[Scan]
initial_time=2016-02-16T01:26:41
final_time=2016-02-16T01:27:00
ip_count=19
run=1030
dataset=4
scan=331
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.08749E-4
ql1_vset=
ql1_vmon=-8.16202E-1
ql1_imon=6.06024E-10
ql2_vset=
ql2_vmon=-7.97987E-1
ql2_imon=2.63214E-10
ql3_vset=
ql3_vmon=-9.13146E0
ql3_imon=5.04935E-10
ql4_vset=
ql4_vmon=-9.14247E0
ql4_imon=4.67193E-10
mult1=-9.37917E-9
mult2=-2.83638E-9
rf_tmon=-4.8549E-3
rf_agc=3.25645E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=4.1213E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69618E0
bslens_imon=2.58822E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19971E1
lens5a_imon=2.00398E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12508E2
lens4a_imon=2.05158E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53778E1
cs_ef1b_imon=3.04E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04644E2
lens23_imon=1.02107E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05234E1
cs_ea1_imon=2.20622E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34312E0
lens1_imon=2.81894E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64542E1
os_ef1alow_imon=3.00793E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03828E1
cs_ea2_imon=1.57103E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84232E1
cs_ef1a_imon=3.01225E-5
olens2_vset=9.7E-1
olens2_vmon=9.70578E-1
olens2_imon=4.16815E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1143E1
os_restr1_imon=2.88756E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15125E1
os_ea1_imon=1.88285E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63473E1
os_ef1bup_imon=3.10055E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2545E0
cs_ionrep_imon=1.25018E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93755E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01641E1
cs_anode1_imon=3.27174E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20515E0
olens4_imon=6.65057E-10
tplens_vset=1.4E-1
tplens_vmon=1.61259E0
tplens_imon=-1.62358E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26032E1
iondef3_imon=1.50361E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27185E1
iondef2_imon=1.6114E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02996E2
lens6_imon=2.98429E-4
ql6_vset=1.0E-1
ql6_vmon=9.30071E-2
ql6_imon=3.61645E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2509E0
ionrepsh_imon=2.00722E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33982E1
lens5b_imon=2.17918E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74345E1
cs_ef2b_imon=3.13263E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.21682E-1
os_ea2_imon=-3.6784E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0611E2
lens4b_imon=2.00853E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7145E1
cs_ef2a_imon=3.182E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62038E0
os_ef2alow_imon=-2.30956E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.25945E-1
os_ef2bup_imon=-5.34771E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10889E1
os_restr2_imon=2.88323E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23071E2
cs_ionfoca_imon=6.31478E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01629E1
cs_anode2_imon=2.30299E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73009E1
iondef1_imon=1.0876E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68124E1
iondef4_imon=1.09026E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71791E1
olens3_imon=1.85184E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=2.82657E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12714E0
cs_ionaccel_imon=-1.78699E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02058E2
cs_ionfocb_imon=1.47424E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56219E1
einzel_imon=7.61216E-6
window_vset=0.0E0
window_vmon=1.92115E-1
window_imon=-8.57164E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82583E2
mask1_imon=2.39145E-4
mask2_vset=0.0E0
mask2_vmon=-1.86026E1
mask2_imon=-6.2651E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92667E3
multa_neg_imon=7.75052E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.91777E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50154E3
multb_neg_imon=7.0872E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36547E0
defgridb_imon=6.27248E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3396E1
os_fil1_imon=4.63206E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.86362E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65866E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30803E1
cs_fil1_imon=1.00765E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62864E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65852E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.06081E-2
os_fil2_imon=-2.22148E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.56018E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.19028E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31335E-1
cs_fil2_imon=-2.3296E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.18427E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22388E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=1.9934E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.58401E-1
res40_imon=-2.60509E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-8.16464E-1	-7.97915E-1	-9.13134E0	-9.14209E0	5.65052E-3	9.32932E-2	2.73466E1	-3.26729E1	-3.2629E1	2.6816E1	1.73605E-7	2.51662E-3	2.51662E-3	6.33486E-3	1.9911E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.16131E-1	-7.97987E-1	-9.13131E0	-9.14223E0	5.26905E-3	9.32693E-2	2.73712E1	-3.26554E1	-3.26554E1	2.68286E1	1.7368E-7	2.51116E-3	2.51116E-3	6.30192E-3	2.00325E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09611E0	-8.16202E-1	-7.98249E-1	-9.13119E0	-9.14214E0	5.53131E-3	9.30071E-2	2.72276E1	-3.26086E1	-3.27209E1	2.67776E1	1.7368E-7	2.52099E-3	2.52099E-3	6.34037E-3	1.9963E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-8.16202E-1	-7.98106E-1	-9.13119E0	-9.14218E0	5.60284E-3	9.31025E-2	2.72918E1	-3.26561E1	-3.26202E1	2.67897E1	1.73605E-7	2.51225E-3	2.51225E-3	6.31288E-3	1.99803E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09611E0	-8.16107E-1	-7.98225E-1	-9.13129E0	-9.14211E0	5.24521E-3	9.31978E-2	2.72642E1	-3.26158E1	-3.2638E1	2.67938E1	1.73677E-7	2.51709E-3	2.51709E-3	6.31269E-3	1.99394E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.16298E-1	-7.97939E-1	-9.13115E0	-9.14214E0	5.38826E-3	9.31263E-2	2.72564E1	-3.26663E1	-3.26302E1	2.67649E1	1.73605E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.98937E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.16226E-1	-7.97939E-1	-9.13136E0	-9.14247E0	5.19753E-3	9.29832E-2	2.72997E1	-3.26903E1	-3.2605E1	2.68064E1	1.7368E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.9911E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0958E0	-8.16059E-1	-7.98225E-1	-9.1315E0	-9.14237E0	5.29289E-3	9.31025E-2	2.72739E1	-3.26488E1	-3.26236E1	2.68286E1	1.7368E-7	2.51334E-3	2.51334E-3	6.34037E-3	1.9911E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.15964E-1	-7.98106E-1	-9.1315E0	-9.14204E0	5.65052E-3	9.32693E-2	2.72886E1	-3.26529E1	-3.26058E1	2.68151E1	1.73605E-7	2.52099E-3	2.52099E-3	6.32386E-3	1.98592E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.16011E-1	-7.98106E-1	-9.13157E0	-9.14228E0	5.4121E-3	9.32932E-2	2.72859E1	-3.26777E1	-3.26681E1	2.68111E1	1.73605E-7	2.52027E-3	2.52027E-3	6.3074E-3	1.99577E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.16178E-1	-7.97939E-1	-9.1315E0	-9.14221E0	5.50747E-3	9.36031E-2	2.72576E1	-3.26645E1	-3.26116E1	2.68064E1	1.7368E-7	2.51116E-3	2.51116E-3	6.31837E-3	1.99456E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09426E0	-8.1594E-1	-7.97868E-1	-9.13155E0	-9.14202E0	5.4121E-3	9.34124E-2	2.73207E1	-3.27221E1	-3.25996E1	2.67974E1	1.73605E-7	2.51552E-3	2.51552E-3	6.33486E-3	1.99283E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09418E0	-8.16298E-1	-7.97725E-1	-9.13141E0	-9.14218E0	5.60284E-3	9.32693E-2	2.72532E1	-3.26773E1	-3.26425E1	2.6789E1	1.73605E-7	2.52209E-3	2.52209E-3	6.31288E-3	1.9911E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09426E0	-8.16298E-1	-7.98011E-1	-9.13093E0	-9.14247E0	5.36442E-3	9.32455E-2	2.73123E1	-3.27077E1	-3.26609E1	2.68088E1	1.73679E-7	2.51525E-3	2.51525E-3	6.32896E-3	1.98491E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-8.16751E-1	-7.98035E-1	-9.13141E0	-9.14211E0	5.31673E-3	9.32932E-2	2.73526E1	-3.26536E1	-3.2629E1	2.67986E1	1.73605E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.98247E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0941E0	-8.16488E-1	-7.97582E-1	-9.1315E0	-9.14211E0	5.48363E-3	9.31025E-2	2.73092E1	-3.26909E1	-3.2629E1	2.67728E1	1.73605E-7	2.5199E-3	2.5199E-3	6.31837E-3	1.97731E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09379E0	-8.15964E-1	-7.9751E-1	-9.13153E0	-9.14218E0	5.53131E-3	9.33647E-2	2.73231E1	-3.26512E1	-3.26458E1	2.67872E1	1.73679E-7	2.51847E-3	2.51847E-3	6.3074E-3	1.97815E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09441E0	-8.16369E-1	-7.97844E-1	-9.13134E0	-9.14199E0	5.43594E-3	9.32932E-2	2.72582E1	-3.26741E1	-3.26146E1	2.68352E1	1.73831E-7	2.50898E-3	2.50898E-3	6.32936E-3	1.98419E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.16202E-1	-7.97939E-1	-9.13157E0	-9.14223E0	5.48363E-3	9.30071E-2	2.73393E1	-3.26726E1	-3.26107E1	2.68157E1	1.73605E-7	2.51443E-3	2.51443E-3	6.32936E-3	1.98764E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-8.16202E-1	-7.97987E-1	-9.13146E0	-9.14247E0	5.45979E-3	9.30071E-2	2.73009E1	-3.27185E1	-3.26032E1	2.68124E1	1.73605E-7	2.51632E-3	2.51632E-3	6.31817E-3	1.9934E-1