[Scan]
initial_time=2016-02-16T01:41:04
final_time=2016-02-16T01:41:26
ip_count=19
run=1030
dataset=5
scan=363
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.808E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-6.70469E-10
ql2_vset=
ql2_vmon=2.38419E-4
ql2_imon=3.81088E-10
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.95882E-9
ql4_vset=
ql4_vmon=7.15256E-5
ql4_imon=8.04055E-10
mult1=-1.12093E-8
mult2=-2.75254E-9
rf_tmon=-4.84889E-3
rf_agc=3.25104E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.31673E-3
ql5_imon=4.14562E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63967E0
bslens_imon=2.66714E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.2019E1
lens5a_imon=1.9851E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.05114E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5337E1
cs_ef1b_imon=3.06235E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.02436E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05023E1
cs_ea1_imon=2.22153E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03183E0
lens1_imon=1.60178E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64885E1
os_ef1alow_imon=2.99567E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03661E1
cs_ea2_imon=1.5901E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84064E1
cs_ef1a_imon=3.03135E-5
olens2_vset=9.7E-1
olens2_vmon=9.70578E-1
olens2_imon=4.02153E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11208E1
os_restr1_imon=2.87242E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1517E1
os_ea1_imon=1.89343E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63263E1
os_ef1bup_imon=3.1056E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27215E0
cs_ionrep_imon=1.26341E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91881E2
cs_nozzle_imon=1.9331E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01995E1
cs_anode1_imon=3.25516E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20549E0
olens4_imon=6.99031E-10
tplens_vset=1.4E-1
tplens_vmon=1.63022E0
tplens_imon=-2.17481E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2584E1
iondef3_imon=1.49418E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26567E1
iondef2_imon=1.5763E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02973E2
lens6_imon=2.9853E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=3.69298E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30578E0
ionrepsh_imon=2.02863E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33551E1
lens5b_imon=2.19817E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74507E1
cs_ef2b_imon=3.1319E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.27439E-1
os_ea2_imon=-5.14791E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06106E2
lens4b_imon=2.00701E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71162E1
cs_ef2a_imon=3.19425E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65522E0
os_ef2alow_imon=-2.342E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.30751E-1
os_ef2bup_imon=-5.28644E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10355E1
os_restr2_imon=2.86809E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23089E2
cs_ionfoca_imon=6.32547E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01593E1
cs_anode2_imon=2.28858E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72811E1
iondef1_imon=1.07795E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68484E1
iondef4_imon=1.09999E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.88255E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=2.68006E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13375E0
cs_ionaccel_imon=-2.01404E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02065E2
cs_ionfocb_imon=1.47558E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56351E1
einzel_imon=7.72388E-6
window_vset=0.0E0
window_vmon=1.96319E-1
window_imon=-9.18431E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.39304E-4
mask2_vset=0.0E0
mask2_vmon=-1.86644E1
mask2_imon=-7.23817E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.47012E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93734E3
defgrida_imon=6.71976E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50087E3
multb_neg_imon=7.3427E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40556E0
defgridb_imon=6.23132E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3394E1
os_fil1_imon=5.46698E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.83359E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66237E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.308E1
cs_fil1_imon=1.00841E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62672E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66171E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.24325E-2
os_fil2_imon=-2.27554E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.37998E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.8116E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29134E-1
cs_fil2_imon=-2.28755E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.51793E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22368E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=1.98322E-1
chamber_ion_pmon=1.73679E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.36487E-1
res40_imon=-2.44651E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2882E4	1.1E1	1.47E2	4.1E1	-7.286E-2	-8.80013E1	-2.14577E-4	-8.80002E1	2.6226E-4	5.19753E-3	9.31978E-2	2.7311E1	-3.26797E1	-3.26036E1	2.67914E1	1.73605E-7	2.50882E-3	2.50882E-3	6.29128E-3	1.9951E-1
2.0E0	5.972E3	4.0E0	3.16E2	1.6E2	-7.35556E-2	-8.80013E1	4.76837E-5	-8.80006E1	7.15256E-5	5.53131E-3	9.34362E-2	2.73027E1	-3.26658E1	-3.26064E1	2.68274E1	1.73753E-7	2.51954E-3	2.51954E-3	6.32896E-3	1.9883E-1
3.0E0	5.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80015E1	1.43051E-4	-8.80004E1	4.76837E-5	5.22137E-3	9.35078E-2	2.73159E1	-3.26621E1	-3.2623E1	2.68094E1	1.73605E-7	2.51804E-3	2.51804E-3	6.32978E-3	2.00285E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-7.38649E-2	-8.80012E1	-4.76837E-5	-8.80005E1	3.33786E-4	5.43594E-3	9.32693E-2	2.72871E1	-3.26561E1	-3.26524E1	2.68106E1	1.73605E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.00499E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.25507E-2	-8.80013E1	1.90735E-4	-8.80003E1	-2.38419E-5	5.34058E-3	9.31025E-2	2.7298E1	-3.26703E1	-3.26195E1	2.67914E1	1.73605E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.00499E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.80014E1	1.66893E-4	-8.80003E1	-1.90735E-4	5.50747E-3	9.34124E-2	2.72913E1	-3.26561E1	-3.26224E1	2.6786E1	1.73906E-7	2.51225E-3	2.51225E-3	6.32386E-3	1.9911E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30146E-2	-8.80014E1	9.53674E-5	-8.80003E1	-4.76837E-5	5.4121E-3	9.30309E-2	2.73171E1	-3.26182E1	-3.26338E1	2.67812E1	1.73755E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.98937E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.31692E-2	-8.80012E1	4.76837E-5	-8.80004E1	0.0E0	5.45979E-3	9.31263E-2	2.73104E1	-3.26803E1	-3.26113E1	2.68112E1	1.73605E-7	2.50775E-3	2.50775E-3	6.31278E-3	1.97984E-1
1.2E1	3.27E2	0.0E0	4.85E2	3.23E2	-7.25507E-2	-8.80011E1	1.43051E-4	-8.80004E1	9.53674E-5	5.34058E-3	9.31025E-2	2.73027E1	-3.26296E1	-3.26218E1	2.684E1	1.73605E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.98764E-1
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.29374E-2	-8.80009E1	2.14577E-4	-8.80007E1	0.0E0	5.57899E-3	9.34839E-2	2.72949E1	-3.26795E1	-3.26062E1	2.68154E1	1.73605E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.99283E-1
1.4E1	7.44E2	0.0E0	5.66E2	3.82E2	-7.18554E-2	-8.80011E1	-9.53674E-5	-8.80005E1	0.0E0	5.4121E-3	9.31501E-2	2.74247E1	-3.27528E1	-3.25209E1	2.67836E1	1.73827E-7	2.5131E-3	2.5131E-3	6.32356E-3	1.9934E-1
1.5E1	7.7E1	0.0E0	6.06E2	4.11E2	-7.16233E-2	-8.80012E1	1.19209E-4	-8.80003E1	9.53674E-5	5.74589E-3	9.32932E-2	2.72949E1	-3.26314E1	-3.26224E1	2.68151E1	1.73605E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.99803E-1
1.6E1	3.288E3	1.0E0	6.47E2	4.41E2	-7.13143E-2	-8.80012E1	2.38419E-5	-8.80005E1	1.43051E-4	5.67436E-3	9.31263E-2	2.73222E1	-3.26083E1	-3.26638E1	2.68046E1	1.7368E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.98592E-1
1.7E1	4.0407E4	1.1E1	6.87E2	4.7E2	-7.19325E-2	-8.80014E1	1.90735E-4	-8.80005E1	9.53674E-5	5.31673E-3	9.2864E-2	2.73161E1	-3.26364E1	-3.2626E1	2.67851E1	1.7368E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.97731E-1
1.8E1	1.79755E5	1.03E2	7.27E2	5.0E2	-7.17779E-2	-8.80015E1	2.38419E-4	-8.80006E1	-2.38419E-5	5.50747E-3	9.29117E-2	2.73195E1	-3.26783E1	-3.26296E1	2.67986E1	1.73681E-7	2.51025E-3	2.51025E-3	6.31858E-3	1.97994E-1
1.9E1	2.439E3	1.0E0	7.68E2	5.29E2	-7.18554E-2	-8.80013E1	1.19209E-4	-8.80007E1	1.43051E-4	5.17368E-3	9.29356E-2	2.72997E1	-3.26579E1	-3.2602E1	2.68154E1	1.73827E-7	2.51847E-3	2.51847E-3	6.31278E-3	1.9883E-1
2.0E1	3.52E2	1.0E0	8.08E2	5.58E2	-7.27828E-2	-8.80014E1	9.53674E-5	-8.80007E1	-7.15256E-5	5.55515E-3	9.32693E-2	2.7301E1	-3.26638E1	-3.26461E1	2.6774E1	1.7368E-7	2.51443E-3	2.51443E-3	6.29098E-3	1.99456E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.24736E-2	-8.80013E1	7.15256E-5	-8.80005E1	3.33786E-4	5.45979E-3	9.3317E-2	2.72877E1	-3.26597E1	-3.26356E1	2.67728E1	1.73679E-7	2.51525E-3	2.51525E-3	6.29665E-3	1.9968E-1
2.2E1	5.2E1	1.0E0	8.89E2	6.17E2	-7.22418E-2	-8.80011E1	-7.15256E-5	-8.80005E1	2.14577E-4	5.126E-3	9.29594E-2	2.73488E1	-3.27098E1	-3.26189E1	2.67559E1	1.73605E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.98937E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80014E1	2.38419E-4	-8.80004E1	7.15256E-5	5.31673E-3	9.31263E-2	2.72811E1	-3.26567E1	-3.2584E1	2.68484E1	1.73679E-7	2.51417E-3	2.51417E-3	6.32896E-3	1.98322E-1