[Scan]
initial_time=2016-02-16T01:35:44
final_time=2016-02-16T01:36:04
ip_count=19
run=1030
dataset=5
scan=351
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.26282E-2
qbias_imon=-3.73886E-6
ql1_vset=
ql1_vmon=-8.80003E1
ql1_imon=-7.49409E-10
ql2_vset=
ql2_vmon=-7.15256E-5
ql2_imon=3.99768E-10
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-2.16012E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=8.39353E-10
mult1=-1.08602E-8
mult2=-2.79646E-9
rf_tmon=-5.02313E-3
rf_agc=3.28169E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.34058E-3
ql5_imon=3.64661E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63554E0
bslens_imon=2.69899E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19842E1
lens5a_imon=1.99076E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12531E2
lens4a_imon=2.05231E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53622E1
cs_ef1b_imon=3.05406E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04622E2
lens23_imon=1.02291E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05159E1
cs_ea1_imon=2.21657E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03301E0
lens1_imon=1.51683E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64741E1
os_ef1alow_imon=2.99459E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03649E1
cs_ea2_imon=1.56532E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84376E1
cs_ef1a_imon=3.02234E-5
olens2_vset=9.7E-1
olens2_vmon=9.70626E-1
olens2_imon=3.47364E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1143E1
os_restr1_imon=2.88251E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15134E1
os_ea1_imon=1.87608E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63629E1
os_ef1bup_imon=3.10776E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23971E0
cs_ionrep_imon=1.26483E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91878E2
cs_nozzle_imon=1.93367E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01701E1
cs_anode1_imon=3.25516E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20546E0
olens4_imon=7.29203E-10
tplens_vset=1.4E-1
tplens_vmon=1.62551E0
tplens_imon=-1.0068E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26218E1
iondef3_imon=1.50515E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26645E1
iondef2_imon=1.59505E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02992E2
lens6_imon=2.98576E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=3.8898E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25564E0
ionrepsh_imon=2.0166E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33858E1
lens5b_imon=2.2102E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74675E1
cs_ef2b_imon=3.12614E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.43367E-1
os_ea2_imon=-3.30742E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06158E2
lens4b_imon=2.00669E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71252E1
cs_ef2a_imon=3.19678E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62579E0
os_ef2alow_imon=-2.6195E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.54777E-1
os_ef2bup_imon=-5.31167E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10853E1
os_restr2_imon=2.88215E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.30742E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01947E1
cs_anode2_imon=2.29506E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73045E1
iondef1_imon=1.0921E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67956E1
iondef4_imon=1.09855E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.8227E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=3.59869E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11092E0
cs_ionaccel_imon=-2.02485E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47284E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56297E1
einzel_imon=7.91129E-6
window_vset=0.0E0
window_vmon=2.18544E-1
window_imon=-1.10944E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82613E2
mask1_imon=2.39095E-4
mask2_vset=0.0E0
mask2_vmon=-1.86608E1
mask2_imon=-4.31896E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92628E3
multa_neg_imon=7.04185E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.53925E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50109E3
multb_neg_imon=7.42764E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.53844E0
defgridb_imon=5.98002E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33981E1
os_fil1_imon=5.12461E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.299E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65742E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30799E1
cs_fil1_imon=1.009E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62282E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65596E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.26858E-2
os_fil2_imon=-2.40768E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.74038E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.09635E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29134E-1
cs_fil2_imon=-2.14339E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.26236E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22493E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=1.99E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.92929E-1
res40_imon=-2.6123E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2814E4	9.0E0	1.47E2	4.1E1	-7.201E-2	-8.80006E1	3.57628E-4	-8.80001E1	4.76837E-4	5.43594E-3	9.31978E-2	2.72927E1	-3.26142E1	-3.26366E1	2.68041E1	1.73605E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.00363E-1
2.0E0	6.156E3	4.0E0	3.16E2	1.6E2	-7.30146E-2	-8.80005E1	9.53674E-5	-8.80006E1	1.43051E-4	5.29289E-3	9.3174E-2	2.73216E1	-3.26572E1	-3.26217E1	2.67951E1	1.73827E-7	2.51417E-3	2.51417E-3	6.32896E-3	2.00534E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.80008E1	2.38419E-5	-8.80003E1	2.86102E-4	5.45979E-3	9.31263E-2	2.73039E1	-3.2626E1	-3.26349E1	2.6796E1	1.73642E-7	2.51809E-3	2.51809E-3	6.31827E-3	1.99913E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.16233E-2	-8.80009E1	9.53674E-5	-8.80003E1	5.00679E-4	5.43594E-3	9.30786E-2	2.73027E1	-3.2641E1	-3.26729E1	2.68004E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.20871E-2	-8.80008E1	2.14577E-4	-8.80005E1	1.19209E-4	5.29289E-3	9.3174E-2	2.73345E1	-3.26963E1	-3.26278E1	2.67463E1	1.7368E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.00673E-1
6.0E0	2.0E0	0.0E0	9.93E2	6.35E2	-7.21643E-2	-8.80007E1	2.38419E-5	-8.80004E1	5.00679E-4	5.36442E-3	9.33647E-2	2.7275E1	-3.26803E1	-3.26119E1	2.67782E1	1.7368E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.99283E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.17779E-2	-8.80006E1	-1.43051E-4	-8.80006E1	4.05312E-4	5.60284E-3	9.31978E-2	2.72889E1	-3.26687E1	-3.26675E1	2.68142E1	1.73605E-7	2.52061E-3	2.52061E-3	6.32896E-3	1.99E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.80005E1	4.76837E-5	-8.80007E1	2.38419E-4	5.74589E-3	9.32217E-2	2.72835E1	-3.26506E1	-3.25425E1	2.68388E1	1.73605E-7	2.51443E-3	2.51443E-3	6.30192E-3	2.00325E-1
1.2E1	2.91E2	1.0E0	4.85E2	3.23E2	-7.23189E-2	-8.80006E1	3.09944E-4	-8.80007E1	1.19209E-4	5.24521E-3	9.30786E-2	2.72721E1	-3.26603E1	-3.2608E1	2.67782E1	1.73681E-7	2.51693E-3	2.51693E-3	6.30182E-3	1.99931E-1
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.26282E-2	-8.80005E1	2.6226E-4	-8.80007E1	1.66893E-4	5.03063E-3	9.31978E-2	2.73544E1	-3.26879E1	-3.26729E1	2.68052E1	1.73605E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.00673E-1
1.4E1	7.53E2	1.0E0	5.66E2	3.82E2	-7.24736E-2	-8.80005E1	2.14577E-4	-8.80006E1	2.6226E-4	5.17368E-3	9.32217E-2	2.73718E1	-3.26555E1	-3.26396E1	2.67994E1	1.73605E-7	2.5131E-3	2.5131E-3	6.32356E-3	2.00192E-1
1.5E1	6.8E1	0.0E0	6.06E2	4.11E2	-7.24736E-2	-8.80007E1	1.43051E-4	-8.80004E1	-3.09944E-4	5.4121E-3	9.32455E-2	2.73003E1	-3.26969E1	-3.26428E1	2.6728E1	1.73755E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.99456E-1
1.6E1	3.163E3	1.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80005E1	-2.14577E-4	-8.80006E1	4.76837E-5	5.43594E-3	9.3317E-2	2.72823E1	-3.26398E1	-3.25894E1	2.67553E1	1.73831E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.00325E-1
1.7E1	4.0719E4	1.1E1	6.87E2	4.7E2	-7.25507E-2	-8.80005E1	2.38419E-4	-8.80004E1	2.38419E-4	5.22137E-3	9.30548E-2	2.72873E1	-3.26352E1	-3.26548E1	2.67988E1	1.7368E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.00325E-1
1.8E1	1.81204E5	9.6E1	7.27E2	5.0E2	-7.32464E-2	-8.80007E1	1.90735E-4	-8.80006E1	3.33786E-4	5.22137E-3	9.32217E-2	2.72945E1	-3.26443E1	-3.26172E1	2.68151E1	1.73605E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.00325E-1
1.9E1	2.285E3	2.0E0	7.68E2	5.29E2	-7.35556E-2	-8.80005E1	-7.15256E-5	-8.80005E1	2.6226E-4	5.17368E-3	9.31501E-2	2.73159E1	-3.26609E1	-3.26242E1	2.6804E1	1.7368E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.00151E-1
2.0E1	3.57E2	0.0E0	8.08E2	5.58E2	-7.42513E-2	-8.80003E1	2.38419E-5	-8.8E1	3.09944E-4	5.26905E-3	9.32217E-2	2.73381E1	-3.26646E1	-3.26847E1	2.67802E1	1.73605E-7	2.51096E-3	2.51096E-3	6.31817E-3	2.00192E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.3401E-2	-8.80004E1	-2.38419E-5	-8.80003E1	0.0E0	5.38826E-3	9.29832E-2	2.73045E1	-3.26661E1	-3.26378E1	2.68046E1	1.73675E-7	2.51752E-3	2.51752E-3	6.3074E-3	1.99015E-1
2.2E1	4.3E1	1.0E0	8.89E2	6.17E2	-7.26282E-2	-8.80006E1	4.76837E-5	-8.80003E1	2.14577E-4	5.19753E-3	9.32693E-2	2.73333E1	-3.26651E1	-3.26398E1	2.68004E1	1.73755E-7	2.51552E-3	2.51552E-3	6.30192E-3	1.98764E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.26282E-2	-8.80003E1	-7.15256E-5	-8.80005E1	3.09944E-4	5.34058E-3	9.33886E-2	2.73045E1	-3.26645E1	-3.26218E1	2.67956E1	1.73605E-7	2.51954E-3	2.51954E-3	6.31278E-3	1.99E-1