[Scan]
initial_time=2016-02-16T01:40:11
final_time=2016-02-16T01:40:30
ip_count=19
run=1030
dataset=5
scan=361
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.74278E-6
ql1_vset=
ql1_vmon=-8.80011E1
ql1_imon=-6.2083E-10
ql2_vset=
ql2_vmon=3.09944E-4
ql2_imon=3.85082E-10
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.96824E-9
ql4_vset=
ql4_vmon=-1.43051E-4
ql4_imon=7.7697E-10
mult1=-1.00053E-8
mult2=-2.76253E-9
rf_tmon=-3.63522E-3
rf_agc=3.42108E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=4.13919E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68155E0
bslens_imon=2.67422E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19677E1
lens5a_imon=2.00704E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12544E2
lens4a_imon=2.05029E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53875E1
cs_ef1b_imon=3.0537E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04556E2
lens23_imon=1.02514E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05531E1
cs_ea1_imon=2.18507E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98051E0
lens1_imon=1.80706E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64771E1
os_ef1alow_imon=2.99712E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04192E1
cs_ea2_imon=1.53984E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84232E1
cs_ef1a_imon=3.01838E-5
olens2_vset=9.7E-1
olens2_vmon=9.70554E-1
olens2_imon=4.03786E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11213E1
os_restr1_imon=2.89152E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15022E1
os_ea1_imon=1.93094E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6387E1
os_ef1bup_imon=3.08181E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24915E0
cs_ionrep_imon=1.27014E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91845E2
cs_nozzle_imon=1.93792E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01545E1
cs_anode1_imon=3.26994E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=7.80821E-10
tplens_vset=1.4E-1
tplens_vmon=1.60014E0
tplens_imon=-5.07712E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26122E1
iondef3_imon=1.52037E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26464E1
iondef2_imon=1.58833E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02956E2
lens6_imon=2.98579E-4
ql6_vset=1.0E-1
ql6_vmon=9.33409E-2
ql6_imon=4.28534E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28277E0
ionrepsh_imon=2.00315E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34029E1
lens5b_imon=2.18578E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74946E1
cs_ef2b_imon=3.13226E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.55754E-1
os_ea2_imon=-3.69675E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06135E2
lens4b_imon=2.0041E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70843E1
cs_ef2a_imon=3.18272E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.67504E0
os_ef2alow_imon=-2.22667E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.53576E-1
os_ef2bup_imon=-5.254E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10649E1
os_restr2_imon=2.87999E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.35308E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01899E1
cs_anode2_imon=2.28858E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73135E1
iondef1_imon=1.07901E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6798E1
iondef4_imon=1.11837E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.90161E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82666E-1
olens1_imon=3.46446E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.07969E0
cs_ionaccel_imon=-2.17622E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.021E2
cs_ionfocb_imon=1.47381E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56285E1
einzel_imon=7.83921E-6
window_vset=0.0E0
window_vmon=2.19745E-1
window_imon=-1.04097E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8259E2
mask1_imon=2.39297E-4
mask2_vset=0.0E0
mask2_vmon=-1.86614E1
mask2_imon=-4.75143E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92626E3
multa_neg_imon=7.51967E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9375E3
defgrida_imon=6.44723E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50147E3
multb_neg_imon=7.07016E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3465E0
defgridb_imon=6.01542E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3393E1
os_fil1_imon=5.17866E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.25405E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65946E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30835E1
cs_fil1_imon=1.00936E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63117E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66025E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.02798E-2
os_fil2_imon=-2.25752E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.95952E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.76224E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29263E-1
cs_fil2_imon=-2.16141E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.09417E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22449E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34518E-3
inlet_lpb_pmon=2.00021E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.49391E-1
res40_imon=-2.60869E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3171E4	1.0E1	1.47E2	4.1E1	-7.27828E-2	-8.80007E1	2.6226E-4	-8.80003E1	-2.38419E-5	5.43594E-3	9.3174E-2	2.73195E1	-3.26573E1	-3.26446E1	2.67878E1	1.73753E-7	2.5131E-3	2.5131E-3	6.31278E-3	1.9917E-1
2.0E0	5.994E3	4.0E0	3.16E2	1.6E2	-7.286E-2	-8.80008E1	9.53674E-5	-8.80004E1	1.19209E-4	5.72205E-3	9.28879E-2	2.73225E1	-3.26633E1	-3.26663E1	2.68274E1	1.73755E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.00499E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.8001E1	1.66893E-4	-8.80001E1	1.19209E-4	5.45979E-3	9.30309E-2	2.73351E1	-3.26933E1	-3.2626E1	2.68064E1	1.73605E-7	2.51443E-3	2.51443E-3	6.30192E-3	1.9963E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.24736E-2	-8.80013E1	9.53674E-5	-8.80003E1	2.6226E-4	4.8399E-3	9.26971E-2	2.73187E1	-3.26844E1	-3.26319E1	2.67665E1	1.73605E-7	2.5131E-3	2.5131E-3	6.31278E-3	1.9934E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.21643E-2	-8.80015E1	1.43051E-4	-8.80007E1	4.29153E-4	5.07832E-3	9.30786E-2	2.72494E1	-3.26315E1	-3.26787E1	2.67493E1	1.73605E-7	2.51007E-3	2.51007E-3	6.29645E-3	1.98937E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.8001E1	-1.66893E-4	-8.80008E1	3.57628E-4	5.55515E-3	9.30548E-2	2.72955E1	-3.26741E1	-3.25978E1	2.6807E1	1.73605E-7	2.5199E-3	2.5199E-3	6.30192E-3	1.98419E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27053E-2	-8.80012E1	4.76837E-5	-8.80007E1	4.52995E-4	5.48363E-3	9.31025E-2	2.73075E1	-3.26703E1	-3.2649E1	2.68058E1	1.73605E-7	2.51007E-3	2.51007E-3	6.31837E-3	1.98592E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.34782E-2	-8.80012E1	-9.53674E-5	-8.80008E1	3.33786E-4	5.60284E-3	9.29356E-2	2.72871E1	-3.26645E1	-3.25936E1	2.68436E1	1.73605E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.97815E-1
1.2E1	3.07E2	0.0E0	4.85E2	3.23E2	-7.35556E-2	-8.80013E1	-9.53674E-5	-8.80007E1	1.90735E-4	5.50747E-3	9.29117E-2	2.72799E1	-3.26434E1	-3.2605E1	2.67962E1	1.7368E-7	2.5199E-3	2.5199E-3	6.31837E-3	1.98764E-1
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80009E1	-3.57628E-4	-8.80003E1	9.53674E-5	5.45979E-3	9.31978E-2	2.72738E1	-3.26685E1	-3.2603E1	2.6795E1	1.7368E-7	2.51334E-3	2.51334E-3	6.29098E-3	1.99283E-1
1.4E1	7.38E2	1.0E0	5.66E2	3.82E2	-7.35556E-2	-8.8001E1	-2.14577E-4	-8.80004E1	2.14577E-4	5.29289E-3	9.31978E-2	2.72889E1	-3.26765E1	-3.27131E1	2.6804E1	1.7368E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.98592E-1
1.5E1	7.9E1	1.0E0	6.06E2	4.11E2	-7.36328E-2	-8.80011E1	-2.14577E-4	-8.80004E1	2.38419E-4	5.57899E-3	9.31501E-2	2.73163E1	-3.26455E1	-3.26148E1	2.68238E1	1.7368E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.00325E-1
1.6E1	3.164E3	1.0E0	6.47E2	4.41E2	-7.23964E-2	-8.8001E1	-1.19209E-4	-8.80006E1	7.15256E-5	5.4121E-3	9.30548E-2	2.73051E1	-3.26573E1	-3.26254E1	2.67752E1	1.73753E-7	2.52384E-3	2.52384E-3	6.32356E-3	2.00534E-1
1.7E1	4.0545E4	2.0E1	6.87E2	4.7E2	-7.29374E-2	-8.8001E1	7.15256E-5	-8.80006E1	-1.43051E-4	5.19753E-3	9.2864E-2	2.72967E1	-3.26861E1	-3.26092E1	2.68064E1	1.7368E-7	2.52099E-3	2.52099E-3	6.3074E-3	1.98764E-1
1.8E1	1.80956E5	8.4E1	7.27E2	5.0E2	-7.27053E-2	-8.8001E1	7.15256E-5	-8.80003E1	-2.14577E-4	5.19753E-3	9.31263E-2	2.72865E1	-3.26723E1	-3.26332E1	2.67722E1	1.73755E-7	2.52647E-3	2.52647E-3	6.31288E-3	1.9911E-1
1.9E1	2.362E3	1.0E0	7.68E2	5.29E2	-7.30918E-2	-8.8001E1	-3.8147E-4	-8.80005E1	2.38419E-5	5.38826E-3	9.30548E-2	2.72803E1	-3.26561E1	-3.26319E1	2.68304E1	1.73679E-7	2.51739E-3	2.51739E-3	6.32896E-3	1.9917E-1
2.0E1	3.6E2	1.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80011E1	-3.57628E-4	-8.80004E1	7.15256E-5	5.36442E-3	9.31025E-2	2.73556E1	-3.26783E1	-3.26561E1	2.68004E1	1.73605E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.98937E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.33239E-2	-8.80011E1	-2.6226E-4	-8.80003E1	-2.86102E-4	5.22137E-3	9.32455E-2	2.73446E1	-3.26573E1	-3.26579E1	2.67978E1	1.73755E-7	2.51443E-3	2.51443E-3	6.34037E-3	2.00673E-1
2.2E1	4.7E1	0.0E0	8.89E2	6.17E2	-7.24736E-2	-8.80012E1	3.09944E-4	-8.80004E1	-3.09944E-4	5.34058E-3	9.32217E-2	2.72803E1	-3.2652E1	-3.26384E1	2.68508E1	1.73827E-7	2.51632E-3	2.51632E-3	6.32356E-3	1.9951E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80011E1	3.09944E-4	-8.80005E1	-1.43051E-4	5.48363E-3	9.33409E-2	2.73135E1	-3.26464E1	-3.26122E1	2.6798E1	1.73605E-7	2.51525E-3	2.51525E-3	6.34518E-3	2.00021E-1