[Scan]
initial_time=2016-02-16T01:28:27
final_time=2016-02-16T01:28:47
ip_count=19
run=1030
dataset=4
scan=335
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0941E0
qbias_imon=-1.08748E-4
ql1_vset=
ql1_vmon=-8.16059E-1
ql1_imon=5.83792E-10
ql2_vset=
ql2_vmon=-7.97939E-1
ql2_imon=2.8888E-10
ql3_vset=
ql3_vmon=-9.13172E0
ql3_imon=5.02574E-10
ql4_vset=
ql4_vmon=-9.14183E0
ql4_imon=4.92311E-10
mult1=-1.10287E-8
mult2=-2.91423E-9
rf_tmon=-3.86954E-3
rf_agc=3.49378E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.4121E-3
ql5_imon=3.50738E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62708E0
bslens_imon=2.69277E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19791E1
lens5a_imon=1.97983E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12475E2
lens4a_imon=2.05634E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53592E1
cs_ef1b_imon=3.08109E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04583E2
lens23_imon=1.02164E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04994E1
cs_ea1_imon=2.2228E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42363E0
lens1_imon=2.60264E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64734E1
os_ef1alow_imon=2.95964E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03786E1
cs_ea2_imon=1.58112E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83709E1
cs_ef1a_imon=3.01297E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=3.84951E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11274E1
os_restr1_imon=2.87602E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15203E1
os_ea1_imon=1.9153E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63437E1
os_ef1bup_imon=3.1056E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22386E0
cs_ionrep_imon=1.25163E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.93571E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02254E1
cs_anode1_imon=3.2566E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20549E0
olens4_imon=6.42657E-10
tplens_vset=1.4E-1
tplens_vmon=1.60298E0
tplens_imon=-2.34457E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26314E1
iondef3_imon=1.52344E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26488E1
iondef2_imon=1.57679E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02919E2
lens6_imon=2.98724E-4
ql6_vset=1.0E-1
ql6_vmon=9.29356E-2
ql6_imon=3.58903E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29836E0
ionrepsh_imon=1.98415E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33604E1
lens5b_imon=2.21559E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74543E1
cs_ef2b_imon=3.12902E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.66744E-1
os_ea2_imon=-4.29124E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06083E2
lens4b_imon=2.00533E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71504E1
cs_ef2a_imon=3.20939E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.58855E0
os_ef2alow_imon=-2.69879E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.55378E-1
os_ef2bup_imon=-5.29365E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11111E1
os_restr2_imon=2.88431E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23045E2
cs_ionfoca_imon=6.31046E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01275E1
cs_anode2_imon=2.29614E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73117E1
iondef1_imon=1.1013E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68124E1
iondef4_imon=1.06647E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.83277E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=2.77114E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10191E0
cs_ionaccel_imon=-1.82663E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02101E2
cs_ionfocb_imon=1.47399E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56195E1
einzel_imon=8.06986E-6
window_vset=0.0E0
window_vmon=1.84306E-1
window_imon=-9.79699E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.39185E-4
mask2_vset=0.0E0
mask2_vmon=-1.87053E1
mask2_imon=-5.50827E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92614E3
multa_neg_imon=7.14488E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93704E3
defgrida_imon=6.83125E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50162E3
multb_neg_imon=7.14849E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.6151E0
defgridb_imon=6.08863E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33987E1
os_fil1_imon=5.7553E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.89365E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65993E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30773E1
cs_fil1_imon=1.00913E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63237E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65832E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.21558E-2
os_fil2_imon=-2.29956E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.02209E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.98017E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31076E-1
cs_fil2_imon=-2.18544E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.45787E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22357E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.00021E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.69503E-1
res40_imon=-2.55463E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=178
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09402E0	-8.16011E-1	-7.98273E-1	-9.13129E0	-9.14199E0	5.55515E-3	9.31263E-2	2.73532E1	-3.26645E1	-3.26747E1	2.68244E1	1.7368E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.00151E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09426E0	-8.16107E-1	-7.98249E-1	-9.13157E0	-9.14178E0	5.60284E-3	9.31501E-2	2.73075E1	-3.26687E1	-3.26428E1	2.68052E1	1.73605E-7	2.51225E-3	2.51225E-3	6.32936E-3	1.98937E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09379E0	-8.16345E-1	-7.97868E-1	-9.13131E0	-9.14202E0	5.79357E-3	9.33409E-2	2.73305E1	-3.26756E1	-3.26284E1	2.67926E1	1.73831E-7	2.51771E-3	2.51771E-3	6.34588E-3	1.98075E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09371E0	-8.16059E-1	-7.98321E-1	-9.1315E0	-9.14195E0	5.34058E-3	9.31978E-2	2.73111E1	-3.26753E1	-3.2614E1	2.68015E1	1.73605E-7	2.51739E-3	2.51739E-3	6.30202E-3	2.00363E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09387E0	-8.16441E-1	-7.98011E-1	-9.13148E0	-9.14202E0	4.95911E-3	9.29594E-2	2.73177E1	-3.26861E1	-3.26122E1	2.68206E1	1.73605E-7	2.51334E-3	2.51334E-3	6.27461E-3	1.98247E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.09394E0	-8.16154E-1	-7.98035E-1	-9.13134E0	-9.14202E0	4.95911E-3	9.26018E-2	2.73145E1	-3.26767E1	-3.25942E1	2.67896E1	1.73679E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.00021E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09402E0	-8.16512E-1	-7.98225E-1	-9.13153E0	-9.14216E0	5.31673E-3	9.2864E-2	2.72709E1	-3.26639E1	-3.26386E1	2.67794E1	1.73605E-7	2.52428E-3	2.52428E-3	6.29645E-3	1.98247E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09394E0	-8.15821E-1	-7.9813E-1	-9.13181E0	-9.14204E0	5.26905E-3	9.30309E-2	2.72856E1	-3.2672E1	-3.26272E1	2.681E1	1.73755E-7	2.51116E-3	2.51116E-3	6.28006E-3	1.98937E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09394E0	-8.15845E-1	-7.98082E-1	-9.13172E0	-9.14226E0	5.126E-3	9.2864E-2	2.73015E1	-3.26963E1	-3.2608E1	2.68904E1	1.73605E-7	2.52276E-3	2.52276E-3	6.31278E-3	1.9934E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.16202E-1	-7.98011E-1	-9.1316E0	-9.14235E0	5.65052E-3	9.28879E-2	2.7254E1	-3.26837E1	-3.26813E1	2.69019E1	1.73605E-7	2.51443E-3	2.51443E-3	6.30192E-3	1.9911E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09572E0	-8.15654E-1	-7.98178E-1	-9.13146E0	-9.14209E0	5.55515E-3	9.31501E-2	2.72931E1	-3.26597E1	-3.26476E1	2.68022E1	1.73605E-7	2.52099E-3	2.52099E-3	6.31288E-3	1.98419E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.15821E-1	-7.98178E-1	-9.13141E0	-9.14207E0	5.57899E-3	9.30548E-2	2.72859E1	-3.26615E1	-3.26801E1	2.67535E1	1.73755E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.9963E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09572E0	-8.16345E-1	-7.97772E-1	-9.13143E0	-9.14195E0	5.53131E-3	9.31025E-2	2.72567E1	-3.26272E1	-3.26561E1	2.67728E1	1.73755E-7	2.51334E-3	2.51334E-3	6.33486E-3	1.99283E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.16011E-1	-7.97844E-1	-9.13136E0	-9.14168E0	5.19753E-3	9.27448E-2	2.73081E1	-3.26633E1	-3.26597E1	2.67619E1	1.73679E-7	2.5131E-3	2.5131E-3	6.32896E-3	1.98322E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.16298E-1	-7.97462E-1	-9.13148E0	-9.14214E0	5.4121E-3	9.31978E-2	2.73431E1	-3.26725E1	-3.26095E1	2.68142E1	1.73755E-7	2.5199E-3	2.5199E-3	6.28552E-3	1.9911E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.15964E-1	-7.97868E-1	-9.1315E0	-9.14204E0	5.53131E-3	9.33409E-2	2.72945E1	-3.26502E1	-3.25936E1	2.68178E1	1.73605E-7	2.51443E-3	2.51443E-3	6.33486E-3	1.9911E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09387E0	-8.16154E-1	-7.9782E-1	-9.13162E0	-9.14195E0	5.57899E-3	9.32217E-2	2.73387E1	-3.26374E1	-3.26969E1	2.67932E1	1.73831E-7	2.51662E-3	2.51662E-3	6.32936E-3	1.9911E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09394E0	-8.16226E-1	-7.97749E-1	-9.13148E0	-9.14185E0	5.07832E-3	9.29832E-2	2.73087E1	-3.26458E1	-3.2635E1	2.67746E1	1.73605E-7	2.5188E-3	2.5188E-3	6.3514E-3	1.99283E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09371E0	-8.16321E-1	-7.97796E-1	-9.13153E0	-9.14216E0	5.17368E-3	9.28879E-2	2.73322E1	-3.26891E1	-3.25906E1	2.6818E1	1.7368E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.98764E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0941E0	-8.16059E-1	-7.97939E-1	-9.13172E0	-9.14183E0	5.4121E-3	9.29356E-2	2.73117E1	-3.26488E1	-3.26314E1	2.68124E1	1.73605E-7	2.51525E-3	2.51525E-3	6.32896E-3	2.00021E-1