[Scan]
initial_time=2016-02-16T01:36:11
final_time=2016-02-16T01:36:30
ip_count=19
run=1030
dataset=5
scan=352
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.77347E-6
ql1_vset=
ql1_vmon=-8.80003E1
ql1_imon=-7.53415E-10
ql2_vset=
ql2_vmon=-3.33786E-4
ql2_imon=4.31645E-10
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-2.22654E-9
ql4_vset=
ql4_vmon=6.67572E-4
ql4_imon=8.01063E-10
mult1=-9.36713E-9
mult2=-2.8264E-9
rf_tmon=-5.12527E-3
rf_agc=3.22821E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.22137E-3
ql5_imon=4.02701E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6379E0
bslens_imon=2.83386E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19969E1
lens5a_imon=1.98605E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.05419E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5358E1
cs_ef1b_imon=3.06456E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04643E2
lens23_imon=1.02383E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04887E1
cs_ea1_imon=2.21764E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05053E0
lens1_imon=1.41748E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64787E1
os_ef1alow_imon=2.98034E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03724E1
cs_ea2_imon=1.59169E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8431E1
cs_ef1a_imon=3.01926E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=3.80182E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11174E1
os_restr1_imon=2.87263E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15249E1
os_ea1_imon=1.89711E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63479E1
os_ef1bup_imon=3.09207E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22637E0
cs_ionrep_imon=1.28659E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91896E2
cs_nozzle_imon=1.93595E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01653E1
cs_anode1_imon=3.25045E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20515E0
olens4_imon=7.20823E-10
tplens_vset=1.4E-1
tplens_vmon=1.60619E0
tplens_imon=-2.40548E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2653E1
iondef3_imon=1.50241E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26416E1
iondef2_imon=1.59806E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02909E2
lens6_imon=2.98591E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=4.03547E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27447E0
ionrepsh_imon=2.00418E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33926E1
lens5b_imon=2.18743E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74479E1
cs_ef2b_imon=3.13603E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.50791E-1
os_ea2_imon=-5.62756E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.00586E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71325E1
cs_ef2a_imon=3.19676E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64791E0
os_ef2alow_imon=-2.50256E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.64056E-1
os_ef2bup_imon=-5.16005E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1071E1
os_restr2_imon=2.87565E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23063E2
cs_ionfoca_imon=6.31774E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01569E1
cs_anode2_imon=2.28006E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73075E1
iondef1_imon=1.10367E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67956E1
iondef4_imon=1.1003E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=1.9196E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=3.54862E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11336E0
cs_ionaccel_imon=-2.05293E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02052E2
cs_ionfocb_imon=1.47421E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56562E1
einzel_imon=7.72475E-6
window_vset=0.0E0
window_vmon=2.14091E-1
window_imon=-8.95316E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.38977E-4
mask2_vset=0.0E0
mask2_vmon=-1.86573E1
mask2_imon=-6.53726E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.48238E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.53925E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50107E3
multb_neg_imon=7.24072E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.61552E0
defgridb_imon=5.9586E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.34E1
os_fil1_imon=4.49163E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.47795E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65825E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30782E1
cs_fil1_imon=1.00664E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62719E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65166E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.20046E-2
os_fil2_imon=-2.34223E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.12522E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.10761E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29531E-1
cs_fil2_imon=-2.31986E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19214E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22274E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=2.00534E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51203E-3
foreline_cvt_pmon=2.51203E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.91003E-1
res40_imon=-2.60658E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=178
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2854E4	1.4E1	1.47E2	4.1E1	-7.34782E-2	-8.80005E1	-4.76837E-5	-8.80004E1	-7.15256E-5	5.22137E-3	9.31978E-2	2.73087E1	-3.26741E1	-3.26554E1	2.6783E1	1.73745E-7	2.51752E-3	2.51752E-3	6.29721E-3	1.98693E-1
2.0E0	6.041E3	5.0E0	3.16E2	1.6E2	-7.30146E-2	-8.80002E1	1.19209E-4	-8.80008E1	-7.15256E-5	5.17368E-3	9.32217E-2	2.72907E1	-3.26645E1	-3.26032E1	2.68701E1	1.73753E-7	2.51525E-3	2.51525E-3	6.30202E-3	1.9985E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.80005E1	-2.6226E-4	-8.80008E1	-4.76837E-5	5.07832E-3	9.30548E-2	2.73165E1	-3.26561E1	-3.26332E1	2.67902E1	1.73605E-7	2.51334E-3	2.51334E-3	6.34037E-3	1.99803E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.37103E-2	-8.80005E1	-2.86102E-4	-8.80005E1	1.66893E-4	5.07832E-3	9.30309E-2	2.72715E1	-3.26649E1	-3.26142E1	2.68214E1	1.7368E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.9963E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.3401E-2	-8.80004E1	-4.76837E-5	-8.80005E1	-2.38419E-5	5.57899E-3	9.30071E-2	2.73213E1	-3.26536E1	-3.26278E1	2.68112E1	1.7368E-7	2.51007E-3	2.51007E-3	6.30192E-3	1.98937E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.80003E1	-9.53674E-5	-8.80006E1	4.29153E-4	5.17368E-3	9.32217E-2	2.72498E1	-3.26723E1	-3.26404E1	2.68052E1	1.7368E-7	2.51225E-3	2.51225E-3	6.31288E-3	1.9911E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.80003E1	1.90735E-4	-8.80005E1	2.38419E-5	5.07832E-3	9.31501E-2	2.72889E1	-3.2653E1	-3.26392E1	2.68142E1	1.73605E-7	2.51809E-3	2.51809E-3	6.33188E-3	1.99569E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23189E-2	-8.80003E1	3.33786E-4	-8.80004E1	-2.14577E-4	5.57899E-3	9.31025E-2	2.73139E1	-3.26408E1	-3.26284E1	2.67931E1					
1.2E1	3.22E2	0.0E0	4.85E2	3.23E2	-7.20871E-2	-8.80005E1	4.76837E-5	-8.80003E1	-1.90735E-4	5.07832E-3	9.34601E-2	2.72757E1	-3.26975E1	-3.2614E1	2.67812E1	1.73605E-7	2.51007E-3	2.51007E-3	6.32386E-3	1.9963E-1
1.3E1	1.3E1	0.0E0	5.25E2	3.53E2	-7.24736E-2	-8.80006E1	2.6226E-4	-8.80006E1	1.90735E-4	5.29289E-3	9.32693E-2	2.73201E1	-3.2653E1	-3.26927E1	2.67716E1	1.73605E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.00499E-1
1.4E1	7.26E2	0.0E0	5.66E2	3.82E2	-7.29374E-2	-8.80007E1	-1.66893E-4	-8.80002E1	1.90735E-4	5.36442E-3	9.3174E-2	2.73399E1	-3.26981E1	-3.26458E1	2.67547E1	1.73605E-7	2.51847E-3	2.51847E-3	6.33977E-3	1.9985E-1
1.5E1	6.9E1	0.0E0	6.06E2	4.11E2	-7.24736E-2	-8.80004E1	2.38419E-5	-8.80004E1	0.0E0	5.29289E-3	9.32693E-2	2.72762E1	-3.26561E1	-3.2662E1	2.68172E1	1.73605E-7	2.50898E-3	2.50898E-3	6.34037E-3	1.9911E-1
1.6E1	3.222E3	0.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80006E1	2.38419E-5	-8.80002E1	1.90735E-4	5.10216E-3	9.33886E-2	2.73117E1	-3.26933E1	-3.2593E1	2.68563E1	1.73605E-7	2.51334E-3	2.51334E-3	6.34037E-3	1.99283E-1
1.7E1	4.1194E4	2.4E1	6.87E2	4.7E2	-7.40967E-2	-8.80008E1	-7.15256E-5	-8.80002E1	1.90735E-4	5.67436E-3	9.34839E-2	2.73093E1	-3.26939E1	-3.26657E1	2.67619E1	1.73605E-7	2.51847E-3	2.51847E-3	6.31817E-3	1.9951E-1
1.8E1	1.82189E5	1.06E2	7.27E2	5.0E2	-7.34782E-2	-8.80006E1	9.53674E-5	-8.80001E1	3.33786E-4	4.86374E-3	9.3317E-2	2.72892E1	-3.26903E1	-3.26608E1	2.68118E1	1.7368E-7	2.51662E-3	2.51662E-3	6.29645E-3	1.9911E-1
1.9E1	2.392E3	0.0E0	7.68E2	5.29E2	-7.40967E-2	-8.80005E1	-1.19209E-4	-8.80001E1	1.90735E-4	5.31673E-3	9.34601E-2	2.73027E1	-3.26517E1	-3.26334E1	2.68052E1	1.7368E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.99977E-1
2.0E1	3.42E2	0.0E0	8.08E2	5.58E2	-7.35556E-2	-8.80005E1	-2.38419E-5	-8.80006E1	7.15256E-5	5.126E-3	9.3317E-2	2.73511E1	-3.2682E1	-3.26378E1	2.6796E1	1.7368E-7	2.52209E-3	2.52209E-3	6.29098E-3	1.98419E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.38649E-2	-8.80007E1	1.66893E-4	-8.80008E1	1.43051E-4	5.38826E-3	9.3317E-2	2.73305E1	-3.27021E1	-3.26366E1	2.67668E1	1.73605E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.00673E-1
2.2E1	4.0E1	0.0E0	8.89E2	6.17E2	-7.27053E-2	-8.80006E1	-3.8147E-4	-8.80004E1	4.76837E-4	5.55515E-3	9.31263E-2	2.73291E1	-3.26873E1	-3.26266E1	2.67631E1	1.73679E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.00705E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80003E1	-3.33786E-4	-8.80006E1	6.67572E-4	5.22137E-3	9.32693E-2	2.73075E1	-3.26416E1	-3.2653E1	2.67956E1	1.73605E-7	2.51203E-3	2.51203E-3	6.29128E-3	2.00534E-1