[Scan]
initial_time=2016-02-16T01:12:18
final_time=2016-02-16T01:12:37
ip_count=19
run=1030
dataset=4
scan=316
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08773E-4
ql1_vset=
ql1_vmon=-8.17108E-1
ql1_imon=5.94699E-10
ql2_vset=
ql2_vmon=-7.97582E-1
ql2_imon=2.99358E-10
ql3_vset=
ql3_vmon=-9.13126E0
ql3_imon=4.97448E-10
ql4_vset=
ql4_vmon=-9.14204E0
ql4_imon=5.0658E-10
mult1=-7.40692E-9
mult2=-3.56597E-9
rf_tmon=-1.09571E-2
rf_agc=2.62893E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.36442E-3
ql5_imon=3.78335E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62829E0
bslens_imon=2.65672E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19911E1
lens5a_imon=1.99353E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.05284E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53611E1
cs_ef1b_imon=3.05812E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04637E2
lens23_imon=1.02377E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04958E1
cs_ea1_imon=2.20478E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37376E0
lens1_imon=2.72521E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64752E1
os_ef1alow_imon=2.97728E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03804E1
cs_ea2_imon=1.56057E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84263E1
cs_ef1a_imon=3.01396E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=3.83294E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.10967E1
os_restr1_imon=2.88559E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15678E1
os_ea1_imon=1.88538E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63716E1
os_ef1bup_imon=3.08582E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22987E0
cs_ionrep_imon=1.25739E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9186E2
cs_nozzle_imon=1.93442E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01684E1
cs_anode1_imon=3.25011E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20492E0
olens4_imon=7.40659E-10
tplens_vset=1.4E-1
tplens_vmon=1.57534E0
tplens_imon=-1.22703E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25015E1
iondef3_imon=1.51407E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.28478E1
iondef2_imon=1.58725E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02938E2
lens6_imon=2.98522E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=3.79586E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27974E0
ionrepsh_imon=2.01443E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33796E1
lens5b_imon=2.18062E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74682E1
cs_ef2b_imon=3.12287E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.4932E-1
os_ea2_imon=-5.84137E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06095E2
lens4b_imon=2.00832E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71089E1
cs_ef2a_imon=3.19173E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62967E0
os_ef2alow_imon=-2.71653E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.7081E-1
os_ef2bup_imon=-5.12675E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10855E1
os_restr2_imon=2.8796E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.31767E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01497E1
cs_anode2_imon=2.28041E-5
iondef1_vset=2.763E1
iondef1_vmon=2.75116E1
iondef1_imon=1.11067E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6783E1
iondef4_imon=1.08129E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.89358E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=2.51102E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12702E0
cs_ionaccel_imon=-1.84825E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47237E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56355E1
einzel_imon=7.93111E-6
window_vset=0.0E0
window_vmon=2.18844E-1
window_imon=-9.94946E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82613E2
mask1_imon=2.39312E-4
mask2_vset=0.0E0
mask2_vmon=-1.86394E1
mask2_imon=-6.84312E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92623E3
multa_neg_imon=7.32153E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93697E3
defgrida_imon=6.46715E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50167E3
multb_neg_imon=7.5955E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4557E0
defgridb_imon=6.09224E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3395E1
os_fil1_imon=4.29246E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=6.98712E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66249E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30732E1
cs_fil1_imon=1.00953E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62696E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66409E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.1382E-2
os_fil2_imon=-2.413E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.18097E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.76878E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30593E-1
cs_fil2_imon=-2.05121E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.23602E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2226E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=1.98592E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.04919E-1
res40_imon=-2.69034E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.16417E-1	-7.98178E-1	-9.13136E0	-9.14199E0	5.26905E-3	9.34124E-2	2.73039E1	-3.26349E1	-3.26307E1	2.68128E1	1.73605E-7	2.51552E-3	2.51552E-3	6.28006E-3	2.01022E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09441E0	-8.16607E-1	-7.98106E-1	-9.13141E0	-9.14178E0	5.45979E-3	9.33409E-2	2.73069E1	-3.26488E1	-3.26098E1	2.68148E1	1.73605E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.00534E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-8.16369E-1	-7.97892E-1	-9.13115E0	-9.14178E0	5.53131E-3	9.31025E-2	2.72998E1	-3.26614E1	-3.26372E1	2.67631E1	1.73681E-7	2.51915E-3	2.51915E-3	6.32418E-3	2.0064E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09356E0	-8.16536E-1	-7.98464E-1	-9.13146E0	-9.14218E0	5.26905E-3	9.32455E-2	2.73039E1	-3.26549E1	-3.2614E1	2.678E1	1.73677E-7	2.52342E-3	2.52342E-3	6.30212E-3	2.00567E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09379E0	-8.16441E-1	-7.98106E-1	-9.13136E0	-9.14211E0	5.26905E-3	9.33886E-2	2.73309E1	-3.26554E1	-3.26735E1	2.68172E1	1.73605E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.00151E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.16226E-1	-7.98273E-1	-9.1316E0	-9.14185E0	5.19753E-3	9.31263E-2	2.73165E1	-3.26687E1	-3.26104E1	2.67769E1	1.73605E-7	2.51716E-3	2.51716E-3	6.31837E-3	1.99197E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.16393E-1	-7.97892E-1	-9.13153E0	-9.14199E0	5.26905E-3	9.29594E-2	2.72805E1	-3.26705E1	-3.26248E1	2.67832E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.15964E-1	-7.98202E-1	-9.1315E0	-9.14185E0	4.93526E-3	9.32455E-2	2.73303E1	-3.26675E1	-3.26224E1	2.6801E1	1.73605E-7	2.50898E-3	2.50898E-3	6.31837E-3	1.9911E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-8.16107E-1	-7.97963E-1	-9.13134E0	-9.14166E0	5.14984E-3	9.30786E-2	2.72839E1	-3.26738E1	-3.26095E1	2.6785E1	1.73605E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.99283E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.16131E-1	-7.97844E-1	-9.13122E0	-9.14185E0	5.10216E-3	9.31978E-2	2.73131E1	-3.26713E1	-3.26425E1	2.67904E1	1.7368E-7	2.52318E-3	2.52318E-3	6.32936E-3	1.99283E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-8.16274E-1	-7.97701E-1	-9.1311E0	-9.14207E0	5.22137E-3	9.3174E-2	2.72968E1	-3.26526E1	-3.26484E1	2.6797E1	1.73605E-7	2.5188E-3	2.5188E-3	6.29645E-3	1.99456E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-8.16369E-1	-7.98082E-1	-9.13129E0	-9.14197E0	5.31673E-3	9.32217E-2	2.73177E1	-3.26717E1	-3.26524E1	2.68196E1	1.73679E-7	2.50989E-3	2.50989E-3	6.30202E-3	1.9883E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.16441E-1	-7.97606E-1	-9.1315E0	-9.14176E0	5.22137E-3	9.32217E-2	2.72552E1	-3.26338E1	-3.26669E1	2.68142E1	1.7368E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.99456E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09418E0	-8.16703E-1	-7.97939E-1	-9.13148E0	-9.14199E0	5.19753E-3	9.30071E-2	2.73141E1	-3.26518E1	-3.26212E1	2.67902E1	1.73605E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.00325E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.16941E-1	-7.97653E-1	-9.13146E0	-9.14214E0	5.24521E-3	9.30786E-2	2.7296E1	-3.26846E1	-3.26465E1	2.68809E1	1.73681E-7	2.51136E-3	2.51136E-3	6.32978E-3	2.00108E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.16917E-1	-7.97963E-1	-9.13153E0	-9.14187E0	5.55515E-3	9.31978E-2	2.73101E1	-3.26422E1	-3.26572E1	2.67135E1	1.73675E-7	2.51447E-3	2.51447E-3	6.31761E-3	2.00793E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.16989E-1	-7.97534E-1	-9.13146E0	-9.14197E0	5.57899E-3	9.31978E-2	2.72935E1	-3.26909E1	-3.26132E1	2.67613E1	1.73605E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.00018E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.16464E-1	-7.97963E-1	-9.13138E0	-9.14199E0	5.36442E-3	9.3317E-2	2.73558E1	-3.26691E1	-3.26242E1	2.68111E1	1.73605E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.99283E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.17013E-1	-7.9751E-1	-9.1311E0	-9.14214E0	5.60284E-3	9.32693E-2	2.72943E1	-3.26675E1	-3.26675E1	2.67463E1	1.73605E-7	2.51954E-3	2.51954E-3	6.31278E-3	1.9968E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.17108E-1	-7.97582E-1	-9.13126E0	-9.14204E0	5.36442E-3	9.32455E-2	2.75116E1	-3.28478E1	-3.25015E1	2.6783E1	1.73605E-7	2.52099E-3	2.52099E-3	6.31837E-3	1.98592E-1