[Scan]
initial_time=2016-02-16T01:15:24
final_time=2016-02-16T01:15:44
ip_count=19
run=1030
dataset=4
scan=323
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09426E0
qbias_imon=-1.08745E-4
ql1_vset=
ql1_vmon=-8.1656E-1
ql1_imon=6.05857E-10
ql2_vset=
ql2_vmon=-7.97844E-1
ql2_imon=2.82311E-10
ql3_vset=
ql3_vmon=-9.13141E0
ql3_imon=5.02312E-10
ql4_vset=
ql4_vmon=-9.14214E0
ql4_imon=4.97305E-10
mult1=-9.09742E-9
mult2=-2.51661E-9
rf_tmon=-3.75178E-3
rf_agc=3.46266E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=3.74007E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68056E0
bslens_imon=2.88022E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19568E1
lens5a_imon=1.96613E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12548E2
lens4a_imon=2.05183E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53388E1
cs_ef1b_imon=3.04829E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02204E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05198E1
cs_ea1_imon=2.22749E-5
lens1_vset=-5.0E0
lens1_vmon=-5.30467E0
lens1_imon=2.69637E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64644E1
os_ef1alow_imon=2.9827E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03955E1
cs_ea2_imon=1.57066E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83781E1
cs_ef1a_imon=3.00036E-5
olens2_vset=9.7E-1
olens2_vmon=9.70554E-1
olens2_imon=3.65043E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1143E1
os_restr1_imon=2.88035E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15432E1
os_ea1_imon=1.88898E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63659E1
os_ef1bup_imon=3.0937E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26411E0
cs_ionrep_imon=1.2455E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91889E2
cs_nozzle_imon=1.93384E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01695E1
cs_anode1_imon=3.23606E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=6.80435E-10
tplens_vset=1.4E-1
tplens_vmon=1.63963E0
tplens_imon=-1.47938E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26022E1
iondef3_imon=1.51551E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26671E1
iondef2_imon=1.58364E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02945E2
lens6_imon=2.98378E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=3.5131E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26351E0
ionrepsh_imon=2.02741E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33556E1
lens5b_imon=2.17485E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74537E1
cs_ef2b_imon=3.13226E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.69147E-1
os_ea2_imon=-1.69568E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0613E2
lens4b_imon=2.00237E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71462E1
cs_ef2a_imon=3.19353E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62999E0
os_ef2alow_imon=-2.5258E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.36757E-1
os_ef2bup_imon=-5.26481E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10697E1
os_restr2_imon=2.88143E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2308E2
cs_ionfoca_imon=6.32632E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01851E1
cs_anode2_imon=2.29326E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72777E1
iondef1_imon=1.1031E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68241E1
iondef4_imon=1.08557E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.87057E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81808E-1
olens1_imon=2.63989E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11573E0
cs_ionaccel_imon=-2.0681E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02049E2
cs_ionfocb_imon=1.47309E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56465E1
einzel_imon=7.86804E-6
window_vset=0.0E0
window_vmon=2.01125E-1
window_imon=-1.04817E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.39138E-4
mask2_vset=0.0E0
mask2_vmon=-1.86356E1
mask2_imon=-6.73362E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92674E3
multa_neg_imon=8.17229E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93697E3
defgrida_imon=6.60774E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=6.98626E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.28126E0
defgridb_imon=5.97327E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33966E1
os_fil1_imon=4.89635E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.4792E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65374E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30818E1
cs_fil1_imon=1.00783E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6281E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.661E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.08661E-2
os_fil2_imon=-2.36564E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.53906E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.18383E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29004E-1
cs_fil2_imon=-2.27554E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25635E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22497E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30182E-3
inlet_lpb_pmon=2.00108E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.5147E-3
foreline_cvt_pmon=2.5147E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.54196E-1
res40_imon=-2.51859E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=148
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.16488E-1	-7.98202E-1	-9.13136E0	-9.14185E0	5.126E-3	9.31263E-2	2.72874E1	-3.26278E1	-3.26189E1	2.68041E1	1.73758E-7	2.5147E-3	2.5147E-3	6.27954E-3	1.99401E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.16655E-1	-7.9782E-1	-9.13126E0	-9.14185E0	5.26905E-3	9.33886E-2	2.72984E1	-3.26701E1	-3.26676E1	2.67957E1	1.73605E-7	2.51393E-3	2.51393E-3	6.2863E-3	1.99061E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.16536E-1	-7.9782E-1	-9.13112E0	-9.14199E0	5.29289E-3	9.32455E-2	2.72727E1	-3.26532E1	-3.26202E1	2.68099E1	1.73681E-7	2.52139E-3	2.52139E-3	6.3074E-3	2.00463E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-8.16417E-1	-7.9751E-1	-9.13129E0	-9.14204E0	5.14984E-3	9.33647E-2	2.72913E1	-3.26591E1	-3.26464E1	2.681E1	1.73605E-7	2.51393E-3	2.51393E-3	6.29684E-3	2.00064E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.16321E-1	-7.97653E-1	-9.13124E0	-9.14209E0	5.43594E-3	9.32217E-2	2.73003E1	-3.26627E1	-3.26663E1	2.68046E1	1.7368E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.00499E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.16441E-1	-7.97796E-1	-9.13119E0	-9.14211E0	5.38826E-3	9.33886E-2	2.73021E1	-3.26735E1	-3.25942E1	2.67836E1	1.73605E-7	2.51334E-3	2.51334E-3	6.30192E-3	1.99803E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.16464E-1	-7.98082E-1	-9.13115E0	-9.14202E0	5.72205E-3	9.3174E-2	2.72769E1	-3.2635E1	-3.26915E1	2.67704E1	1.73605E-7	2.51804E-3	2.51804E-3	6.29067E-3	1.99401E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.16369E-1	-7.97772E-1	-9.13124E0	-9.14216E0	5.10216E-3	9.34124E-2	2.73033E1	-3.26194E1	-3.2626E1	2.6789E1	1.73605E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.00847E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.16131E-1	-7.97725E-1	-9.13138E0	-9.14221E0	5.03063E-3	9.32932E-2	2.72727E1	-3.26634E1	-3.26242E1	2.68124E1	1.73605E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.00151E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.15916E-1	-7.98059E-1	-9.13129E0	-9.14209E0	5.29289E-3	9.31978E-2	2.72955E1	-3.26554E1	-3.26176E1	2.68082E1	1.73605E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.98592E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.1625E-1	-7.98249E-1	-9.13191E0	-9.14197E0	5.45979E-3	9.3174E-2	2.72997E1	-3.26627E1	-3.26326E1	2.68076E1	1.73835E-7	2.52027E-3	2.52027E-3	6.32978E-3	1.97994E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09603E0	-8.15988E-1	-7.97939E-1	-9.13177E0	-9.14195E0	5.03063E-3	9.31025E-2	2.73246E1	-3.26307E1	-3.26585E1	2.68154E1	1.73753E-7	2.51739E-3	2.51739E-3	6.31278E-3	1.96973E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.16035E-1	-7.97915E-1	-9.13177E0	-9.14214E0	5.00679E-3	9.32455E-2	2.71909E1	-3.25179E1	-3.26314E1	2.67914E1	1.73605E-7	2.51552E-3	2.51552E-3	6.33486E-3	1.98419E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.16274E-1	-7.97844E-1	-9.13153E0	-9.1423E0	5.07832E-3	9.31501E-2	2.73147E1	-3.26969E1	-3.26422E1	2.6789E1	1.73605E-7	2.51552E-3	2.51552E-3	6.31014E-3	1.97989E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09595E0	-8.15725E-1	-7.97582E-1	-9.1316E0	-9.14211E0	4.95911E-3	9.30786E-2	2.73081E1	-3.27011E1	-3.259E1	2.67896E1					
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.15773E-1	-7.97892E-1	-9.1315E0	-9.14221E0	5.07832E-3	9.35793E-2	2.73228E1	-3.26962E1	-3.26349E1	2.68023E1	1.73755E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.98764E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.1594E-1	-7.97129E-1	-9.13153E0	-9.14214E0	4.95911E-3	9.33647E-2	2.73289E1	-3.2661E1	-3.26321E1	2.68297E1	1.73679E-7	2.51632E-3	2.51632E-3	6.31278E-3	1.9883E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-8.1625E-1	-7.97963E-1	-9.13169E0	-9.14226E0	5.22137E-3	9.31978E-2	2.73074E1	-3.26852E1	-3.26459E1	2.68192E1	1.73667E-7	2.51747E-3	2.51747E-3	6.31651E-3	1.99091E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.16059E-1	-7.97796E-1	-9.13143E0	-9.14216E0	5.6982E-3	9.32693E-2	2.73382E1	-3.27134E1	-3.25649E1	2.68038E1	1.73677E-7	2.51814E-3	2.51814E-3	6.30212E-3	1.98727E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09426E0	-8.1656E-1	-7.97844E-1	-9.13141E0	-9.14214E0	5.48363E-3	9.3317E-2	2.72777E1	-3.26671E1	-3.26022E1	2.68241E1	1.73605E-7	2.5147E-3	2.5147E-3	6.30182E-3	2.00108E-1