[Scan]
initial_time=2016-02-16T01:31:18
final_time=2016-02-16T01:31:37
ip_count=19
run=1030
dataset=5
scan=341
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.77098E-6
ql1_vset=
ql1_vmon=-8.79992E1
ql1_imon=-1.04222E-9
ql2_vset=
ql2_vmon=3.57628E-4
ql2_imon=4.07112E-10
ql3_vset=
ql3_vmon=-8.80011E1
ql3_imon=-3.17506E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=8.82757E-10
mult1=-9.43937E-9
mult2=-2.83039E-9
rf_tmon=-4.1339E-3
rf_agc=3.44271E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=4.246E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67155E0
bslens_imon=2.74323E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19899E1
lens5a_imon=1.97802E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12514E2
lens4a_imon=2.05118E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5385E1
cs_ef1b_imon=3.05262E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02125E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05276E1
cs_ea1_imon=2.23758E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03835E0
lens1_imon=1.36614E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6471E1
os_ef1alow_imon=2.97081E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03901E1
cs_ea2_imon=1.56994E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84346E1
cs_ef1a_imon=3.02703E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=3.98064E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1146E1
os_restr1_imon=2.89224E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15546E1
os_ea1_imon=1.90809E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63581E1
os_ef1bup_imon=3.10019E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22446E0
cs_ionrep_imon=1.26352E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91905E2
cs_nozzle_imon=1.93398E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01893E1
cs_anode1_imon=3.24183E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20535E0
olens4_imon=7.24018E-10
tplens_vset=1.4E-1
tplens_vmon=1.63302E0
tplens_imon=-2.16432E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2611E1
iondef3_imon=1.51262E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26488E1
iondef2_imon=1.57355E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02976E2
lens6_imon=2.98659E-4
ql6_vset=1.0E-1
ql6_vmon=9.30071E-2
ql6_imon=4.12309E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24188E0
ionrepsh_imon=2.00218E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33748E1
lens5b_imon=2.21487E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74453E1
cs_ef2b_imon=3.1438E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.54728E-1
os_ea2_imon=-5.08433E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06107E2
lens4b_imon=2.00691E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71402E1
cs_ef2a_imon=3.20146E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62819E0
os_ef2alow_imon=-2.51859E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.31952E-1
os_ef2bup_imon=-5.23959E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10973E1
os_restr2_imon=2.8926E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.29892E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01881E1
cs_anode2_imon=2.28641E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73015E1
iondef1_imon=1.11211E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67842E1
iondef4_imon=1.10179E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.89382E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82761E-1
olens1_imon=3.95024E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.08569E0
cs_ionaccel_imon=-2.07891E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02012E2
cs_ionfocb_imon=1.47435E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56814E1
einzel_imon=7.87164E-6
window_vset=0.0E0
window_vmon=2.22749E-1
window_imon=-1.03015E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82642E2
mask1_imon=2.39243E-4
mask2_vset=0.0E0
mask2_vmon=-1.86254E1
mask2_imon=-5.76054E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.66039E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93703E3
defgrida_imon=6.65461E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50147E3
multb_neg_imon=7.11604E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50382E0
defgridb_imon=6.11747E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33953E1
os_fil1_imon=5.2147E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.80956E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65933E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30803E1
cs_fil1_imon=1.01115E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62654E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65842E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.18979E-2
os_fil2_imon=-2.32359E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.62024E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.91444E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30817E-1
cs_fil2_imon=-2.41369E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.07014E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22446E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31798E-3
inlet_lpb_pmon=1.97731E-1
chamber_ion_pmon=1.73677E-7
chamber_cvt_pmon=2.51287E-3
foreline_cvt_pmon=2.51287E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.68903E-1
res40_imon=-2.55103E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2549E4	1.4E1	1.47E2	4.1E1	-7.25507E-2	-8.79995E1	2.14577E-4	-8.80007E1	3.09944E-4	5.31673E-3	9.30309E-2	2.73346E1	-3.26579E1	-3.26121E1	2.678E1	1.7368E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.99977E-1
2.0E0	6.059E3	8.0E0	3.16E2	1.6E2	-7.32464E-2	-8.79992E1	5.72205E-4	-8.80009E1	1.43051E-4	5.26905E-3	9.30786E-2	2.72849E1	-3.26352E1	-3.26346E1	2.67902E1	1.73827E-7	2.51739E-3	2.51739E-3	6.31278E-3	1.9917E-1
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.31692E-2	-8.79992E1	-2.38419E-5	-8.8001E1	1.90735E-4	5.57899E-3	9.33647E-2	2.73021E1	-3.26632E1	-3.26443E1	2.67949E1	1.73681E-7	2.51915E-3	2.51915E-3	6.29624E-3	1.99754E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.37103E-2	-8.79994E1	3.09944E-4	-8.80008E1	4.52995E-4	5.81741E-3	9.30309E-2	2.72974E1	-3.26472E1	-3.25953E1	2.68106E1	1.73677E-7	2.52342E-3	2.52342E-3	6.32858E-3	1.99729E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.3401E-2	-8.79993E1	4.29153E-4	-8.80008E1	4.29153E-4	5.74589E-3	9.31263E-2	2.73119E1	-3.26425E1	-3.26681E1	2.68048E1	1.73679E-7	2.51632E-3	2.51632E-3	6.3074E-3	1.99E-1
6.0E0	2.0E0	0.0E0	9.93E2	6.35E2	-7.36328E-2	-8.79995E1	3.09944E-4	-8.80012E1	5.48363E-4	5.62668E-3	9.33647E-2	2.73101E1	-3.26678E1	-3.25954E1	2.67868E1	1.73605E-7	2.5199E-3	2.5199E-3	6.33863E-3	1.99283E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.79995E1	5.48363E-4	-8.80009E1	5.00679E-4	5.43594E-3	9.32455E-2	2.726E1	-3.26573E1	-3.25924E1	2.67734E1	1.73684E-7	2.5118E-3	2.5118E-3	6.33065E-3	2.0057E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.39421E-2	-8.79994E1	5.72205E-4	-8.80008E1	5.72205E-4	5.43594E-3	9.3174E-2	2.72861E1	-3.26487E1	-3.26107E1	2.68113E1	1.73679E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.00021E-1
1.2E1	3.31E2	0.0E0	4.85E2	3.23E2	-7.27828E-2	-8.79992E1	6.19888E-4	-8.80009E1	2.38419E-4	5.62668E-3	9.30309E-2	2.73159E1	-3.26328E1	-3.26197E1	2.68285E1	1.73717E-7	2.51647E-3	2.51647E-3	6.31827E-3	1.99054E-1
1.3E1	8.0E0	0.0E0	5.25E2	3.53E2	-7.30918E-2	-8.79994E1	3.33786E-4	-8.80007E1	4.52995E-4	5.26905E-3	9.31263E-2	2.73069E1	-3.27071E1	-3.26278E1	2.67908E1					
1.4E1	7.15E2	0.0E0	5.66E2	3.82E2	-7.31692E-2	-8.79989E1	2.38419E-4	-8.80007E1	5.24521E-4	5.36442E-3	9.32693E-2	2.73315E1	-3.26987E1	-3.2629E1	2.68076E1	1.73605E-7	2.51096E-3	2.51096E-3	6.32896E-3	1.98491E-1
1.5E1	6.1E1	0.0E0	6.06E2	4.11E2	-7.34782E-2	-8.79991E1	-4.76837E-5	-8.80008E1	3.09944E-4	5.126E-3	9.35078E-2	2.73694E1	-3.26449E1	-3.26762E1	2.6777E1	1.7368E-7	2.51225E-3	2.51225E-3	6.31837E-3	1.98075E-1
1.6E1	3.249E3	1.0E0	6.47E2	4.41E2	-7.30146E-2	-8.79993E1	-2.14577E-4	-8.80012E1	4.52995E-4	5.17368E-3	9.30309E-2	2.73496E1	-3.26374E1	-3.26404E1	2.67662E1	1.73605E-7	2.51417E-3	2.51417E-3	6.32356E-3	1.98491E-1
1.7E1	4.0599E4	2.1E1	6.87E2	4.7E2	-7.30918E-2	-8.79993E1	-1.43051E-4	-8.80007E1	2.38419E-4	5.29289E-3	9.30309E-2	2.73141E1	-3.26404E1	-3.26536E1	2.6798E1	1.73605E-7	2.5147E-3	2.5147E-3	6.32418E-3	1.98169E-1
1.8E1	1.79641E5	9.6E1	7.27E2	5.0E2	-7.26282E-2	-8.79991E1	2.14577E-4	-8.80007E1	4.76837E-5	5.38826E-3	9.31978E-2	2.73081E1	-3.26554E1	-3.26711E1	2.68106E1	1.73605E-7	2.51954E-3	2.51954E-3	6.30202E-3	1.97984E-1
1.9E1	2.295E3	1.0E0	7.68E2	5.29E2	-7.13143E-2	-8.79991E1	9.53674E-5	-8.80008E1	2.38419E-4	4.98295E-3	9.31263E-2	2.73039E1	-3.26897E1	-3.25737E1	2.68172E1	1.73605E-7	2.51662E-3	2.51662E-3	6.32936E-3	1.9963E-1
2.0E1	3.37E2	0.0E0	8.08E2	5.58E2	-7.27053E-2	-8.79992E1	1.19209E-4	-8.80006E1	6.67572E-4	5.4121E-3	9.3174E-2	2.73122E1	-3.26083E1	-3.26667E1	2.67885E1	1.73605E-7	2.51225E-3	2.51225E-3	6.3074E-3	1.99456E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.24736E-2	-8.79992E1	2.14577E-4	-8.8001E1	6.91414E-4	5.19753E-3	9.33886E-2	2.72829E1	-3.26488E1	-3.26494E1	2.67608E1	1.73605E-7	2.51739E-3	2.51739E-3	6.32356E-3	1.98153E-1
2.2E1	4.9E1	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.79992E1	4.76837E-5	-8.80008E1	2.86102E-4	5.34058E-3	9.32693E-2	2.73051E1	-3.26726E1	-3.26343E1	2.68146E1	1.73758E-7	2.51915E-3	2.51915E-3	6.32418E-3	1.98696E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.79992E1	3.57628E-4	-8.80011E1	2.86102E-4	5.19753E-3	9.30071E-2	2.73015E1	-3.26488E1	-3.2611E1	2.67842E1	1.73677E-7	2.51287E-3	2.51287E-3	6.31798E-3	1.97731E-1