[Scan]
initial_time=2016-02-16T01:33:58
final_time=2016-02-16T01:34:17
ip_count=19
run=1030
dataset=5
scan=347
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23964E-2
qbias_imon=-3.78648E-6
ql1_vset=
ql1_vmon=-8.80004E1
ql1_imon=-8.00109E-10
ql2_vset=
ql2_vmon=5.24521E-4
ql2_imon=3.41082E-10
ql3_vset=
ql3_vmon=-8.80009E1
ql3_imon=-2.30668E-9
ql4_vset=
ql4_vmon=3.8147E-4
ql4_imon=8.07703E-10
mult1=-1.174E-8
mult2=-2.70849E-9
rf_tmon=-4.10107E-3
rf_agc=3.38823E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.36442E-3
ql5_imon=3.95703E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67996E0
bslens_imon=2.77207E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19857E1
lens5a_imon=1.98379E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12475E2
lens4a_imon=2.05158E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53644E1
cs_ef1b_imon=3.05759E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04672E2
lens23_imon=1.02363E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05078E1
cs_ea1_imon=2.22244E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06719E0
lens1_imon=1.49592E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64452E1
os_ef1alow_imon=2.97696E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03913E1
cs_ea2_imon=1.584E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84603E1
cs_ef1a_imon=3.02179E-5
olens2_vset=9.7E-1
olens2_vmon=9.70602E-1
olens2_imon=3.461E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.10921E1
os_restr1_imon=2.84803E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15588E1
os_ea1_imon=1.89475E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63699E1
os_ef1bup_imon=3.10937E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2557E0
cs_ionrep_imon=1.27902E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91905E2
cs_nozzle_imon=1.93334E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01861E1
cs_anode1_imon=3.24004E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20573E0
olens4_imon=7.04038E-10
tplens_vset=1.4E-1
tplens_vmon=1.64504E0
tplens_imon=-9.02587E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26561E1
iondef3_imon=1.49244E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26428E1
iondef2_imon=1.59338E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02969E2
lens6_imon=2.98519E-4
ql6_vset=1.0E-1
ql6_vmon=9.31501E-2
ql6_imon=4.03047E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27433E0
ionrepsh_imon=2.02885E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33964E1
lens5b_imon=2.19216E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74461E1
cs_ef2b_imon=3.14169E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.39707E-1
os_ea2_imon=-6.70656E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06123E2
lens4b_imon=2.00569E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7113E1
cs_ef2a_imon=3.19729E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62971E0
os_ef2alow_imon=-2.48423E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.6827E-1
os_ef2bup_imon=-5.09762E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10706E1
os_restr2_imon=2.88174E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23046E2
cs_ionfoca_imon=6.33533E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01711E1
cs_anode2_imon=2.28295E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72784E1
iondef1_imon=1.11031E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68314E1
iondef4_imon=1.08503E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71791E1
olens3_imon=1.85077E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=2.68102E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12782E0
cs_ionaccel_imon=-1.93166E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47494E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56608E1
einzel_imon=7.60443E-6
window_vset=0.0E0
window_vmon=2.50122E-1
window_imon=-9.6554E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82661E2
mask1_imon=2.39265E-4
mask2_vset=0.0E0
mask2_vmon=-1.86031E1
mask2_imon=-8.23055E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92628E3
multa_neg_imon=7.49096E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.82404E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50142E3
multb_neg_imon=7.10162E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.60006E0
defgridb_imon=6.05258E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33952E1
os_fil1_imon=4.74469E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.20632E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65932E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30816E1
cs_fil1_imon=1.00917E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63675E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65285E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.28007E-2
os_fil2_imon=-2.14211E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.003E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.95311E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28903E-1
cs_fil2_imon=-2.47805E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10146E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22403E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=1.97984E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.80261E-1
res40_imon=-2.67884E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=204
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2944E4	7.0E0	1.47E2	4.1E1	-7.18554E-2	-8.80002E1	1.43051E-4	-8.80008E1	3.33786E-4	5.55515E-3	9.3317E-2	2.73364E1	-3.26561E1	-3.26443E1	2.67373E1					
2.0E0	6.098E3	7.0E0	3.16E2	1.6E2	-7.27053E-2	-8.80002E1	1.43051E-4	-8.8001E1	-2.38419E-5	5.07832E-3	9.31025E-2	2.72745E1	-3.27025E1	-3.25795E1	2.67523E1	1.73605E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.99456E-1
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.18554E-2	-8.80001E1	5.00679E-4	-8.80005E1	2.38419E-4	5.14984E-3	9.32932E-2	2.73169E1	-3.26236E1	-3.26614E1	2.67914E1	1.73605E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.00673E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-7.286E-2	-8.80002E1	9.53674E-5	-8.80005E1	4.05312E-4	5.05447E-3	9.32455E-2	2.7301E1	-3.26962E1	-3.26242E1	2.67758E1	1.73605E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.00151E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.80006E1	-7.15256E-5	-8.80006E1	4.52995E-4	4.86374E-3	9.33409E-2	2.73442E1	-3.26945E1	-3.25918E1	2.68447E1	1.73605E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.00876E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80002E1	-7.15256E-5	-8.80004E1	3.09944E-4	5.14984E-3	9.32932E-2	2.73039E1	-3.26627E1	-3.2626E1	2.67734E1	1.73605E-7	2.51116E-3	2.51116E-3	6.34037E-3	1.99977E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.80001E1	9.53674E-5	-8.80005E1	5.96046E-4	5.19753E-3	9.32217E-2	2.73075E1	-3.26578E1	-3.26713E1	2.68213E1	1.7368E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.98592E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.20871E-2	-8.8E1	-9.53674E-5	-8.80005E1	3.57628E-4	5.126E-3	9.34124E-2	2.73116E1	-3.26844E1	-3.26207E1	2.67769E1	1.73605E-7	2.51136E-3	2.51136E-3	6.32978E-3	1.98696E-1
1.2E1	2.97E2	0.0E0	4.85E2	3.23E2	-7.29374E-2	-8.8E1	2.38419E-5	-8.80005E1	3.33786E-4	5.36442E-3	9.32217E-2	2.72901E1	-3.2647E1	-3.25767E1	2.67751E1	1.73605E-7	2.52061E-3	2.52061E-3	6.31817E-3	1.9934E-1
1.3E1	5.0E0	0.0E0	5.25E2	3.53E2	-7.33239E-2	-8.80001E1	2.38419E-5	-8.80003E1	4.76837E-5	5.81741E-3	9.35316E-2	2.73207E1	-3.27041E1	-3.25984E1	2.68094E1	1.7368E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.99456E-1
1.4E1	7.25E2	0.0E0	5.66E2	3.82E2	-7.30146E-2	-8.80003E1	2.38419E-5	-8.80007E1	2.14577E-4	5.53131E-3	9.32217E-2	2.72973E1	-3.26669E1	-3.25984E1	2.67884E1	1.7368E-7	2.51443E-3	2.51443E-3	6.32386E-3	1.98937E-1
1.5E1	7.6E1	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.80001E1	-9.53674E-5	-8.80008E1	3.57628E-4	5.74589E-3	9.31263E-2	2.73225E1	-3.26885E1	-3.26068E1	2.67824E1	1.73605E-7	2.51225E-3	2.51225E-3	6.31288E-3	1.98764E-1
1.6E1	3.242E3	0.0E0	6.47E2	4.41E2	-7.30146E-2	-8.80005E1	1.19209E-4	-8.80007E1	2.6226E-4	5.62668E-3	9.35078E-2	2.72974E1	-3.26732E1	-3.26496E1	2.68022E1	1.73605E-7	2.5199E-3	2.5199E-3	6.33486E-3	1.9911E-1
1.7E1	4.0602E4	2.3E1	6.87E2	4.7E2	-7.31692E-2	-8.80003E1	2.6226E-4	-8.80007E1	-7.15256E-5	5.55515E-3	9.34362E-2	2.72793E1	-3.26416E1	-3.25942E1	2.6792E1	1.73605E-7	2.51632E-3	2.51632E-3	6.31278E-3	1.9968E-1
1.8E1	1.81187E5	1.06E2	7.27E2	5.0E2	-7.34782E-2	-8.80003E1	3.09944E-4	-8.80011E1	-1.43051E-4	5.55515E-3	9.34124E-2	2.73063E1	-3.26467E1	-3.2629E1	2.68112E1	1.73679E-7	2.51203E-3	2.51203E-3	6.31817E-3	1.9968E-1
1.9E1	2.347E3	0.0E0	7.68E2	5.29E2	-7.37103E-2	-8.80002E1	0.0E0	-8.80009E1	7.15256E-5	5.31673E-3	9.33647E-2	2.72991E1	-3.26458E1	-3.2617E1	2.67952E1	1.73605E-7	2.51771E-3	2.51771E-3	6.32936E-3	1.9963E-1
2.0E1	3.38E2	0.0E0	8.08E2	5.58E2	-7.24736E-2	-8.8E1	0.0E0	-8.80007E1	2.14577E-4	5.84126E-3	9.3317E-2	2.73171E1	-3.26182E1	-3.26729E1	2.68035E1	1.73831E-7	2.51116E-3	2.51116E-3	6.31837E-3	1.99456E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.25507E-2	-8.80002E1	2.38419E-4	-8.80009E1	2.38419E-4	5.6982E-3	9.29117E-2	2.73246E1	-3.26785E1	-3.26077E1	2.68196E1	1.73753E-7	2.51954E-3	2.51954E-3	6.28592E-3	1.98491E-1
2.2E1	3.4E1	1.0E0	8.89E2	6.17E2	-7.21643E-2	-8.80002E1	3.8147E-4	-8.80007E1	-4.76837E-5	5.57899E-3	9.33647E-2	2.73117E1	-3.26302E1	-3.26296E1	2.67728E1	1.7368E-7	2.51334E-3	2.51334E-3	6.3074E-3	1.97731E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.23964E-2	-8.80004E1	5.24521E-4	-8.80009E1	3.8147E-4	5.36442E-3	9.31501E-2	2.72784E1	-3.26428E1	-3.26561E1	2.68314E1	1.73605E-7	2.51847E-3	2.51847E-3	6.29665E-3	1.97984E-1