[Scan]
initial_time=2016-02-16T01:13:11
final_time=2016-02-16T01:13:30
ip_count=19
run=1030
dataset=4
scan=318
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08777E-4
ql1_vset=
ql1_vmon=-8.16631E-1
ql1_imon=5.8105E-10
ql2_vset=
ql2_vmon=-7.97701E-1
ql2_imon=2.95424E-10
ql3_vset=
ql3_vmon=-9.13105E0
ql3_imon=4.81069E-10
ql4_vset=
ql4_vmon=-9.1423E0
ql4_imon=4.861E-10
mult1=-8.80122E-9
mult2=-2.43517E-9
rf_tmon=-7.4805E-3
rf_agc=3.12487E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.24521E-3
ql5_imon=3.95095E-10
bslens_vset=-6.2E0
bslens_vmon=-6.5936E0
bslens_imon=2.61595E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.21067E1
lens5a_imon=1.97729E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.05145E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53424E1
cs_ef1b_imon=3.0787E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02087E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04932E1
cs_ea1_imon=2.23747E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40625E0
lens1_imon=2.42503E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6429E1
os_ef1alow_imon=2.96867E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04345E1
cs_ea2_imon=1.56924E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83696E1
cs_ef1a_imon=3.01022E-5
olens2_vset=9.7E-1
olens2_vmon=9.70578E-1
olens2_imon=3.90005E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1113E1
os_restr1_imon=2.87286E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15144E1
os_ea1_imon=1.82792E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63723E1
os_ef1bup_imon=3.09442E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27144E0
cs_ionrep_imon=1.26151E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91853E2
cs_nozzle_imon=1.9339E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01678E1
cs_anode1_imon=3.24862E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20554E0
olens4_imon=6.7116E-10
tplens_vset=1.4E-1
tplens_vmon=1.6433E0
tplens_imon=-5.32386E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.25551E1
iondef3_imon=1.49736E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26314E1
iondef2_imon=1.57934E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02957E2
lens6_imon=2.98529E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=3.62754E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.34382E0
ionrepsh_imon=2.01398E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33371E1
lens5b_imon=2.20827E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74819E1
cs_ef2b_imon=3.14457E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.35709E-1
os_ea2_imon=-6.93395E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00874E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70834E1
cs_ef2a_imon=3.18874E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64152E0
os_ef2alow_imon=-2.54063E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.86404E-1
os_ef2bup_imon=-5.31014E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10836E1
os_restr2_imon=2.88334E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2308E2
cs_ionfoca_imon=6.29891E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01765E1
cs_anode2_imon=2.27368E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73063E1
iondef1_imon=1.13198E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68016E1
iondef4_imon=1.09364E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.95712E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=2.87664E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09396E0
cs_ionaccel_imon=-1.98299E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0208E2
cs_ionfocb_imon=1.47357E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56087E1
einzel_imon=7.75895E-6
window_vset=0.0E0
window_vmon=1.85785E-1
window_imon=-8.19045E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82604E2
mask1_imon=2.39447E-4
mask2_vset=0.0E0
mask2_vmon=-1.86512E1
mask2_imon=-6.46886E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.925E3
multa_neg_imon=8.53459E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.47561E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50148E3
multb_neg_imon=7.86823E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.65547E0
defgridb_imon=6.29592E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33943E1
os_fil1_imon=4.90998E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.57969E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65876E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30775E1
cs_fil1_imon=1.0073E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62596E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66161E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.11687E-2
os_fil2_imon=-2.43171E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.18097E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.09048E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.2898E-1
cs_fil2_imon=-2.4629E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.49176E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22416E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.9883E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.09285E-1
res40_imon=-2.52566E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.16298E-1	-7.98106E-1	-9.13131E0	-9.1419E0	5.24521E-3	9.31501E-2	2.72951E1	-3.26703E1	-3.26101E1	2.67986E1	1.73761E-7	2.52066E-3	2.52066E-3	6.34164E-3	1.99343E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09572E0	-8.16178E-1	-7.97772E-1	-9.13115E0	-9.14218E0	5.38826E-3	9.31978E-2	2.7272E1	-3.26597E1	-3.26029E1	2.6831E1	1.73605E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.98764E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09642E0	-8.16369E-1	-7.98154E-1	-9.13134E0	-9.14218E0	5.29289E-3	9.34124E-2	2.72871E1	-3.26648E1	-3.26567E1	2.68106E1	1.73681E-7	2.51804E-3	2.51804E-3	6.29624E-3	1.99048E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0965E0	-8.16298E-1	-7.97606E-1	-9.13126E0	-9.14207E0	5.10216E-3	9.32932E-2	2.73281E1	-3.26614E1	-3.26437E1	2.67952E1	1.73605E-7	2.51498E-3	2.51498E-3	6.31269E-3	1.98894E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09588E0	-8.16321E-1	-7.9751E-1	-9.13124E0	-9.14197E0	4.81606E-3	9.33409E-2	2.72745E1	-3.26699E1	-3.26008E1	2.67601E1	1.73679E-7	2.51525E-3	2.51525E-3	6.31278E-3	1.9934E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.16464E-1	-7.97677E-1	-9.13105E0	-9.14199E0	5.45979E-3	9.34601E-2	2.73082E1	-3.26474E1	-3.26413E1	2.68257E1	1.7368E-7	2.51443E-3	2.51443E-3	6.33486E-3	1.99456E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0958E0	-8.16131E-1	-7.97963E-1	-9.13095E0	-9.1419E0	5.4121E-3	9.35555E-2	2.73033E1	-3.26579E1	-3.26182E1	2.68172E1	1.73758E-7	2.51915E-3	2.51915E-3	6.30182E-3	2.00285E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.1594E-1	-7.9813E-1	-9.13112E0	-9.14192E0	5.57899E-3	9.31263E-2	2.73285E1	-3.26933E1	-3.25912E1	2.67974E1	1.7368E-7	2.51334E-3	2.51334E-3	6.32386E-3	2.00499E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09611E0	-8.15797E-1	-7.97701E-1	-9.13136E0	-9.14218E0	5.126E-3	9.32693E-2	2.73303E1	-3.26951E1	-3.25978E1	2.67884E1	1.73831E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.99803E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09572E0	-8.15868E-1	-7.98273E-1	-9.13148E0	-9.14242E0	5.14984E-3	9.3174E-2	2.73014E1	-3.27142E1	-3.25881E1	2.68022E1	1.7368E-7	2.5199E-3	2.5199E-3	6.29645E-3	2.00673E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09619E0	-8.16107E-1	-7.98011E-1	-9.13169E0	-9.14226E0	5.29289E-3	9.33647E-2	2.73139E1	-3.26526E1	-3.26443E1	2.67956E1	1.73605E-7	2.51804E-3	2.51804E-3	6.29067E-3	2.00996E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09611E0	-8.16393E-1	-7.98321E-1	-9.13157E0	-9.1424E0	5.43594E-3	9.34601E-2	2.73556E1	-3.25984E1	-3.26272E1	2.68034E1	1.73753E-7	2.51203E-3	2.51203E-3	6.31278E-3	1.9968E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09557E0	-8.1656E-1	-7.97844E-1	-9.13129E0	-9.14221E0	5.05447E-3	9.33647E-2	2.73682E1	-3.27175E1	-3.2615E1	2.67612E1	1.73605E-7	2.52139E-3	2.52139E-3	6.32418E-3	1.99931E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.16655E-1	-7.98011E-1	-9.13103E0	-9.14245E0	5.67436E-3	9.31025E-2	2.7307E1	-3.26828E1	-3.26497E1	2.6802E1	1.73676E-7	2.51058E-3	2.51058E-3	6.3126E-3	1.99119E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-8.16393E-1	-7.98106E-1	-9.13131E0	-9.14235E0	5.38826E-3	9.30071E-2	2.73299E1	-3.2718E1	-3.26018E1	2.68058E1	1.73605E-7	2.52749E-3	2.52749E-3	6.29603E-3	1.99703E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-8.16202E-1	-7.98011E-1	-9.1311E0	-9.14209E0	5.57899E-3	9.31263E-2	2.73201E1	-3.26897E1	-3.26422E1	2.6792E1	1.73753E-7	2.51847E-3	2.51847E-3	6.32356E-3	1.9883E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09348E0	-8.16202E-1	-7.98082E-1	-9.13093E0	-9.14223E0	5.48363E-3	9.30786E-2	2.72696E1	-3.26639E1	-3.26278E1	2.68971E1	1.73605E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.99283E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.16178E-1	-7.97725E-1	-9.13088E0	-9.14195E0	5.48363E-3	9.31978E-2	2.72915E1	-3.26531E1	-3.26455E1	2.68318E1	1.7368E-7	2.52318E-3	2.52318E-3	6.33486E-3	1.98592E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.16298E-1	-7.98154E-1	-9.13117E0	-9.14228E0	5.29289E-3	9.3174E-2	2.72791E1	-3.27033E1	-3.26756E1	2.6784E1	1.73679E-7	2.51954E-3	2.51954E-3	6.32896E-3	1.9968E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.16631E-1	-7.97701E-1	-9.13105E0	-9.1423E0	5.24521E-3	9.3317E-2	2.73063E1	-3.26314E1	-3.25551E1	2.68016E1	1.73605E-7	2.52061E-3	2.52061E-3	6.3074E-3	1.9883E-1