[Scan]
initial_time=2016-02-16T01:12:44
final_time=2016-02-16T01:13:04
ip_count=19
run=1030
dataset=4
scan=317
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08762E-4
ql1_vset=
ql1_vmon=-8.16059E-1
ql1_imon=6.17278E-10
ql2_vset=
ql2_vmon=-7.98345E-1
ql2_imon=2.73538E-10
ql3_vset=
ql3_vmon=-9.13131E0
ql3_imon=5.25224E-10
ql4_vset=
ql4_vmon=-9.14218E0
ql4_imon=5.06437E-10
mult1=-1.26912E-8
mult2=-2.66446E-9
rf_tmon=-1.25322E-3
rf_agc=3.94559E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=3.68428E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62905E0
bslens_imon=2.48663E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20049E1
lens5a_imon=2.01695E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12451E2
lens4a_imon=2.05068E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53754E1
cs_ef1b_imon=3.05586E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.02379E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04976E1
cs_ea1_imon=2.20348E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36548E0
lens1_imon=2.62113E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64296E1
os_ef1alow_imon=2.9827E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03785E1
cs_ea2_imon=1.58196E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84538E1
cs_ef1a_imon=3.01946E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=3.75211E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.10985E1
os_restr1_imon=2.87278E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15081E1
os_ea1_imon=1.87785E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63713E1
os_ef1bup_imon=3.10163E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24856E0
cs_ionrep_imon=1.25562E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9191E2
cs_nozzle_imon=1.93427E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01773E1
cs_anode1_imon=3.24579E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20546E0
olens4_imon=6.93464E-10
tplens_vset=1.4E-1
tplens_vmon=1.63081E0
tplens_imon=-1.36074E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27576E1
iondef3_imon=1.50268E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.25788E1
iondef2_imon=1.57028E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0298E2
lens6_imon=2.9859E-4
ql6_vset=1.0E-1
ql6_vmon=9.28164E-2
ql6_imon=3.40664E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25328E0
ionrepsh_imon=2.01554E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33463E1
lens5b_imon=2.2056E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74579E1
cs_ef2b_imon=3.14128E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.86429E-1
os_ea2_imon=-5.53725E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06182E2
lens4b_imon=2.00927E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70855E1
cs_ef2a_imon=3.17731E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64261E0
os_ef2alow_imon=-2.42129E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.2114E-1
os_ef2bup_imon=-5.30085E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10511E1
os_restr2_imon=2.87386E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.29716E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01863E1
cs_anode2_imon=2.28894E-5
iondef1_vset=2.763E1
iondef1_vmon=2.71659E1
iondef1_imon=1.08786E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68134E1
iondef4_imon=1.10431E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.88917E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=3.19207E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12474E0
cs_ionaccel_imon=-2.02485E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02096E2
cs_ionfocb_imon=1.47338E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56135E1
einzel_imon=7.59053E-6
window_vset=0.0E0
window_vmon=1.89712E-1
window_imon=-7.74273E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82623E2
mask1_imon=2.39127E-4
mask2_vset=0.0E0
mask2_vmon=-1.8629E1
mask2_imon=-7.74273E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.53029E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.472E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50153E3
multb_neg_imon=7.18342E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4971E0
defgridb_imon=6.4897E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33938E1
os_fil1_imon=5.08256E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.14883E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66221E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30791E1
cs_fil1_imon=1.00841E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6278E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66307E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.952E-2
os_fil2_imon=-2.28154E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.56018E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.74959E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30558E-1
cs_fil2_imon=-2.46775E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.37998E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22448E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=1.9968E-1
chamber_ion_pmon=1.73827E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.58111E-1
res40_imon=-2.68437E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09588E0	-8.16488E-1	-7.98059E-1	-9.1311E0	-9.14211E0	5.17368E-3	9.26971E-2	2.73147E1	-3.26657E1	-3.26212E1	2.68238E1	1.73827E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.00534E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09588E0	-8.16345E-1	-7.97939E-1	-9.13093E0	-9.14178E0	5.53131E-3	9.27925E-2	2.73137E1	-3.26266E1	-3.26242E1	2.68138E1	1.73605E-7	2.51662E-3	2.51662E-3	6.3514E-3	1.99456E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.16464E-1	-7.98273E-1	-9.13129E0	-9.14183E0	5.34058E-3	9.29117E-2	2.72987E1	-3.26764E1	-3.26162E1	2.67937E1	1.73681E-7	2.51359E-3	2.51359E-3	6.31858E-3	1.99224E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.16131E-1	-7.97868E-1	-9.13117E0	-9.14187E0	5.60284E-3	9.30309E-2	2.73364E1	-3.26744E1	-3.26248E1	2.6819E1	1.73605E-7	2.51937E-3	2.51937E-3	6.31541E-3	1.99789E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-8.16321E-1	-7.98106E-1	-9.13115E0	-9.14185E0	5.22137E-3	9.31501E-2	2.72967E1	-3.26518E1	-3.26488E1	2.67433E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.16369E-1	-7.97844E-1	-9.13093E0	-9.14178E0	5.17368E-3	9.32932E-2	2.72793E1	-3.26963E1	-3.2605E1	2.68046E1	1.73605E-7	2.51443E-3	2.51443E-3	6.28552E-3	2.00151E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09588E0	-8.16274E-1	-7.98297E-1	-9.13112E0	-9.14207E0	5.17368E-3	9.33886E-2	2.73098E1	-3.26968E1	-3.26124E1	2.67787E1	1.73755E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.99977E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.16584E-1	-7.97987E-1	-9.13172E0	-9.14214E0	4.673E-3	9.31263E-2	2.72895E1	-3.26699E1	-3.25978E1	2.6786E1	1.73605E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.00847E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.15988E-1	-7.98559E-1	-9.13153E0	-9.14218E0	4.673E-3	9.33409E-2	2.72931E1	-3.26789E1	-3.25755E1	2.68076E1	1.73605E-7	2.51334E-3	2.51334E-3	6.29645E-3	1.99456E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.16178E-1	-7.97749E-1	-9.13134E0	-9.14207E0	4.95911E-3	9.32455E-2	2.72955E1	-3.26362E1	-3.26573E1	2.67998E1	1.73679E-7	2.52061E-3	2.52061E-3	6.3074E-3	1.99E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.15678E-1	-7.97677E-1	-9.13131E0	-9.14218E0	5.07832E-3	9.30071E-2	2.73057E1	-3.26868E1	-3.26378E1	2.67866E1	1.73605E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.99977E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-8.15725E-1	-7.9813E-1	-9.13148E0	-9.14237E0	5.19753E-3	9.30786E-2	2.73634E1	-3.27173E1	-3.25779E1	2.68148E1	1.73753E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.01219E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.15916E-1	-7.98082E-1	-9.13146E0	-9.14199E0	5.50747E-3	9.30786E-2	2.72324E1	-3.25581E1	-3.25641E1	2.68148E1	1.73605E-7	2.52027E-3	2.52027E-3	6.3074E-3	2.00108E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.15511E-1	-7.98106E-1	-9.13126E0	-9.14202E0	5.38826E-3	9.30548E-2	2.73381E1	-3.2653E1	-3.26218E1	2.67752E1	1.73679E-7	2.5131E-3	2.5131E-3	6.30202E-3	2.00705E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.15964E-1	-7.97606E-1	-9.13155E0	-9.14192E0	5.43594E-3	9.33886E-2	2.72727E1	-3.26567E1	-3.26609E1	2.68076E1	1.7368E-7	2.51552E-3	2.51552E-3	6.29645E-3	1.99456E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.16035E-1	-7.97725E-1	-9.13153E0	-9.14199E0	5.43594E-3	9.29594E-2	2.73231E1	-3.27083E1	-3.25984E1	2.68725E1	1.73605E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.9963E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.16226E-1	-7.97915E-1	-9.13124E0	-9.14195E0	5.55515E-3	9.2864E-2	2.73147E1	-3.26663E1	-3.26362E1	2.68815E1	1.73755E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.00673E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-2.09595E0	-8.16751E-1	-7.98321E-1	-9.13157E0	-9.14233E0	5.43594E-3	9.29117E-2	2.73428E1	-3.26799E1	-3.2644E1	2.67862E1	1.73755E-7	2.51771E-3	2.51771E-3	6.29098E-3	1.99977E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.16965E-1	-7.9813E-1	-9.13136E0	-9.14209E0	5.05447E-3	9.28879E-2	2.73057E1	-3.27083E1	-3.26272E1	2.6813E1	1.73605E-7	2.51525E-3	2.51525E-3	6.32896E-3	2.00534E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.16059E-1	-7.98345E-1	-9.13131E0	-9.14218E0	5.17368E-3	9.28164E-2	2.71659E1	-3.25788E1	-3.27576E1	2.68134E1	1.73827E-7	2.51739E-3	2.51739E-3	6.32356E-3	1.9968E-1