[Scan]
initial_time=2016-02-16T01:48:03
final_time=2016-02-16T01:48:24
ip_count=19
run=1030
dataset=5
scan=377
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.33239E-2
qbias_imon=-3.86406E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-6.39236E-10
ql2_vset=
ql2_vmon=-4.76837E-5
ql2_imon=3.70908E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.79307E-9
ql4_vset=
ql4_vmon=4.05312E-4
ql4_imon=8.14819E-10
mult1=-1.13538E-8
mult2=-2.73658E-9
rf_tmon=-4.31415E-3
rf_agc=3.38923E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.62668E-3
ql5_imon=4.0189E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64734E0
bslens_imon=2.62113E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19818E1
lens5a_imon=2.01377E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.05312E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53256E1
cs_ef1b_imon=3.05586E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04639E2
lens23_imon=1.02043E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04404E1
cs_ea1_imon=2.21339E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06074E0
lens1_imon=1.70088E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64434E1
os_ef1alow_imon=2.99604E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03844E1
cs_ea2_imon=1.59364E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84184E1
cs_ef1a_imon=3.0191E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=3.92735E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11238E1
os_restr1_imon=2.87422E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.155E1
os_ea1_imon=1.88953E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63467E1
os_ef1bup_imon=3.08073E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24797E0
cs_ionrep_imon=1.26589E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.93604E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02121E1
cs_anode1_imon=3.28039E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=7.53856E-10
tplens_vset=1.4E-1
tplens_vmon=1.6025E0
tplens_imon=-2.42257E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25912E1
iondef3_imon=1.49666E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26536E1
iondef2_imon=1.6131E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02939E2
lens6_imon=2.98622E-4
ql6_vset=1.0E-1
ql6_vmon=9.27448E-2
ql6_imon=3.98028E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27038E0
ionrepsh_imon=2.00846E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33551E1
lens5b_imon=2.20525E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74675E1
cs_ef2b_imon=3.13335E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.65193E-1
os_ea2_imon=-2.98887E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00651E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71168E1
cs_ef2a_imon=3.17551E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65822E0
os_ef2alow_imon=-2.40687E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.45767E-1
os_ef2bup_imon=-5.05578E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10841E1
os_restr2_imon=2.88143E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23074E2
cs_ionfoca_imon=6.31981E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01929E1
cs_anode2_imon=2.29038E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72841E1
iondef1_imon=1.11299E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6783E1
iondef4_imon=1.078E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.94334E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=3.28445E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10431E0
cs_ionaccel_imon=-1.82303E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47298E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56177E1
einzel_imon=7.73109E-6
window_vset=0.0E0
window_vmon=2.4257E-1
window_imon=-8.24728E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82619E2
mask1_imon=2.39253E-4
mask2_vset=0.0E0
mask2_vmon=-1.86614E1
mask2_imon=-4.60728E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92662E3
multa_neg_imon=7.87007E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93688E3
defgrida_imon=6.45077E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=7.47719E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50595E0
defgridb_imon=6.20301E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33932E1
os_fil1_imon=5.32883E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.70745E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66474E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30826E1
cs_fil1_imon=1.00876E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63621E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66795E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.21793E-2
os_fil2_imon=-2.38366E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.08216E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.68378E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27839E-1
cs_fil2_imon=-2.49778E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.29839E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22604E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=1.9968E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.5749E-1
res40_imon=-2.30956E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.3304E4	2.4E1	1.47E2	4.1E1	-7.31692E-2	-8.80019E1	4.76837E-5	-8.80004E1	1.90735E-4	5.03063E-3	9.32217E-2	2.73216E1	-3.26803E1	-3.26189E1	2.67787E1	1.73605E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.99803E-1
2.0E0	6.079E3	7.0E0	3.16E2	1.6E2	-7.3401E-2	-8.80016E1	1.43051E-4	-8.80004E1	2.38419E-5	5.53131E-3	9.29832E-2	2.73267E1	-3.26585E1	-3.26597E1	2.68172E1	1.73605E-7	2.51287E-3	2.51287E-3	6.30212E-3	2.00735E-1
3.0E0	5.0E0	1.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80016E1	-1.43051E-4	-8.80006E1	3.57628E-4	5.48363E-3	9.33409E-2	2.73039E1	-3.26602E1	-3.26225E1	2.6771E1	1.73605E-7	2.51804E-3	2.51804E-3	6.31299E-3	1.99048E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27828E-2	-8.80016E1	-3.33786E-4	-8.80005E1	1.19209E-4	5.34058E-3	9.35078E-2	2.73045E1	-3.2667E1	-3.26327E1	2.68274E1	1.73605E-7	2.51417E-3	2.51417E-3	6.3074E-3	1.9934E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80016E1	2.38419E-5	-8.80005E1	0.0E0	5.07832E-3	9.34124E-2	2.73093E1	-3.26585E1	-3.26218E1	2.68028E1	1.7368E-7	2.50898E-3	2.50898E-3	6.29645E-3	1.98937E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.3401E-2	-8.80016E1	-3.09944E-4	-8.80008E1	1.66893E-4	5.53131E-3	9.32455E-2	2.73189E1	-3.2653E1	-3.26218E1	2.67914E1	1.7368E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.99456E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.38649E-2	-8.80016E1	-5.00679E-4	-8.80005E1	4.76837E-4	5.14984E-3	9.32217E-2	2.72865E1	-3.26362E1	-3.26458E1	2.6819E1	1.73755E-7	2.51116E-3	2.51116E-3	6.29645E-3	1.99456E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.80016E1	-7.15256E-4	-8.80004E1	3.09944E-4	5.50747E-3	9.31263E-2	2.72853E1	-3.26723E1	-3.2638E1	2.68088E1	1.73681E-7	2.51581E-3	2.51581E-3	6.30182E-3	1.99224E-1
1.2E1	3.27E2	0.0E0	4.85E2	3.23E2	-7.34782E-2	-8.80018E1	-1.90735E-4	-8.80006E1	3.33786E-4	5.38826E-3	9.31263E-2	2.73093E1	-3.26338E1	-3.26398E1	2.67607E1	1.7368E-7	2.52318E-3	2.52318E-3	6.29645E-3	1.99456E-1
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80018E1	-3.09944E-4	-8.80005E1	2.14577E-4	5.79357E-3	9.29356E-2	2.72594E1	-3.26146E1	-3.26434E1	2.68226E1	1.73605E-7	2.51632E-3	2.51632E-3	6.31278E-3	1.9951E-1
1.4E1	6.97E2	1.0E0	5.66E2	3.82E2	-7.25507E-2	-8.80018E1	-1.66893E-4	-8.80004E1	1.66893E-4	5.38826E-3	9.30786E-2	2.72931E1	-3.26915E1	-3.26729E1	2.67752E1	1.73605E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.99456E-1
1.5E1	7.9E1	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80018E1	-3.33786E-4	-8.80003E1	1.90735E-4	5.60284E-3	9.3174E-2	2.73015E1	-3.27191E1	-3.26254E1	2.67908E1	1.73755E-7	2.52099E-3	2.52099E-3	6.29098E-3	1.99283E-1
1.6E1	3.21E3	0.0E0	6.47E2	4.41E2	-7.32464E-2	-8.80017E1	-6.19888E-4	-8.80003E1	2.38419E-4	5.65052E-3	9.3317E-2	2.73541E1	-3.26496E1	-3.26207E1	2.67956E1	1.73605E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.9963E-1
1.7E1	4.0969E4	1.3E1	6.87E2	4.7E2	-7.31692E-2	-8.80016E1	-5.24521E-4	-8.80006E1	-4.76837E-5	5.38826E-3	9.31501E-2	2.73189E1	-3.26861E1	-3.2611E1	2.68064E1	1.73605E-7	2.51662E-3	2.51662E-3	6.33486E-3	1.99803E-1
1.8E1	1.81327E5	1.07E2	7.27E2	5.0E2	-7.3401E-2	-8.80016E1	-7.15256E-5	-8.80003E1	6.19888E-4	5.34058E-3	9.29832E-2	2.73207E1	-3.26669E1	-3.26008E1	2.67966E1	1.73605E-7	2.51417E-3	2.51417E-3	6.31278E-3	1.98322E-1
1.9E1	2.385E3	4.0E0	7.68E2	5.29E2	-7.27828E-2	-8.80018E1	-2.6226E-4	-8.80005E1	6.4373E-4	5.50747E-3	9.32932E-2	2.73411E1	-3.26938E1	-3.2629E1	2.67932E1	1.7368E-7	2.52318E-3	2.52318E-3	6.31837E-3	1.98419E-1
2.0E1	3.52E2	2.0E0	8.08E2	5.58E2	-7.37103E-2	-8.80014E1	9.53674E-5	-8.80005E1	2.86102E-4	5.38826E-3	9.30071E-2	2.73369E1	-3.262E1	-3.26639E1	2.67938E1	1.73679E-7	2.51739E-3	2.51739E-3	6.31278E-3	1.99E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.80014E1	4.76837E-5	-8.80003E1	6.19888E-4	5.79357E-3	9.29832E-2	2.73322E1	-3.26862E1	-3.26036E1	2.6803E1	1.73605E-7	2.51225E-3	2.51225E-3	6.32936E-3	1.9963E-1
2.2E1	4.0E1	0.0E0	8.89E2	6.17E2	-7.33239E-2	-8.80012E1	-4.76837E-5	-8.80001E1	5.00679E-4	5.6982E-3	9.26495E-2	2.73016E1	-3.25942E1	-3.25611E1	2.68136E1	1.73753E-7	2.51203E-3	2.51203E-3	6.33436E-3	1.99E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.33239E-2	-8.80014E1	-4.76837E-5	-8.80001E1	4.05312E-4	5.62668E-3	9.27448E-2	2.72841E1	-3.26536E1	-3.25912E1	2.6783E1	1.73605E-7	2.52061E-3	2.52061E-3	6.32356E-3	1.9968E-1