[Scan]
initial_time=2016-02-16T01:34:51
final_time=2016-02-16T01:35:10
ip_count=19
run=1030
dataset=5
scan=349
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.20871E-2
qbias_imon=-3.76587E-6
ql1_vset=
ql1_vmon=-8.80005E1
ql1_imon=-8.12662E-10
ql2_vset=
ql2_vmon=1.43051E-4
ql2_imon=3.78442E-10
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-2.24042E-9
ql4_vset=
ql4_vmon=7.15256E-4
ql4_imon=8.11982E-10
mult1=-9.93676E-9
mult2=-2.69582E-9
rf_tmon=-3.37097E-3
rf_agc=3.38518E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.98295E-3
ql5_imon=4.10128E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65147E0
bslens_imon=2.65298E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19706E1
lens5a_imon=1.98227E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12538E2
lens4a_imon=2.04813E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5332E1
cs_ef1b_imon=3.04229E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04672E2
lens23_imon=1.0233E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04923E1
cs_ea1_imon=2.20773E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0454E0
lens1_imon=1.62655E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64603E1
os_ef1alow_imon=2.97348E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03714E1
cs_ea2_imon=1.58939E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84255E1
cs_ef1a_imon=3.03187E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=3.92771E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11471E1
os_restr1_imon=2.86888E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15724E1
os_ea1_imon=1.87927E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63317E1
os_ef1bup_imon=3.10276E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20314E0
cs_ionrep_imon=1.27261E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91871E2
cs_nozzle_imon=1.93363E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0163E1
cs_anode1_imon=3.2515E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20573E0
olens4_imon=7.04837E-10
tplens_vset=1.4E-1
tplens_vmon=1.66208E0
tplens_imon=-7.59044E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26307E1
iondef3_imon=1.49666E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26142E1
iondef2_imon=1.59789E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0294E2
lens6_imon=2.98424E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=3.914E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28395E0
ionrepsh_imon=2.00102E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33557E1
lens5b_imon=2.20312E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74316E1
cs_ef2b_imon=3.14099E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.07076E-1
os_ea2_imon=-8.36877E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.01012E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71304E1
cs_ef2a_imon=3.19486E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.59844E0
os_ef2alow_imon=-2.59196E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.35835E-1
os_ef2bup_imon=-5.19492E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10683E1
os_restr2_imon=2.87618E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23126E2
cs_ionfoca_imon=6.28902E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01989E1
cs_anode2_imon=2.28538E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72856E1
iondef1_imon=1.08573E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6789E1
iondef4_imon=1.08677E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.89326E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=3.36957E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10118E0
cs_ionaccel_imon=-1.96294E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02092E2
cs_ionfocb_imon=1.47383E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56011E1
einzel_imon=7.69479E-6
window_vset=0.0E0
window_vmon=2.20003E-1
window_imon=-1.01419E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82613E2
mask1_imon=2.39258E-4
mask2_vset=0.0E0
mask2_vmon=-1.86541E1
mask2_imon=-2.94816E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92663E3
multa_neg_imon=7.89484E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.31627E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50105E3
multb_neg_imon=7.76035E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.6093E0
defgridb_imon=6.32335E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33935E1
os_fil1_imon=5.12117E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.78553E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.655E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30785E1
cs_fil1_imon=1.00759E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62922E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65299E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.16727E-2
os_fil2_imon=-2.53018E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.75572E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.11533E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30651E-1
cs_fil2_imon=-2.31587E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.35052E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22332E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.9985E-1
chamber_ion_pmon=1.73753E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.42612E-1
res40_imon=-2.69274E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2713E4	1.5E1	1.47E2	4.1E1	-7.10825E-2	-8.80003E1	2.38419E-5	-8.80007E1	2.6226E-4	5.50747E-3	9.30786E-2	2.73694E1	-3.26685E1	-3.26065E1	2.6771E1	1.7368E-7	2.51007E-3	2.51007E-3	6.32386E-3	1.99456E-1
2.0E0	6.122E3	5.0E0	3.16E2	1.6E2	-7.14689E-2	-8.8E1	1.43051E-4	-8.80009E1	2.38419E-5	5.00679E-3	9.32693E-2	2.73241E1	-3.26462E1	-3.26297E1	2.67998E1	1.73605E-7	2.51739E-3	2.51739E-3	6.28056E-3	1.9934E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80003E1	-7.15256E-5	-8.8001E1	9.53674E-5	5.60284E-3	9.32455E-2	2.72943E1	-3.26711E1	-3.26206E1	2.67884E1	1.7368E-7	2.5188E-3	2.5188E-3	6.29645E-3	1.9963E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.22418E-2	-8.80004E1	2.38419E-4	-8.80007E1	1.90735E-4	5.55515E-3	9.30786E-2	2.73021E1	-3.2649E1	-3.26242E1	2.68196E1	1.7368E-7	2.52318E-3	2.52318E-3	6.31837E-3	2.00499E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80004E1	9.53674E-5	-8.80007E1	-2.38419E-5	5.65052E-3	9.30786E-2	2.72811E1	-3.26837E1	-3.25924E1	2.68052E1	1.73831E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.98592E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.80005E1	-1.90735E-4	-8.80004E1	2.38419E-5	5.43594E-3	9.32217E-2	2.7301E1	-3.26797E1	-3.26136E1	2.68047E1	1.7368E-7	2.51771E-3	2.51771E-3	6.32936E-3	1.99456E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.16233E-2	-8.80005E1	3.8147E-4	-8.80006E1	4.52995E-4	5.53131E-3	9.33886E-2	2.72978E1	-3.26352E1	-3.26383E1	2.6818E1	1.73753E-7	2.51417E-3	2.51417E-3	6.32356E-3	1.98491E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.16233E-2	-8.80006E1	2.38419E-5	-8.80002E1	3.57628E-4	5.45979E-3	9.31501E-2	2.72781E1	-3.26675E1	-3.26092E1	2.6822E1	1.73605E-7	2.51581E-3	2.51581E-3	6.3074E-3	1.99224E-1
1.2E1	3.29E2	0.0E0	4.85E2	3.23E2	-7.16233E-2	-8.80003E1	1.66893E-4	-8.80003E1	5.72205E-4	5.36442E-3	9.30786E-2	2.7301E1	-3.26738E1	-3.26095E1	2.68059E1	1.73827E-7	2.51739E-3	2.51739E-3	6.32356E-3	1.9883E-1
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.16233E-2	-8.80003E1	3.33786E-4	-8.80003E1	4.29153E-4	5.50747E-3	9.31025E-2	2.73476E1	-3.2636E1	-3.26254E1	2.6789E1	1.73605E-7	2.51954E-3	2.51954E-3	6.31817E-3	1.9934E-1
1.4E1	7.28E2	0.0E0	5.66E2	3.82E2	-7.20871E-2	-8.80005E1	7.15256E-5	-8.80004E1	3.57628E-4	5.53131E-3	9.30071E-2	2.72468E1	-3.262E1	-3.26242E1	2.681E1	1.73679E-7	2.5131E-3	2.5131E-3	6.3074E-3	1.9883E-1
1.5E1	6.9E1	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80004E1	2.38419E-4	-8.80007E1	3.09944E-4	5.67436E-3	9.32455E-2	2.72973E1	-3.26374E1	-3.26621E1	2.67788E1	1.73605E-7	2.51804E-3	2.51804E-3	6.3074E-3	1.99401E-1
1.6E1	3.177E3	0.0E0	6.47E2	4.41E2	-7.23964E-2	-8.80005E1	2.38419E-5	-8.80005E1	1.19209E-4	5.60284E-3	9.33647E-2	2.73598E1	-3.26669E1	-3.26392E1	2.67872E1	1.7368E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.9911E-1
1.7E1	4.0652E4	1.2E1	6.87E2	4.7E2	-7.22418E-2	-8.80003E1	-3.09944E-4	-8.80009E1	2.86102E-4	5.45979E-3	9.34124E-2	2.72841E1	-3.26675E1	-3.26452E1	2.67956E1	1.73529E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.99456E-1
1.8E1	1.81962E5	1.11E2	7.27E2	5.0E2	-7.29374E-2	-8.80004E1	-2.14577E-4	-8.80005E1	3.57628E-4	5.50747E-3	9.32693E-2	2.73147E1	-3.26476E1	-3.26038E1	2.67788E1	1.73605E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.9911E-1
1.9E1	2.405E3	0.0E0	7.68E2	5.29E2	-7.31692E-2	-8.80005E1	-2.86102E-4	-8.80005E1	2.86102E-4	5.36442E-3	9.34362E-2	2.73086E1	-3.26608E1	-3.26555E1	2.68017E1	1.73753E-7	2.51525E-3	2.51525E-3	6.33436E-3	2.00705E-1
2.0E1	3.44E2	0.0E0	8.08E2	5.58E2	-7.25507E-2	-8.80005E1	-4.05312E-4	-8.80006E1	5.96046E-4	5.26905E-3	9.32455E-2	2.73075E1	-3.26897E1	-3.26194E1	2.68159E1	1.73605E-7	2.51771E-3	2.51771E-3	6.29645E-3	1.99803E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.23189E-2	-8.80005E1	-2.14577E-4	-8.80005E1	4.29153E-4	5.19753E-3	9.34124E-2	2.73063E1	-3.26735E1	-3.26146E1	2.67872E1	1.73679E-7	2.51739E-3	2.51739E-3	6.29128E-3	2.00876E-1
2.2E1	4.5E1	0.0E0	8.89E2	6.17E2	-7.18554E-2	-8.80006E1	1.66893E-4	-8.80006E1	5.96046E-4	4.91142E-3	9.31025E-2	2.73129E1	-3.26747E1	-3.26104E1	2.67944E1	1.73758E-7	2.5147E-3	2.5147E-3	6.31299E-3	2.00108E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.20871E-2	-8.80005E1	1.43051E-4	-8.80006E1	7.15256E-4	4.98295E-3	9.31025E-2	2.72856E1	-3.26142E1	-3.26307E1	2.6789E1	1.73753E-7	2.51739E-3	2.51739E-3	6.3074E-3	1.9985E-1