[Scan]
initial_time=2016-02-16T01:24:28
final_time=2016-02-16T01:24:47
ip_count=19
run=1030
dataset=4
scan=326
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08777E-4
ql1_vset=
ql1_vmon=-8.16154E-1
ql1_imon=5.81038E-10
ql2_vset=
ql2_vmon=-7.97963E-1
ql2_imon=2.49267E-10
ql3_vset=
ql3_vmon=-9.13157E0
ql3_imon=5.8825E-10
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=4.85039E-10
mult1=-1.08615E-8
mult2=-2.88056E-9
rf_tmon=-2.83816E-3
rf_agc=3.4969E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.55515E-3
ql5_imon=3.55411E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64675E0
bslens_imon=2.63528E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19518E1
lens5a_imon=1.98474E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12503E2
lens4a_imon=2.05266E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53789E1
cs_ef1b_imon=3.03187E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04673E2
lens23_imon=1.02174E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04823E1
cs_ea1_imon=2.19958E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41857E0
lens1_imon=2.58219E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64742E1
os_ef1alow_imon=2.98808E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03767E1
cs_ea2_imon=1.55966E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84139E1
cs_ef1a_imon=3.02457E-5
olens2_vset=9.7E-1
olens2_vmon=9.70626E-1
olens2_imon=3.59964E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11106E1
os_restr1_imon=2.86888E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15323E1
os_ea1_imon=1.88104E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63844E1
os_ef1bup_imon=3.10276E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.258E0
cs_ionrep_imon=1.27509E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91882E2
cs_nozzle_imon=1.93639E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01693E1
cs_anode1_imon=3.24386E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=6.68156E-10
tplens_vset=1.4E-1
tplens_vmon=1.5677E0
tplens_imon=-2.42257E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26321E1
iondef3_imon=1.50091E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27136E1
iondef2_imon=1.58656E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02995E2
lens6_imon=2.98664E-4
ql6_vset=1.0E-1
ql6_vmon=9.36747E-2
ql6_imon=3.49939E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22673E0
ionrepsh_imon=2.00527E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3384E1
lens5b_imon=2.19746E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.14377E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.8348E-1
os_ea2_imon=-5.18331E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06158E2
lens4b_imon=2.0069E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71107E1
cs_ef2a_imon=3.19138E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.59786E0
os_ef2alow_imon=-2.59543E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.49736E-1
os_ef2bup_imon=-5.11847E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10886E1
os_restr2_imon=2.86401E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23083E2
cs_ionfoca_imon=6.31273E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02E1
cs_anode2_imon=2.28538E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72806E1
iondef1_imon=1.09033E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6786E1
iondef4_imon=1.08364E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.84506E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=2.8528E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11508E0
cs_ionaccel_imon=-1.93514E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02092E2
cs_ionfocb_imon=1.47275E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56214E1
einzel_imon=7.93806E-6
window_vset=0.0E0
window_vmon=1.9278E-1
window_imon=-1.1393E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82636E2
mask1_imon=2.39227E-4
mask2_vset=0.0E0
mask2_vmon=-1.86373E1
mask2_imon=-5.17233E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92585E3
multa_neg_imon=7.15157E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.85072E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.00999E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.54139E0
defgridb_imon=6.42245E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33955E1
os_fil1_imon=4.57672E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.60598E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66262E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30781E1
cs_fil1_imon=1.00847E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62534E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65885E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.10396E-2
os_fil2_imon=-2.368E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.21909E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.77743E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32149E-1
cs_fil2_imon=-2.46646E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2926E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22374E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=1.98937E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51225E-3
foreline_cvt_pmon=2.51225E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.38558E-1
res40_imon=-2.68579E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=177
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-8.16345E-1	-7.97772E-1	-9.13134E0	-9.14187E0	5.26905E-3	9.30071E-2	2.73135E1	-3.26867E1	-3.26518E1	2.67668E1	1.73679E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.01047E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.16059E-1	-7.98035E-1	-9.13124E0	-9.14192E0	5.26905E-3	9.32217E-2	2.72971E1	-3.26799E1	-3.26052E1	2.67726E1	1.73605E-7	2.51225E-3	2.51225E-3	6.29645E-3	1.99803E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-8.16584E-1	-7.98202E-1	-9.13126E0	-9.14192E0	4.91142E-3	9.28402E-2	2.72721E1	-3.27027E1	-3.26555E1	2.68186E1	1.73605E-7	2.52027E-3	2.52027E-3	6.31299E-3	2.00463E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-8.16464E-1	-7.98154E-1	-9.13141E0	-9.14197E0	5.03063E-3	9.30309E-2	2.73279E1	-3.27203E1	-3.26549E1	2.68034E1	1.73605E-7	2.51287E-3	2.51287E-3	6.3074E-3	1.98561E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0941E0	-8.16655E-1	-7.98416E-1	-9.13126E0	-9.14192E0	5.38826E-3	9.29117E-2	2.73016E1	-3.26697E1	-3.2659E1	2.68204E1	1.73605E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.99977E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09426E0	-8.16393E-1	-7.97915E-1	-9.13122E0	-9.14195E0	5.19753E-3	9.28879E-2	2.72702E1	-3.26422E1	-3.26236E1	2.68328E1	1.73753E-7	2.50989E-3	2.50989E-3	6.33977E-3	1.9968E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.16679E-1	-7.98082E-1	-9.13129E0	-9.14218E0	5.22137E-3	9.30786E-2	2.73075E1	-3.26518E1	-3.26362E1	2.67892E1	1.73831E-7	2.51443E-3	2.51443E-3	6.30192E-3	1.99803E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.16751E-1	-7.97796E-1	-9.13136E0	-9.14199E0	5.24521E-3	9.33409E-2	2.73087E1	-3.26873E1	-3.25719E1	2.68106E1	1.73605E-7	2.51116E-3	2.51116E-3	6.30192E-3	2.00847E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.16321E-1	-7.98154E-1	-9.1315E0	-9.14207E0	4.95911E-3	9.30786E-2	2.7269E1	-3.2626E1	-3.26344E1	2.67734E1	1.73831E-7	2.5188E-3	2.5188E-3	6.34037E-3	1.99803E-1
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.16274E-1	-7.98011E-1	-9.13157E0	-9.14185E0	5.34058E-3	9.30786E-2	2.7288E1	-3.26856E1	-3.2639E1	2.67686E1	1.73605E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.00325E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.0958E0	-8.16584E-1	-7.98178E-1	-9.13146E0	-9.14204E0	5.36442E-3	9.32693E-2	2.73442E1	-3.26837E1	-3.26512E1	2.68004E1	1.73755E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.00673E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-8.16679E-1	-7.97725E-1	-9.13153E0	-9.14218E0	5.03063E-3	9.31501E-2	2.72991E1	-3.26813E1	-3.26458E1	2.68064E1	1.7368E-7	2.51662E-3	2.51662E-3	6.34588E-3	1.99977E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.16464E-1	-7.98225E-1	-9.13146E0	-9.14228E0	5.24521E-3	9.35078E-2	2.72721E1	-3.26591E1	-3.27528E1	2.67902E1	1.73605E-7	2.51847E-3	2.51847E-3	6.33436E-3	1.9968E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.16441E-1	-7.98154E-1	-9.13129E0	-9.14226E0	5.17368E-3	9.39369E-2	2.73363E1	-3.26603E1	-3.26518E1	2.67812E1	1.7368E-7	2.51443E-3	2.51443E-3	6.33486E-3	1.98592E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.16345E-1	-7.97892E-1	-9.13155E0	-9.1423E0	5.26905E-3	9.3627E-2	2.7298E1	-3.2652E1	-3.26502E1	2.68034E1	1.73755E-7	2.51116E-3	2.51116E-3	6.32936E-3	1.99456E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.1594E-1	-7.98202E-1	-9.13172E0	-9.14195E0	5.05447E-3	9.33409E-2	2.72612E1	-3.259E1	-3.26915E1	2.6807E1	1.7368E-7	2.52209E-3	2.52209E-3	6.28552E-3	2.00499E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-8.16441E-1	-7.98321E-1	-9.13138E0	-9.14216E0	4.98295E-3	9.33886E-2	2.73275E1	-3.26685E1	-3.25847E1	2.68016E1	1.73753E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.00363E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.16345E-1	-7.98082E-1	-9.13131E0	-9.14214E0	5.24521E-3	9.31978E-2	2.7348E1	-3.26138E1	-3.26631E1	2.6807E1	1.73605E-7	2.51552E-3	2.51552E-3	6.33486E-3	1.9911E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-8.16226E-1	-7.97749E-1	-9.13157E0	-9.14209E0	5.34058E-3	9.35793E-2	2.73117E1	-3.26921E1	-3.26074E1	2.68304E1	1.73677E-7	2.52025E-3	2.52025E-3	6.31269E-3	1.98894E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.16154E-1	-7.97963E-1	-9.13157E0	-9.14185E0	5.55515E-3	9.36747E-2	2.72806E1	-3.27136E1	-3.26321E1	2.6786E1	1.73605E-7	2.51225E-3	2.51225E-3	6.32936E-3	1.98937E-1