[Scan]
initial_time=2016-02-16T01:14:57
final_time=2016-02-16T01:15:17
ip_count=19
run=1030
dataset=4
scan=322
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08766E-4
ql1_vset=
ql1_vmon=-8.16417E-1
ql1_imon=6.56891E-10
ql2_vset=
ql2_vmon=-7.97939E-1
ql2_imon=2.85554E-10
ql3_vset=
ql3_vmon=-9.131E0
ql3_imon=5.60033E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=5.20849E-10
mult1=-9.72397E-9
mult2=-2.73306E-9
rf_tmon=-4.43279E-3
rf_agc=3.38341E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=3.65126E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6366E0
bslens_imon=2.79385E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20122E1
lens5a_imon=1.98506E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12511E2
lens4a_imon=2.05042E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53742E1
cs_ef1b_imon=3.06562E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0464E2
lens23_imon=1.02214E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04644E1
cs_ea1_imon=2.20426E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38943E0
lens1_imon=2.49017E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65062E1
os_ef1alow_imon=2.99945E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04015E1
cs_ea2_imon=1.58638E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84284E1
cs_ef1a_imon=3.02047E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=3.81601E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11467E1
os_restr1_imon=2.8675E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.153E1
os_ea1_imon=1.88851E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63519E1
os_ef1bup_imon=3.09559E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25469E0
cs_ionrep_imon=1.27764E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91872E2
cs_nozzle_imon=1.93455E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0177E1
cs_anode1_imon=3.25362E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20539E0
olens4_imon=6.79874E-10
tplens_vset=1.4E-1
tplens_vmon=1.60055E0
tplens_imon=-3.16938E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2629E1
iondef3_imon=1.49917E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26242E1
iondef2_imon=1.56692E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02944E2
lens6_imon=2.98404E-4
ql6_vset=1.0E-1
ql6_vmon=9.30786E-2
ql6_imon=3.53396E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25404E0
ionrepsh_imon=1.9835E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33963E1
lens5b_imon=2.19413E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74391E1
cs_ef2b_imon=3.12673E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.94334E-1
os_ea2_imon=-4.22059E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06133E2
lens4b_imon=2.0049E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71076E1
cs_ef2a_imon=3.19835E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64359E0
os_ef2alow_imon=-2.51773E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.40121E-1
os_ef2bup_imon=-5.19951E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10883E1
os_restr2_imon=2.86634E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23134E2
cs_ionfoca_imon=6.32498E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01783E1
cs_anode2_imon=2.2786E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73482E1
iondef1_imon=1.08725E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67704E1
iondef4_imon=1.09885E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=1.81743E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81903E-1
olens1_imon=2.44415E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12041E0
cs_ionaccel_imon=-2.03508E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47265E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55925E1
einzel_imon=7.63335E-6
window_vset=0.0E0
window_vmon=2.03599E-1
window_imon=-7.58415E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82612E2
mask1_imon=2.39006E-4
mask2_vset=0.0E0
mask2_vmon=-1.86727E1
mask2_imon=-5.56016E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.55931E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93736E3
defgrida_imon=6.76506E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50114E3
multb_neg_imon=7.17387E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.60488E0
defgridb_imon=6.2745E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33971E1
os_fil1_imon=4.56791E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.56497E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6602E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30853E1
cs_fil1_imon=1.00832E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62651E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65723E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.14955E-2
os_fil2_imon=-2.31494E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.66449E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.9827E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32169E-1
cs_fil2_imon=-2.56794E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.37624E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22455E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.00192E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40094E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.19717E-1
res40_imon=-2.50994E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-8.16536E-1	-7.97749E-1	-9.13188E0	-9.14245E0	5.48363E-3	9.29594E-2	2.72915E1	-3.26909E1	-3.26561E1	2.6795E1	1.73605E-7	2.52147E-3	2.52147E-3	6.3074E-3	2.00345E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.16107E-1	-7.98368E-1	-9.13157E0	-9.14209E0	5.26905E-3	9.33886E-2	2.73027E1	-3.27056E1	-3.26254E1	2.67728E1	1.73679E-7	2.5131E-3	2.5131E-3	6.31278E-3	2.00363E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.16917E-1	-7.98273E-1	-9.13131E0	-9.14228E0	5.6982E-3	9.34362E-2	2.73034E1	-3.26886E1	-3.26446E1	2.68001E1	1.73605E-7	2.5225E-3	2.5225E-3	6.29067E-3	1.99048E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.16321E-1	-7.97963E-1	-9.13112E0	-9.14187E0	5.48363E-3	9.33409E-2	2.72967E1	-3.26819E1	-3.25954E1	2.67998E1	1.73823E-7	2.51603E-3	2.51603E-3	6.32328E-3	1.98727E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.16059E-1	-7.98011E-1	-9.13126E0	-9.14216E0	5.79357E-3	9.32455E-2	2.73165E1	-3.26603E1	-3.26158E1	2.6798E1	1.73605E-7	2.52318E-3	2.52318E-3	6.30192E-3	1.98764E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09348E0	-8.16345E-1	-7.98154E-1	-9.13143E0	-9.14211E0	5.36442E-3	9.34124E-2	2.72546E1	-3.265E1	-3.26218E1	2.68136E1	1.7368E-7	2.52209E-3	2.52209E-3	6.3074E-3	1.99456E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.16369E-1	-7.97892E-1	-9.13117E0	-9.14207E0	5.55515E-3	9.34362E-2	2.73145E1	-3.2626E1	-3.26354E1	2.68244E1	1.7368E-7	2.50789E-3	2.50789E-3	6.31837E-3	1.99803E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.16417E-1	-7.97796E-1	-9.13115E0	-9.14226E0	5.36442E-3	9.35316E-2	2.73051E1	-3.26729E1	-3.26404E1	2.6792E1	1.73679E-7	2.52276E-3	2.52276E-3	6.31817E-3	1.9951E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09441E0	-8.16178E-1	-7.9782E-1	-9.13138E0	-9.14221E0	5.126E-3	9.34362E-2	2.73111E1	-3.26639E1	-3.26422E1	2.68023E1	1.7368E-7	2.51771E-3	2.51771E-3	6.34588E-3	1.99803E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09356E0	-8.16298E-1	-7.98202E-1	-9.13107E0	-9.14218E0	4.95911E-3	9.31978E-2	2.73352E1	-3.27287E1	-3.25871E1	2.67858E1	1.73605E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.01372E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.16226E-1	-7.98345E-1	-9.1311E0	-9.14211E0	4.95911E-3	9.31978E-2	2.73033E1	-3.2662E1	-3.26113E1	2.68016E1	1.73679E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.00363E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09379E0	-8.16679E-1	-7.9844E-1	-9.13095E0	-9.14228E0	5.34058E-3	9.31025E-2	2.72684E1	-3.26248E1	-3.26242E1	2.68001E1	1.73679E-7	2.52061E-3	2.52061E-3	6.30202E-3	1.9934E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.16464E-1	-7.98225E-1	-9.13091E0	-9.14221E0	5.26905E-3	9.33886E-2	2.72186E1	-3.26627E1	-3.27534E1	2.6807E1	1.73827E-7	2.51739E-3	2.51739E-3	6.31278E-3	1.99E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09565E0	-8.1625E-1	-7.98249E-1	-9.13098E0	-9.14199E0	5.24521E-3	9.3317E-2	2.73204E1	-3.26484E1	-3.26242E1	2.681E1	1.73605E-7	2.51334E-3	2.51334E-3	6.32936E-3	1.98247E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.16727E-1	-7.97868E-1	-9.13103E0	-9.14209E0	5.67436E-3	9.31263E-2	2.73204E1	-3.26614E1	-3.26136E1	2.68034E1	1.7368E-7	2.51007E-3	2.51007E-3	6.31288E-3	1.9911E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.16488E-1	-7.97677E-1	-9.1311E0	-9.14233E0	5.36442E-3	9.32693E-2	2.73291E1	-3.26567E1	-3.26086E1	2.67914E1	1.73605E-7	2.52061E-3	2.52061E-3	6.32356E-3	1.98661E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-8.16321E-1	-7.98178E-1	-9.13105E0	-9.14209E0	5.53131E-3	9.31978E-2	2.73345E1	-3.26795E1	-3.2629E1	2.68208E1	1.7368E-7	2.5199E-3	2.5199E-3	6.30192E-3	1.99456E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.16512E-1	-7.97987E-1	-9.13105E0	-9.14195E0	5.57899E-3	9.31025E-2	2.7298E1	-3.26714E1	-3.26119E1	2.68047E1	1.73605E-7	2.52209E-3	2.52209E-3	6.29645E-3	1.99803E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.16298E-1	-7.98178E-1	-9.13081E0	-9.14218E0	5.55515E-3	9.32455E-2	2.7257E1	-3.26627E1	-3.26338E1	2.67818E1	1.73679E-7	2.51525E-3	2.51525E-3	6.33436E-3	2.00876E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.16417E-1	-7.97939E-1	-9.131E0	-9.14202E0	5.45979E-3	9.30786E-2	2.73482E1	-3.26242E1	-3.2629E1	2.67704E1	1.73605E-7	2.52169E-3	2.52169E-3	6.32896E-3	2.00192E-1