[Scan]
initial_time=2016-02-16T01:14:31
final_time=2016-02-16T01:14:50
ip_count=19
run=1030
dataset=4
scan=321
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08832E-4
ql1_vset=
ql1_vmon=-8.16751E-1
ql1_imon=6.04188E-10
ql2_vset=
ql2_vmon=-7.97486E-1
ql2_imon=2.84278E-10
ql3_vset=
ql3_vmon=-9.13155E0
ql3_imon=5.01955E-10
ql4_vset=
ql4_vmon=-9.14209E0
ql4_imon=5.10693E-10
mult1=-1.03785E-8
mult2=-2.73857E-9
rf_tmon=-4.50642E-3
rf_agc=3.24323E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=3.52633E-10
bslens_vset=-6.2E0
bslens_vmon=-6.59284E0
bslens_imon=2.51973E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19688E1
lens5a_imon=1.96E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12466E2
lens4a_imon=2.05219E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53832E1
cs_ef1b_imon=3.0573E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04653E2
lens23_imon=1.02377E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05108E1
cs_ea1_imon=2.21523E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37316E0
lens1_imon=2.76126E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64542E1
os_ef1alow_imon=2.98847E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04123E1
cs_ea2_imon=1.58869E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83908E1
cs_ef1a_imon=3.00072E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=3.58927E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11123E1
os_restr1_imon=2.89332E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1539E1
os_ea1_imon=1.8861E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63767E1
os_ef1bup_imon=3.09154E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28935E0
cs_ionrep_imon=1.25487E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91869E2
cs_nozzle_imon=1.93712E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01701E1
cs_anode1_imon=3.25084E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=6.60729E-10
tplens_vset=1.4E-1
tplens_vmon=1.65946E0
tplens_imon=-1.58753E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2641E1
iondef3_imon=1.51767E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26747E1
iondef2_imon=1.57283E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02919E2
lens6_imon=2.98696E-4
ql6_vset=1.0E-1
ql6_vmon=9.31501E-2
ql6_imon=3.51536E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30858E0
ionrepsh_imon=2.0029E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33465E1
lens5b_imon=2.2192E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74862E1
cs_ef2b_imon=3.12938E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.66143E-1
os_ea2_imon=-7.42755E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.00868E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7112E1
cs_ef2a_imon=3.18416E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61858E0
os_ef2alow_imon=-2.48976E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.11529E-1
os_ef2bup_imon=-5.13868E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10949E1
os_restr2_imon=2.87458E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23086E2
cs_ionfoca_imon=6.28739E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01749E1
cs_anode2_imon=2.30191E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73381E1
iondef1_imon=1.10418E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67734E1
iondef4_imon=1.08485E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.86075E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=2.57254E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12113E0
cs_ionaccel_imon=-2.0753E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02074E2
cs_ionfocb_imon=1.47298E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56225E1
einzel_imon=7.56891E-6
window_vset=0.0E0
window_vmon=1.81303E-1
window_imon=-9.40055E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82609E2
mask1_imon=2.39142E-4
mask2_vset=0.0E0
mask2_vmon=-1.86386E1
mask2_imon=-5.79658E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92659E3
multa_neg_imon=7.1557E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93704E3
defgrida_imon=6.95382E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50148E3
multb_neg_imon=7.41886E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.55495E0
defgridb_imon=6.30132E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33939E1
os_fil1_imon=4.77022E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.79755E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66042E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30807E1
cs_fil1_imon=1.00843E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62684E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66149E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.15109E-2
os_fil2_imon=-2.34161E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.59912E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.83968E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3263E-1
cs_fil2_imon=-2.28755E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10618E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22482E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=1.9951E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.86632E-1
res40_imon=-2.62671E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.16441E-1	-7.97439E-1	-9.13141E0	-9.14228E0	5.126E-3	9.3174E-2	2.72786E1	-3.26773E1	-3.26236E1	2.6829E1	1.73605E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.00363E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09572E0	-8.16512E-1	-7.97749E-1	-9.13143E0	-9.14226E0	5.17368E-3	9.31978E-2	2.72877E1	-3.26831E1	-3.25888E1	2.67826E1	1.73605E-7	2.51954E-3	2.51954E-3	6.31817E-3	1.9968E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.16178E-1	-7.97844E-1	-9.13119E0	-9.14211E0	4.91142E-3	9.35316E-2	2.73033E1	-3.26703E1	-3.26077E1	2.68128E1	1.73758E-7	2.51136E-3	2.51136E-3	6.32978E-3	1.99224E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09603E0	-8.1625E-1	-7.97987E-1	-9.13122E0	-9.14195E0	4.76837E-3	9.34362E-2	2.72871E1	-3.26543E1	-3.26723E1	2.67926E1	1.73679E-7	2.51954E-3	2.51954E-3	6.33436E-3	1.99E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09619E0	-8.1625E-1	-7.98249E-1	-9.13126E0	-9.14218E0	5.34058E-3	9.34124E-2	2.73009E1	-3.26717E1	-3.26302E1	2.67752E1	1.73642E-7	2.51607E-3	2.51607E-3	6.32936E-3	1.9937E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09572E0	-8.16393E-1	-7.98321E-1	-9.13112E0	-9.14216E0	4.86374E-3	9.31501E-2	2.72817E1	-3.26458E1	-3.26296E1	2.67806E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.16464E-1	-7.9813E-1	-9.13174E0	-9.14197E0	5.14984E-3	9.33409E-2	2.72829E1	-3.26476E1	-3.2623E1	2.68016E1	1.73755E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.99283E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.16107E-1	-7.98249E-1	-9.13107E0	-9.14221E0	5.31673E-3	9.32932E-2	2.72787E1	-3.26693E1	-3.26314E1	2.68022E1	1.73605E-7	2.51007E-3	2.51007E-3	6.31837E-3	1.9911E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.16584E-1	-7.97582E-1	-9.13124E0	-9.14185E0	4.98295E-3	9.32455E-2	2.72973E1	-3.26284E1	-3.2623E1	2.67956E1	1.7368E-7	2.51225E-3	2.51225E-3	6.29098E-3	1.9911E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-8.16607E-1	-7.98035E-1	-9.13119E0	-9.14195E0	5.03063E-3	9.33647E-2	2.73193E1	-3.26986E1	-3.25658E1	2.68052E1	1.73605E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.9911E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.16464E-1	-7.97963E-1	-9.13122E0	-9.14187E0	5.14984E-3	9.28164E-2	2.72997E1	-3.26825E1	-3.2647E1	2.67914E1	1.73605E-7	2.51739E-3	2.51739E-3	6.33977E-3	1.98491E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-8.16607E-1	-7.98178E-1	-9.13122E0	-9.14195E0	5.24521E-3	9.3174E-2	2.73204E1	-3.26667E1	-3.25599E1	2.68221E1	1.73605E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.99977E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.16464E-1	-7.98154E-1	-9.13103E0	-9.14221E0	5.19753E-3	9.31501E-2	2.74042E1	-3.26651E1	-3.24878E1	2.67782E1	1.73679E-7	2.51739E-3	2.51739E-3	6.28056E-3	1.98491E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09356E0	-8.16321E-1	-7.97629E-1	-9.13119E0	-9.14218E0	5.38826E-3	9.30309E-2	2.72984E1	-3.26572E1	-3.2645E1	2.68593E1	1.7368E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.9963E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09449E0	-8.16226E-1	-7.98249E-1	-9.1315E0	-9.14237E0	5.126E-3	9.31025E-2	2.73147E1	-3.26675E1	-3.26152E1	2.6813E1	1.73912E-7	2.51804E-3	2.51804E-3	6.31858E-3	1.99401E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0948E0	-8.16655E-1	-7.97725E-1	-9.13122E0	-9.14214E0	4.79221E-3	9.31025E-2	2.73228E1	-3.26602E1	-3.26502E1	2.68196E1	1.7368E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.99283E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09549E0	-8.16369E-1	-7.98082E-1	-9.13136E0	-9.14195E0	5.29289E-3	9.2864E-2	2.72916E1	-3.26303E1	-3.26664E1	2.67698E1	1.73753E-7	2.51632E-3	2.51632E-3	6.29665E-3	1.9934E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.16417E-1	-7.98106E-1	-9.13105E0	-9.14214E0	4.98295E-3	9.32693E-2	2.72833E1	-3.26673E1	-3.26231E1	2.67944E1	1.73681E-7	2.51136E-3	2.51136E-3	6.33538E-3	1.99048E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.16607E-1	-7.97963E-1	-9.13122E0	-9.14199E0	4.95911E-3	9.3317E-2	2.73252E1	-3.26762E1	-3.26372E1	2.67893E1	1.73753E-7	2.51847E-3	2.51847E-3	6.32356E-3	1.98322E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.16751E-1	-7.97486E-1	-9.13155E0	-9.14209E0	5.19753E-3	9.31501E-2	2.73381E1	-3.26747E1	-3.2641E1	2.67734E1	1.73605E-7	2.51525E-3	2.51525E-3	6.29665E-3	1.9951E-1