[Scan]
initial_time=2016-02-16T01:37:04
final_time=2016-02-16T01:37:24
ip_count=19
run=1030
dataset=5
scan=354
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.82832E-6
ql1_vset=
ql1_vmon=-8.8001E1
ql1_imon=-7.3396E-10
ql2_vset=
ql2_vmon=4.76837E-5
ql2_imon=3.85714E-10
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-2.13169E-9
ql4_vset=
ql4_vmon=2.6226E-4
ql4_imon=7.80916E-10
mult1=-9.45141E-9
mult2=-2.93219E-9
rf_tmon=-3.04641E-3
rf_agc=3.49678E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=3.86262E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6686E0
bslens_imon=2.67719E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19631E1
lens5a_imon=1.98218E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12515E2
lens4a_imon=2.05336E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53823E1
cs_ef1b_imon=3.0416E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04643E2
lens23_imon=1.02378E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04953E1
cs_ea1_imon=2.20536E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04118E0
lens1_imon=1.56828E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64632E1
os_ef1alow_imon=2.99538E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04073E1
cs_ea2_imon=1.56747E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84209E1
cs_ef1a_imon=3.0211E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=3.84939E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11378E1
os_restr1_imon=2.88382E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15074E1
os_ea1_imon=1.90988E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63699E1
os_ef1bup_imon=3.08852E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2463E0
cs_ionrep_imon=1.27582E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91861E2
cs_nozzle_imon=1.93597E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0178E1
cs_anode1_imon=3.27757E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20568E0
olens4_imon=7.45869E-10
tplens_vset=1.4E-1
tplens_vmon=1.63564E0
tplens_imon=-2.32397E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26122E1
iondef3_imon=1.51811E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26819E1
iondef2_imon=1.59354E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02997E2
lens6_imon=2.98447E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=3.99649E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28628E0
ionrepsh_imon=2.00721E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34017E1
lens5b_imon=2.1911E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74299E1
cs_ef2b_imon=3.10659E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.03673E-1
os_ea2_imon=-2.01111E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.00567E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71292E1
cs_ef2a_imon=3.2032E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64072E0
os_ef2alow_imon=-2.66146E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.56107E-1
os_ef2bup_imon=-5.13584E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10695E1
os_restr2_imon=2.8807E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23083E2
cs_ionfoca_imon=6.33509E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02064E1
cs_anode2_imon=2.3111E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73189E1
iondef1_imon=1.09367E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67842E1
iondef4_imon=1.10137E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.85161E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=2.96664E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11856E0
cs_ionaccel_imon=-1.98379E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02097E2
cs_ionfocb_imon=1.47417E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56434E1
einzel_imon=7.64961E-6
window_vset=0.0E0
window_vmon=2.26374E-1
window_imon=-8.64758E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8265E2
mask1_imon=2.39258E-4
mask2_vset=0.0E0
mask2_vmon=-1.8661E1
mask2_imon=-5.34609E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.06416E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.57749E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=6.93554E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.60952E0
defgridb_imon=5.84749E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3394E1
os_fil1_imon=4.513E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.27004E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66129E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3079E1
cs_fil1_imon=1.00902E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63356E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65945E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.18288E-2
os_fil2_imon=-2.50122E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.27701E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.76588E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29152E-1
cs_fil2_imon=-2.08998E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.56483E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2249E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31299E-3
inlet_lpb_pmon=1.97818E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.52139E-3
foreline_cvt_pmon=2.52139E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.24657E-1
res40_imon=-2.63019E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=209
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.292E4	1.5E1	1.47E2	4.1E1	-7.23964E-2	-8.80009E1	3.09944E-4	-8.80001E1	2.86102E-4	4.91142E-3	9.34601E-2	2.73346E1	-3.26791E1	-3.26425E1	2.6777E1	1.73677E-7	2.51603E-3	2.51603E-3	6.31269E-3	1.97897E-1
2.0E0	5.974E3	6.0E0	3.16E2	1.6E2	-7.24736E-2	-8.80005E1	-1.19209E-4	-8.80003E1	4.05312E-4	5.126E-3	9.31978E-2	2.73111E1	-3.26933E1	-3.26464E1	2.67662E1	1.73679E-7	2.51954E-3	2.51954E-3	6.32356E-3	1.98491E-1
3.0E0	8.0E0	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80007E1	2.38419E-5	-8.80003E1	4.52995E-4	5.26905E-3	9.31025E-2	2.73063E1	-3.26615E1	-3.26428E1	2.6789E1	1.7368E-7	2.51443E-3	2.51443E-3	6.30192E-3	1.98247E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-7.16233E-2	-8.8001E1	-3.09944E-4	-8.80004E1	4.29153E-4	5.34058E-3	9.29117E-2	2.73153E1	-3.26422E1	-3.26326E1	2.68454E1	1.7368E-7	2.51225E-3	2.51225E-3	6.29645E-3	1.97903E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.18554E-2	-8.80008E1	-1.66893E-4	-8.80005E1	3.09944E-4	5.4121E-3	9.29832E-2	2.73181E1	-3.26767E1	-3.25947E1	2.68059E1	1.73755E-7	2.51334E-3	2.51334E-3	6.32936E-3	1.97903E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.19325E-2	-8.80005E1	-2.14577E-4	-8.80004E1	9.53674E-5	5.67436E-3	9.27925E-2	2.72709E1	-3.26482E1	-3.26188E1	2.68046E1	1.73605E-7	2.51096E-3	2.51096E-3	6.31278E-3	1.9951E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.80007E1	-1.19209E-4	-8.79999E1	2.38419E-4	5.88894E-3	9.31978E-2	2.72721E1	-3.26512E1	-3.26536E1	2.67728E1	1.73605E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.98592E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.15461E-2	-8.80009E1	-1.66893E-4	-8.80003E1	2.38419E-4	5.67436E-3	9.31978E-2	2.73399E1	-3.26849E1	-3.259E1	2.67565E1	1.7368E-7	2.51007E-3	2.51007E-3	6.30192E-3	1.98419E-1
1.2E1	3.09E2	0.0E0	4.85E2	3.23E2	-7.14689E-2	-8.80007E1	-1.90735E-4	-8.80004E1	2.14577E-4	5.88894E-3	9.30071E-2	2.726E1	-3.26146E1	-3.26176E1	2.68142E1	1.7368E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.99803E-1
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.16233E-2	-8.80009E1	-1.66893E-4	-8.8E1	1.90735E-4	5.43594E-3	9.31263E-2	2.73458E1	-3.27062E1	-3.25835E1	2.67595E1	1.7368E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.99977E-1
1.4E1	7.55E2	2.0E0	5.66E2	3.82E2	-7.13915E-2	-8.80006E1	1.19209E-4	-8.80004E1	2.38419E-5	5.43594E-3	9.32217E-2	2.72532E1	-3.25694E1	-3.27045E1	2.67868E1	1.73605E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.00363E-1
1.5E1	9.0E1	0.0E0	6.06E2	4.11E2	-7.17007E-2	-8.80006E1	-3.09944E-4	-8.80004E1	4.52995E-4	5.31673E-3	9.31263E-2	2.73448E1	-3.26921E1	-3.26543E1	2.67698E1	1.73605E-7	2.51771E-3	2.51771E-3	6.29098E-3	2.00325E-1
1.6E1	3.281E3	1.0E0	6.47E2	4.41E2	-7.201E-2	-8.80007E1	-3.57628E-4	-8.80002E1	3.33786E-4	5.55515E-3	9.2864E-2	2.73249E1	-3.26735E1	-3.26152E1	2.6807E1	1.73827E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.00021E-1
1.7E1	4.0649E4	1.7E1	6.87E2	4.7E2	-7.17007E-2	-8.80009E1	-2.14577E-4	-8.80003E1	7.86781E-4	5.67436E-3	9.34362E-2	2.72955E1	-3.26645E1	-3.26254E1	2.67968E1	1.73681E-7	2.51359E-3	2.51359E-3	6.3074E-3	2.00463E-1
1.8E1	1.80046E5	9.9E1	7.27E2	5.0E2	-7.10825E-2	-8.80006E1	-4.76837E-5	-8.80005E1	5.72205E-4	5.34058E-3	9.34124E-2	2.72943E1	-3.26434E1	-3.26428E1	2.68358E1	1.73605E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.99456E-1
1.9E1	2.455E3	0.0E0	7.68E2	5.29E2	-7.21643E-2	-8.80008E1	-4.52995E-4	-8.80005E1	3.09944E-4	5.19753E-3	9.36031E-2	2.72821E1	-3.2652E1	-3.2662E1	2.6831E1	1.73679E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.9883E-1
2.0E1	3.77E2	0.0E0	8.08E2	5.58E2	-7.18554E-2	-8.8001E1	-2.86102E-4	-8.80007E1	4.29153E-4	5.19753E-3	9.32932E-2	2.72985E1	-3.25906E1	-3.26518E1	2.67884E1	1.73605E-7	2.51662E-3	2.51662E-3	6.33486E-3	1.97903E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.31692E-2	-8.8001E1	-7.15256E-5	-8.80006E1	4.29153E-4	5.45979E-3	9.32693E-2	2.72921E1	-3.2685E1	-3.26496E1	2.68094E1	1.7368E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.97903E-1
2.2E1	4.8E1	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.80006E1	-3.8147E-4	-8.80007E1	3.09944E-4	5.24521E-3	9.34362E-2	2.7321E1	-3.26854E1	-3.25923E1	2.67826E1	1.73605E-7	2.51603E-3	2.51603E-3	6.32328E-3	1.97897E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.8001E1	4.76837E-5	-8.80007E1	2.6226E-4	5.45979E-3	9.3317E-2	2.73189E1	-3.26819E1	-3.26122E1	2.67842E1	1.73605E-7	2.52139E-3	2.52139E-3	6.31299E-3	1.97818E-1