[Scan]
initial_time=2016-02-16T01:29:31
final_time=2016-02-16T01:29:51
ip_count=19
run=1030
dataset=5
scan=337
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30146E-2
qbias_imon=-3.76804E-6
ql1_vset=
ql1_vmon=-8.79977E1
ql1_imon=-3.14187E-9
ql2_vset=
ql2_vmon=4.76837E-5
ql2_imon=5.17404E-10
ql3_vset=
ql3_vmon=-8.80013E1
ql3_imon=-8.19072E-9
ql4_vset=
ql4_vmon=3.33786E-4
ql4_imon=1.42155E-9
mult1=-9.90129E-9
mult2=-2.72914E-9
rf_tmon=-4.75133E-3
rf_agc=3.31085E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=5.74005E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62727E0
bslens_imon=2.31027E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20064E1
lens5a_imon=1.97498E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12525E2
lens4a_imon=2.05191E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53569E1
cs_ef1b_imon=3.04577E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.02477E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04921E1
cs_ea1_imon=2.19415E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0069E0
lens1_imon=1.57859E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65147E1
os_ef1alow_imon=2.99399E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04076E1
cs_ea2_imon=1.55846E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84238E1
cs_ef1a_imon=3.02666E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=4.6072E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11367E1
os_restr1_imon=2.87096E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15177E1
os_ea1_imon=1.90013E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63658E1
os_ef1bup_imon=3.09894E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2465E0
cs_ionrep_imon=1.27082E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91787E2
cs_nozzle_imon=1.93393E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01815E1
cs_anode1_imon=3.25915E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20573E0
olens4_imon=9.93633E-10
tplens_vset=1.4E-1
tplens_vmon=1.65989E0
tplens_imon=-2.60686E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26071E1
iondef3_imon=1.50576E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26826E1
iondef2_imon=1.57457E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02959E2
lens6_imon=2.98655E-4
ql6_vset=1.0E-1
ql6_vmon=9.29832E-2
ql6_imon=5.37765E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29965E0
ionrepsh_imon=1.99411E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33903E1
lens5b_imon=2.18106E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74698E1
cs_ef2b_imon=3.1396E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.92745E-1
os_ea2_imon=-1.66709E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0612E2
lens4b_imon=2.00572E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71043E1
cs_ef2a_imon=3.20042E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64883E0
os_ef2alow_imon=-2.32784E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.59582E-1
os_ef2bup_imon=-5.27485E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11042E1
os_restr2_imon=2.88417E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23035E2
cs_ionfoca_imon=6.31405E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02E1
cs_anode2_imon=2.28087E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73051E1
iondef1_imon=1.08756E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67491E1
iondef4_imon=1.09789E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.94402E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=4.66228E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11277E0
cs_ionaccel_imon=-1.90038E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.47445E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56278E1
einzel_imon=7.77125E-6
window_vset=0.0E0
window_vmon=2.38537E-1
window_imon=-7.67451E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39383E-4
mask2_vset=0.0E0
mask2_vmon=-1.86101E1
mask2_imon=-7.36173E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.77438E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93742E3
defgrida_imon=6.50904E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50114E3
multb_neg_imon=7.26758E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40831E0
defgridb_imon=6.65672E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33957E1
os_fil1_imon=5.11538E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.93034E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65795E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30761E1
cs_fil1_imon=1.00902E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62771E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65581E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.12841E-2
os_fil2_imon=-2.32745E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.62454E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.0524E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29277E-1
cs_fil2_imon=-2.0726E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.29839E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22355E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.99803E-1
chamber_ion_pmon=1.7368E-7
chamber_cvt_pmon=2.51225E-3
foreline_cvt_pmon=2.51225E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.44929E-1
res40_imon=-2.65799E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=171
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2183E4	1.2E1	1.47E2	4.1E1	-7.30146E-2	-8.79977E1	9.53674E-5	-8.80011E1	-4.76837E-5	5.55515E-3	9.29832E-2	2.73003E1	-3.26609E1	-3.2614E1	2.68233E1	1.73676E-7	2.51783E-3	2.51783E-3	6.29703E-3	1.99776E-1
2.0E0	5.957E3	3.0E0	3.16E2	1.6E2	-7.22418E-2	-8.79977E1	7.15256E-5	-8.80009E1	1.90735E-4	5.43594E-3	9.29594E-2	2.72696E1	-3.26909E1	-3.26083E1	2.67808E1	1.73605E-7	2.52061E-3	2.52061E-3	6.32356E-3	1.9883E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.18554E-2	-8.79976E1	5.24521E-4	-8.80013E1	3.57628E-4	5.36442E-3	9.27448E-2	2.73275E1	-3.26602E1	-3.26331E1	2.68354E1	1.73605E-7	2.51915E-3	2.51915E-3	6.35786E-3	1.99401E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.22418E-2	-8.79977E1	4.29153E-4	-8.80015E1	4.76837E-5	5.07832E-3	9.28879E-2	2.73287E1	-3.2675E1	-3.25959E1	2.67758E1	1.73679E-7	2.51203E-3	2.51203E-3	6.29128E-3	1.9934E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.79977E1	1.90735E-4	-8.80015E1	0.0E0	5.48363E-3	9.30309E-2	2.73225E1	-3.26344E1	-3.2644E1	2.68184E1	1.73679E-7	2.51096E-3	2.51096E-3	6.31278E-3	1.9934E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.20871E-2	-8.79977E1	3.09944E-4	-8.80016E1	2.86102E-4	4.95911E-3	9.2864E-2	2.72821E1	-3.26567E1	-3.26543E1	2.6792E1	1.73605E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.99456E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.20871E-2	-8.79975E1	3.57628E-4	-8.80015E1	4.76837E-4	5.43594E-3	9.30309E-2	2.72756E1	-3.26189E1	-3.26201E1	2.68058E1	1.7368E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.9963E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23964E-2	-8.79977E1	2.38419E-4	-8.80013E1	2.86102E-4	5.38826E-3	9.29117E-2	2.72984E1	-3.26731E1	-3.25881E1	2.6795E1	1.73679E-7	2.51632E-3	2.51632E-3	6.31278E-3	1.9951E-1
1.2E1	3.27E2	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.79975E1	2.14577E-4	-8.80014E1	1.19209E-4	5.53131E-3	9.31025E-2	2.72898E1	-3.26596E1	-3.26119E1	2.68623E1	1.7368E-7	2.51334E-3	2.51334E-3	6.32386E-3	1.98937E-1
1.3E1	2.0E1	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.79974E1	4.05312E-4	-8.80015E1	-4.76837E-5	4.91142E-3	9.31263E-2	2.73201E1	-3.26813E1	-3.25996E1	2.68593E1	1.73605E-7	2.5199E-3	2.5199E-3	6.33486E-3	1.9911E-1
1.4E1	7.11E2	0.0E0	5.66E2	3.82E2	-7.201E-2	-8.79975E1	4.76837E-5	-8.80017E1	-2.38419E-5	5.34058E-3	9.32455E-2	2.73213E1	-3.26753E1	-3.25785E1	2.68004E1	1.7368E-7	2.52099E-3	2.52099E-3	6.30192E-3	1.9911E-1
1.5E1	7.2E1	0.0E0	6.06E2	4.11E2	-7.19325E-2	-8.79975E1	3.33786E-4	-8.80014E1	1.43051E-4	5.19753E-3	9.2864E-2	2.72931E1	-3.26627E1	-3.26482E1	2.67668E1	1.7368E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.00499E-1
1.6E1	3.203E3	1.0E0	6.47E2	4.41E2	-7.21643E-2	-8.79975E1	4.29153E-4	-8.80015E1	0.0E0	5.26905E-3	9.3174E-2	2.73123E1	-3.26476E1	-3.2632E1	2.678E1	1.73605E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.99283E-1
1.7E1	3.9638E4	2.4E1	6.87E2	4.7E2	-7.18554E-2	-8.79978E1	1.43051E-4	-8.80013E1	2.14577E-4	5.17368E-3	9.30071E-2	2.72967E1	-3.26615E1	-3.26296E1	2.6792E1	1.73755E-7	2.52099E-3	2.52099E-3	6.32386E-3	1.98764E-1
1.8E1	1.79505E5	1.12E2	7.27E2	5.0E2	-7.286E-2	-8.79979E1	1.66893E-4	-8.80013E1	3.8147E-4	5.48363E-3	9.32932E-2	2.72927E1	-3.26585E1	-3.26178E1	2.68182E1	1.73753E-7	2.51632E-3	2.51632E-3	6.30202E-3	1.9934E-1
1.9E1	2.412E3	1.0E0	7.68E2	5.29E2	-7.23964E-2	-8.79977E1	3.33786E-4	-8.80012E1	5.96046E-4	5.22137E-3	9.31025E-2	2.72769E1	-3.26585E1	-3.26392E1	2.67628E1	1.7368E-7	2.51007E-3	2.51007E-3	6.32936E-3	1.98937E-1
2.0E1	3.45E2	0.0E0	8.08E2	5.58E2	-7.27053E-2	-8.79977E1	1.66893E-4	-8.80014E1	2.86102E-4	5.48363E-3	9.33886E-2	2.73141E1	-3.26494E1	-3.2611E1	2.67882E1	1.7368E-7	2.51771E-3	2.51771E-3	6.29645E-3	1.99803E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.79977E1	0.0E0	-8.80015E1	2.38419E-4	5.38826E-3	9.31263E-2	2.72666E1	-3.26759E1	-3.26194E1	2.67943E1	1.73605E-7	2.51552E-3	2.51552E-3	6.29645E-3	1.99977E-1
2.2E1	4.9E1	0.0E0	8.89E2	6.17E2	-7.27053E-2	-8.79976E1	1.66893E-4	-8.80013E1	2.14577E-4	5.00679E-3	9.31501E-2	2.72685E1	-3.26649E1	-3.26791E1	2.67956E1	1.73827E-7	2.51632E-3	2.51632E-3	6.3074E-3	1.98491E-1
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.30146E-2	-8.79977E1	4.76837E-5	-8.80013E1	3.33786E-4	5.48363E-3	9.29832E-2	2.73051E1	-3.26826E1	-3.26071E1	2.67491E1	1.7368E-7	2.51225E-3	2.51225E-3	6.3074E-3	1.99803E-1