[Scan]
initial_time=2016-02-16T01:45:38
final_time=2016-02-16T01:46:00
ip_count=19
run=1030
dataset=5
scan=372
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.32464E-2
qbias_imon=-3.82068E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-5.86689E-10
ql2_vset=
ql2_vmon=-2.86102E-4
ql2_imon=3.98433E-10
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.88137E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=7.38263E-10
mult1=-1.06796E-8
mult2=-2.73258E-9
rf_tmon=-4.74675E-3
rf_agc=3.33035E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=3.67856E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65122E0
bslens_imon=2.38519E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20071E1
lens5a_imon=1.9947E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12521E2
lens4a_imon=2.05159E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53818E1
cs_ef1b_imon=3.02874E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.02531E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05255E1
cs_ea1_imon=2.18346E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0632E0
lens1_imon=1.37013E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64272E1
os_ef1alow_imon=2.9992E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03667E1
cs_ea2_imon=1.56712E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84736E1
cs_ef1a_imon=3.01206E-5
olens2_vset=9.7E-1
olens2_vmon=9.70602E-1
olens2_imon=3.69E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11008E1
os_restr1_imon=2.88209E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.153E1
os_ea1_imon=1.91301E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63745E1
os_ef1bup_imon=3.10207E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25557E0
cs_ionrep_imon=1.25705E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.93403E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01775E1
cs_anode1_imon=3.27687E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20558E0
olens4_imon=7.27034E-10
tplens_vset=1.4E-1
tplens_vmon=1.63332E0
tplens_imon=-3.01921E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25972E1
iondef3_imon=1.50386E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.273E1
iondef2_imon=1.58138E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02958E2
lens6_imon=2.9868E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=4.06921E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28976E0
ionrepsh_imon=2.03224E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33513E1
lens5b_imon=2.18137E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74582E1
cs_ef2b_imon=3.13578E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.64276E-1
os_ea2_imon=-4.8616E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06136E2
lens4b_imon=2.00678E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7076E1
cs_ef2a_imon=3.18269E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65925E0
os_ef2alow_imon=-2.27919E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.34676E-1
os_ef2bup_imon=-5.19492E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10544E1
os_restr2_imon=2.89008E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23054E2
cs_ionfoca_imon=6.31527E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02076E1
cs_anode2_imon=2.31944E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73225E1
iondef1_imon=1.09367E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67938E1
iondef4_imon=1.10067E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.91002E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=3.56722E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10524E0
cs_ionaccel_imon=-1.96989E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02116E2
cs_ionfocb_imon=1.47525E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56191E1
einzel_imon=7.50365E-6
window_vset=0.0E0
window_vmon=2.17107E-1
window_imon=-7.81352E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.39126E-4
mask2_vset=0.0E0
mask2_vmon=-1.86466E1
mask2_imon=-6.52767E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92678E3
multa_neg_imon=7.8324E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.80692E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50149E3
multb_neg_imon=7.6864E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.58631E0
defgridb_imon=6.48363E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33935E1
os_fil1_imon=5.36444E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.90138E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66765E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30832E1
cs_fil1_imon=1.00949E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63455E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66265E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.12069E-2
os_fil2_imon=-2.2927E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.05513E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.49119E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31774E-1
cs_fil2_imon=-2.13631E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.46612E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22415E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3131E-3
inlet_lpb_pmon=1.98625E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51611E-3
foreline_cvt_pmon=2.51611E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.17127E-1
res40_imon=-2.52593E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3135E4	1.6E1	1.47E2	4.1E1	-7.36328E-2	-8.80016E1	-4.52995E-4	-8.8E1	1.66893E-4	5.126E-3	9.29594E-2	2.72715E1	-3.26655E1	-3.25883E1	2.68316E1	1.73827E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.00363E-1
2.0E0	6.102E3	9.0E0	3.16E2	1.6E2	-7.36328E-2	-8.80015E1	-2.86102E-4	-8.80001E1	1.43051E-4	5.4121E-3	9.30548E-2	2.73222E1	-3.26517E1	-3.26144E1	2.68202E1	1.73679E-7	2.50989E-3	2.50989E-3	6.3074E-3	1.9951E-1
3.0E0	5.0E0	0.0E0	4.85E2	2.79E2	-7.40967E-2	-8.80017E1	-9.53674E-5	-8.80002E1	2.38419E-5	5.67436E-3	9.29832E-2	2.73328E1	-3.26054E1	-3.26313E1	2.67538E1	1.73605E-7	2.51248E-3	2.51248E-3	6.32418E-3	2.01174E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.40967E-2	-8.80018E1	-2.86102E-4	-8.80001E1	1.19209E-4	5.24521E-3	9.34601E-2	2.73228E1	-3.26331E1	-3.26278E1	2.68022E1	1.7375E-7	2.51814E-3	2.51814E-3	6.32858E-3	1.99394E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37874E-2	-8.80015E1	-2.14577E-4	-8.80003E1	1.19209E-4	5.36442E-3	9.32932E-2	2.73105E1	-3.27215E1	-3.26092E1	2.6807E1	1.7368E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.98937E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.47149E-2	-8.80017E1	-3.57628E-4	-8.80001E1	3.09944E-4	5.55515E-3	9.34839E-2	2.72985E1	-3.2638E1	-3.26314E1	2.68088E1	1.7368E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.00847E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37874E-2	-8.80012E1	-3.8147E-4	-8.80004E1	4.76837E-5	5.22137E-3	9.30548E-2	2.73219E1	-3.26134E1	-3.26597E1	2.6774E1	1.73605E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.99283E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.42513E-2	-8.80014E1	-5.72205E-4	-8.80006E1	-7.15256E-5	5.17368E-3	9.29356E-2	2.73234E1	-3.26384E1	-3.26537E1	2.6804E1	1.7368E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.98937E-1
1.2E1	3.43E2	0.0E0	4.85E2	3.23E2	-7.40192E-2	-8.80015E1	-2.38419E-5	-8.80003E1	5.00679E-4	5.60284E-3	9.3317E-2	2.73003E1	-3.26266E1	-3.26464E1	2.6786E1	1.73753E-7	2.51417E-3	2.51417E-3	6.30202E-3	1.9917E-1
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.43285E-2	-8.80016E1	-1.43051E-4	-8.80005E1	3.8147E-4	5.22137E-3	9.3317E-2	2.73139E1	-3.2688E1	-3.26006E1	2.67723E1	1.73755E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.9911E-1
1.4E1	6.79E2	0.0E0	5.66E2	3.82E2	-7.32464E-2	-8.80016E1	-3.8147E-4	-8.80004E1	5.48363E-4	5.48363E-3	9.27687E-2	2.73195E1	-3.27504E1	-3.25503E1	2.6798E1	1.73679E-7	2.51203E-3	2.51203E-3	6.29128E-3	2.00021E-1
1.5E1	6.7E1	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.80014E1	-4.76837E-4	-8.80003E1	3.57628E-4	5.55515E-3	9.30548E-2	2.73201E1	-3.26705E1	-3.26567E1	2.67487E1	1.73605E-7	2.51847E-3	2.51847E-3	6.32896E-3	1.9951E-1
1.6E1	3.15E3	1.0E0	6.47E2	4.41E2	-7.32464E-2	-8.80013E1	-4.05312E-4	-8.80002E1	1.90735E-4	5.34058E-3	9.29832E-2	2.73111E1	-3.26699E1	-3.26122E1	2.67992E1	1.73758E-7	2.51581E-3	2.51581E-3	6.33538E-3	1.99048E-1
1.7E1	4.0974E4	1.9E1	6.87E2	4.7E2	-7.27053E-2	-8.80012E1	-3.09944E-4	-8.80003E1	2.38419E-4	5.26905E-3	9.29594E-2	2.73177E1	-3.26554E1	-3.2617E1	2.68166E1	1.7368E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.99456E-1
1.8E1	1.82608E5	1.25E2	7.27E2	5.0E2	-7.30918E-2	-8.8001E1	0.0E0	-8.80005E1	2.6226E-4	5.03063E-3	9.29356E-2	2.73393E1	-3.26909E1	-3.26585E1	2.68184E1	1.73753E-7	2.51096E-3	2.51096E-3	6.32356E-3	2.00363E-1
1.9E1	2.395E3	1.0E0	7.68E2	5.29E2	-7.37103E-2	-8.80013E1	-3.57628E-4	-8.80006E1	3.8147E-4	5.14984E-3	9.31263E-2	2.73105E1	-3.26627E1	-3.26591E1	2.67764E1	1.73681E-7	2.5147E-3	2.5147E-3	6.32418E-3	2.00463E-1
2.0E1	3.93E2	0.0E0	8.08E2	5.58E2	-7.27828E-2	-8.80012E1	-4.52995E-4	-8.80003E1	4.76837E-4	4.95911E-3	9.30309E-2	2.72868E1	-3.26549E1	-3.26296E1	2.67728E1	1.7368E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.00151E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.80011E1	-3.8147E-4	-8.80006E1	7.39098E-4	5.14984E-3	9.31025E-2	2.73862E1	-3.26851E1	-3.26092E1	2.67678E1	1.73605E-7	2.51632E-3	2.51632E-3	6.3074E-3	1.9985E-1
2.2E1	4.6E1	0.0E0	8.89E2	6.17E2	-7.32464E-2	-8.80013E1	1.66893E-4	-8.80004E1	6.67572E-4	5.31673E-3	9.28879E-2	2.74067E1	-3.26089E1	-3.24864E1	2.68009E1	1.73605E-7	2.51162E-3	2.51162E-3	6.31779E-3	1.98792E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.32464E-2	-8.80015E1	-2.86102E-4	-8.80003E1	3.09944E-4	5.07832E-3	9.31263E-2	2.73225E1	-3.273E1	-3.25972E1	2.67938E1	1.73605E-7	2.51611E-3	2.51611E-3	6.3131E-3	1.98625E-1