[Scan]
initial_time=2016-02-16T01:27:08
final_time=2016-02-16T01:27:27
ip_count=19
run=1030
dataset=4
scan=332
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.08763E-4
ql1_vset=
ql1_vmon=-8.15797E-1
ql1_imon=6.06275E-10
ql2_vset=
ql2_vmon=-7.97963E-1
ql2_imon=2.57766E-10
ql3_vset=
ql3_vmon=-9.13143E0
ql3_imon=5.21719E-10
ql4_vset=
ql4_vmon=-9.14216E0
ql4_imon=4.84264E-10
mult1=-9.72511E-9
mult2=-2.56576E-9
rf_tmon=-4.42507E-3
rf_agc=3.32418E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.98295E-3
ql5_imon=3.62623E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68745E0
bslens_imon=2.5114E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19872E1
lens5a_imon=1.97766E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12452E2
lens4a_imon=2.05486E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53814E1
cs_ef1b_imon=3.05622E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04613E2
lens23_imon=1.01976E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.051E1
cs_ea1_imon=2.19392E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38967E0
lens1_imon=2.42646E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64584E1
os_ef1alow_imon=2.98558E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03708E1
cs_ea2_imon=1.57665E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8395E1
cs_ef1a_imon=3.02595E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=3.68261E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.10973E1
os_restr1_imon=2.86593E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15447E1
os_ea1_imon=1.87077E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63611E1
os_ef1bup_imon=3.12902E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26979E0
cs_ionrep_imon=1.26624E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.93459E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01839E1
cs_anode1_imon=3.25516E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=6.21629E-10
tplens_vset=1.4E-1
tplens_vmon=1.5618E0
tplens_imon=-1.92739E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26466E1
iondef3_imon=1.50409E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26366E1
iondef2_imon=1.57877E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02966E2
lens6_imon=2.98824E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=3.59654E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25446E0
ionrepsh_imon=2.02049E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34135E1
lens5b_imon=2.1741E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74585E1
cs_ef2b_imon=3.14416E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.60474E-1
os_ea2_imon=-6.56367E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06122E2
lens4b_imon=2.00655E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70927E1
cs_ef2a_imon=3.1802E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64741E0
os_ef2alow_imon=-2.31677E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.3916E-1
os_ef2bup_imon=-5.19273E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10811E1
os_restr2_imon=2.87638E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23045E2
cs_ionfoca_imon=6.32583E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01797E1
cs_anode2_imon=2.29867E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73095E1
iondef1_imon=1.09387E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68056E1
iondef4_imon=1.09638E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.85519E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=2.64668E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11032E0
cs_ionaccel_imon=-1.89871E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02096E2
cs_ionfocb_imon=1.47331E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56189E1
einzel_imon=7.77434E-6
window_vset=0.0E0
window_vmon=2.17943E-1
window_imon=-6.98589E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82582E2
mask1_imon=2.39044E-4
mask2_vset=0.0E0
mask2_vmon=-1.8647E1
mask2_imon=-3.70628E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=8.03288E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=7.05954E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.28253E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45871E0
defgridb_imon=6.00834E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33977E1
os_fil1_imon=5.13061E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.17286E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66061E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30774E1
cs_fil1_imon=1.00716E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63339E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65841E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.23059E-2
os_fil2_imon=-2.28154E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.62024E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.85842E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28746E-1
cs_fil2_imon=-2.01125E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.3945E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22417E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3282E-3
inlet_lpb_pmon=1.99776E-1
chamber_ion_pmon=1.73676E-7
chamber_cvt_pmon=2.51162E-3
foreline_cvt_pmon=2.51162E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.25365E-1
res40_imon=-2.59067E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.15821E-1	-7.97653E-1	-9.13138E0	-9.14199E0	5.36442E-3	9.32693E-2	2.72961E1	-3.26669E1	-3.25557E1	2.68166E1	1.73753E-7	2.52384E-3	2.52384E-3	6.2752E-3	2.00705E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.16011E-1	-7.97486E-1	-9.13153E0	-9.14202E0	5.48363E-3	9.26256E-2	2.73075E1	-3.26627E1	-3.26554E1	2.68442E1	1.73605E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.00325E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-8.15868E-1	-7.97844E-1	-9.13131E0	-9.14195E0	5.38826E-3	9.2721E-2	2.72941E1	-3.26625E1	-3.26561E1	2.67866E1	1.73605E-7	2.51804E-3	2.51804E-3	6.29624E-3	2.00463E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.15749E-1	-7.98082E-1	-9.13126E0	-9.14199E0	5.36442E-3	9.31025E-2	2.73021E1	-3.26789E1	-3.25984E1	2.67499E1	1.73677E-7	2.51814E-3	2.51814E-3	6.32858E-3	1.99729E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.15964E-1	-7.97391E-1	-9.13138E0	-9.14178E0	5.81741E-3	9.30071E-2	2.73117E1	-3.26843E1	-3.2611E1	2.67804E1	1.7368E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.98937E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-8.15964E-1	-7.97749E-1	-9.13136E0	-9.14202E0	5.74589E-3	9.30071E-2	2.72945E1	-3.26826E1	-3.26154E1	2.68106E1	1.73605E-7	2.52647E-3	2.52647E-3	6.29645E-3	1.98592E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09325E0	-8.16083E-1	-7.97629E-1	-9.13136E0	-9.14185E0	5.88894E-3	9.30548E-2	2.72937E1	-3.26753E1	-3.26488E1	2.67716E1	1.73753E-7	2.5131E-3	2.5131E-3	6.29665E-3	1.98661E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09387E0	-8.15821E-1	-7.97796E-1	-9.13112E0	-9.14202E0	5.72205E-3	9.29832E-2	2.7346E1	-3.26356E1	-3.26561E1	2.67962E1	1.73605E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.00325E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09209E0	-8.15582E-1	-7.97558E-1	-9.13112E0	-9.14207E0	5.60284E-3	9.27925E-2	2.72642E1	-3.26999E1	-3.25948E1	2.67848E1	1.7368E-7	2.52209E-3	2.52209E-3	6.3074E-3	1.9911E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09225E0	-8.16369E-1	-7.97915E-1	-9.13117E0	-9.14207E0	5.43594E-3	9.27925E-2	2.7275E1	-3.26396E1	-3.26284E1	2.68508E1	1.73605E-7	2.52099E-3	2.52099E-3	6.30192E-3	1.9963E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09294E0	-8.16035E-1	-7.97915E-1	-9.13136E0	-9.14192E0	5.34058E-3	9.3174E-2	2.73039E1	-3.26633E1	-3.26038E1	2.68064E1	1.73605E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.00705E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0941E0	-8.16154E-1	-7.97772E-1	-9.13107E0	-9.14199E0	5.19753E-3	9.32217E-2	2.73141E1	-3.26621E1	-3.26194E1	2.67631E1	1.73755E-7	2.52318E-3	2.52318E-3	6.29098E-3	2.00499E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.15988E-1	-7.97462E-1	-9.13112E0	-9.14209E0	5.43594E-3	9.29832E-2	2.7269E1	-3.26464E1	-3.26434E1	2.67734E1	1.73605E-7	2.51443E-3	2.51443E-3	6.32936E-3	1.99977E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09418E0	-8.15678E-1	-7.98059E-1	-9.1311E0	-9.14211E0	5.29289E-3	9.30309E-2	2.73195E1	-3.26615E1	-3.2635E1	2.67962E1	1.7368E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.00499E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09426E0	-8.16154E-1	-7.97844E-1	-9.13081E0	-9.14249E0	5.38826E-3	9.3174E-2	2.73284E1	-3.26884E1	-3.26223E1	2.67944E1	1.7368E-7	2.50789E-3	2.50789E-3	6.33486E-3	2.00673E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.16512E-1	-7.97677E-1	-9.13112E0	-9.14204E0	5.34058E-3	9.32932E-2	2.7288E1	-3.26803E1	-3.25859E1	2.67649E1	1.73681E-7	2.51915E-3	2.51915E-3	6.31858E-3	1.99224E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-8.16059E-1	-7.97963E-1	-9.13129E0	-9.14223E0	5.26905E-3	9.28164E-2	2.72702E1	-3.26939E1	-3.26176E1	2.67955E1	1.73605E-7	2.51417E-3	2.51417E-3	6.29128E-3	1.9883E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09379E0	-8.16274E-1	-7.98035E-1	-9.1316E0	-9.14214E0	5.48363E-3	9.3174E-2	2.73193E1	-3.26891E1	-3.26785E1	2.67776E1	1.73605E-7	2.5199E-3	2.5199E-3	6.31837E-3	1.99283E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09426E0	-8.16488E-1	-7.98106E-1	-9.13134E0	-9.14197E0	5.17368E-3	9.30786E-2	2.72931E1	-3.26585E1	-3.26197E1	2.67959E1	1.73679E-7	2.50775E-3	2.50775E-3	6.3074E-3	2.00876E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-8.15797E-1	-7.97963E-1	-9.13143E0	-9.14216E0	4.98295E-3	9.31978E-2	2.73095E1	-3.26366E1	-3.26466E1	2.68056E1	1.73676E-7	2.51162E-3	2.51162E-3	6.3282E-3	1.99776E-1