[Scan]
initial_time=2016-02-16T01:40:37
final_time=2016-02-16T01:40:57
ip_count=19
run=1030
dataset=5
scan=362
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.77767E-6
ql1_vset=
ql1_vmon=-8.80012E1
ql1_imon=-6.7066E-10
ql2_vset=
ql2_vmon=2.86102E-4
ql2_imon=3.63922E-10
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.95941E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=7.86543E-10
mult1=-9.6294E-9
mult2=-2.90356E-9
rf_tmon=-3.54204E-3
rf_agc=3.39521E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=4.03333E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65172E0
bslens_imon=2.85499E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19947E1
lens5a_imon=1.97983E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12504E2
lens4a_imon=2.05151E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53328E1
cs_ef1b_imon=3.05262E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02114E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04754E1
cs_ea1_imon=2.21163E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01071E0
lens1_imon=1.4815E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64753E1
os_ef1alow_imon=3.00108E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03288E1
cs_ea2_imon=1.5703E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8422E1
cs_ef1a_imon=3.0227E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=3.80659E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11177E1
os_restr1_imon=2.87458E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15522E1
os_ea1_imon=1.90376E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63773E1
os_ef1bup_imon=3.10271E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22446E0
cs_ionrep_imon=1.26496E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91896E2
cs_nozzle_imon=1.93525E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01839E1
cs_anode1_imon=3.24903E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20568E0
olens4_imon=7.52056E-10
tplens_vset=1.4E-1
tplens_vmon=1.58315E0
tplens_imon=-1.83987E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26278E1
iondef3_imon=1.50758E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26679E1
iondef2_imon=1.58761E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0299E2
lens6_imon=2.98649E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=3.76999E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2521E0
ionrepsh_imon=2.00434E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33772E1
lens5b_imon=2.16656E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74585E1
cs_ef2b_imon=3.12398E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.54127E-1
os_ea2_imon=-3.57025E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06127E2
lens4b_imon=2.00706E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71228E1
cs_ef2a_imon=3.18885E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64921E0
os_ef2alow_imon=-2.40327E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.6619E-1
os_ef2bup_imon=-5.33329E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10727E1
os_restr2_imon=2.8699E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.31082E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01785E1
cs_anode2_imon=2.28137E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7344E1
iondef1_imon=1.09121E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67949E1
iondef4_imon=1.08341E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=1.91137E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=3.00479E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13194E0
cs_ionaccel_imon=-1.89871E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02102E2
cs_ionfocb_imon=1.4736E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56417E1
einzel_imon=7.81037E-6
window_vset=0.0E0
window_vmon=2.26953E-1
window_imon=-9.04015E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.39398E-4
mask2_vset=0.0E0
mask2_vmon=-1.86188E1
mask2_imon=-7.05797E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.91274E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93695E3
defgrida_imon=6.92498E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=6.90335E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37149E0
defgridb_imon=6.09584E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33938E1
os_fil1_imon=4.80625E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.44916E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65937E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30804E1
cs_fil1_imon=1.00804E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62402E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66128E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.26717E-2
os_fil2_imon=-2.19145E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.13972E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.82679E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29393E-1
cs_fil2_imon=-2.37765E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.23833E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22424E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=1.9934E-1
chamber_ion_pmon=1.73679E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.26876E-1
res40_imon=-2.42849E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=226
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3103E4	9.0E0	1.47E2	4.1E1	-7.20871E-2	-8.80012E1	1.43051E-4	-8.79999E1	2.14577E-4	5.36442E-3	9.29832E-2	2.72945E1	-3.26455E1	-3.26301E1	2.68319E1	1.73605E-7	2.51096E-3	2.51096E-3	6.30202E-3	1.97984E-1
2.0E0	5.913E3	6.0E0	3.16E2	1.6E2	-7.23189E-2	-8.80012E1	4.76837E-5	-8.80003E1	2.38419E-4	5.00679E-3	9.29117E-2	2.73253E1	-3.2678E1	-3.25752E1	2.68219E1	1.73679E-7	2.52384E-3	2.52384E-3	6.3074E-3	1.99E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.23189E-2	-8.80007E1	1.66893E-4	-8.80003E1	-1.19209E-4	5.31673E-3	9.32455E-2	2.72464E1	-3.26982E1	-3.25662E1	2.68188E1	1.73683E-7	2.51384E-3	2.51384E-3	6.30171E-3	1.98088E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.29374E-2	-8.80012E1	-2.6226E-4	-8.8E1	2.14577E-4	5.6982E-3	9.3174E-2	2.73001E1	-3.26753E1	-3.25986E1	2.67564E1	1.73743E-7	2.51323E-3	2.51323E-3	6.32247E-3	1.99547E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37103E-2	-8.80015E1	-2.38419E-5	-8.80003E1	-1.43051E-4	5.55515E-3	9.30309E-2	2.72979E1	-3.26482E1	-3.26128E1	2.68099E1	1.73605E-7	2.51158E-3	2.51158E-3	6.3131E-3	1.99523E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.26282E-2	-8.80011E1	-1.66893E-4	-8.80003E1	1.19209E-4	5.67436E-3	9.29117E-2	2.73116E1	-3.26986E1	-3.26278E1	2.68004E1	1.7368E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.98764E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80013E1	-7.15256E-5	-8.80005E1	1.19209E-4	4.98295E-3	9.28402E-2	2.72933E1	-3.26726E1	-3.26095E1	2.68124E1	1.73605E-7	2.52384E-3	2.52384E-3	6.31278E-3	1.9968E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.38649E-2	-8.8001E1	-7.15256E-5	-8.80002E1	1.43051E-4	5.14984E-3	9.30548E-2	2.72907E1	-3.26885E1	-3.26308E1	2.67776E1	1.73605E-7	2.51334E-3	2.51334E-3	6.3074E-3	1.98592E-1
1.2E1	3.37E2	0.0E0	4.85E2	3.23E2	-7.37103E-2	-8.80011E1	-1.90735E-4	-8.80006E1	7.15256E-5	5.38826E-3	9.3317E-2	2.72576E1	-3.26621E1	-3.26488E1	2.68184E1	1.73605E-7	2.50789E-3	2.50789E-3	6.31837E-3	1.99283E-1
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80009E1	-3.8147E-4	-8.80003E1	3.33786E-4	5.34058E-3	9.33647E-2	2.72973E1	-3.26392E1	-3.26567E1	2.68166E1	1.73529E-7	2.51771E-3	2.51771E-3	6.29098E-3	1.98592E-1
1.4E1	7.25E2	0.0E0	5.66E2	3.82E2	-7.30918E-2	-8.8001E1	-4.29153E-4	-8.80003E1	2.6226E-4	5.31673E-3	9.30309E-2	2.7275E1	-3.2577E1	-3.25953E1	2.67746E1	1.73605E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.99803E-1
1.5E1	7.0E1	0.0E0	6.06E2	4.11E2	-7.35556E-2	-8.80013E1	-2.38419E-5	-8.80001E1	3.09944E-4	5.31673E-3	9.30309E-2	2.73153E1	-3.26573E1	-3.26068E1	2.6825E1	1.73605E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.00021E-1
1.6E1	3.227E3	1.0E0	6.47E2	4.41E2	-7.286E-2	-8.80013E1	-3.33786E-4	-8.79999E1	-4.76837E-5	5.26905E-3	9.29594E-2	2.73063E1	-3.26458E1	-3.26398E1	2.67974E1	1.73753E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.00363E-1
1.7E1	4.0836E4	2.8E1	6.87E2	4.7E2	-7.26282E-2	-8.80011E1	-4.05312E-4	-8.80006E1	-1.66893E-4	5.45979E-3	9.30071E-2	2.7275E1	-3.26301E1	-3.26189E1	2.68028E1	1.7368E-7	2.51334E-3	2.51334E-3	6.32386E-3	1.99456E-1
1.8E1	1.81549E5	1.08E2	7.27E2	5.0E2	-7.26282E-2	-8.8001E1	-1.19209E-4	-8.80008E1	3.33786E-4	5.93662E-3	9.29356E-2	2.73159E1	-3.27089E1	-3.26458E1	2.68004E1	1.73605E-7	2.51096E-3	2.51096E-3	6.31817E-3	1.9985E-1
1.9E1	2.315E3	0.0E0	7.68E2	5.29E2	-7.27828E-2	-8.8001E1	-1.90735E-4	-8.80008E1	1.66893E-4	5.62668E-3	9.30309E-2	2.73375E1	-3.26567E1	-3.26213E1	2.68082E1	1.73605E-7	2.51116E-3	2.51116E-3	6.30192E-3	1.99456E-1
2.0E1	3.47E2	0.0E0	8.08E2	5.58E2	-7.20871E-2	-8.80008E1	-4.52995E-4	-8.80006E1	3.8147E-4	5.74589E-3	9.32217E-2	2.73204E1	-3.26632E1	-3.25706E1	2.68154E1	1.7368E-7	2.51225E-3	2.51225E-3	6.3074E-3	2.00673E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.23189E-2	-8.80011E1	-2.14577E-4	-8.80004E1	4.29153E-4	5.67436E-3	9.33886E-2	2.72594E1	-3.26152E1	-3.26524E1	2.6804E1	1.73753E-7	2.52061E-3	2.52061E-3	6.32896E-3	2.00363E-1
2.2E1	4.3E1	0.0E0	8.89E2	6.17E2	-7.19325E-2	-8.80011E1	7.15256E-5	-8.80002E1	3.09944E-4	5.24521E-3	9.29117E-2	2.73387E1	-3.26645E1	-3.26302E1	2.67818E1	1.7368E-7	2.51116E-3	2.51116E-3	6.29645E-3	2.00847E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80012E1	2.86102E-4	-8.80003E1	3.09944E-4	5.126E-3	9.34124E-2	2.7344E1	-3.26679E1	-3.26278E1	2.67949E1	1.73679E-7	2.5131E-3	2.5131E-3	6.30202E-3	1.9934E-1