[Scan]
initial_time=2016-02-16T01:41:35
final_time=2016-02-16T01:41:57
ip_count=19
run=1030
dataset=5
scan=364
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.32464E-2
qbias_imon=-3.75175E-6
ql1_vset=
ql1_vmon=-8.8001E1
ql1_imon=-6.81925E-10
ql2_vset=
ql2_vmon=-2.14577E-4
ql2_imon=4.03762E-10
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-2.01263E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=7.62224E-10
mult1=-1.16067E-8
mult2=-3.09587E-9
rf_tmon=-3.93563E-3
rf_agc=3.25285E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=3.81327E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63129E0
bslens_imon=2.80091E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20121E1
lens5a_imon=1.98379E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12533E2
lens4a_imon=2.05392E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53198E1
cs_ef1b_imon=3.06523E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.02247E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04958E1
cs_ea1_imon=2.20478E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06239E0
lens1_imon=1.51395E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64718E1
os_ef1alow_imon=3.00407E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04105E1
cs_ea2_imon=1.59806E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84186E1
cs_ef1a_imon=3.02388E-5
olens2_vset=9.7E-1
olens2_vmon=9.70721E-1
olens2_imon=3.8923E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11355E1
os_restr1_imon=2.87305E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14861E1
os_ea1_imon=1.91386E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63653E1
os_ef1bup_imon=3.08817E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23467E0
cs_ionrep_imon=1.25884E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91911E2
cs_nozzle_imon=1.93424E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02018E1
cs_anode1_imon=3.27375E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20575E0
olens4_imon=7.60114E-10
tplens_vset=1.4E-1
tplens_vmon=1.59998E0
tplens_imon=-1.47938E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26777E1
iondef3_imon=1.53245E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26302E1
iondef2_imon=1.58977E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02945E2
lens6_imon=2.98663E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=4.11367E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27853E0
ionrepsh_imon=2.00831E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33934E1
lens5b_imon=2.19432E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74438E1
cs_ef2b_imon=3.12744E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.40308E-1
os_ea2_imon=-3.57025E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06119E2
lens4b_imon=2.00749E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7098E1
cs_ef2a_imon=3.19138E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64709E0
os_ef2alow_imon=-2.49118E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.3931E-1
os_ef2bup_imon=-5.19492E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1077E1
os_restr2_imon=2.87305E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23089E2
cs_ionfoca_imon=6.31839E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01931E1
cs_anode2_imon=2.30589E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73646E1
iondef1_imon=1.07607E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67938E1
iondef4_imon=1.08746E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.87625E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82046E-1
olens1_imon=3.50058E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11566E0
cs_ionaccel_imon=-1.91776E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47487E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56295E1
einzel_imon=7.88593E-6
window_vset=0.0E0
window_vmon=2.20582E-1
window_imon=-9.96817E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82611E2
mask1_imon=2.393E-4
mask2_vset=0.0E0
mask2_vmon=-1.86825E1
mask2_imon=-5.86738E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=7.28548E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93686E3
defgrida_imon=6.86009E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50146E3
multb_neg_imon=7.49817E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.64217E0
defgridb_imon=6.07421E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33916E1
os_fil1_imon=4.7389E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.62915E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66034E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30783E1
cs_fil1_imon=1.01062E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62094E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6617E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.29297E-2
os_fil2_imon=-2.27532E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.81364E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.89639E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27529E-1
cs_fil2_imon=-2.05522E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.11884E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22445E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=1.99456E-1
chamber_ion_pmon=1.7368E-7
chamber_cvt_pmon=2.51116E-3
foreline_cvt_pmon=2.51116E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.82954E-1
res40_imon=-2.38344E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=179
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3224E4	2.2E1	1.47E2	4.1E1	-7.27828E-2	-8.8001E1	1.66893E-4	-8.80003E1	3.33786E-4	5.38826E-3	9.31025E-2	2.73128E1	-3.26655E1	-3.2616E1	2.67992E1	1.73605E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.9963E-1
2.0E0	6.163E3	4.0E0	3.16E2	1.6E2	-7.33239E-2	-8.8001E1	2.86102E-4	-8.80004E1	4.76837E-4	5.14984E-3	9.29356E-2	2.72907E1	-3.2644E1	-3.26038E1	2.67896E1	1.73605E-7	2.51954E-3	2.51954E-3	6.31817E-3	1.99E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.42513E-2	-8.8001E1	2.14577E-4	-8.80001E1	1.66893E-4	5.29289E-3	9.3317E-2	2.72909E1	-3.26703E1	-3.26366E1	2.67775E1	1.73605E-7	2.5147E-3	2.5147E-3	6.28511E-3	1.99048E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.34782E-2	-8.8001E1	9.53674E-5	-8.80003E1	1.43051E-4	5.36442E-3	9.31978E-2	2.73021E1	-3.26815E1	-3.26331E1	2.67728E1	1.73677E-7	2.51919E-3	2.51919E-3	6.32858E-3	2.00231E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.34782E-2	-8.80011E1	2.86102E-4	-8.80004E1	2.14577E-4	5.24521E-3	9.33409E-2	2.73478E1	-3.26621E1	-3.2638E1	2.68154E1	1.73605E-7	2.51739E-3	2.51739E-3	6.2752E-3	1.9985E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.8001E1	0.0E0	-8.80004E1	1.90735E-4	5.24521E-3	9.3317E-2	2.72979E1	-3.27167E1	-3.25888E1	2.67842E1	1.73755E-7	2.51662E-3	2.51662E-3	6.33486E-3	1.98937E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.80009E1	4.76837E-5	-8.80006E1	2.6226E-4	5.24521E-3	9.3317E-2	2.72642E1	-3.26206E1	-3.26044E1	2.67878E1	1.73605E-7	2.5147E-3	2.5147E-3	6.34661E-3	1.99401E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.29374E-2	-8.80013E1	4.76837E-5	-8.80004E1	3.33786E-4	5.26905E-3	9.31978E-2	2.73586E1	-3.26753E1	-3.2626E1	2.68028E1	1.73605E-7	2.51632E-3	2.51632E-3	6.3074E-3	1.99E-1
1.2E1	3.08E2	2.0E0	4.85E2	3.23E2	-7.29374E-2	-8.80014E1	-4.76837E-5	-8.80005E1	4.76837E-5	5.34058E-3	9.34124E-2	2.73193E1	-3.26296E1	-3.26213E1	2.68076E1	1.73605E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.00673E-1
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80013E1	3.09944E-4	-8.80005E1	4.29153E-4	5.126E-3	9.34124E-2	2.72794E1	-3.26646E1	-3.26272E1	2.67842E1	1.7368E-7	2.51552E-3	2.51552E-3	6.29645E-3	2.01197E-1
1.4E1	7.46E2	0.0E0	5.66E2	3.82E2	-7.286E-2	-8.80016E1	2.86102E-4	-8.80007E1	7.15256E-5	5.76973E-3	9.34124E-2	2.72243E1	-3.25918E1	-3.26325E1	2.6822E1	1.73755E-7	2.52209E-3	2.52209E-3	6.29645E-3	2.00151E-1
1.5E1	7.7E1	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80014E1	2.38419E-5	-8.80006E1	4.29153E-4	5.60284E-3	9.34601E-2	2.72907E1	-3.26645E1	-3.2644E1	2.68286E1	1.7368E-7	2.5188E-3	2.5188E-3	6.32386E-3	1.98937E-1
1.6E1	3.142E3	2.0E0	6.47E2	4.41E2	-7.29374E-2	-8.80015E1	1.66893E-4	-8.80005E1	5.96046E-4	5.65052E-3	9.34362E-2	2.73105E1	-3.26861E1	-3.26098E1	2.67932E1	1.73605E-7	2.5131E-3	2.5131E-3	6.3074E-3	1.9883E-1
1.7E1	4.0455E4	2.0E1	6.87E2	4.7E2	-7.34782E-2	-8.80011E1	-1.19209E-4	-8.80005E1	5.24521E-4	5.126E-3	9.32932E-2	2.73169E1	-3.26644E1	-3.26301E1	2.68215E1	1.7368E-7	2.51771E-3	2.51771E-3	6.34037E-3	1.96191E-1
1.8E1	1.81878E5	9.8E1	7.27E2	5.0E2	-7.39421E-2	-8.80012E1	-1.66893E-4	-8.80004E1	3.09944E-4	5.126E-3	9.32455E-2	2.73261E1	-3.26951E1	-3.25816E1	2.6807E1	1.7368E-7	2.51334E-3	2.51334E-3	6.31288E-3	1.98075E-1
1.9E1	2.425E3	3.0E0	7.68E2	5.29E2	-7.29374E-2	-8.80011E1	9.53674E-5	-8.80007E1	1.66893E-4	5.00679E-3	9.34601E-2	2.72709E1	-3.26526E1	-3.26119E1	2.6774E1	1.73605E-7	2.51096E-3	2.51096E-3	6.28056E-3	1.97815E-1
2.0E1	3.77E2	0.0E0	8.08E2	5.58E2	-7.32464E-2	-8.80011E1	3.33786E-4	-8.80007E1	-4.76837E-5	5.53131E-3	9.30309E-2	2.73322E1	-3.26602E1	-3.26254E1	2.67943E1	1.73605E-7	2.51739E-3	2.51739E-3	6.33436E-3	1.98153E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.23964E-2	-8.80008E1	-3.8147E-4	-8.80006E1	3.57628E-4	5.48363E-3	9.31025E-2	2.72927E1	-3.26419E1	-3.26124E1	2.67938E1	1.73605E-7	2.51443E-3	2.51443E-3	6.30192E-3	1.98764E-1
2.2E1	4.0E1	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.80011E1	2.38419E-5	-8.80002E1	1.90735E-4	5.38826E-3	9.33886E-2	2.72797E1	-3.26561E1	-3.26714E1	2.67856E1	1.73677E-7	2.52342E-3	2.52342E-3	6.31798E-3	1.98727E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.32464E-2	-8.8001E1	-2.14577E-4	-8.80002E1	1.90735E-4	5.19753E-3	9.31263E-2	2.73646E1	-3.26302E1	-3.26777E1	2.67938E1	1.7368E-7	2.51116E-3	2.51116E-3	6.32936E-3	1.99456E-1