[Scan]
initial_time=2016-02-16T01:37:31
final_time=2016-02-16T01:37:50
ip_count=19
run=1030
dataset=5
scan=355
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.7692E-6
ql1_vset=
ql1_vmon=-8.8001E1
ql1_imon=-6.96647E-10
ql2_vset=
ql2_vmon=-4.76837E-5
ql2_imon=3.75128E-10
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-2.0741E-9
ql4_vset=
ql4_vmon=7.15256E-5
ql4_imon=8.02505E-10
mult1=-1.04989E-8
mult2=-2.84836E-9
rf_tmon=-3.34081E-3
rf_agc=3.35379E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.60284E-3
ql5_imon=3.93581E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63613E0
bslens_imon=2.56095E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20013E1
lens5a_imon=1.98828E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12509E2
lens4a_imon=2.05086E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53632E1
cs_ef1b_imon=3.04994E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04587E2
lens23_imon=1.02217E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04982E1
cs_ea1_imon=2.20135E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05543E0
lens1_imon=1.74689E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64313E1
os_ef1alow_imon=3.00024E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04038E1
cs_ea2_imon=1.55187E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84284E1
cs_ef1a_imon=3.01171E-5
olens2_vset=9.7E-1
olens2_vmon=9.70745E-1
olens2_imon=3.96848E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11037E1
os_restr1_imon=2.88243E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1537E1
os_ea1_imon=1.91926E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63601E1
os_ef1bup_imon=3.076E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27097E0
cs_ionrep_imon=1.26553E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91896E2
cs_nozzle_imon=1.93424E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01867E1
cs_anode1_imon=3.2734E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2057E0
olens4_imon=6.92499E-10
tplens_vset=1.4E-1
tplens_vmon=1.60073E0
tplens_imon=-4.05069E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2617E1
iondef3_imon=1.49277E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26603E1
iondef2_imon=1.57417E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02962E2
lens6_imon=2.98657E-4
ql6_vset=1.0E-1
ql6_vmon=9.30786E-2
ql6_imon=3.94428E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25092E0
ionrepsh_imon=1.99748E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33663E1
lens5b_imon=2.19038E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74455E1
cs_ef2b_imon=3.12223E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.8171E-1
os_ea2_imon=-5.00633E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06109E2
lens4b_imon=2.00973E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7124E1
cs_ef2a_imon=3.19486E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63898E0
os_ef2alow_imon=-2.57806E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.63058E-1
os_ef2bup_imon=-5.27138E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10625E1
os_restr2_imon=2.88174E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23095E2
cs_ionfoca_imon=6.31025E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0189E1
cs_anode2_imon=2.29094E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73093E1
iondef1_imon=1.11299E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67631E1
iondef4_imon=1.09476E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71791E1
olens3_imon=1.88669E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82499E-1
olens1_imon=3.28124E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12435E0
cs_ionaccel_imon=-1.8274E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02046E2
cs_ionfocb_imon=1.47348E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5637E1
einzel_imon=7.69131E-6
window_vset=0.0E0
window_vmon=1.93938E-1
window_imon=-1.11498E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82624E2
mask1_imon=2.3948E-4
mask2_vset=0.0E0
mask2_vmon=-1.86049E1
mask2_imon=-6.80569E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.6754E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93747E3
defgrida_imon=6.93212E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.31084E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.53844E0
defgridb_imon=6.33396E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33959E1
os_fil1_imon=5.02271E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.92454E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65773E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3079E1
cs_fil1_imon=1.00937E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62766E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6594E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.20526E-2
os_fil2_imon=-2.35641E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.46612E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.99637E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28528E-1
cs_fil2_imon=-2.64602E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.56661E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22377E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=1.9917E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.20226E-1
res40_imon=-2.66146E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2959E4	1.6E1	1.47E2	4.1E1	-7.25507E-2	-8.80007E1	-1.19209E-4	-8.80004E1	3.57628E-4	4.98295E-3	9.3174E-2	2.72603E1	-3.2708E1	-3.26124E1	2.6771E1	1.73679E-7	2.51096E-3	2.51096E-3	6.28056E-3	2.00192E-1
2.0E0	6.019E3	1.0E1	3.16E2	1.6E2	-7.25507E-2	-8.80004E1	-7.15256E-5	-8.80006E1	3.09944E-4	5.19753E-3	9.32217E-2	2.73405E1	-3.26939E1	-3.2617E1	2.67926E1	1.73605E-7	2.51393E-3	2.51393E-3	6.29684E-3	1.98894E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.29374E-2	-8.80006E1	-9.53674E-5	-8.80007E1	2.14577E-4	5.24521E-3	9.32455E-2	2.73528E1	-3.2648E1	-3.26407E1	2.67854E1	1.73605E-7	2.51804E-3	2.51804E-3	6.31858E-3	1.99224E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.80007E1	-4.05312E-4	-8.80007E1	0.0E0	5.29289E-3	9.33886E-2	2.73629E1	-3.26856E1	-3.26166E1	2.67505E1	1.73605E-7	2.52428E-3	2.52428E-3	6.31288E-3	1.99803E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.44059E-2	-8.8001E1	-1.66893E-4	-8.80007E1	-1.90735E-4	5.34058E-3	9.34124E-2	2.73165E1	-3.26362E1	-3.2611E1	2.67806E1	1.73605E-7	2.51203E-3	2.51203E-3	6.31817E-3	1.98661E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.46377E-2	-8.80008E1	-4.52995E-4	-8.80006E1	1.19209E-4	5.26905E-3	9.31263E-2	2.72977E1	-3.26852E1	-3.26311E1	2.67685E1	1.73605E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.99283E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.37103E-2	-8.80011E1	-2.14577E-4	-8.80007E1	-2.38419E-5	5.36442E-3	9.31501E-2	2.73019E1	-3.2633E1	-3.26228E1	2.67881E1	1.73676E-7	2.51886E-3	2.51886E-3	6.31779E-3	1.98792E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.39421E-2	-8.80013E1	-2.86102E-4	-8.80006E1	-2.38419E-4	5.60284E-3	9.31501E-2	2.72992E1	-3.26449E1	-3.2616E1	2.67711E1	1.73764E-7	2.51642E-3	2.51642E-3	6.31902E-3	1.99834E-1
1.2E1	3.2E2	0.0E0	4.85E2	3.23E2	-7.35556E-2	-8.80008E1	-1.90735E-4	-8.80009E1	2.86102E-4	5.07832E-3	9.31501E-2	2.72955E1	-3.26705E1	-3.25972E1	2.6804E1	1.73679E-7	2.51525E-3	2.51525E-3	6.31817E-3	1.9968E-1
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.35556E-2	-8.80009E1	-4.76837E-5	-8.80003E1	4.29153E-4	5.14984E-3	9.3174E-2	2.73187E1	-3.26968E1	-3.26065E1	2.67589E1	1.73755E-7	2.51771E-3	2.51771E-3	6.33486E-3	1.99283E-1
1.4E1	7.35E2	1.0E0	5.66E2	3.82E2	-7.30146E-2	-8.80008E1	-4.76837E-4	-8.80004E1	3.33786E-4	5.24521E-3	9.30071E-2	2.73405E1	-3.27642E1	-3.26446E1	2.68136E1	1.73605E-7	2.5131E-3	2.5131E-3	6.29665E-3	1.9917E-1
1.5E1	7.0E1	1.0E0	6.06E2	4.11E2	-7.24736E-2	-8.80008E1	-2.86102E-4	-8.80007E1	3.57628E-4	5.17368E-3	9.33886E-2	2.7242E1	-3.26729E1	-3.2623E1	2.67968E1	1.73605E-7	2.51334E-3	2.51334E-3	6.32386E-3	1.98764E-1
1.6E1	3.228E3	2.0E0	6.47E2	4.41E2	-7.23189E-2	-8.80009E1	-3.33786E-4	-8.80006E1	1.43051E-4	5.72205E-3	9.28879E-2	2.72833E1	-3.27104E1	-3.26048E1	2.67908E1	1.7368E-7	2.5188E-3	2.5188E-3	6.28552E-3	1.99456E-1
1.7E1	4.0606E4	2.0E1	6.87E2	4.7E2	-7.25507E-2	-8.80009E1	-1.43051E-4	-8.80007E1	5.72205E-4	5.10216E-3	9.31263E-2	2.72522E1	-3.26212E1	-3.26627E1	2.68106E1	1.73679E-7	2.51739E-3	2.51739E-3	6.32896E-3	1.9951E-1
1.8E1	1.79263E5	9.1E1	7.27E2	5.0E2	-7.34782E-2	-8.80015E1	1.66893E-4	-8.80008E1	9.53674E-5	4.76837E-3	9.29356E-2	2.73123E1	-3.26765E1	-3.2605E1	2.68064E1	1.73982E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.9911E-1
1.9E1	2.391E3	3.0E0	7.68E2	5.29E2	-7.37103E-2	-8.80009E1	-4.05312E-4	-8.80008E1	4.76837E-5	5.29289E-3	9.28402E-2	2.72913E1	-3.2635E1	-3.26627E1	2.68094E1	1.73605E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.97216E-1
2.0E1	3.81E2	0.0E0	8.08E2	5.58E2	-7.42513E-2	-8.80008E1	4.76837E-5	-8.80003E1	3.09944E-4	5.24521E-3	9.30071E-2	2.73193E1	-3.26396E1	-3.26213E1	2.67926E1	1.73605E-7	2.51443E-3	2.51443E-3	6.30192E-3	1.97216E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.39421E-2	-8.80009E1	-2.38419E-5	-8.80007E1	3.57628E-4	5.07832E-3	9.31263E-2	2.73195E1	-3.26969E1	-3.26356E1	2.67956E1	1.73605E-7	2.51954E-3	2.51954E-3	6.29128E-3	1.98322E-1
2.2E1	6.3E1	0.0E0	8.89E2	6.17E2	-7.38649E-2	-8.80006E1	-2.14577E-4	-8.80006E1	1.66893E-4	5.17368E-3	9.3174E-2	2.72957E1	-3.26154E1	-3.25989E1	2.67792E1	1.73755E-7	2.51771E-3	2.51771E-3	6.32936E-3	1.98247E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.8001E1	-4.76837E-5	-8.80005E1	7.15256E-5	5.60284E-3	9.30786E-2	2.73093E1	-3.26603E1	-3.2617E1	2.67631E1	1.73605E-7	2.51847E-3	2.51847E-3	6.30202E-3	1.9917E-1