[Scan]
initial_time=2016-02-16T01:46:08
final_time=2016-02-16T01:46:31
ip_count=19
run=1030
dataset=5
scan=373
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.80717E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-6.31356E-10
ql2_vset=
ql2_vmon=3.09944E-4
ql2_imon=3.79038E-10
ql3_vset=
ql3_vmon=-8.80008E1
ql3_imon=-1.9116E-9
ql4_vset=
ql4_vmon=-1.19209E-4
ql4_imon=7.76899E-10
mult1=-1.02323E-8
mult2=-2.80165E-9
rf_tmon=-4.91061E-3
rf_agc=3.30378E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=3.95978E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65265E0
bslens_imon=2.63882E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19588E1
lens5a_imon=2.00279E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1247E2
lens4a_imon=2.05178E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53482E1
cs_ef1b_imon=3.06627E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0461E2
lens23_imon=1.02443E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04457E1
cs_ea1_imon=2.17941E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00057E0
lens1_imon=1.59116E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64406E1
os_ef1alow_imon=2.97314E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04144E1
cs_ea2_imon=1.58231E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83913E1
cs_ef1a_imon=3.03882E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=3.8861E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11639E1
os_restr1_imon=2.86158E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15252E1
os_ea1_imon=1.89697E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63398E1
os_ef1bup_imon=3.09825E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23263E0
cs_ionrep_imon=1.26624E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91864E2
cs_nozzle_imon=1.93332E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01775E1
cs_anode1_imon=3.25428E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=7.20191E-10
tplens_vset=1.4E-1
tplens_vmon=1.61607E0
tplens_imon=-2.10402E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2636E1
iondef3_imon=1.50232E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26555E1
iondef2_imon=1.56957E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02949E2
lens6_imon=2.98657E-4
ql6_vset=1.0E-1
ql6_vmon=9.30786E-2
ql6_imon=4.00853E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30165E0
ionrepsh_imon=2.01412E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33699E1
lens5b_imon=2.19569E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74553E1
cs_ef2b_imon=3.15037E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.64603E-1
os_ea2_imon=-4.33385E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06111E2
lens4b_imon=2.00502E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70887E1
cs_ef2a_imon=3.18026E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63203E0
os_ef2alow_imon=-2.59891E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.61899E-1
os_ef2bup_imon=-5.13237E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10903E1
os_restr2_imon=2.86784E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23058E2
cs_ionfoca_imon=6.32123E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02018E1
cs_anode2_imon=2.28712E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72974E1
iondef1_imon=1.13989E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67403E1
iondef4_imon=1.08851E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.88899E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81855E-1
olens1_imon=3.64971E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.08786E0
cs_ionaccel_imon=-1.93514E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02074E2
cs_ionfocb_imon=1.47383E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56144E1
einzel_imon=7.8616E-6
window_vset=0.0E0
window_vmon=2.04943E-1
window_imon=-1.35477E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82614E2
mask1_imon=2.3948E-4
mask2_vset=0.0E0
mask2_vmon=-1.86651E1
mask2_imon=-4.92906E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92567E3
multa_neg_imon=8.30188E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93737E3
defgrida_imon=6.96752E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50164E3
multb_neg_imon=7.02769E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.65065E0
defgridb_imon=6.35874E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3392E1
os_fil1_imon=4.79682E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.72761E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66494E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30837E1
cs_fil1_imon=1.00791E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63316E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66593E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.16727E-2
os_fil2_imon=-2.42013E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.04533E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.66606E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29028E-1
cs_fil2_imon=-1.84092E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.51849E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22526E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.00325E-1
chamber_ion_pmon=1.73642E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.30449E-1
res40_imon=-2.31741E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3468E4	1.5E1	1.47E2	4.1E1	-7.17779E-2	-8.80017E1	-4.05312E-4	-8.80008E1	1.90735E-4	5.03063E-3	9.30071E-2	2.73088E1	-3.26205E1	-3.26248E1	2.6795E1	1.73679E-7	2.51632E-3	2.51632E-3	6.33436E-3	2.00363E-1
2.0E0	6.178E3	7.0E0	3.16E2	1.6E2	-7.24736E-2	-8.80015E1	1.43051E-4	-8.80005E1	3.09944E-4	5.38826E-3	9.29832E-2	2.73195E1	-3.26398E1	-3.26458E1	2.67508E1	1.73605E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.99283E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.19325E-2	-8.80013E1	-3.09944E-4	-8.80004E1	1.43051E-4	5.05447E-3	9.31501E-2	2.72974E1	-3.26431E1	-3.26201E1	2.68314E1	1.73605E-7	2.52027E-3	2.52027E-3	6.30182E-3	1.98696E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.201E-2	-8.80016E1	-2.86102E-4	-8.80003E1	3.09944E-4	5.60284E-3	9.29832E-2	2.72951E1	-3.26278E1	-3.26343E1	2.6786E1	1.73677E-7	2.51393E-3	2.51393E-3	6.31269E-3	1.98727E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.18554E-2	-8.80015E1	-4.76837E-5	-8.80005E1	5.00679E-4	5.67436E-3	9.31025E-2	2.72794E1	-3.26529E1	-3.26799E1	2.68148E1	1.7368E-7	2.51334E-3	2.51334E-3	6.28552E-3	1.98937E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.32464E-2	-8.80014E1	-4.76837E-5	-8.80008E1	4.76837E-4	5.126E-3	9.33886E-2	2.73004E1	-3.26531E1	-3.26384E1	2.67699E1	1.73605E-7	2.52027E-3	2.52027E-3	6.31858E-3	1.99754E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.26282E-2	-8.80012E1	4.76837E-5	-8.80006E1	4.05312E-4	5.24521E-3	9.32455E-2	2.72985E1	-3.26314E1	-3.2617E1	2.67898E1	1.73605E-7	2.51603E-3	2.51603E-3	6.3074E-3	2.00567E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.80012E1	-4.76837E-5	-8.80007E1	5.24521E-4	5.14984E-3	9.32217E-2	2.72901E1	-3.26518E1	-3.26633E1	2.67899E1	1.73605E-7	2.51334E-3	2.51334E-3	6.31837E-3	2.00499E-1
1.2E1	3.54E2	2.0E0	4.85E2	3.23E2	-7.22418E-2	-8.80016E1	-4.76837E-5	-8.80006E1	1.66893E-4	5.43594E-3	9.31978E-2	2.73016E1	-3.26614E1	-3.26626E1	2.68047E1	1.73835E-7	2.51581E-3	2.51581E-3	6.33538E-3	2.00463E-1
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80017E1	1.90735E-4	-8.80007E1	3.09944E-4	5.48363E-3	9.30548E-2	2.73357E1	-3.26554E1	-3.26332E1	2.67842E1	1.73679E-7	2.51847E-3	2.51847E-3	6.31278E-3	1.9968E-1
1.4E1	7.42E2	0.0E0	5.66E2	3.82E2	-7.21643E-2	-8.80016E1	-7.15256E-5	-8.80004E1	2.38419E-5	4.95911E-3	9.30786E-2	2.72272E1	-3.2557E1	-3.26626E1	2.67992E1	1.73605E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.01022E-1
1.5E1	8.1E1	0.0E0	6.06E2	4.11E2	-7.23964E-2	-8.80016E1	-9.53674E-5	-8.80005E1	2.38419E-4	4.98295E-3	9.28879E-2	2.73351E1	-3.26891E1	-3.26315E1	2.67848E1	1.73679E-7	2.52169E-3	2.52169E-3	6.32896E-3	2.00192E-1
1.6E1	3.269E3	0.0E0	6.47E2	4.41E2	-7.32464E-2	-8.80013E1	-2.38419E-5	-8.80006E1	1.90735E-4	5.34058E-3	9.31501E-2	2.72903E1	-3.26319E1	-3.26626E1	2.67914E1	1.73642E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.00064E-1
1.7E1	4.0559E4	2.0E1	6.87E2	4.7E2	-7.286E-2	-8.80013E1	-3.57628E-4	-8.80004E1	1.66893E-4	5.00679E-3	9.31025E-2	2.73219E1	-3.26879E1	-3.26062E1	2.68215E1					
1.8E1	1.81504E5	1.18E2	7.27E2	5.0E2	-7.39421E-2	-8.80012E1	-2.86102E-4	-8.80009E1	3.57628E-4	5.07832E-3	9.31025E-2	2.73273E1	-3.26711E1	-3.26122E1	2.67739E1	1.73605E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.00021E-1
1.9E1	2.432E3	4.0E0	7.68E2	5.29E2	-7.44059E-2	-8.80016E1	-2.86102E-4	-8.80004E1	1.90735E-4	5.4121E-3	9.34124E-2	2.73027E1	-3.2659E1	-3.26744E1	2.68036E1	1.73681E-7	2.51136E-3	2.51136E-3	6.29624E-3	2.00996E-1
2.0E1	3.52E2	0.0E0	8.08E2	5.58E2	-7.42513E-2	-8.80013E1	4.76837E-5	-8.80004E1	2.14577E-4	5.60284E-3	9.32932E-2	2.73075E1	-3.26602E1	-3.26278E1	2.67986E1	1.73605E-7	2.51417E-3	2.51417E-3	6.33977E-3	1.9985E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.36328E-2	-8.80016E1	2.14577E-4	-8.80002E1	-7.15256E-5	5.24521E-3	9.30071E-2	2.73111E1	-3.26446E1	-3.2614E1	2.67613E1	1.73753E-7	2.51632E-3	2.51632E-3	6.31278E-3	1.9917E-1
2.2E1	4.8E1	0.0E0	8.89E2	6.17E2	-7.37103E-2	-8.80017E1	1.90735E-4	-8.80007E1	1.19209E-4	5.24521E-3	9.31978E-2	2.71663E1	-3.25575E1	-3.27858E1	2.68082E1	1.73679E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.01047E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80017E1	3.09944E-4	-8.80008E1	-1.19209E-4	5.45979E-3	9.30786E-2	2.72974E1	-3.26555E1	-3.2636E1	2.67403E1	1.73642E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.00325E-1