216E0
ql4_imon=5.21469E-10
mult1=-6.2125E-9
mult2=-3.21364E-9
rf_tmon=-7.04791E-3
rf_agc=2.96265E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.88894E-3
ql5_imon=3.76487E-10
bslens_vset=-6.2E0
bslens_vmon=-6.72862E0
bslens_imon=2.70358E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19628E1
lens5a_imon=1.98559E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12508E2
lens4a_imon=2.05096E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53839E1
cs_ef1b_imon=3.03964E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04644E2
lens23_imon=1.02132E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0473E1
cs_ea1_imon=2.21415E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38638E0
lens1_imon=2.30704E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6447E1
os_ef1alow_imon=2.99856E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04201E1
cs_ea2_imon=1.57103E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84334E1
cs_ef1a_imon=3.00793E-5
olens2_vset=9.7E-1
olens2_vmon=9.70554E-1
olens2_imon=3.64041E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11039E1
os_restr1_imon=2.88431E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15342E1
os_ea1_imon=1.89908E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63821E1
os_ef1bup_imon=3.10343E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24669E0
cs_ionrep_imon=1.26208E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91857E2
cs_nozzle_imon=1.93337E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01497E1
cs_anode1_imon=3.2512E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20566E0
olens4_imon=6.57713E-10
tplens_vset=1.4E-1
tplens_vmon=1.58135E0
tplens_imon=-7.94438E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.25209E1
iondef3_imon=1.49136E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27882E1
iondef2_imon=1.5977E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02955E2
lens6_imon=2.98663E-4
ql6_vset=1.0E-1
ql6_vmon=9.29832E-2
ql6_imon=3.55363E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27793E0
ionrepsh_imon=2.00074E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3379E1
lens5b_imon=2.16404E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74693E1
cs_ef2b_imon=3.14884E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.36102E-1
os_ea2_imon=-4.65174E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06107E2
lens4b_imon=2.00565E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70867E1
cs_ef2a_imon=3.19101E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6342E0
os_ef2alow_imon=-2.4321E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.43965E-1
os_ef2bup_imon=-5.39095E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10865E1
os_restr2_imon=2.8753E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23096E2
cs_ionfoca_imon=6.30181E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01827E1
cs_anode2_imon=2.29362E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7409E1
iondef1_imon=1.08652E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68172E1
iondef4_imon=1.08954E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.91702E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81998E-1
olens1_imon=2.88594E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10912E0
cs_ionaccel_imon=-2.01404E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47522E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56201E1
einzel_imon=7.52206E-6
window_vset=0.0E0
window_vmon=1.91514E-1
window_imon=-6.48134E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82601E2
mask1_imon=2.3912E-4
mask2_vset=0.0E0
mask2_vmon=-1.86446E1
mask2_imon=-4.21084E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92623E3
multa_neg_imon=7.5955E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93738E3
defgrida_imon=7.00789E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.3035E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39856E0
defgridb_imon=6.14992E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33951E1
os_fil1_imon=5.42494E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.79755E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66298E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3075E1
cs_fil1_imon=1.00836E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62192E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66625E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.06081E-2
os_fil2_imon=-2.32359E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.29879E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.76105E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30299E-1
cs_fil2_imon=-2.67798E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.15424E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22364E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=1.9917E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.00738E-1
res40_imon=-2.66996E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09387E0	-8.1656E-1	-7.97391E-1	-9.13129E0	-9.14209E0	5.43594E-3	9.30309E-2	2.73281E1	-3.26638E1	-3.26773E1	2.67764E1	1.73679E-7	2.51525E-3	2.51525E-3	6.33977E-3	1.9934E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.16369E-1	-7.97939E-1	-9.13136E0	-9.14187E0	5.50747E-3	9.31501E-2	2.73277E1	-3.26682E1	-3.26113E1	2.67385E1	1.73755E-7	2.51662E-3	2.51662E-3	6.34037E-3	1.98592E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.17037E-1	-7.9782E-1	-9.1311E0	-9.14176E0	5.17368E-3	9.29356E-2	2.73428E1	-3.26797E1	-3.26502E1	2.6768E1	1.73605E-7	2.51136E-3	2.51136E-3	6.31858E-3	1.99401E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-8.16655E-1	-7.97749E-1	-9.13112E0	-9.14187E0	5.8651E-3	9.31263E-2	2.73482E1	-3.26496E1	-3.26325E1	2.68076E1	1.73605E-7	2.52384E-3	2.52384E-3	6.31817E-3	1.9917E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.16417E-1	-7.9813E-1	-9.13136E0	-9.14183E0	5.57899E-3	9.32217E-2	2.73213E1	-3.26873E1	-3.2593E1	2.68154E1	1.73605E-7	2.51954E-3	2.51954E-3	6.30202E-3	2.00021E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.16274E-1	-7.9782E-1	-9.13157E0	-9.14185E0	5.96046E-3	9.31978E-2	2.72979E1	-3.26398E1	-3.2644E1	2.68202E1	1.73605E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.99803E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-8.16298E-1	-7.97439E-1	-9.13119E0	-9.14199E0	5.93662E-3	9.32932E-2	2.72552E1	-3.26885E1	-3.26224E1	2.68334E1	1.73605E-7	2.51116E-3	2.51116E-3	6.3074E-3	1.99283E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.16202E-1	-7.97725E-1	-9.13138E0	-9.14226E0	5.79357E-3	9.3317E-2	2.73165E1	-3.26452E1	-3.26861E1	2.68028E1	1.7368E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.00325E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.16083E-1	-7.97796E-1	-9.13131E0	-9.14221E0	5.67436E-3	9.31501E-2	2.73231E1	-3.26362E1	-3.26705E1	2.68238E1	1.7368E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.9963E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.15868E-1	-7.9782E-1	-9.13153E0	-9.14209E0	5.43594E-3	9.30071E-2	2.72684E1	-3.26682E1	-3.2634E1	2.6777E1	1.73605E-7	2.51225E-3	2.51225E-3	6.31837E-3	1.98419E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.16584E-1	-7.97415E-1	-9.13141E0	-9.14204E0	5.45979E-3	9.29356E-2	2.73117E1	-3.26506E1	-3.26759E1	2.67873E1	1.73681E-7	2.51136E-3	2.51136E-3	6.33538E-3	1.99754E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-8.16631E-1	-7.97272E-1	-9.1315E0	-9.14207E0	5.48363E-3	9.27925E-2	2.73287E1	-3.2652E1	-3.2659E1	2.67746E1	1.73679E-7	2.51525E-3	2.51525E-3	6.31278E-3	1.98491E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.16274E-1	-7.97963E-1	-9.13157E0	-9.14197E0	5.50747E-3	9.2864E-2	2.73111E1	-3.27083E1	-3.25533E1	2.67794E1	1.73605E-7	2.51225E-3	2.51225E-3	6.30192E-3	1.99283E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09588E0	-8.16202E-1	-7.97939E-1	-9.1316E0	-9.1418E0	5.43594E-3	9.28879E-2	2.72821E1	-3.27086E1	-3.25871E1	2.67235E1	1.73755E-7	2.5188E-3	2.5188E-3	6.29645E-3	1.99803E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09627E0	-8.16512E-1	-7.9813E-1	-9.13157E0	-9.14204E0	5.60284E-3	9.29117E-2	2.73092E1	-3.26549E1	-3.26207E1	2.68001E1	1.73753E-7	2.52061E-3	2.52061E-3	6.32896E-3	1.9917E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09595E0	-8.16584E-1	-7.97629E-1	-9.13134E0	-9.14221E0	5.48363E-3	9.30309E-2	2.73204E1	-3.26278E1	-3.27007E1	2.67715E1	1.73642E-7	2.51809E-3	2.51809E-3	6.29926E-3	1.99312E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09657E0	-8.16584E-1	-7.98273E-1	-9.13136E0	-9.14195E0	5.38826E-3	9.27925E-2	2.72656E1	-3.26673E1	-3.26012E1	2.6728E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09619E0	-8.16774E-1	-7.98202E-1	-9.13165E0	-9.14192E0	5.45979E-3	9.28879E-2	2.73021E1	-3.26703E1	-3.26189E1	2.68194E1	1.73605E-7	2.51443E-3	2.51443E-3	6.30192E-3	2.01022E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0968E0	-8.16774E-1	-7.97582E-1	-9.13146E0	-9.14207E0	5.67436E-3	9.26495E-2	2.72803E1	-3.26897E1	-3.26419E1	2.68023E1	1.73677E-7	2.51709E-3	2.51709E-3	6.29684E-3	2.00399E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.09642E0	-8.16059E-1	-7.97963E-1	-9.13146E0	-9.14216E0	5.88894E-3	9.29832E-2	2.7409E1	-3.27882E1	-3.25209E1	2.68172E1	1.73605E-7	2.51525E-3	2.51525E-3	6.31817E-3	1.9917E-1