[Scan]
initial_time=2016-02-16T01:27:34
final_time=2016-02-16T01:27:54
ip_count=19
run=1030
dataset=4
scan=333
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08724E-4
ql1_vset=
ql1_vmon=-8.1625E-1
ql1_imon=6.64604E-10
ql2_vset=
ql2_vmon=-7.97915E-1
ql2_imon=2.87986E-10
ql3_vset=
ql3_vmon=-9.13117E0
ql3_imon=5.1378E-10
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=4.99594E-10
mult1=-1.0511E-8
mult2=-3.02401E-9
rf_tmon=-2.98633E-3
rf_agc=3.4361E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.55515E-3
ql5_imon=3.71242E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67624E0
bslens_imon=2.72377E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19883E1
lens5a_imon=1.97519E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12506E2
lens4a_imon=2.05139E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53316E1
cs_ef1b_imon=3.04901E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04606E2
lens23_imon=1.02089E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05289E1
cs_ea1_imon=2.21303E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38377E0
lens1_imon=2.6813E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65023E1
os_ef1alow_imon=2.99531E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0415E1
cs_ea2_imon=1.58974E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84244E1
cs_ef1a_imon=3.00649E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=3.6912E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11652E1
os_restr1_imon=2.89909E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15235E1
os_ea1_imon=1.8952E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63263E1
os_ef1bup_imon=3.08361E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2403E0
cs_ionrep_imon=1.26235E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93427E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01617E1
cs_anode1_imon=3.26922E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=6.82628E-10
tplens_vset=1.4E-1
tplens_vmon=1.61312E0
tplens_imon=-2.2456E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26332E1
iondef3_imon=1.51329E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26675E1
iondef2_imon=1.59258E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02959E2
lens6_imon=2.98537E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=3.46196E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25033E0
ionrepsh_imon=2.01695E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33911E1
lens5b_imon=2.20171E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74603E1
cs_ef2b_imon=3.12722E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.8466E-1
os_ea2_imon=-4.51082E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06147E2
lens4b_imon=2.00665E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71138E1
cs_ef2a_imon=3.19533E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.67504E0
os_ef2alow_imon=-2.49336E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.54176E-1
os_ef2bup_imon=-5.35131E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10877E1
os_restr2_imon=2.86593E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23082E2
cs_ionfoca_imon=6.31238E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01851E1
cs_anode2_imon=2.29074E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73153E1
iondef1_imon=1.10343E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67845E1
iondef4_imon=1.09314E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.86791E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=2.66767E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0929E0
cs_ionaccel_imon=-1.81582E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0212E2
cs_ionfocb_imon=1.47183E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55907E1
einzel_imon=8.07707E-6
window_vset=0.0E0
window_vmon=1.84306E-1
window_imon=-9.68887E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8258E2
mask1_imon=2.39286E-4
mask2_vset=0.0E0
mask2_vmon=-1.86728E1
mask2_imon=-5.97678E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92653E3
multa_neg_imon=7.73203E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93697E3
defgrida_imon=6.72684E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.48073E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.64769E0
defgridb_imon=6.19239E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33962E1
os_fil1_imon=4.35576E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.03181E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65868E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30808E1
cs_fil1_imon=1.00863E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.64372E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65696E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.07863E-2
os_fil2_imon=-2.26353E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.25985E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.90019E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30817E-1
cs_fil2_imon=-1.96319E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.40051E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22456E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=1.98661E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.20269E-1
res40_imon=-2.41047E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.16011E-1	-7.98011E-1	-9.13138E0	-9.14183E0	5.55515E-3	9.29832E-2	2.72909E1	-3.26921E1	-3.26225E1	2.68064E1					
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.16154E-1	-7.98154E-1	-9.13129E0	-9.14214E0	5.43594E-3	9.30786E-2	2.73082E1	-3.26554E1	-3.26254E1	2.67727E1	1.73605E-7	2.52061E-3	2.52061E-3	6.33436E-3	1.9917E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.16202E-1	-7.97868E-1	-9.1315E0	-9.14187E0	5.79357E-3	9.34362E-2	2.73004E1	-3.26242E1	-3.26366E1	2.67619E1	1.73681E-7	2.51915E-3	2.51915E-3	6.3074E-3	1.99754E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.16107E-1	-7.98297E-1	-9.13157E0	-9.14185E0	5.74589E-3	9.29594E-2	2.72967E1	-3.26843E1	-3.26446E1	2.68106E1	1.73605E-7	2.51954E-3	2.51954E-3	6.31817E-3	1.99E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-8.15964E-1	-7.98106E-1	-9.1315E0	-9.14214E0	5.67436E-3	9.3317E-2	2.73003E1	-3.27071E1	-3.25948E1	2.68238E1	1.73605E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.99977E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.16441E-1	-7.97915E-1	-9.13148E0	-9.14204E0	5.26905E-3	9.33886E-2	2.72997E1	-3.26687E1	-3.265E1	2.6816E1	1.73605E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.99803E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.16464E-1	-7.97939E-1	-9.13134E0	-9.14202E0	5.53131E-3	9.30071E-2	2.72474E1	-3.26657E1	-3.26308E1	2.68286E1	1.73605E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.98764E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.1625E-1	-7.98368E-1	-9.13148E0	-9.14171E0	5.38826E-3	9.32217E-2	2.72967E1	-3.26615E1	-3.26146E1	2.67818E1	1.7368E-7	2.52318E-3	2.52318E-3	6.31837E-3	2.00499E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.16083E-1	-7.98059E-1	-9.13143E0	-9.14183E0	5.67436E-3	9.33647E-2	2.73123E1	-3.26332E1	-3.26561E1	2.68052E1	1.7368E-7	2.51007E-3	2.51007E-3	6.3074E-3	2.00499E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-8.15964E-1	-7.98202E-1	-9.13165E0	-9.14185E0	5.36442E-3	9.32217E-2	2.72991E1	-3.26651E1	-3.26332E1	2.67986E1	1.73605E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.00151E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-8.16131E-1	-7.97772E-1	-9.13115E0	-9.14166E0	5.53131E-3	9.30786E-2	2.72673E1	-3.26325E1	-3.26396E1	2.67734E1	1.73605E-7	2.51417E-3	2.51417E-3	6.30202E-3	1.9917E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.15701E-1	-7.98011E-1	-9.13143E0	-9.14195E0	5.17368E-3	9.30548E-2	2.73297E1	-3.26554E1	-3.2629E1	2.6783E1	1.73755E-7	2.51443E-3	2.51443E-3	6.32386E-3	1.99977E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.16011E-1	-7.98011E-1	-9.13119E0	-9.14183E0	5.19753E-3	9.33886E-2	2.73195E1	-3.27191E1	-3.2623E1	2.67974E1	1.73605E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.9963E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.16417E-1	-7.97606E-1	-9.13146E0	-9.14197E0	5.14984E-3	9.30309E-2	2.73145E1	-3.26408E1	-3.26443E1	2.67962E1	1.73605E-7	2.51443E-3	2.51443E-3	6.33486E-3	1.99283E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-8.16631E-1	-7.97415E-1	-9.13129E0	-9.14187E0	5.05447E-3	9.3317E-2	2.73201E1	-3.26615E1	-3.26164E1	2.67926E1	1.73605E-7	2.51525E-3	2.51525E-3	6.3074E-3	1.99E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.16274E-1	-7.97486E-1	-9.13131E0	-9.1419E0	5.67436E-3	9.3174E-2	2.72799E1	-3.26687E1	-3.26212E1	2.67764E1	1.73605E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.98764E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.16298E-1	-7.9751E-1	-9.13136E0	-9.14185E0	5.55515E-3	9.3317E-2	2.73219E1	-3.26591E1	-3.26621E1	2.68046E1	1.73605E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.9911E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09449E0	-8.16345E-1	-7.97606E-1	-9.131E0	-9.14178E0	5.48363E-3	9.30548E-2	2.73086E1	-3.26472E1	-3.26526E1	2.6787E1	1.73605E-7	2.51552E-3	2.51552E-3	6.32936E-3	1.98937E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09387E0	-8.16107E-1	-7.98082E-1	-9.13081E0	-9.14183E0	5.76973E-3	9.31263E-2	2.73488E1	-3.26543E1	-3.25824E1	2.68016E1	1.73679E-7	2.52061E-3	2.52061E-3	6.31817E-3	1.9917E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.1625E-1	-7.97915E-1	-9.13117E0	-9.14187E0	5.55515E-3	9.33886E-2	2.73153E1	-3.26675E1	-3.26332E1	2.67845E1	1.73605E-7	2.52061E-3	2.52061E-3	6.29128E-3	1.98661E-1