[Scan]
initial_time=2016-02-16T01:15:51
final_time=2016-02-16T01:23:54
ip_count=19
run=1030
dataset=4
scan=324
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08704E-4
ql1_vset=
ql1_vmon=-8.16131E-1
ql1_imon=6.01769E-10
ql2_vset=
ql2_vmon=-7.98225E-1
ql2_imon=3.21317E-10
ql3_vset=
ql3_vmon=-9.13141E0
ql3_imon=5.05149E-10
ql4_vset=
ql4_vmon=-9.14216E0
ql4_imon=5.31542E-10
mult1=-1.02652E-8
mult2=-2.82617E-9
rf_tmon=-5.06271E-3
rf_agc=3.37181E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=3.66378E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64571E0
bslens_imon=2.69998E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19845E1
lens5a_imon=1.98884E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.125E2
lens4a_imon=2.05295E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5331E1
cs_ef1b_imon=3.06775E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04595E2
lens23_imon=1.02269E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05156E1
cs_ea1_imon=2.1918E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36355E0
lens1_imon=2.58462E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6462E1
os_ef1alow_imon=2.95891E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04237E1
cs_ea2_imon=1.57211E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84184E1
cs_ef1a_imon=3.03171E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=3.77154E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1134E1
os_restr1_imon=2.84755E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15414E1
os_ea1_imon=1.89115E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63665E1
os_ef1bup_imon=3.07821E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24549E0
cs_ionrep_imon=1.27326E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9186E2
cs_nozzle_imon=1.93384E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02085E1
cs_anode1_imon=3.27246E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20539E0
olens4_imon=6.5217E-10
tplens_vset=1.4E-1
tplens_vmon=1.59096E0
tplens_imon=-1.98407E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26241E1
iondef3_imon=1.51695E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26852E1
iondef2_imon=1.59554E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03013E2
lens6_imon=2.98519E-4
ql6_vset=1.0E-1
ql6_vmon=9.30786E-2
ql6_imon=3.64769E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28635E0
ionrepsh_imon=2.0065E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33784E1
lens5b_imon=2.17017E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74453E1
cs_ef2b_imon=3.13659E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.61337E-1
os_ea2_imon=-5.19248E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06128E2
lens4b_imon=2.00706E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71474E1
cs_ef2a_imon=3.19858E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65162E0
os_ef2alow_imon=-2.4357E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.34955E-1
os_ef2bup_imon=-5.3441E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10811E1
os_restr2_imon=2.87314E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.31334E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01671E1
cs_anode2_imon=2.28281E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73102E1
iondef1_imon=1.12185E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67851E1
iondef4_imon=1.06972E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.89453E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=2.84636E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0965E0
cs_ionaccel_imon=-1.7113E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47205E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56327E1
einzel_imon=7.81037E-6
window_vset=0.0E0
window_vmon=2.02927E-1
window_imon=-1.1599E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82658E2
mask1_imon=2.3916E-4
mask2_vset=0.0E0
mask2_vmon=-1.86074E1
mask2_imon=-5.07579E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92607E3
multa_neg_imon=7.5919E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=7.07278E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.26745E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36247E0
defgridb_imon=6.17155E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33955E1
os_fil1_imon=5.3048E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.01979E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65937E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30826E1
cs_fil1_imon=1.00824E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62438E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65738E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.1124E-2
os_fil2_imon=-2.43171E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.04612E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.9299E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32889E-1
cs_fil2_imon=-2.53382E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.37668E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22322E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29703E-3
inlet_lpb_pmon=1.98955E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51886E-3
foreline_cvt_pmon=2.51886E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.47589E-1
res40_imon=-2.55103E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.16488E-1	-7.9844E-1	-9.13131E0	-9.14226E0	5.34058E-3	9.29356E-2	2.73128E1	-3.26549E1	-3.26626E1	2.67583E1	1.73758E-7	2.52697E-3	2.52697E-3	6.32978E-3	1.98872E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09433E0	-8.16512E-1	-7.98106E-1	-9.13134E0	-9.14209E0	5.10216E-3	9.29356E-2	2.72782E1	-3.26897E1	-3.26015E1	2.68106E1	1.73605E-7	2.50989E-3	2.50989E-3	6.31278E-3	1.99E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.16584E-1	-7.97987E-1	-9.13115E0	-9.14247E0	5.17368E-3	9.32455E-2	2.72962E1	-3.26366E1	-3.26785E1	2.68082E1	1.73605E-7	2.52027E-3	2.52027E-3	6.31299E-3	1.98872E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.16655E-1	-7.97749E-1	-9.13134E0	-9.14223E0	4.81606E-3	9.30548E-2	2.72738E1	-3.26903E1	-3.26133E1	2.68094E1	1.7375E-7	2.51077E-3	2.51077E-3	6.3074E-3	2.00903E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.1625E-1	-7.98249E-1	-9.13122E0	-9.14207E0	5.05447E-3	9.30309E-2	2.73502E1	-3.26122E1	-3.26308E1	2.68018E1	1.73531E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.00363E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09402E0	-8.16798E-1	-7.98082E-1	-9.13134E0	-9.14192E0	4.95911E-3	9.33886E-2	2.73429E1	-3.26128E1	-3.27119E1	2.67746E1	1.73679E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.00534E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.1625E-1	-7.9813E-1	-9.13141E0	-9.14207E0	4.91142E-3	9.32455E-2	2.72796E1	-3.26393E1	-3.26451E1	2.68202E1	1.73605E-7	2.51334E-3	2.51334E-3	6.3074E-3	1.98592E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.16441E-1	-7.97606E-1	-9.13134E0	-9.14223E0	5.03063E-3	9.29117E-2	2.72659E1	-3.2634E1	-3.26578E1	2.678E1	1.73753E-7	2.51525E-3	2.51525E-3	6.29665E-3	1.9985E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.16059E-1	-7.98011E-1	-9.13138E0	-9.14223E0	5.22137E-3	9.32455E-2	2.73255E1	-3.27083E1	-3.26104E1	2.67968E1	1.73681E-7	2.52027E-3	2.52027E-3	6.32418E-3	1.99048E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09402E0	-8.15892E-1	-7.98035E-1	-9.13129E0	-9.14242E0	5.43594E-3	9.30071E-2	2.73285E1	-3.26464E1	-3.26488E1	2.67908E1	1.73605E-7	2.50775E-3	2.50775E-3	6.31278E-3	1.98322E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09364E0	-8.16202E-1	-7.98154E-1	-9.13148E0	-9.14245E0	5.43594E-3	9.31501E-2	2.72895E1	-3.26693E1	-3.26464E1	2.68226E1	1.73605E-7	2.50898E-3	2.50898E-3	6.31837E-3	1.98937E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0941E0	-8.16393E-1	-7.98059E-1	-9.13141E0	-9.14235E0	5.43594E-3	9.30071E-2	2.73111E1	-3.26915E1	-3.26176E1	2.67902E1	1.73528E-7	2.51136E-3	2.51136E-3	6.29624E-3	1.99401E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-8.16393E-1	-7.98488E-1	-9.13131E0	-9.14218E0	5.43594E-3	9.30548E-2	2.74437E1	-3.27741E1	-3.2511E1	2.6792E1	1.73605E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.01047E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.16202E-1	-7.98059E-1	-9.13115E0	-9.14214E0	5.45979E-3	9.31978E-2	2.72709E1	-3.26632E1	-3.26172E1	2.6807E1	1.73605E-7	2.52384E-3	2.52384E-3	6.32356E-3	2.00363E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-8.16035E-1	-7.97915E-1	-9.131E0	-9.14197E0	5.26905E-3	9.30309E-2	2.73045E1	-3.26741E1	-3.26212E1	2.67974E1	1.73906E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.01372E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09348E0	-8.16298E-1	-7.97915E-1	-9.13136E0	-9.14211E0	5.50747E-3	9.31025E-2	2.7341E1	-3.26357E1	-3.26511E1	2.67955E1	1.7368E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.00151E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0934E0	-8.16751E-1	-7.97796E-1	-9.13157E0	-9.14235E0	5.17368E-3	9.33409E-2	2.72943E1	-3.26489E1	-3.26826E1	2.67546E1	1.73819E-7	2.52301E-3	2.52301E-3	6.30221E-3	1.99611E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0941E0	-8.16631E-1	-7.97772E-1	-9.13162E0	-9.14216E0	5.24521E-3	9.32693E-2	2.72467E1	-3.26767E1	-3.26124E1	2.6789E1	1.73605E-7	2.50949E-3	2.50949E-3	6.33065E-3	1.99466E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.16393E-1	-7.98035E-1	-9.1316E0	-9.14218E0	5.29289E-3	9.3174E-2	2.73022E1	-3.26323E1	-3.26721E1	2.68082E1	1.73679E-7	2.52169E-3	2.52169E-3	6.32356E-3	1.9968E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-8.16131E-1	-7.98225E-1	-9.13141E0	-9.14216E0	5.126E-3	9.30786E-2	2.73102E1	-3.26852E1	-3.26241E1	2.67851E1	1.73605E-7	2.51886E-3	2.51886E-3	6.29703E-3	1.98955E-1