[Scan]
initial_time=2016-02-16T01:44:37
final_time=2016-02-16T01:44:59
ip_count=19
run=1030
dataset=5
scan=370
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.8427E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-5.99384E-10
ql2_vset=
ql2_vmon=-3.8147E-4
ql2_imon=3.97289E-10
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.71701E-9
ql4_vset=
ql4_vmon=-1.43051E-4
ql4_imon=8.52072E-10
mult1=-1.09565E-8
mult2=-2.66871E-9
rf_tmon=-3.44896E-3
rf_agc=3.39164E-2
counter1=8
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.67436E-3
ql5_imon=4.00984E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6397E0
bslens_imon=2.8658E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20572E1
lens5a_imon=1.97298E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12491E2
lens4a_imon=2.05421E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53586E1
cs_ef1b_imon=3.06975E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0461E2
lens23_imon=1.02002E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04555E1
cs_ea1_imon=2.21703E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02273E0
lens1_imon=1.41301E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64823E1
os_ef1alow_imon=3.00615E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0381E1
cs_ea2_imon=1.62906E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84174E1
cs_ef1a_imon=3.01554E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=3.89469E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11407E1
os_restr1_imon=2.86297E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15432E1
os_ea1_imon=1.88033E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63618E1
os_ef1bup_imon=3.12257E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28574E0
cs_ionrep_imon=1.25739E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91839E2
cs_nozzle_imon=1.93366E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01682E1
cs_anode1_imon=3.26645E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2057E0
olens4_imon=7.60365E-10
tplens_vset=1.4E-1
tplens_vmon=1.61319E0
tplens_imon=-3.8947E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2608E1
iondef3_imon=1.51767E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26723E1
iondef2_imon=1.56958E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02953E2
lens6_imon=2.98724E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=3.94511E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29416E0
ionrepsh_imon=1.98055E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33622E1
lens5b_imon=2.21451E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74391E1
cs_ef2b_imon=3.12188E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.82966E-1
os_ea2_imon=-7.42755E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06138E2
lens4b_imon=2.01005E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71038E1
cs_ef2a_imon=3.19416E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.66562E0
os_ef2alow_imon=-2.38692E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.5379E-1
os_ef2bup_imon=-5.08719E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10683E1
os_restr2_imon=2.86436E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23048E2
cs_ionfoca_imon=6.29424E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01734E1
cs_anode2_imon=2.27809E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72769E1
iondef1_imon=1.09842E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6801E1
iondef4_imon=1.10693E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.90901E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=3.32665E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12435E0
cs_ionaccel_imon=-1.99074E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02063E2
cs_ionfocb_imon=1.47386E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56168E1
einzel_imon=7.64961E-6
window_vset=0.0E0
window_vmon=1.95676E-1
window_imon=-6.9447E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82613E2
mask1_imon=2.39108E-4
mask2_vset=0.0E0
mask2_vmon=-1.86564E1
mask2_imon=-7.04896E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92621E3
multa_neg_imon=7.5955E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93664E3
defgrida_imon=6.45273E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50152E3
multb_neg_imon=7.55585E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.78653E0
defgridb_imon=6.12829E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33956E1
os_fil1_imon=4.55355E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.90138E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66146E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30856E1
cs_fil1_imon=1.00944E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.64486E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6667E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.17689E-2
os_fil2_imon=-2.27532E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.88691E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.59219E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27654E-1
cs_fil2_imon=-2.46067E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.13622E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22442E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.99E-1
chamber_ion_pmon=1.73679E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.42612E-1
res40_imon=-2.78657E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=171
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3082E4	2.3E1	1.47E2	4.1E1	-7.41738E-2	-8.80014E1	2.38419E-5	-8.8E1	1.19209E-4	5.34058E-3	9.31025E-2	2.72947E1	-3.26446E1	-3.26567E1	2.6813E1	1.73679E-7	2.52169E-3	2.52169E-3	6.31278E-3	1.97647E-1
2.0E0	6.122E3	7.0E0	3.16E2	1.6E2	-7.32464E-2	-8.80015E1	0.0E0	-8.80003E1	2.38419E-5	5.36442E-3	9.32693E-2	2.73192E1	-3.26744E1	-3.26089E1	2.68064E1	1.73753E-7	2.52061E-3	2.52061E-3	6.30202E-3	1.9883E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.35556E-2	-8.80013E1	2.14577E-4	-8.80006E1	3.57628E-4	5.19753E-3	9.32693E-2	2.73015E1	-3.26861E1	-3.26669E1	2.67866E1	1.73605E-7	2.51581E-3	2.51581E-3	6.32978E-3	1.99577E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.31692E-2	-8.80016E1	4.05312E-4	-8.80004E1	4.05312E-4	5.29289E-3	9.30786E-2	2.73299E1	-3.26526E1	-3.26236E1	2.68046E1	1.7368E-7	2.51225E-3	2.51225E-3	6.3074E-3	1.98592E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37874E-2	-8.80016E1	-7.15256E-5	-8.80004E1	2.38419E-5	5.17368E-3	9.30071E-2	2.73279E1	-3.26825E1	-3.2641E1	2.681E1	1.73679E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.00363E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.37874E-2	-8.80015E1	-7.15256E-5	-8.80003E1	9.53674E-5	4.98295E-3	9.30309E-2	2.72907E1	-3.26446E1	-3.2635E1	2.67812E1	1.73755E-7	2.51334E-3	2.51334E-3	6.3074E-3	2.00847E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.47149E-2	-8.80012E1	-1.90735E-4	-8.80003E1	1.90735E-4	5.31673E-3	9.34362E-2	2.72992E1	-3.26714E1	-3.25912E1	2.67984E1	1.73605E-7	2.51443E-3	2.51443E-3	6.32936E-3	1.99977E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.43285E-2	-8.80012E1	-3.57628E-4	-8.80003E1	0.0E0	5.53131E-3	9.3317E-2	2.73484E1	-3.27011E1	-3.2614E1	2.67734E1	1.73827E-7	2.52061E-3	2.52061E-3	6.32356E-3	1.9985E-1
1.2E1	3.12E2	0.0E0	4.85E2	3.23E2	-7.34782E-2	-8.80013E1	-2.86102E-4	-8.80004E1	-4.76837E-5	5.31673E-3	9.33886E-2	2.73081E1	-3.26543E1	-3.26452E1	2.68106E1	1.73605E-7	2.52209E-3	2.52209E-3	6.31837E-3	1.98592E-1
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.41738E-2	-8.80014E1	-2.86102E-4	-8.80008E1	3.33786E-4	5.19753E-3	9.33409E-2	2.72877E1	-3.26693E1	-3.26302E1	2.68058E1	1.73605E-7	2.51662E-3	2.51662E-3	6.33486E-3	1.98247E-1
1.4E1	7.21E2	1.0E0	5.66E2	3.82E2	-7.38649E-2	-8.80014E1	0.0E0	-8.80004E1	7.15256E-5	5.14984E-3	9.30548E-2	2.72763E1	-3.26963E1	-3.27035E1	2.6816E1	1.7368E-7	2.51225E-3	2.51225E-3	6.32936E-3	1.9937E-1
1.5E1	7.9E1	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.80015E1	-3.57628E-4	-8.80004E1	-1.43051E-4	5.126E-3	9.32455E-2	2.72775E1	-3.2635E1	-3.265E1	2.6774E1					
1.6E1	3.265E3	1.0E0	6.47E2	4.41E2	-7.3401E-2	-8.80014E1	-5.96046E-4	-8.80005E1	2.14577E-4	5.34058E-3	9.32932E-2	2.7254E1	-3.26494E1	-3.26416E1	2.6771E1	1.73605E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.9911E-1
1.7E1	4.0294E4	1.2E1	6.87E2	4.7E2	-7.30918E-2	-8.80019E1	-2.38419E-4	-8.80003E1	1.43051E-4	5.05447E-3	9.34124E-2	2.73033E1	-3.26543E1	-3.26425E1	2.67782E1	1.73605E-7	2.51417E-3	2.51417E-3	6.31817E-3	1.9985E-1
1.8E1	1.8247E5	1.27E2	7.27E2	5.0E2	-7.36328E-2	-8.80016E1	-3.09944E-4	-8.80005E1	-4.76837E-5	5.126E-3	9.32932E-2	2.72751E1	-3.26182E1	-3.2605E1	2.68334E1	1.73831E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.99456E-1
1.9E1	2.442E3	1.0E0	7.68E2	5.29E2	-7.27828E-2	-8.80016E1	-4.76837E-4	-8.80004E1	1.66893E-4	5.34058E-3	9.31025E-2	2.72616E1	-3.26523E1	-3.26309E1	2.67728E1	1.7368E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.99977E-1
2.0E1	3.7E2	1.0E0	8.08E2	5.58E2	-7.25507E-2	-8.80016E1	-7.15256E-4	-8.80006E1	-1.66893E-4	5.26905E-3	9.31025E-2	2.73352E1	-3.26573E1	-3.25706E1	2.68142E1	1.73605E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.00325E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.31692E-2	-8.80019E1	-6.19888E-4	-8.80007E1	4.29153E-4	5.14984E-3	9.34124E-2	2.73051E1	-3.26266E1	-3.26455E1	2.67995E1	1.73605E-7	2.51662E-3	2.51662E-3	6.32936E-3	1.99803E-1
2.2E1	3.7E1	0.0E0	8.89E2	6.17E2	-7.24736E-2	-8.80019E1	-3.57628E-4	-8.80005E1	0.0E0	5.45979E-3	9.30786E-2	2.73912E1	-3.26779E1	-3.25664E1	2.678E1	1.73679E-7	2.50989E-3	2.50989E-3	6.31278E-3	2.00705E-1
2.3E1	8.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.80018E1	-3.8147E-4	-8.80004E1	-1.43051E-4	5.67436E-3	9.33886E-2	2.72769E1	-3.26723E1	-3.2608E1	2.6801E1	1.73679E-7	2.51739E-3	2.51739E-3	6.3074E-3	1.99E-1