[Scan]
initial_time=2016-02-16T01:29:58
final_time=2016-02-16T01:30:17
ip_count=19
run=1030
dataset=5
scan=338
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.29374E-2
qbias_imon=-3.7627E-6
ql1_vset=
ql1_vmon=-8.79983E1
ql1_imon=-1.69184E-9
ql2_vset=
ql2_vmon=-4.05312E-4
ql2_imon=4.45795E-10
ql3_vset=
ql3_vmon=-8.80011E1
ql3_imon=-4.97608E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=1.05109E-9
mult1=-1.015E-8
mult2=-2.72193E-9
rf_tmon=-3.24219E-3
rf_agc=3.38181E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.57899E-3
ql5_imon=4.74405E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65112E0
bslens_imon=2.84417E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19917E1
lens5a_imon=1.98307E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12494E2
lens4a_imon=2.05042E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53328E1
cs_ef1b_imon=3.0555E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04644E2
lens23_imon=1.02435E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04898E1
cs_ea1_imon=2.19757E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01432E0
lens1_imon=1.47429E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6471E1
os_ef1alow_imon=3.00649E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03756E1
cs_ea2_imon=1.55913E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83902E1
cs_ef1a_imon=3.03171E-5
olens2_vset=9.7E-1
olens2_vmon=9.70483E-1
olens2_imon=4.22454E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11592E1
os_restr1_imon=2.87242E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14987E1
os_ea1_imon=1.91205E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63467E1
os_ef1bup_imon=3.10163E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26051E0
cs_ionrep_imon=1.26749E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91843E2
cs_nozzle_imon=1.93532E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01875E1
cs_anode1_imon=3.24579E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=7.75635E-10
tplens_vset=1.4E-1
tplens_vmon=1.62641E0
tplens_imon=-1.76778E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26119E1
iondef3_imon=1.49929E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26523E1
iondef2_imon=1.60023E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02975E2
lens6_imon=2.98411E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=4.55379E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29716E0
ionrepsh_imon=2.03462E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33694E1
lens5b_imon=2.18279E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74387E1
cs_ef2b_imon=3.1456E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.18678E-1
os_ea2_imon=-3.4621E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06146E2
lens4b_imon=2.00753E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70933E1
cs_ef2a_imon=3.18885E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64681E0
os_ef2alow_imon=-2.40687E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.43965E-1
os_ef2bup_imon=-5.34771E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10733E1
os_restr2_imon=2.89044E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.31839E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01677E1
cs_anode2_imon=2.27921E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73063E1
iondef1_imon=1.11067E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67788E1
iondef4_imon=1.07945E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.90126E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82928E-1
olens1_imon=4.3987E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0971E0
cs_ionaccel_imon=-1.77618E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02098E2
cs_ionfocb_imon=1.47147E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56165E1
einzel_imon=7.94012E-6
window_vset=0.0E0
window_vmon=2.26953E-1
window_imon=-9.50867E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39235E-4
mask2_vset=0.0E0
mask2_vmon=-1.86524E1
mask2_imon=-6.12094E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92678E3
multa_neg_imon=7.67121E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.89254E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.07278E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47976E0
defgridb_imon=5.97688E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33947E1
os_fil1_imon=5.31682E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.3021E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66183E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30798E1
cs_fil1_imon=1.00921E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63183E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65512E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.18979E-2
os_fil2_imon=-2.32359E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.50011E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.83581E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31594E-1
cs_fil2_imon=-2.29356E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19028E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2238E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=1.98937E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.81516E-1
res40_imon=-2.5294E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=145
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2619E4	1.7E1	1.47E2	4.1E1	-7.24736E-2	-8.7998E1	-1.43051E-4	-8.80012E1	3.09944E-4	4.98295E-3	9.30071E-2	2.73546E1	-3.27074E1	-3.26378E1	2.67187E1	1.7368E-7	2.51007E-3	2.51007E-3	6.28006E-3	1.99283E-1
2.0E0	6.192E3	3.0E0	3.16E2	1.6E2	-7.31692E-2	-8.79979E1	-1.43051E-4	-8.80014E1	5.00679E-4	5.126E-3	9.28164E-2	2.73556E1	-3.26549E1	-3.26494E1	2.67469E1	1.73605E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.00705E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.31692E-2	-8.79982E1	7.15256E-5	-8.80014E1	1.19209E-4	5.34058E-3	9.27448E-2	2.73005E1	-3.27112E1	-3.25999E1	2.68337E1	1.73605E-7	2.51581E-3	2.51581E-3	6.32978E-3	1.98696E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.37874E-2	-8.7998E1	3.09944E-4	-8.80016E1	5.72205E-4	5.43594E-3	9.29594E-2	2.73069E1	-3.26699E1	-3.25942E1	2.67547E1	1.73677E-7	2.52342E-3	2.52342E-3	6.31269E-3	1.99227E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.36328E-2	-8.79981E1	0.0E0	-8.80011E1	4.52995E-4	5.19753E-3	9.30309E-2	2.72837E1	-3.26327E1	-3.26156E1	2.68106E1	1.7368E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.98937E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.79982E1	3.57628E-4	-8.8001E1	3.57628E-4	5.05447E-3	9.28164E-2	2.72951E1	-3.26673E1	-3.2577E1	2.67764E1	1.73605E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.98937E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.79981E1	1.43051E-4	-8.80011E1	3.09944E-4	5.126E-3	9.29832E-2	2.73009E1	-3.26735E1	-3.26506E1	2.67625E1	1.73605E-7	2.51334E-3	2.51334E-3	6.29098E-3	1.98937E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.79981E1	2.38419E-5	-8.80011E1	2.6226E-4	5.05447E-3	9.29117E-2	2.72895E1	-3.26458E1	-3.26464E1	2.67271E1	1.73605E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.97903E-1
1.2E1	3.25E2	0.0E0	4.85E2	3.23E2	-7.27828E-2	-8.79979E1	3.57628E-4	-8.80014E1	3.33786E-4	5.19753E-3	9.29594E-2	2.7233E1	-3.26326E1	-3.265E1	2.67848E1	1.73755E-7	2.5199E-3	2.5199E-3	6.34037E-3	1.98419E-1
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.79979E1	9.53674E-5	-8.80012E1	2.86102E-4	4.95911E-3	9.30786E-2	2.73363E1	-3.26416E1	-3.26026E1	2.67716E1	1.73827E-7	2.52061E-3	2.52061E-3	6.31817E-3	1.98491E-1
1.4E1	7.46E2	1.0E0	5.66E2	3.82E2	-7.22418E-2	-8.7998E1	-4.29153E-4	-8.80011E1	3.57628E-4	5.126E-3	9.30309E-2	2.7311E1	-3.27174E1	-3.26083E1	2.68082E1	1.7368E-7	2.51334E-3	2.51334E-3	6.31288E-3	1.9963E-1
1.5E1	5.7E1	0.0E0	6.06E2	4.11E2	-7.23964E-2	-8.79983E1	-1.66893E-4	-8.80012E1	1.43051E-4	4.88758E-3	9.30071E-2	2.73575E1	-3.27017E1	-3.26293E1	2.67663E1	1.7368E-7	2.51443E-3	2.51443E-3	6.29645E-3	1.9911E-1
1.6E1	3.158E3	0.0E0	6.47E2	4.41E2	-7.20871E-2	-8.79982E1	2.38419E-5	-8.8001E1	2.14577E-4	5.14984E-3	9.32455E-2	2.73183E1	-3.26615E1	-3.26446E1	2.67836E1	1.7374E-7	2.51891E-3	2.51891E-3	6.31727E-3	1.99907E-1
1.7E1	3.9793E4	2.6E1	6.87E2	4.7E2	-7.27053E-2	-8.79982E1	-7.15256E-5	-8.80009E1	1.90735E-4	5.10216E-3	9.31025E-2	2.73165E1	-3.26609E1	-3.26104E1	2.68196E1	1.7368E-7	2.51007E-3	2.51007E-3	6.29645E-3	1.9911E-1
1.8E1	1.79269E5	1.28E2	7.27E2	5.0E2	-7.24736E-2	-8.79982E1	9.53674E-5	-8.80011E1	1.43051E-4	5.29289E-3	9.34601E-2	2.7269E1	-3.26446E1	-3.2602E1	2.6801E1	1.7368E-7	2.5188E-3	2.5188E-3	6.33486E-3	1.9911E-1
1.9E1	2.406E3	2.0E0	7.68E2	5.29E2	-7.15461E-2	-8.79981E1	-1.43051E-4	-8.80009E1	3.57628E-4	4.98295E-3	9.33886E-2	2.73105E1	-3.26332E1	-3.26452E1	2.67897E1	1.73605E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.99803E-1
2.0E1	3.41E2	0.0E0	8.08E2	5.58E2	-7.13143E-2	-8.79983E1	1.43051E-4	-8.80012E1	3.33786E-4	5.17368E-3	9.35555E-2	2.73466E1	-3.26561E1	-3.26266E1	2.67649E1	1.7368E-7	2.52099E-3	2.52099E-3	6.29098E-3	1.99283E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.7998E1	-9.53674E-5	-8.80015E1	2.86102E-4	5.05447E-3	9.33409E-2	2.72924E1	-3.26521E1	-3.25994E1	2.6843E1	1.73605E-7	2.52061E-3	2.52061E-3	6.3074E-3	1.98322E-1
2.2E1	4.1E1	0.0E0	8.89E2	6.17E2	-7.23189E-2	-8.79982E1	-2.38419E-4	-8.80009E1	2.6226E-4	5.53131E-3	9.30309E-2	2.72925E1	-3.26699E1	-3.26621E1	2.67782E1	1.73605E-7	2.51632E-3	2.51632E-3	6.31817E-3	1.9934E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.29374E-2	-8.79983E1	-4.05312E-4	-8.80011E1	2.86102E-4	5.57899E-3	9.31263E-2	2.73063E1	-3.26523E1	-3.26119E1	2.67788E1	1.73605E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.98937E-1