[Scan]
initial_time=2016-02-16T01:10:58
final_time=2016-02-16T01:11:17
ip_count=19
run=1030
dataset=4
scan=313
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09603E0
qbias_imon=-1.08852E-4
ql1_vset=
ql1_vmon=-8.16441E-1
ql1_imon=6.10733E-10
ql2_vset=
ql2_vmon=-7.98178E-1
ql2_imon=2.77781E-10
ql3_vset=
ql3_vmon=-9.13126E0
ql3_imon=5.06961E-10
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=4.91917E-10
mult1=-1.39787E-8
mult2=-3.77055E-9
rf_tmon=2.15674E-3
rf_agc=4.1619E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.55515E-3
ql5_imon=3.77738E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63259E0
bslens_imon=2.54326E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20031E1
lens5a_imon=2.00067E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.05231E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53556E1
cs_ef1b_imon=3.06271E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04641E2
lens23_imon=1.01948E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05012E1
cs_ea1_imon=2.20135E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42152E0
lens1_imon=2.59635E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6468E1
os_ef1alow_imon=2.97621E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04021E1
cs_ea2_imon=1.59789E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84466E1
cs_ef1a_imon=3.01586E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=3.99852E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11159E1
os_restr1_imon=2.89476E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15435E1
os_ea1_imon=1.88918E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63653E1
os_ef1bup_imon=3.09226E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2055E0
cs_ionrep_imon=1.25385E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9189E2
cs_nozzle_imon=1.93611E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01941E1
cs_anode1_imon=3.26633E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20501E0
olens4_imon=7.11989E-10
tplens_vset=1.4E-1
tplens_vmon=1.64379E0
tplens_imon=-5.43106E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2757E1
iondef3_imon=1.49772E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27281E1
iondef2_imon=1.57594E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02969E2
lens6_imon=2.98548E-4
ql6_vset=1.0E-1
ql6_vmon=9.30309E-2
ql6_imon=3.89421E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23971E0
ionrepsh_imon=1.99748E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33994E1
lens5b_imon=2.18932E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74417E1
cs_ef2b_imon=3.12686E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.41007E-1
os_ea2_imon=-5.85579E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06155E2
lens4b_imon=2.00541E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7136E1
cs_ef2a_imon=3.19786E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62098E0
os_ef2alow_imon=-2.45732E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.36156E-1
os_ef2bup_imon=-5.14228E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10799E1
os_restr2_imon=2.86485E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23076E2
cs_ionfoca_imon=6.30211E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01509E1
cs_anode2_imon=2.29723E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72883E1
iondef1_imon=1.10024E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68052E1
iondef4_imon=1.09206E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.95013E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=2.95067E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11212E0
cs_ionaccel_imon=-1.978E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.47262E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56123E1
einzel_imon=7.77794E-6
window_vset=0.0E0
window_vmon=1.86709E-1
window_imon=-9.58075E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8262E2
mask1_imon=2.3912E-4
mask2_vset=0.0E0
mask2_vmon=-1.86218E1
mask2_imon=-4.75143E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=7.35685E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.69498E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.33562E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.6034E0
defgridb_imon=6.26672E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33964E1
os_fil1_imon=4.32573E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.67741E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66392E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30812E1
cs_fil1_imon=1.0079E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62858E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66329E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.23059E-2
os_fil2_imon=-2.59389E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.47899E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.87361E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33536E-1
cs_fil2_imon=-2.20947E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.35846E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22473E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.00363E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.81827E-1
res40_imon=-2.54742E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=176
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09611E0	-8.16655E-1	-7.97677E-1	-9.13115E0	-9.14187E0	5.65052E-3	9.30548E-2	2.72496E1	-3.26472E1	-3.26172E1	2.67792E1	1.73827E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.00192E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.16703E-1	-7.97963E-1	-9.13117E0	-9.14199E0	5.67436E-3	9.29832E-2	2.72791E1	-3.26779E1	-3.25794E1	2.68196E1	1.73827E-7	2.5131E-3	2.5131E-3	6.29665E-3	2.00363E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09627E0	-8.16607E-1	-7.9782E-1	-9.13146E0	-9.14223E0	5.48363E-3	9.33409E-2	2.73241E1	-3.26438E1	-3.26229E1	2.68172E1	1.73679E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.00876E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09565E0	-8.16202E-1	-7.97915E-1	-9.13157E0	-9.14207E0	5.24521E-3	9.31978E-2	2.73169E1	-3.26484E1	-3.25812E1	2.6792E1	1.73761E-7	2.51611E-3	2.51611E-3	6.30171E-3	2.00425E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09688E0	-8.16822E-1	-7.97629E-1	-9.13162E0	-9.14204E0	5.36442E-3	9.32455E-2	2.7325E1	-3.26135E1	-3.26323E1	2.67819E1	1.73753E-7	2.52276E-3	2.52276E-3	6.31817E-3	2.00021E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09642E0	-8.16679E-1	-7.97558E-1	-9.1316E0	-9.14211E0	5.48363E-3	9.33886E-2	2.72745E1	-3.26664E1	-3.25899E1	2.68207E1	1.73605E-7	2.51783E-3	2.51783E-3	6.3074E-3	2.006E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09565E0	-8.16894E-1	-7.97582E-1	-9.13119E0	-9.14218E0	5.07832E-3	9.3317E-2	2.73291E1	-3.26512E1	-3.26645E1	2.68064E1	1.73605E-7	2.5188E-3	2.5188E-3	6.29098E-3	1.99803E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09611E0	-8.16894E-1	-7.97725E-1	-9.13146E0	-9.14185E0	5.36442E-3	9.34601E-2	2.72614E1	-3.26626E1	-3.25936E1	2.68105E1	1.73605E-7	2.51662E-3	2.51662E-3	6.29645E-3	1.99803E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09603E0	-8.16584E-1	-7.9751E-1	-9.1315E0	-9.14171E0	5.45979E-3	9.34839E-2	2.73057E1	-3.27474E1	-3.25942E1	2.67686E1	1.73605E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.99803E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.16274E-1	-7.97391E-1	-9.13141E0	-9.1418E0	5.53131E-3	9.35555E-2	2.72546E1	-3.26603E1	-3.25888E1	2.67944E1	1.73605E-7	2.5188E-3	2.5188E-3	6.29098E-3	1.99283E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.16798E-1	-7.98106E-1	-9.13153E0	-9.14221E0	5.43594E-3	9.36031E-2	2.73429E1	-3.26663E1	-3.26464E1	2.67589E1	1.73753E-7	2.50989E-3	2.50989E-3	6.3074E-3	1.9951E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.17013E-1	-7.98297E-1	-9.1315E0	-9.14183E0	5.79357E-3	9.33409E-2	2.73237E1	-3.26326E1	-3.26086E1	2.6792E1	1.73681E-7	2.52585E-3	2.52585E-3	6.32978E-3	1.99401E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.16393E-1	-7.97987E-1	-9.13115E0	-9.14195E0	5.62668E-3	9.33886E-2	2.72162E1	-3.26591E1	-3.27065E1	2.68052E1	1.73605E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.99283E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.16703E-1	-7.9751E-1	-9.13117E0	-9.14207E0	5.48363E-3	9.35555E-2	2.73021E1	-3.26868E1	-3.26455E1	2.68124E1	1.73605E-7	2.51096E-3	2.51096E-3	6.31278E-3	1.9985E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.16464E-1	-7.98178E-1	-9.13131E0	-9.14218E0	5.43594E-3	9.33409E-2	2.73075E1	-3.26682E1	-3.25881E1	2.681E1	1.7368E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.00673E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.16178E-1	-7.98345E-1	-9.13136E0	-9.1423E0	5.07832E-3	9.33886E-2	2.73177E1	-3.26837E1	-3.25996E1	2.67589E1	1.7368E-7	2.5188E-3	2.5188E-3	6.30192E-3	2.01022E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-8.1625E-1	-7.97772E-1	-9.13098E0	-9.14211E0	5.14984E-3	9.28164E-2	2.73009E1	-3.26633E1	-3.26362E1	2.67127E1	1.73605E-7	2.51804E-3	2.51804E-3	6.31299E-3	2.00108E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0958E0	-8.17299E-1	-7.97677E-1	-9.13146E0	-9.14233E0	5.10216E-3	9.29356E-2	2.73316E1	-3.26266E1	-3.26384E1	2.678E1	1.73605E-7	2.51417E-3	2.51417E-3	6.3074E-3	2.00192E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09595E0	-8.16393E-1	-7.97844E-1	-9.1315E0	-9.14207E0	5.34058E-3	9.31978E-2	2.73399E1	-3.2682E1	-3.26083E1	2.67775E1	1.73605E-7	2.52099E-3	2.52099E-3	6.30192E-3	1.99977E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09603E0	-8.16441E-1	-7.98178E-1	-9.13126E0	-9.14187E0	5.55515E-3	9.30309E-2	2.72883E1	-3.27281E1	-3.2757E1	2.68052E1	1.73605E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.00363E-1