[Scan]
initial_time=2016-02-16T01:42:05
final_time=2016-02-16T01:42:27
ip_count=19
run=1030
dataset=5
scan=365
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.26282E-2
qbias_imon=-3.73403E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-6.73187E-10
ql2_vset=
ql2_vmon=-2.6226E-4
ql2_imon=4.12083E-10
ql3_vset=
ql3_vmon=-8.80008E1
ql3_imon=-1.94167E-9
ql4_vset=
ql4_vmon=4.05312E-4
ql4_imon=7.91514E-10
mult1=-1.09324E-8
mult2=-2.76452E-9
rf_tmon=-4.206E-3
rf_agc=3.31113E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.8651E-3
ql5_imon=3.86286E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66918E0
bslens_imon=2.40604E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19903E1
lens5a_imon=2.00026E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12471E2
lens4a_imon=2.0526E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53489E1
cs_ef1b_imon=3.05851E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04639E2
lens23_imon=1.02284E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04895E1
cs_ea1_imon=2.16712E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99715E0
lens1_imon=1.48485E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64664E1
os_ef1alow_imon=2.97889E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04252E1
cs_ea2_imon=1.57269E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84468E1
cs_ef1a_imon=3.0348E-5
olens2_vset=9.7E-1
olens2_vmon=9.70602E-1
olens2_imon=3.72267E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11642E1
os_restr1_imon=2.87557E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15462E1
os_ea1_imon=1.88381E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63284E1
os_ef1bup_imon=3.08469E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22313E0
cs_ionrep_imon=1.24766E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91844E2
cs_nozzle_imon=1.93649E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01915E1
cs_anode1_imon=3.27718E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2057E0
olens4_imon=7.08926E-10
tplens_vset=1.4E-1
tplens_vmon=1.63564E0
tplens_imon=-1.66349E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26302E1
iondef3_imon=1.50316E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26999E1
iondef2_imon=1.61266E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02977E2
lens6_imon=2.98509E-4
ql6_vset=1.0E-1
ql6_vmon=9.30786E-2
ql6_imon=3.77846E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24688E0
ionrepsh_imon=2.00339E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33316E1
lens5b_imon=2.20848E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74295E1
cs_ef2b_imon=3.14768E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.85713E-1
os_ea2_imon=-4.02731E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06097E2
lens4b_imon=2.00623E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7101E1
cs_ef2a_imon=3.18695E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60685E0
os_ef2alow_imon=-2.39317E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.22134E-1
os_ef2bup_imon=-5.03285E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10752E1
os_restr2_imon=2.88159E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23088E2
cs_ionfoca_imon=6.30936E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0188E1
cs_anode2_imon=2.32994E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73111E1
iondef1_imon=1.11174E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6781E1
iondef4_imon=1.05858E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.8896E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=3.26991E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11422E0
cs_ionaccel_imon=-2.02164E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02096E2
cs_ionfocb_imon=1.47506E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56187E1
einzel_imon=7.75861E-6
window_vset=0.0E0
window_vmon=2.09556E-1
window_imon=-9.21183E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8261E2
mask1_imon=2.39095E-4
mask2_vset=0.0E0
mask2_vmon=-1.86474E1
mask2_imon=-4.96571E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92663E3
multa_neg_imon=7.49173E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.89035E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50145E3
multb_neg_imon=7.17887E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50511E0
defgridb_imon=6.2542E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33978E1
os_fil1_imon=4.85747E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.38156E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6628E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30848E1
cs_fil1_imon=1.0073E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62159E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66284E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.30725E-2
os_fil2_imon=-2.31376E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.41602E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.82181E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32385E-1
cs_fil2_imon=-2.05428E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.30724E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22449E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=1.9968E-1
chamber_ion_pmon=1.73679E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.13799E-1
res40_imon=-2.45333E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=183
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3035E4	1.2E1	1.47E2	4.1E1	-7.27053E-2	-8.80014E1	0.0E0	-8.80002E1	2.38419E-4	5.6982E-3	9.33409E-2	2.72739E1	-3.26609E1	-3.26134E1	2.68064E1	1.73679E-7	2.51096E-3	2.51096E-3	6.29665E-3	1.9883E-1
2.0E0	6.1E3	4.0E0	3.16E2	1.6E2	-7.13143E-2	-8.80014E1	-2.38419E-5	-8.80003E1	3.57628E-4	5.60284E-3	9.32455E-2	2.72985E1	-3.26729E1	-3.26524E1	2.6777E1	1.73605E-7	2.51525E-3	2.51525E-3	6.32356E-3	1.98661E-1
3.0E0	9.0E0	0.0E0	4.85E2	2.79E2	-7.16233E-2	-8.80014E1	-1.19209E-4	-8.80002E1	1.43051E-4	5.57899E-3	9.33409E-2	2.7349E1	-3.26753E1	-3.26314E1	2.68076E1	1.73605E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.99977E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.21643E-2	-8.80013E1	0.0E0	-8.80007E1	9.53674E-5	5.26905E-3	9.3174E-2	2.73015E1	-3.26873E1	-3.2617E1	2.67944E1	1.73605E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.99456E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.201E-2	-8.80015E1	1.19209E-4	-8.80005E1	-1.43051E-4	5.31673E-3	9.34124E-2	2.73321E1	-3.26452E1	-3.26603E1	2.67992E1	1.73605E-7	2.51116E-3	2.51116E-3	6.32386E-3	2.00673E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.18554E-2	-8.80012E1	-2.6226E-4	-8.80006E1	-2.14577E-4	5.48363E-3	9.31501E-2	2.72768E1	-3.26573E1	-3.2639E1	2.67798E1	1.73605E-7	2.51007E-3	2.51007E-3	6.30192E-3	1.99977E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.19325E-2	-8.80012E1	-1.19209E-4	-8.80003E1	7.15256E-5	5.53131E-3	9.3317E-2	2.72745E1	-3.26416E1	-3.26296E1	2.67926E1	1.73831E-7	2.51334E-3	2.51334E-3	6.29645E-3	1.98592E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.20871E-2	-8.80015E1	-5.24521E-4	-8.80006E1	1.19209E-4	5.50747E-3	9.33886E-2	2.7321E1	-3.26511E1	-3.26125E1	2.67716E1	1.73605E-7	2.51443E-3	2.51443E-3	6.29098E-3	1.98075E-1
1.2E1	3.09E2	0.0E0	4.85E2	3.23E2	-7.25507E-2	-8.80012E1	-7.15256E-5	-8.80008E1	0.0E0	5.36442E-3	9.3174E-2	2.73257E1	-3.2659E1	-3.26119E1	2.67884E1	1.7368E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.98592E-1
1.3E1	1.8E1	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.80009E1	-9.53674E-5	-8.80007E1	1.90735E-4	5.19753E-3	9.28879E-2	2.73195E1	-3.26735E1	-3.26657E1	2.6816E1	1.73753E-7	2.52384E-3	2.52384E-3	6.29665E-3	1.98322E-1
1.4E1	7.5E2	0.0E0	5.66E2	3.82E2	-7.32464E-2	-8.80009E1	0.0E0	-8.80003E1	3.09944E-4	5.22137E-3	9.30309E-2	2.73586E1	-3.27287E1	-3.24998E1	2.6789E1	1.73755E-7	2.52318E-3	2.52318E-3	6.31288E-3	1.98075E-1
1.5E1	7.7E1	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80013E1	-4.76837E-5	-8.80005E1	2.14577E-4	5.19753E-3	9.29594E-2	2.72744E1	-3.26508E1	-3.26301E1	2.67734E1	1.73605E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.97731E-1
1.6E1	3.177E3	1.0E0	6.47E2	4.41E2	-7.29374E-2	-8.80012E1	-3.09944E-4	-8.80005E1	2.38419E-4	5.00679E-3	9.32932E-2	2.73117E1	-3.26627E1	-3.2632E1	2.68226E1	1.73755E-7	2.51334E-3	2.51334E-3	6.32936E-3	1.97045E-1
1.7E1	4.0744E4	1.1E1	6.87E2	4.7E2	-7.25507E-2	-8.80011E1	-9.53674E-5	-8.80004E1	2.38419E-4	5.26905E-3	9.3174E-2	2.73085E1	-3.26704E1	-3.26112E1	2.67774E1	1.73755E-7	2.51662E-3	2.51662E-3	6.32936E-3	1.97731E-1
1.8E1	1.80501E5	1.22E2	7.27E2	5.0E2	-7.27053E-2	-8.80012E1	-7.15256E-5	-8.80005E1	4.76837E-5	5.31673E-3	9.30548E-2	2.72599E1	-3.26184E1	-3.26712E1	2.68218E1	1.73605E-7	2.52058E-3	2.52058E-3	6.29211E-3	1.97891E-1
1.9E1	2.385E3	2.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80012E1	-4.05312E-4	-8.80002E1	7.15256E-5	5.29289E-3	9.29594E-2	2.7265E1	-3.26396E1	-3.26779E1	2.68111E1	1.73605E-7	2.5118E-3	2.5118E-3	6.31321E-3	1.98004E-1
2.0E1	3.3E2	0.0E0	8.08E2	5.58E2	-7.31692E-2	-8.8001E1	-3.57628E-4	-8.80005E1	2.86102E-4	5.34058E-3	9.28879E-2	2.73287E1	-3.27151E1	-3.26343E1	2.67962E1	1.73605E-7	2.51552E-3	2.51552E-3	6.34037E-3	1.9911E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.23964E-2	-8.80013E1	-5.00679E-4	-8.80004E1	1.19209E-4	5.34058E-3	9.31025E-2	2.74018E1	-3.26446E1	-3.25984E1	2.6786E1	1.73679E-7	2.5131E-3	2.5131E-3	6.32356E-3	1.9951E-1
2.2E1	3.9E1	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.80012E1	-4.76837E-5	-8.80008E1	4.29153E-4	5.36442E-3	9.28879E-2	2.7245E1	-3.26332E1	-3.26735E1	2.68106E1	1.73605E-7	2.51662E-3	2.51662E-3	6.28552E-3	1.98764E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.26282E-2	-8.80014E1	-2.6226E-4	-8.80008E1	4.05312E-4	5.8651E-3	9.30786E-2	2.73111E1	-3.26999E1	-3.26302E1	2.6781E1	1.73679E-7	2.51632E-3	2.51632E-3	6.29665E-3	1.9968E-1