[Scan]
initial_time=2016-02-16T01:36:37
final_time=2016-02-16T01:36:57
ip_count=19
run=1030
dataset=5
scan=353
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.77107E-6
ql1_vset=
ql1_vmon=-8.80008E1
ql1_imon=-7.92992E-10
ql2_vset=
ql2_vmon=-2.38419E-5
ql2_imon=3.77858E-10
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-2.09057E-9
ql4_vset=
ql4_vmon=1.19209E-4
ql4_imon=7.63154E-10
mult1=-1.06796E-8
mult2=-2.74456E-9
rf_tmon=-4.68666E-3
rf_agc=3.38022E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.24521E-3
ql5_imon=4.18365E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61747E0
bslens_imon=2.68195E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20193E1
lens5a_imon=1.99533E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12448E2
lens4a_imon=2.05356E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5334E1
cs_ef1b_imon=3.02739E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04652E2
lens23_imon=1.02283E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04507E1
cs_ea1_imon=2.19793E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0702E0
lens1_imon=1.61849E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65155E1
os_ef1alow_imon=3.00072E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0354E1
cs_ea2_imon=1.54904E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83577E1
cs_ef1a_imon=3.01838E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=3.73232E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11718E1
os_restr1_imon=2.8926E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15906E1
os_ea1_imon=1.92107E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63431E1
os_ef1bup_imon=3.07532E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21605E0
cs_ionrep_imon=1.2491E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91914E2
cs_nozzle_imon=1.93849E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01731E1
cs_anode1_imon=3.27895E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20508E0
olens4_imon=7.03013E-10
tplens_vset=1.4E-1
tplens_vmon=1.60659E0
tplens_imon=-4.94013E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26194E1
iondef3_imon=1.51767E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26897E1
iondef2_imon=1.55769E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02961E2
lens6_imon=2.98793E-4
ql6_vset=1.0E-1
ql6_vmon=9.29356E-2
ql6_imon=3.98254E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28875E0
ionrepsh_imon=1.99929E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33736E1
lens5b_imon=2.22568E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74742E1
cs_ef2b_imon=3.12686E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.01592E-1
os_ea2_imon=-6.95891E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06104E2
lens4b_imon=2.0085E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71143E1
cs_ef2a_imon=3.20074E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65402E0
os_ef2alow_imon=-2.50057E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.46968E-1
os_ef2bup_imon=-5.4306E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10901E1
os_restr2_imon=2.88035E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23116E2
cs_ionfoca_imon=6.28955E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01797E1
cs_anode2_imon=2.27704E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73033E1
iondef1_imon=1.11392E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68304E1
iondef4_imon=1.08882E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.88003E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82571E-1
olens1_imon=2.72441E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.08269E0
cs_ionaccel_imon=-1.81582E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.4737E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56213E1
einzel_imon=7.70226E-6
window_vset=0.0E0
window_vmon=1.783E-1
window_imon=-8.82392E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82595E2
mask1_imon=2.39088E-4
mask2_vset=0.0E0
mask2_vmon=-1.86632E1
mask2_imon=-4.10272E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9262E3
multa_neg_imon=7.86587E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.91777E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.11965E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.64518E0
defgridb_imon=6.30853E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33975E1
os_fil1_imon=4.77622E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.78553E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65757E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30801E1
cs_fil1_imon=1.00908E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62426E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65777E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.1253E-2
os_fil2_imon=-2.37765E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.05853E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.01369E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27969E-1
cs_fil2_imon=-2.39567E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.16625E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22439E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=1.99283E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.62606E-1
res40_imon=-2.4357E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=171
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2932E4	1.3E1	1.47E2	4.1E1	-7.30146E-2	-8.80005E1	-3.57628E-4	-8.80001E1	2.38419E-4	5.17368E-3	9.33409E-2	2.73446E1	-3.26331E1	-3.2649E1	2.67758E1	1.73681E-7	2.51359E-3	2.51359E-3	6.29624E-3	1.99754E-1
2.0E0	5.843E3	7.0E0	3.16E2	1.6E2	-7.25507E-2	-8.80005E1	-2.6226E-4	-8.8E1	3.33786E-4	5.55515E-3	9.32693E-2	2.73399E1	-3.26536E1	-3.26332E1	2.68331E1	1.73823E-7	2.51077E-3	2.51077E-3	6.29684E-3	2.00064E-1
3.0E0	6.0E0	0.0E0	4.85E2	2.79E2	-7.30146E-2	-8.80004E1	-2.14577E-4	-8.80004E1	4.52995E-4	5.22137E-3	9.34124E-2	2.73309E1	-3.2644E1	-3.26086E1	2.67787E1	1.73605E-7	2.5147E-3	2.5147E-3	6.3074E-3	2.00996E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.80004E1	1.43051E-4	-8.80003E1	3.8147E-4	4.93526E-3	9.32217E-2	2.73075E1	-3.26484E1	-3.26661E1	2.68082E1	1.73605E-7	2.51954E-3	2.51954E-3	6.30202E-3	1.9968E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80004E1	2.38419E-5	-8.80009E1	4.29153E-4	5.22137E-3	9.33886E-2	2.72931E1	-3.26272E1	-3.26044E1	2.67866E1	1.73605E-7	2.51525E-3	2.51525E-3	6.32356E-3	1.9917E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23964E-2	-8.80008E1	-1.43051E-4	-8.80004E1	0.0E0	5.24521E-3	9.33409E-2	2.72998E1	-3.26608E1	-3.26266E1	2.67926E1	1.7368E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.98247E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.30146E-2	-8.80007E1	0.0E0	-8.80005E1	4.29153E-4	5.19753E-3	9.3174E-2	2.73189E1	-3.26777E1	-3.26074E1	2.67944E1	1.73605E-7	2.51662E-3	2.51662E-3	6.29645E-3	1.98937E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.33239E-2	-8.80006E1	9.53674E-5	-8.80007E1	7.15256E-5	5.26905E-3	9.31501E-2	2.72841E1	-3.26633E1	-3.26014E1	2.68346E1	1.73679E-7	2.5131E-3	2.5131E-3	6.32896E-3	1.9968E-1
1.2E1	3.23E2	0.0E0	4.85E2	3.23E2	-7.36328E-2	-8.80006E1	1.19209E-4	-8.80005E1	1.66893E-4	5.55515E-3	9.32932E-2	2.73177E1	-3.26536E1	-3.26146E1	2.68172E1	1.7368E-7	2.5188E-3	2.5188E-3	6.32386E-3	1.99283E-1
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80006E1	2.6226E-4	-8.80009E1	3.33786E-4	5.4121E-3	9.35316E-2	2.73111E1	-3.26579E1	-3.26242E1	2.67896E1	1.73758E-7	2.51025E-3	2.51025E-3	6.32418E-3	2.00285E-1
1.4E1	6.89E2	0.0E0	5.66E2	3.82E2	-7.35556E-2	-8.80007E1	1.43051E-4	-8.80005E1	4.05312E-4	5.57899E-3	9.32455E-2	2.73411E1	-3.27047E1	-3.26062E1	2.67992E1	1.73717E-7	2.51538E-3	2.51538E-3	6.32644E-3	2.00085E-1
1.5E1	7.3E1	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.80007E1	2.38419E-5	-8.80002E1	2.38419E-5	5.45979E-3	9.33886E-2	2.73204E1	-3.26697E1	-3.26726E1	2.6792E1					
1.6E1	3.074E3	2.0E0	6.47E2	4.41E2	-7.23189E-2	-8.80007E1	9.53674E-5	-8.8E1	9.53674E-5	5.36442E-3	9.33409E-2	2.73003E1	-3.26639E1	-3.26338E1	2.67668E1	1.73605E-7	2.5199E-3	2.5199E-3	6.32936E-3	1.98937E-1
1.7E1	4.0623E4	2.7E1	6.87E2	4.7E2	-7.27053E-2	-8.80008E1	-2.86102E-4	-8.80005E1	1.66893E-4	5.14984E-3	9.33886E-2	2.72715E1	-3.26545E1	-3.26345E1	2.6778E1	1.73531E-7	2.51525E-3	2.51525E-3	6.3074E-3	1.9985E-1
1.8E1	1.8076E5	1.02E2	7.27E2	5.0E2	-7.27053E-2	-8.80005E1	-4.76837E-5	-8.8E1	2.14577E-4	5.31673E-3	9.33409E-2	2.73026E1	-3.26655E1	-3.26158E1	2.68147E1	1.73605E-7	2.5199E-3	2.5199E-3	6.29703E-3	1.98792E-1
1.9E1	2.342E3	0.0E0	7.68E2	5.29E2	-7.22418E-2	-8.80006E1	7.15256E-5	-8.80001E1	3.09944E-4	5.24521E-3	9.33886E-2	2.73051E1	-3.26687E1	-3.26134E1	2.67944E1	1.73686E-7	2.51557E-3	2.51557E-3	6.32518E-3	2.00722E-1
2.0E1	3.77E2	0.0E0	8.08E2	5.58E2	-7.22418E-2	-8.80004E1	2.38419E-4	-8.80004E1	7.15256E-5	5.36442E-3	9.33886E-2	2.72789E1	-3.26602E1	-3.26141E1	2.68144E1	1.73679E-7	2.51203E-3	2.51203E-3	6.31278E-3	1.9917E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.30146E-2	-8.80004E1	1.90735E-4	-8.80001E1	1.66893E-4	5.24521E-3	9.31263E-2	2.73063E1	-3.26461E1	-3.26537E1	2.67649E1	1.73605E-7	2.51472E-3	2.51472E-3	6.3074E-3	1.98301E-1
2.2E1	3.8E1	0.0E0	8.89E2	6.17E2	-7.27053E-2	-8.80008E1	1.19209E-4	-8.80001E1	1.66893E-4	5.05447E-3	9.32217E-2	2.7355E1	-3.26597E1	-3.25954E1	2.678E1	1.73605E-7	2.52061E-3	2.52061E-3	6.34518E-3	1.99E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.80008E1	-2.38419E-5	-8.80005E1	1.19209E-4	5.24521E-3	9.29356E-2	2.73033E1	-3.26897E1	-3.26194E1	2.68304E1	1.73605E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.99283E-1