[Scan]
initial_time=2016-02-16T01:43:36
final_time=2016-02-16T01:43:58
ip_count=19
run=1030
dataset=5
scan=368
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.42513E-2
qbias_imon=-3.78859E-6
ql1_vset=
ql1_vmon=-8.80012E1
ql1_imon=-6.51157E-10
ql2_vset=
ql2_vmon=-7.15256E-5
ql2_imon=3.7595E-10
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.96551E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=7.93493E-10
mult1=-1.03151E-8
mult2=-2.60665E-9
rf_tmon=-4.61566E-3
rf_agc=3.39934E-2
counter1=7
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.65052E-3
ql5_imon=4.215E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63369E0
bslens_imon=2.718E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20007E1
lens5a_imon=1.99893E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.05176E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53656E1
cs_ef1b_imon=3.07739E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04653E2
lens23_imon=1.02074E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04988E1
cs_ea1_imon=2.20045E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08522E0
lens1_imon=1.92131E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64707E1
os_ef1alow_imon=2.98565E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0354E1
cs_ea2_imon=1.58941E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84811E1
cs_ef1a_imon=3.0211E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=3.96562E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11106E1
os_restr1_imon=2.88174E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15552E1
os_ea1_imon=1.87889E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6396E1
os_ef1bup_imon=3.10867E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24789E0
cs_ionrep_imon=1.26244E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91869E2
cs_nozzle_imon=1.93615E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01572E1
cs_anode1_imon=3.28348E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20546E0
olens4_imon=7.3452E-10
tplens_vset=1.4E-1
tplens_vmon=1.56333E0
tplens_imon=-1.26308E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26349E1
iondef3_imon=1.5101E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26253E1
iondef2_imon=1.60419E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02973E2
lens6_imon=2.98544E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=4.31049E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28875E0
ionrepsh_imon=2.02237E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33772E1
lens5b_imon=2.21811E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74484E1
cs_ef2b_imon=3.11632E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.73954E-1
os_ea2_imon=-5.84137E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06109E2
lens4b_imon=2.00497E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71217E1
cs_ef2a_imon=3.22266E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.67315E0
os_ef2alow_imon=-2.56763E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.758E-1
os_ef2bup_imon=-5.26095E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10955E1
os_restr2_imon=2.86367E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23086E2
cs_ionfoca_imon=6.31911E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01195E1
cs_anode2_imon=2.27531E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7311E1
iondef1_imon=1.11752E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67765E1
iondef4_imon=1.0753E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=1.93425E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=3.53408E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13941E0
cs_ionaccel_imon=-1.55286E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02035E2
cs_ionfocb_imon=1.47108E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5655E1
einzel_imon=7.8755E-6
window_vset=0.0E0
window_vmon=2.47805E-1
window_imon=-7.11847E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39091E-4
mask2_vset=0.0E0
mask2_vmon=-1.86159E1
mask2_imon=-4.89431E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92633E3
multa_neg_imon=7.89832E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93736E3
defgrida_imon=6.84567E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.44049E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.33239E0
defgridb_imon=6.2833E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33982E1
os_fil1_imon=4.37979E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.81449E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66262E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30848E1
cs_fil1_imon=1.00974E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63965E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66283E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.16399E-2
os_fil2_imon=-2.24636E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.45077E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.72625E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29152E-1
cs_fil2_imon=-1.81196E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.50869E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22404E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33388E-3
inlet_lpb_pmon=1.99394E-1
chamber_ion_pmon=1.7375E-7
chamber_cvt_pmon=2.52025E-3
foreline_cvt_pmon=2.52025E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.13652E-1
res40_imon=-2.65799E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2963E4	1.6E1	1.47E2	4.1E1	-7.13915E-2	-8.80018E1	-1.66893E-4	-8.80002E1	0.0E0	5.45979E-3	9.33409E-2	2.73167E1	-3.26231E1	-3.26399E1	2.68316E1	1.73755E-7	2.51007E-3	2.51007E-3	6.31288E-3	1.99283E-1
2.0E0	6.009E3	5.0E0	3.16E2	1.6E2	-7.16233E-2	-8.80016E1	-1.90735E-4	-8.80002E1	1.66893E-4	5.53131E-3	9.31978E-2	2.73129E1	-3.26368E1	-3.26663E1	2.67968E1	1.73605E-7	2.51709E-3	2.51709E-3	6.31269E-3	1.99227E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.31692E-2	-8.80014E1	4.76837E-5	-8.80002E1	1.19209E-4	5.48363E-3	9.30548E-2	2.73003E1	-3.26597E1	-3.2602E1	2.67728E1	1.73681E-7	2.52027E-3	2.52027E-3	6.29067E-3	1.99224E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.3401E-2	-8.80016E1	-7.15256E-5	-8.80001E1	-7.15256E-5	5.31673E-3	9.2864E-2	2.73104E1	-3.26402E1	-3.26119E1	2.67752E1	1.73679E-7	2.51847E-3	2.51847E-3	6.3074E-3	1.98491E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30146E-2	-8.80015E1	-2.38419E-4	-8.80003E1	3.57628E-4	5.43594E-3	9.30071E-2	2.72789E1	-3.26741E1	-3.26429E1	2.67664E1	1.73679E-7	2.51632E-3	2.51632E-3	6.32896E-3	1.9968E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.18554E-2	-8.80017E1	-3.09944E-4	-8.80001E1	2.6226E-4	5.14984E-3	9.28879E-2	2.73033E1	-3.26502E1	-3.26431E1	2.67646E1	1.73683E-7	2.51611E-3	2.51611E-3	6.3245E-3	1.97909E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.80018E1	-1.66893E-4	-8.80002E1	4.76837E-5	5.29289E-3	9.33647E-2	2.72685E1	-3.26408E1	-3.26537E1	2.67775E1	1.73753E-7	2.51203E-3	2.51203E-3	6.32356E-3	1.9934E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.80014E1	3.57628E-4	-8.80001E1	7.15256E-5	5.38826E-3	9.33409E-2	2.73021E1	-3.26909E1	-3.25683E1	2.6789E1	1.73605E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.98937E-1
1.2E1	3.13E2	1.0E0	4.85E2	3.23E2	-7.33239E-2	-8.80012E1	9.53674E-5	-8.80005E1	1.90735E-4	5.10216E-3	9.35078E-2	2.73345E1	-3.26218E1	-3.2635E1	2.67517E1	1.73605E-7	2.51847E-3	2.51847E-3	6.33436E-3	1.9883E-1
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.36328E-2	-8.80015E1	0.0E0	-8.80004E1	1.66893E-4	5.55515E-3	9.35078E-2	2.73311E1	-3.26909E1	-3.26449E1	2.68629E1	1.7368E-7	2.52099E-3	2.52099E-3	6.31837E-3	1.98764E-1
1.4E1	6.95E2	0.0E0	5.66E2	3.82E2	-7.32464E-2	-8.80017E1	-1.43051E-4	-8.8E1	-2.38419E-5	5.24521E-3	9.31978E-2	2.72907E1	-3.25635E1	-3.25797E1	2.68142E1	1.7368E-7	2.51007E-3	2.51007E-3	6.32386E-3	1.98764E-1
1.5E1	6.4E1	0.0E0	6.06E2	4.11E2	-7.32464E-2	-8.80014E1	-3.09944E-4	-8.80003E1	2.14577E-4	5.34058E-3	9.29117E-2	2.73087E1	-3.26855E1	-3.25864E1	2.67656E1	1.73679E-7	2.51203E-3	2.51203E-3	6.31278E-3	1.9951E-1
1.6E1	3.232E3	1.0E0	6.47E2	4.41E2	-7.40192E-2	-8.80014E1	-1.90735E-4	-8.80005E1	7.15256E-5	5.22137E-3	9.30309E-2	2.73129E1	-3.26422E1	-3.26296E1	2.68088E1	1.7368E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.99283E-1
1.7E1	4.0686E4	2.5E1	6.87E2	4.7E2	-7.41738E-2	-8.80013E1	-5.48363E-4	-8.80006E1	2.14577E-4	5.55515E-3	9.32932E-2	2.72968E1	-3.26732E1	-3.25647E1	2.68053E1	1.7368E-7	2.5188E-3	2.5188E-3	6.32386E-3	1.98937E-1
1.8E1	1.81727E5	1.26E2	7.27E2	5.0E2	-7.37103E-2	-8.80013E1	-3.09944E-4	-8.80007E1	2.14577E-4	5.45979E-3	9.30786E-2	2.73021E1	-3.26573E1	-3.26633E1	2.67818E1	1.73605E-7	2.51417E-3	2.51417E-3	6.32356E-3	2.01047E-1
1.9E1	2.31E3	4.0E0	7.68E2	5.29E2	-7.286E-2	-8.80012E1	-1.43051E-4	-8.80007E1	4.05312E-4	5.74589E-3	9.30786E-2	2.72751E1	-3.26579E1	-3.26266E1	2.6792E1	1.73605E-7	2.51662E-3	2.51662E-3	6.29098E-3	1.9963E-1
2.0E1	3.6E2	0.0E0	8.08E2	5.58E2	-7.37874E-2	-8.80013E1	-9.53674E-5	-8.80004E1	3.09944E-4	5.38826E-3	9.31025E-2	2.72917E1	-3.26569E1	-3.26121E1	2.67789E1	1.7368E-7	2.52099E-3	2.52099E-3	6.31288E-3	1.98764E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.33239E-2	-8.80011E1	9.53674E-5	-8.80002E1	3.33786E-4	5.26905E-3	9.30071E-2	2.73322E1	-3.26596E1	-3.26726E1	2.67908E1	1.73708E-7	2.51423E-3	2.51423E-3	6.3275E-3	1.99072E-1
2.2E1	6.5E1	0.0E0	8.89E2	6.17E2	-7.37874E-2	-8.80013E1	-2.6226E-4	-8.80006E1	2.14577E-4	5.4121E-3	9.31978E-2	2.73022E1	-3.26104E1	-3.26306E1	2.67868E1					
2.3E1	7.0E0	0.0E0	9.3E2	6.47E2	-7.42513E-2	-8.80012E1	-7.15256E-5	-8.80004E1	1.90735E-4	5.65052E-3	9.32693E-2	2.7311E1	-3.26253E1	-3.26349E1	2.67765E1	1.7375E-7	2.52025E-3	2.52025E-3	6.33388E-3	1.99394E-1