[Scan]
initial_time=2016-02-16T01:24:54
final_time=2016-02-16T01:25:14
ip_count=19
run=1030
dataset=4
scan=327
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08803E-4
ql1_vset=
ql1_vmon=-8.16488E-1
ql1_imon=6.17099E-10
ql2_vset=
ql2_vmon=-7.98082E-1
ql2_imon=3.08776E-10
ql3_vset=
ql3_vmon=-9.13186E0
ql3_imon=5.02229E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=4.87483E-10
mult1=-1.08234E-8
mult2=-2.82321E-9
rf_tmon=-3.7544E-3
rf_agc=3.40996E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=3.65138E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6427E0
bslens_imon=2.75044E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20151E1
lens5a_imon=1.99857E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12429E2
lens4a_imon=2.05125E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53556E1
cs_ef1b_imon=3.03676E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04596E2
lens23_imon=1.02197E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05084E1
cs_ea1_imon=2.20189E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39539E0
lens1_imon=2.66032E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64789E1
os_ef1alow_imon=2.99423E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04189E1
cs_ea2_imon=1.56706E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8404E1
cs_ef1a_imon=3.0155E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=4.07827E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11478E1
os_restr1_imon=2.89404E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14783E1
os_ea1_imon=1.89619E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63431E1
os_ef1bup_imon=3.08938E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2527E0
cs_ionrep_imon=1.26821E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91862E2
cs_nozzle_imon=1.93546E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02049E1
cs_anode1_imon=3.28111E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20561E0
olens4_imon=7.55942E-10
tplens_vset=1.4E-1
tplens_vmon=1.61259E0
tplens_imon=-5.42091E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.27369E1
iondef3_imon=1.5101E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26319E1
iondef2_imon=1.5941E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02955E2
lens6_imon=2.98555E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=3.9922E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24008E0
ionrepsh_imon=1.9874E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33513E1
lens5b_imon=2.18387E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74399E1
cs_ef2b_imon=3.12217E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.37304E-1
os_ea2_imon=-5.62508E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06113E2
lens4b_imon=2.00814E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71624E1
cs_ef2a_imon=3.16614E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62158E0
os_ef2alow_imon=-2.40687E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.58982E-1
os_ef2bup_imon=-5.00172E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10823E1
os_restr2_imon=2.8908E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2308E2
cs_ionfoca_imon=6.31118E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02097E1
cs_anode2_imon=2.29578E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72892E1
iondef1_imon=1.11788E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6787E1
iondef4_imon=1.10107E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.86139E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82642E-1
olens1_imon=3.3648E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09951E0
cs_ionaccel_imon=-1.86988E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02096E2
cs_ionfocb_imon=1.47594E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56207E1
einzel_imon=7.4716E-6
window_vset=0.0E0
window_vmon=1.83706E-1
window_imon=-9.79699E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82618E2
mask1_imon=2.39264E-4
mask2_vset=0.0E0
mask2_vmon=-1.8656E1
mask2_imon=-5.40015E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92643E3
multa_neg_imon=7.65318E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=6.69787E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50154E3
multb_neg_imon=7.10162E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44367E0
defgridb_imon=6.1391E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33983E1
os_fil1_imon=4.6621E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.69543E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66037E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30803E1
cs_fil1_imon=1.008E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62768E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65638E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.33166E-2
os_fil2_imon=-2.30557E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.47899E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.8719E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30947E-1
cs_fil2_imon=-2.03527E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.34645E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22532E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=1.98491E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.04342E-1
res40_imon=-2.37804E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.16202E-1	-7.97367E-1	-9.13134E0	-9.14168E0	5.22137E-3	9.34124E-2	2.72976E1	-3.26695E1	-3.26208E1	2.6781E1	1.73679E-7	2.51847E-3	2.51847E-3	6.31817E-3	1.97984E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09364E0	-8.15773E-1	-7.98225E-1	-9.13157E0	-9.14226E0	5.14984E-3	9.31978E-2	2.7302E1	-3.27009E1	-3.26491E1	2.67945E1	1.73605E-7	2.51417E-3	2.51417E-3	6.31817E-3	1.97984E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09418E0	-8.1625E-1	-7.97796E-1	-9.1315E0	-9.14195E0	5.4121E-3	9.30309E-2	2.72848E1	-3.26498E1	-3.26318E1	2.67827E1	1.73605E-7	2.51384E-3	2.51384E-3	6.3074E-3	1.97553E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09418E0	-8.15892E-1	-7.97939E-1	-9.13141E0	-9.14204E0	5.31673E-3	9.32217E-2	2.72594E1	-3.26579E1	-3.2617E1	2.67974E1	1.73605E-7	2.51498E-3	2.51498E-3	6.31269E-3	1.98395E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.16631E-1	-7.98178E-1	-9.13136E0	-9.14204E0	5.126E-3	9.34362E-2	2.73327E1	-3.26951E1	-3.25912E1	2.67986E1	1.73605E-7	2.51096E-3	2.51096E-3	6.32896E-3	1.99E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.16655E-1	-7.97749E-1	-9.13124E0	-9.14204E0	5.19753E-3	9.33647E-2	2.72745E1	-3.26609E1	-3.26008E1	2.67613E1	1.73755E-7	2.5199E-3	2.5199E-3	6.3074E-3	1.98247E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.16298E-1	-7.98154E-1	-9.13138E0	-9.14226E0	5.00679E-3	9.33886E-2	2.73147E1	-3.2638E1	-3.2647E1	2.68076E1	1.7368E-7	2.52209E-3	2.52209E-3	6.3074E-3	1.9911E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.16417E-1	-7.97987E-1	-9.13129E0	-9.14214E0	4.86374E-3	9.34362E-2	2.72839E1	-3.26909E1	-3.26071E1	2.6803E1	1.7368E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.98764E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-8.16178E-1	-7.97606E-1	-9.13095E0	-9.14195E0	5.07832E-3	9.31025E-2	2.73039E1	-3.26669E1	-3.2608E1	2.67758E1	1.73605E-7	2.51847E-3	2.51847E-3	6.29665E-3	1.98153E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.16369E-1	-7.97749E-1	-9.13095E0	-9.14202E0	4.98295E-3	9.34124E-2	2.73016E1	-3.27204E1	-3.25959E1	2.67812E1	1.7368E-7	2.51552E-3	2.51552E-3	6.34037E-3	1.98247E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.16417E-1	-7.97677E-1	-9.13134E0	-9.14214E0	5.126E-3	9.33409E-2	2.73069E1	-3.26795E1	-3.26663E1	2.67908E1	1.73605E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.98075E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.16154E-1	-7.98154E-1	-9.13117E0	-9.14199E0	5.17368E-3	9.33409E-2	2.72672E1	-3.26314E1	-3.2653E1	2.67962E1	1.7368E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.98419E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09426E0	-8.16464E-1	-7.97606E-1	-9.1311E0	-9.14207E0	5.26905E-3	9.35316E-2	2.72234E1	-3.25113E1	-3.25888E1	2.67962E1	1.7368E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.99283E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-8.16655E-1	-7.98178E-1	-9.13088E0	-9.14209E0	5.19753E-3	9.33886E-2	2.73213E1	-3.26687E1	-3.26494E1	2.68124E1	1.73679E-7	2.50882E-3	2.50882E-3	6.33436E-3	1.98661E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-8.16369E-1	-7.98297E-1	-9.13115E0	-9.14202E0	4.79221E-3	9.32932E-2	2.73069E1	-3.26413E1	-3.26596E1	2.68238E1	1.73605E-7	2.5147E-3	2.5147E-3	6.3074E-3	1.98872E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.16274E-1	-7.98416E-1	-9.13155E0	-9.14195E0	5.14984E-3	9.32217E-2	2.73003E1	-3.26621E1	-3.25942E1	2.67931E1	1.73753E-7	2.52276E-3	2.52276E-3	6.31278E-3	1.9883E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.16441E-1	-7.98225E-1	-9.1316E0	-9.14207E0	5.14984E-3	9.33647E-2	2.73255E1	-3.26861E1	-3.25852E1	2.68184E1	1.73827E-7	2.51739E-3	2.51739E-3	6.32356E-3	1.97647E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.16488E-1	-7.97749E-1	-9.13126E0	-9.14199E0	5.07832E-3	9.31263E-2	2.73552E1	-3.26767E1	-3.26036E1	2.68202E1	1.7368E-7	2.51007E-3	2.51007E-3	6.31837E-3	1.97903E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.16751E-1	-7.9782E-1	-9.13191E0	-9.14185E0	4.95911E-3	9.30786E-2	2.73134E1	-3.26838E1	-3.26443E1	2.68212E1	1.73679E-7	2.51096E-3	2.51096E-3	6.32356E-3	1.9731E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.16488E-1	-7.98082E-1	-9.13186E0	-9.14202E0	5.19753E-3	9.34839E-2	2.72892E1	-3.26319E1	-3.27369E1	2.6787E1	1.73605E-7	2.52061E-3	2.52061E-3	6.32896E-3	1.98491E-1