[Scan]
initial_time=2016-02-16T01:46:39
final_time=2016-02-16T01:47:00
ip_count=19
run=1030
dataset=5
scan=374
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.19325E-2
qbias_imon=-3.83092E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-6.07252E-10
ql2_vset=
ql2_vmon=-7.15256E-5
ql2_imon=3.62408E-10
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-1.83338E-9
ql4_vset=
ql4_vmon=4.52995E-4
ql4_imon=7.82287E-10
mult1=-9.0902E-9
mult2=-2.85634E-9
rf_tmon=-5.84626E-3
rf_agc=3.15491E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.55515E-3
ql5_imon=3.91865E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63849E0
bslens_imon=2.64944E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19942E1
lens5a_imon=2.00669E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12499E2
lens4a_imon=2.05043E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53484E1
cs_ef1b_imon=3.07676E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0459E2
lens23_imon=1.02379E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05006E1
cs_ea1_imon=2.21657E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03419E0
lens1_imon=1.74689E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64819E1
os_ef1alow_imon=2.98234E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0415E1
cs_ea2_imon=1.57665E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84334E1
cs_ef1a_imon=3.00829E-5
olens2_vset=9.7E-1
olens2_vmon=9.70554E-1
olens2_imon=3.76427E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11153E1
os_restr1_imon=2.88071E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15064E1
os_ea1_imon=1.8821E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63978E1
os_ef1bup_imon=3.09442E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23912E0
cs_ionrep_imon=1.27438E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93353E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01353E1
cs_anode1_imon=3.26777E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20589E0
olens4_imon=7.07245E-10
tplens_vset=1.4E-1
tplens_vmon=1.60958E0
tplens_imon=-4.05103E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26326E1
iondef3_imon=1.50055E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26993E1
iondef2_imon=1.58833E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02998E2
lens6_imon=2.98558E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=4.10521E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26744E0
ionrepsh_imon=2.00563E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3413E1
lens5b_imon=2.21162E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74549E1
cs_ef2b_imon=3.10668E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.66963E-1
os_ea2_imon=-3.27202E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0608E2
lens4b_imon=2.0074E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71192E1
cs_ef2a_imon=3.19533E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.67024E0
os_ef2alow_imon=-2.65554E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.80605E-1
os_ef2bup_imon=-5.57115E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10841E1
os_restr2_imon=2.87026E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.31627E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01725E1
cs_anode2_imon=2.27885E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73123E1
iondef1_imon=1.10414E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67788E1
iondef4_imon=1.10035E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.9097E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=3.5454E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14155E0
cs_ionaccel_imon=-1.84465E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.47212E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56838E1
einzel_imon=7.7419E-6
window_vset=0.0E0
window_vmon=1.68689E-1
window_imon=-9.50867E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.38864E-4
mask2_vset=0.0E0
mask2_vmon=-1.86566E1
mask2_imon=-6.22906E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9262E3
multa_neg_imon=6.67375E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93748E3
defgrida_imon=6.61712E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50147E3
multb_neg_imon=6.75162E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.53844E0
defgridb_imon=6.05435E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33926E1
os_fil1_imon=5.33484E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.06784E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66369E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30782E1
cs_fil1_imon=1.00868E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61561E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66554E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.17994E-2
os_fil2_imon=-2.46174E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.17826E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.70276E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29911E-1
cs_fil2_imon=-2.47376E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.13972E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22444E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=1.98153E-1
chamber_ion_pmon=1.73753E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.71015E-1
res40_imon=-2.73483E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=215
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3345E4	1.1E1	1.47E2	4.1E1	-7.40192E-2	-8.80017E1	1.66893E-4	-8.80006E1	2.14577E-4	5.00679E-3	9.32693E-2	2.73255E1	-3.26615E1	-3.26116E1	2.68192E1	1.73605E-7	2.51525E-3	2.51525E-3	6.31278E-3	1.9968E-1
2.0E0	6.381E3	4.0E0	3.16E2	1.6E2	-7.36328E-2	-8.80014E1	-9.53674E-5	-8.80007E1	4.76837E-5	5.126E-3	9.32932E-2	2.73075E1	-3.27005E1	-3.26452E1	2.68076E1	1.73605E-7	2.51954E-3	2.51954E-3	6.3074E-3	1.98153E-1
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.32464E-2	-8.80013E1	-1.66893E-4	-8.80005E1	3.09944E-4	5.126E-3	9.3317E-2	2.73423E1	-3.26649E1	-3.26425E1	2.67982E1	1.73605E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.99456E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.37874E-2	-8.80017E1	-2.86102E-4	-8.80007E1	4.52995E-4	5.36442E-3	9.34124E-2	2.7308E1	-3.25977E1	-3.26325E1	2.6849E1	1.73605E-7	2.51007E-3	2.51007E-3	6.32386E-3	1.99283E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.40192E-2	-8.80015E1	-1.66893E-4	-8.80002E1	9.53674E-5	5.29289E-3	9.32217E-2	2.72799E1	-3.26699E1	-3.2632E1	2.68448E1	1.73679E-7	2.51525E-3	2.51525E-3	6.3074E-3	1.9917E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.44059E-2	-8.80013E1	-4.52995E-4	-8.80005E1	1.19209E-4	4.98295E-3	9.3174E-2	2.73015E1	-3.26627E1	-3.26236E1	2.68082E1	1.73753E-7	2.51525E-3	2.51525E-3	6.31278E-3	1.99E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.38649E-2	-8.80014E1	-1.19209E-4	-8.80005E1	1.19209E-4	4.93526E-3	9.34362E-2	2.72817E1	-3.2641E1	-3.26663E1	2.67992E1	1.73605E-7	2.51581E-3	2.51581E-3	6.27954E-3	2.00996E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.38649E-2	-8.80016E1	-1.90735E-4	-8.80007E1	-9.53674E-5	5.53131E-3	9.30548E-2	2.7266E1	-3.26627E1	-3.26434E1	2.67812E1	1.7368E-7	2.51552E-3	2.51552E-3	6.29645E-3	2.00325E-1
1.2E1	3.82E2	0.0E0	4.85E2	3.23E2	-7.44831E-2	-8.80016E1	-1.90735E-4	-8.80004E1	-2.14577E-4	5.07832E-3	9.3317E-2	2.72829E1	-3.26585E1	-3.2635E1	2.67949E1	1.73642E-7	2.51701E-3	2.51701E-3	6.31827E-3	1.99569E-1
1.3E1	9.0E0	0.0E0	5.25E2	3.53E2	-7.38649E-2	-8.80014E1	-5.24521E-4	-8.80003E1	-1.66893E-4	5.36442E-3	9.29594E-2	2.73075E1	-3.26732E1	-3.26248E1	2.67878E1					
1.4E1	7.6E2	0.0E0	5.66E2	3.82E2	-7.36328E-2	-8.80017E1	-2.38419E-4	-8.80002E1	0.0E0	4.98295E-3	9.35078E-2	2.7379E1	-3.27059E1	-3.25773E1	2.68124E1	1.7368E-7	2.51443E-3	2.51443E-3	6.32936E-3	1.99283E-1
1.5E1	8.1E1	0.0E0	6.06E2	4.11E2	-7.3401E-2	-8.80016E1	0.0E0	-8.80005E1	-3.09944E-4	5.65052E-3	9.32932E-2	2.7257E1	-3.2644E1	-3.26699E1	2.678E1	1.73755E-7	2.51443E-3	2.51443E-3	6.30192E-3	1.9963E-1
1.6E1	3.208E3	1.0E0	6.47E2	4.41E2	-7.32464E-2	-8.80016E1	-4.29153E-4	-8.80005E1	7.15256E-5	5.45979E-3	9.30309E-2	2.73506E1	-3.26738E1	-3.26237E1	2.67648E1	1.73753E-7	2.5131E-3	2.5131E-3	6.3074E-3	2.00363E-1
1.7E1	4.0668E4	2.1E1	6.87E2	4.7E2	-7.43285E-2	-8.80016E1	-1.43051E-4	-8.80004E1	4.05312E-4	5.26905E-3	9.31501E-2	2.72847E1	-3.26413E1	-3.26623E1	2.68026E1	1.73677E-7	2.51709E-3	2.51709E-3	6.29684E-3	2.00231E-1
1.8E1	1.82168E5	1.07E2	7.27E2	5.0E2	-7.30918E-2	-8.80021E1	-2.86102E-4	-8.80005E1	3.09944E-4	5.60284E-3	9.33886E-2	2.73405E1	-3.26975E1	-3.26152E1	2.68088E1	1.73605E-7	2.51271E-3	2.51271E-3	6.33021E-3	2.00244E-1
1.9E1	2.345E3	1.0E0	7.68E2	5.29E2	-7.286E-2	-8.80019E1	-2.38419E-4	-8.80007E1	3.57628E-4	5.10216E-3	9.34839E-2	2.72898E1	-3.26809E1	-3.26502E1	2.6792E1	1.73605E-7	2.51248E-3	2.51248E-3	6.31299E-3	2.00285E-1
2.0E1	3.67E2	0.0E0	8.08E2	5.58E2	-7.30918E-2	-8.8002E1	-3.09944E-4	-8.80006E1	4.05312E-4	5.26905E-3	9.32455E-2	2.72775E1	-3.26549E1	-3.2626E1	2.67674E1	1.73605E-7	2.51918E-3	2.51918E-3	6.32099E-3	1.99312E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80019E1	-5.72205E-4	-8.80006E1	4.05312E-4	5.48363E-3	9.30071E-2	2.7324E1	-3.26909E1	-3.26101E1	2.6785E1					
2.2E1	4.7E1	0.0E0	8.89E2	6.17E2	-7.25507E-2	-8.80018E1	-2.38419E-4	-8.80006E1	4.52995E-4	5.57899E-3	9.30786E-2	2.74325E1	-3.27564E1	-3.24921E1	2.67962E1	1.73605E-7	2.5131E-3	2.5131E-3	6.30202E-3	1.9883E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.19325E-2	-8.80018E1	-7.15256E-5	-8.80006E1	4.52995E-4	5.55515E-3	9.32932E-2	2.73123E1	-3.26993E1	-3.26326E1	2.67788E1	1.73753E-7	2.51525E-3	2.51525E-3	6.31278E-3	1.98153E-1