[Scan]
initial_time=2016-02-16T01:31:44
final_time=2016-02-16T01:32:04
ip_count=19
run=1030
dataset=5
scan=342
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.44831E-2
qbias_imon=-3.7549E-6
ql1_vset=
ql1_vmon=-8.79995E1
ql1_imon=-9.69827E-10
ql2_vset=
ql2_vmon=-1.19209E-4
ql2_imon=4.09281E-10
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-2.93164E-9
ql4_vset=
ql4_vmon=1.19209E-4
ql4_imon=8.66449E-10
mult1=-9.48754E-9
mult2=-2.89826E-9
rf_tmon=-3.88757E-3
rf_agc=3.33877E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.24521E-3
ql5_imon=4.22633E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66444E0
bslens_imon=2.47601E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1983E1
lens5a_imon=1.98191E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.0532E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53688E1
cs_ef1b_imon=3.04865E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.02372E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04634E1
cs_ea1_imon=2.20702E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08492E0
lens1_imon=1.63009E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6447E1
os_ef1alow_imon=2.99423E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03796E1
cs_ea2_imon=1.5901E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8452E1
cs_ef1a_imon=3.0018E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=3.99697E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11472E1
os_restr1_imon=2.89404E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15306E1
os_ea1_imon=1.88458E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63749E1
os_ef1bup_imon=3.08794E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26508E0
cs_ionrep_imon=1.26801E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.93618E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01623E1
cs_anode1_imon=3.25804E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=7.70688E-10
tplens_vset=1.4E-1
tplens_vmon=1.60191E0
tplens_imon=-3.76754E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26116E1
iondef3_imon=1.51683E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26464E1
iondef2_imon=1.57736E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02998E2
lens6_imon=2.98767E-4
ql6_vset=1.0E-1
ql6_vmon=9.29832E-2
ql6_imon=4.30572E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26449E0
ionrepsh_imon=1.99784E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33705E1
lens5b_imon=2.19286E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74639E1
cs_ef2b_imon=3.12542E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.72862E-1
os_ea2_imon=-4.51082E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06125E2
lens4b_imon=2.00704E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71126E1
cs_ef2a_imon=3.19894E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60657E0
os_ef2alow_imon=-2.4393E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.55978E-1
os_ef2bup_imon=-5.04858E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10787E1
os_restr2_imon=2.87855E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.30247E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02049E1
cs_anode2_imon=2.29795E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72775E1
iondef1_imon=1.1236E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67908E1
iondef4_imon=1.09494E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.88729E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=3.60119E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0953E0
cs_ionaccel_imon=-2.01043E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02051E2
cs_ionfocb_imon=1.47525E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56309E1
einzel_imon=7.78515E-6
window_vset=0.0E0
window_vmon=1.8731E-1
window_imon=-9.14827E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.3903E-4
mask2_vset=0.0E0
mask2_vmon=-1.86524E1
mask2_imon=-5.36411E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92535E3
multa_neg_imon=8.21693E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.66313E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.03477E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35831E0
defgridb_imon=6.16053E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33967E1
os_fil1_imon=4.4879E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=9.08296E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66216E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30803E1
cs_fil1_imon=1.00935E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63159E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65296E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.12929E-2
os_fil2_imon=-2.40168E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.47899E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.89639E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30688E-1
cs_fil2_imon=-2.05329E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.35245E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.224E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=1.98322E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.88124E-1
res40_imon=-2.55103E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=171
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2579E4	7.0E0	1.47E2	4.1E1	-7.33239E-2	-8.79992E1	3.33786E-4	-8.80007E1	2.86102E-4	5.14984E-3	9.33886E-2	2.73075E1	-3.26669E1	-3.2635E1	2.6798E1	1.73605E-7	2.52428E-3	2.52428E-3	6.31288E-3	1.99283E-1
2.0E0	6.27E3	4.0E0	3.16E2	1.6E2	-7.24736E-2	-8.79994E1	9.53674E-5	-8.80008E1	5.48363E-4	5.22137E-3	9.31263E-2	2.73003E1	-3.26753E1	-3.25936E1	2.67848E1	1.73753E-7	2.51525E-3	2.51525E-3	6.31817E-3	1.9934E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.23964E-2	-8.79991E1	7.15256E-5	-8.80006E1	3.33786E-4	5.65052E-3	9.31263E-2	2.72756E1	-3.26431E1	-3.25841E1	2.67943E1	1.7368E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.98247E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.286E-2	-8.79988E1	3.8147E-4	-8.80008E1	3.09944E-4	5.50747E-3	9.29832E-2	2.72821E1	-3.26526E1	-3.26531E1	2.67944E1	1.73679E-7	2.51847E-3	2.51847E-3	6.32896E-3	1.97647E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.29374E-2	-8.79987E1	3.33786E-4	-8.80005E1	1.90735E-4	5.29289E-3	9.30071E-2	2.72883E1	-3.26717E1	-3.26416E1	2.67836E1	1.73605E-7	2.51954E-3	2.51954E-3	6.32896E-3	1.9883E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.79987E1	4.52995E-4	-8.80004E1	4.05312E-4	5.19753E-3	9.31263E-2	2.73261E1	-3.26554E1	-3.25821E1	2.681E1	1.73605E-7	2.5188E-3	2.5188E-3	6.29645E-3	1.9963E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.33239E-2	-8.79987E1	9.53674E-5	-8.80004E1	4.76837E-4	5.126E-3	9.27687E-2	2.72817E1	-3.26416E1	-3.26062E1	2.67932E1	1.73605E-7	2.52209E-3	2.52209E-3	6.27461E-3	1.9911E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.29374E-2	-8.79993E1	5.00679E-4	-8.80003E1	2.38419E-4	5.19753E-3	9.32217E-2	2.73267E1	-3.26494E1	-3.26765E1	2.67944E1	1.73605E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.9963E-1
1.2E1	3.08E2	1.0E0	4.85E2	3.23E2	-7.3401E-2	-8.79993E1	2.38419E-4	-8.80003E1	3.8147E-4	4.69685E-3	9.32455E-2	2.73305E1	-3.26431E1	-3.26225E1	2.68053E1	1.73605E-7	2.51662E-3	2.51662E-3	6.32936E-3	1.97731E-1
1.3E1	9.0E0	0.0E0	5.25E2	3.53E2	-7.30918E-2	-8.79991E1	1.90735E-4	-8.80004E1	2.14577E-4	4.91142E-3	9.3174E-2	2.73472E1	-3.26386E1	-3.26597E1	2.6795E1	1.73605E-7	2.51739E-3	2.51739E-3	6.33436E-3	1.97984E-1
1.4E1	7.48E2	0.0E0	5.66E2	3.82E2	-7.20871E-2	-8.79993E1	1.19209E-4	-8.80006E1	3.09944E-4	5.38826E-3	9.29117E-2	2.73081E1	-3.2653E1	-3.26224E1	2.67908E1	1.7368E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.98247E-1
1.5E1	6.8E1	0.0E0	6.06E2	4.11E2	-7.19325E-2	-8.79992E1	1.66893E-4	-8.80005E1	1.90735E-4	5.50747E-3	9.28879E-2	2.73222E1	-3.26844E1	-3.26142E1	2.6774E1	1.7368E-7	2.51334E-3	2.51334E-3	6.31288E-3	1.98247E-1
1.6E1	3.149E3	1.0E0	6.47E2	4.41E2	-7.23964E-2	-8.79992E1	7.15256E-5	-8.80005E1	3.33786E-4	5.14984E-3	9.32455E-2	2.73105E1	-3.27005E1	-3.2608E1	2.67794E1	1.73605E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.98764E-1
1.7E1	4.0799E4	2.5E1	6.87E2	4.7E2	-7.22418E-2	-8.79994E1	4.52995E-4	-8.80004E1	1.66893E-4	5.10216E-3	9.29594E-2	2.72998E1	-3.26697E1	-3.26319E1	2.68118E1	1.73753E-7	2.51632E-3	2.51632E-3	6.32896E-3	1.9985E-1
1.8E1	1.81115E5	9.7E1	7.27E2	5.0E2	-7.30146E-2	-8.79994E1	1.66893E-4	-8.80008E1	1.66893E-4	5.38826E-3	9.30071E-2	2.73375E1	-3.26933E1	-3.2611E1	2.68105E1	1.73679E-7	2.51203E-3	2.51203E-3	6.32896E-3	1.9917E-1
1.9E1	2.435E3	1.0E0	7.68E2	5.29E2	-7.35556E-2	-8.79992E1	2.38419E-4	-8.80006E1	5.00679E-4	5.22137E-3	9.28879E-2	2.73093E1	-3.26765E1	-3.26446E1	2.68178E1	1.73755E-7	2.5199E-3	2.5199E-3	6.31837E-3	1.98764E-1
2.0E1	3.46E2	0.0E0	8.08E2	5.58E2	-7.37103E-2	-8.79991E1	4.52995E-4	-8.80003E1	1.43051E-4	4.93526E-3	9.31025E-2	2.72756E1	-3.2699E1	-3.26376E1	2.67908E1	1.73605E-7	2.51007E-3	2.51007E-3	6.31837E-3	1.96021E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.34782E-2	-8.79996E1	3.57628E-4	-8.80004E1	1.43051E-4	5.26905E-3	9.30071E-2	2.72791E1	-3.2698E1	-3.27009E1	2.67931E1	1.73605E-7	2.51525E-3	2.51525E-3	6.31817E-3	1.9731E-1
2.2E1	3.3E1	0.0E0	8.89E2	6.17E2	-7.47923E-2	-8.79994E1	3.09944E-4	-8.80002E1	3.33786E-4	5.07832E-3	9.32932E-2	2.73147E1	-3.26152E1	-3.26224E1	2.68016E1	1.73679E-7	2.51525E-3	2.51525E-3	6.3074E-3	1.97478E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.44831E-2	-8.79995E1	-1.19209E-4	-8.80005E1	1.19209E-4	5.24521E-3	9.29832E-2	2.72775E1	-3.26464E1	-3.26116E1	2.67908E1	1.73605E-7	2.51739E-3	2.51739E-3	6.33436E-3	1.98322E-1